CN104834043B - Polarized light illumination device - Google Patents
Polarized light illumination device Download PDFInfo
- Publication number
- CN104834043B CN104834043B CN201510064078.4A CN201510064078A CN104834043B CN 104834043 B CN104834043 B CN 104834043B CN 201510064078 A CN201510064078 A CN 201510064078A CN 104834043 B CN104834043 B CN 104834043B
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- Prior art keywords
- polarizer
- light
- illumination device
- wiregrating
- shielding part
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Polarising Elements (AREA)
- Liquid Crystal (AREA)
Abstract
The present invention provides a kind of polarizer, polarized light illumination device and polarizing axis direction regulating method, in the polarized light illumination device for configuring multiple polarizers in polarizer monomer or side by side, carries out the adjustment of the polarisation axis direction of polarizer with high precision.The polarizer has: substrate (10), is formed with wiregrating (G) on surface；And light shielding part (11,11A), it is formed on substrate (10) and stops the light of transmission substrate (10), light transmissive light transmission region (12A) and the boundary line (L) of light shielding part (11,11A) are formed as linear relative to the extending direction of wiregrating (G) on direction initialization.
Description
Technical field
The present invention relates to a kind of polarizer, using polarizer polarized light illumination device and polarized light illumination device it is inclined
Optical axis direction method of adjustment.
Background technique
The polarizer of rectilinearly polarized light is obtained as the light never polarized, it is known to wire-grid polarizer.Wire-grid polarizer
For the linear filament of electric conductor is formed with fine line width/fine spaced and parallel arrangement on light-transmitting substrate.It is manufactured
Method, such as it has been known that there is the methods for forming linear filament by stripping method, and using electron beam lithography or X-ray lithography to logical
Cross the method (for example, referenced patent document 1) that resist when stripping method forms linear filament forms pattern.
It will be irradiated to the polarized light illumination device of plane of illumination by the rectilinearly polarized light of polarizer, such as can be used in base
The light orientation processing of liquid crystal display panel alignment films is formed on plate.This polarized light illumination device has: illumination part has rodlike
Lamp and reflecting mirror；And polarizer unit, configure multiple wire-grid polarizers side by side, also, along being set on work objective table
Deal with objects substrate width direction configuration arrangement wire-grid polarizer illumination part, and make work objective table to process object
The orthogonal direction of the width direction of substrate is mobile, to be scanned exposure to process object substrate top by rectilinearly polarized light
(referring to following patent documents 2).
Patent document 1: Japanese Patent Publication 10-153706 bulletin
Patent document 2: Japanese Patent Publication 2009-265290 bulletin
In the polarized light illumination device, the polarisation axis direction for the multiple wire-grid polarizers for needing to make to configure side by side is aligned
Direction initialization.Therefore, the adjustment for making the polarisation axis direction of each polarizer be respectively aligned to reference direction has been carried out in the past, as it
Method of adjustment, the direction using polarizing axis are known measurement polarizer (analyzer) and receive by adjusting object polarization
Device and further by the measurement illuminance transducer of the light of measurement polarizer, on one side to the tune relative to measurement polarizer
The direction of whole object polarizer carries out angle adjustment, monitors the output of measurement illuminance transducer on one side, polarizes to regulating object
The direction of device is adjusted so that the output of measurement illuminance transducer is peak value.
According to this previous method of adjustment, near the peak value of the output of measurement illuminance transducer, relative to adjustment
The fine angle of object polarizer adjusts, and the output of measurement illuminance transducer will not generate too big gap.Therefore, previous inclined
In optical axis direction method of adjustment, there are the following problems, that is, is difficult to carry out as high-precision in required to be adjusted as unit of 0.1deg
Degree adjustment.
Summary of the invention
The present invention is to solve the problems, such as this example as project.That is, it is an object of the present invention to,
In the polarized light illumination device of configuration polarizer monomer or multiple polarizers side by side, it can carry out with high precision partially
The adjustment etc. of the polarisation axis direction of vibration device.
In order to achieve the above object, the present invention have in several inventions recorded in specification with flowering structure.
A kind of polarized light illumination device has polarizer or configures the polarizer unit of multiple polarizers side by side, will be from
Light source projects and the illumination of transmissive polarizer is mapped to plane of illumination, wherein the polarizer has: substrate is formed wired on surface
Grid；And light shielding part, it is formed on the substrate and stops the light for transmiting the substrate, light transmissive light transmission region and the screening
The boundary line in light portion is formed as linear relative to the extending direction of the wiregrating on direction initialization.
Invention effect
Have the polarizer of the invention with this feature or configures the inclined of the polarizer unit of multiple polarizers side by side
Shake light irradiation device, and the boundary line of light transmissive light transmission region and light shielding part is shot by camera review, can make to polarize
The polarizing axis alignment fiducials direction of device.Thereby, it is possible to adjust the polarisation axis direction of polarizer with high precision.
Detailed description of the invention
Fig. 1 is explanatory diagram (Fig. 1 (a) expression overall top view, the Fig. 1 for indicating the polarizer of one embodiment of the present invention
(b) indicate that the portion S enlarged drawing, Fig. 1 (c) indicate that the portion T enlarged drawing, Fig. 1 (d) indicate the shooting picture in the shooting portion U).
Fig. 2 is explanatory diagram (Fig. 2 (a) expression overall top view, the Fig. 2 for indicating the polarizer of one embodiment of the present invention
(b) indicate that the portion S enlarged drawing, Fig. 2 (c) indicate that the portion T enlarged drawing, Fig. 2 (d) indicate the shooting picture in the shooting portion U).
Fig. 3 is explanatory diagram (Fig. 3 (a) expression overall top view, the Fig. 3 for indicating the polarizer of one embodiment of the present invention
(b) indicate that the portion S enlarged drawing, Fig. 3 (c) indicate that the portion T enlarged drawing, Fig. 3 (d) indicate the shooting picture in the shooting portion U).
Fig. 4 is the explanatory diagram (Fig. 4 (a) for indicating the polarized light illumination device of the polarizer using embodiments of the present invention
For top view, Fig. 4 (b) is front view).
Fig. 5 is the explanatory diagram for indicating the polarizing axis method of adjustment of polarized light illumination device shown in Fig. 4.
Fig. 6 is the polarisation axis direction adjustment side of the polarizer in the polarized light illumination device for indicate embodiments of the present invention
(Fig. 6 (a) indicates the 1st process to the explanatory diagram of another example of method, and Fig. 6 (b) indicates the 2nd process, and Fig. 6 (c) indicates the 3rd process.).
In figure: 1,1A, 1B, 1C- polarizer, 1U- polarizer unit, 10- substrate, 11,11A, 11B, 11C- light shielding part,
12A, 12B, 12C, 12C '-light transmission region, G- wiregrating, P- polarizing axis, the boundary line L-, L1, L2- reference line, 2- light source, 3- quilt
Irradiate substrate, 3a- plane of illumination, 4- specific wavelength transmission filter, 100- polarized light illumination device, E- video camera.
Specific embodiment
Hereinafter, with reference to attached drawing, embodiments of the present invention will be described.Fig. 1, Fig. 2, Fig. 3 are to indicate a reality of the invention
Apply the polarizer of mode explanatory diagram ((a) indicate overall top view, (b) indicate the portion S enlarged drawing, (c) indicate the portion T enlarged drawing,
(d) shooting picture in the shooting portion U is indicated).
Polarizer 1 (1A, 1B, 1C) is formed with wiregrating G on the surface of substrate 10.Wiregrating G is that length: width is longer
Multiple linear electric conductors are with configured in parallel at equal intervals, for example, can be formed by chromium, aluminium and titanium oxide etc..Here, by linear
Extending direction of the longitudinal direction of electric conductor as wiregrating G.
The major part of the G pairs of polarized component parallel with its extending direction of wiregrating reflects, and makes orthogonal with its extending direction
Polarized component pass through.Therefore, the polarizing axis with the direction orthogonal with the extending direction of wiregrating G is become by the light of wiregrating G
Polarised light.That is, the polarizing axis P of polarizer 1 (1A, 1B, 1C) becomes the direction orthogonal with the extending direction of wiregrating G.Here, if
The wavelength for the light that the narrower intervals of wiregrating G then polarize can shorten.
It is formed with the light shielding part 11 (11A, 11B, 11C) for stopping the light of transmission substrate 10 on the substrate 10.Shown in Fig. 1
In example, light shielding part 11 (11A) is formed as rectangle in the corner of substrate 10.It is entire in addition to light shielding part 11 (11A) in the example
Substrate 10 becomes wiregrating forming region Ga, and the wiregrating forming region Ga becomes light transmissive light transmission region 12A.
In example shown in Fig. 2, light shielding part 11 (11B) is formed as architrave shape in the peripheral portion of substrate 10.In the example, shading
The inside in portion 11 (11B) becomes wiregrating forming region Ga, and the wiregrating forming region Ga becomes light transmissive light transmission region
12B。
In example shown in Fig. 3, light shielding part 11 (11C) is in the same manner as example shown in Fig. 2 in the peripheral portion shape of substrate 10
As architrave shape.In the example, the inside of light shielding part 11 (11C) becomes wiregrating forming region Ga, and the wiregrating forming region Ga at
For light transmissive light transmission region 12C.Also, light transmission region 12C ' is partially formed in light shielding part 11 (11C).
Here, light shielding part 11 (11A, 11B, 11C) and light transmission region 12A, 12B, 12C ' boundary line L relative to wiregrating
The extending direction of G is formed as linearly on direction initialization, and light shielding part 11 (11A, 11B, 11C) plays work as registration mark
With.So-called direction initialization can be direction identical with the extending direction of wiregrating G herein, be also possible to relative to wiregrating G's
The direction that the orthogonal or angle with setting of extending direction is intersected.In example shown in FIG. 1 to FIG. 3, boundary line L is with wiregrating G's
The identical side of extending direction is upwardly formed, and the direction of boundary line L be formed in polarizer 1 (1A~1C) with polarizing axis P's
On the orthogonal direction in direction.
In example shown in FIG. 1, rectangle light shielding part 11 (11A) becomes the boundary line L, and boundary line L shape on one side
On the orthogonal direction in the direction of Cheng Yu polarizing axis P (that is, direction identical with the extending direction of wiregrating G).Example shown in Fig. 2
In, the inner edge of the light shielding part 11 (11B) of architrave shape becomes the boundary line L, and boundary line L is formed in the side with polarizing axis P
To on orthogonal direction (that is, direction identical with the extending direction of wiregrating G).In example shown in Fig. 3, in light shielding part 11
The light transmission region 12C's ' being partially formed as rectangle of (11C) becomes the boundary line L on one side, and boundary line L is formed in
On the direction (that is, direction identical with the extending direction of wiregrating G) orthogonal with the direction of polarizing axis P.
It, can be with here, the direction of the extending direction of wiregrating G and the boundary line L is by identical pattern formation process
High-precision makes direction establish association.It gives one example, wiregrating G can be formed by stripping method, resist at this time is retouched
In the process of line drawing grid G pattern, the description of the boundary line L in light shielding part 11 (11A, 11B, 11C) is executed at the same time.At this time
X-ray lithography and electric lithography are used in description.In this way, by forming the pass being set between the extending direction of wiregrating G
The boundary line L of the light shielding part 11 (11A, 11B, 11C) of system, although can not optical pickup wiregrating G itself, can optical pickup should
Boundary line L and the adjustment for carrying out polarizing axis P.
(d) of FIG. 1 to FIG. 3 indicates the shooting picture in the portion U of boundary line L of the shooting including light shielding part 11 (11A, 11B, 11C)
Face.As shown, by using in picture with reference line L1 shooting picture, and by adjusting polarizer 1 (1A, 1B,
Polarisation axis direction 1C) so that reference line L1 aligned boundary line L direction, easily and polarizing axis can be accurately proceed
The adjustment in direction.
Fig. 4 be indicate the polarized light illumination device using the polarizer explanatory diagram (Fig. 4 (a) be top view, Fig. 4 (b)
For front view).Polarized light illumination device 100 has the polarizer unit for configuring multiple polarizers 1 (1A, 1B, 1C) side by side
1U will be irradiated to the plane of illumination 3a of illuminated substrate 3 from the light (rectilinearly polarized light) of the injection of light source 2 and transmissive polarizer 1.Root
According to needs, specific wavelength transmission filter 4 can be set between light source 2 and polarizer 1.
In the case that the alignment films that illuminated substrate 3 is liquid crystal display panel form substrate, plane of illumination 3a, which becomes, to be coated with
The face of photonasty oriented material.There is the polarised light of the polarizing axis of specific direction by the entire surface irradiation to plane of illumination 3a
And implement light orientation processing.At this point, polarizer 1 and light source 2 along the width direction (X-direction in diagram) of illuminated substrate 3 and
It is arranged, will be projected on one side from light source 2 and the polarizing light irradiation of transmissive polarizer 1 is to plane of illumination 3a, make illuminated base on one side
Plate 3 is mobile along its extending direction (Y-direction in diagram) relative to polarizer 1 and light source 2, is scanned exposure to plane of illumination 3a
Light.
In this polarized light illumination device 100, need to adjust irradiation with high precision relative to scanning direction (diagram Y-direction)
The polarizing axis of polarised light.Fig. 5 is the explanatory diagram for indicating its method of adjustment.The adjustment uses video camera E.Such as (d) of FIG. 1 to FIG. 3
It is shown, video camera E be can obtain the video camera of the shooting picture with reference line L1, and be equipped to it is along polarizer 1 and
Column direction (X-direction in diagram) moves freely, so that the direction (reference direction) of reference line L1 is constant.
In the method for adjustment of the polarizing axis of polarized light illumination device 100, each polarizer 1 is adjusted around optical axis rotation, so that
Pass through the shooting image alignment fiducials direction (reference line L1) of the video camera E boundary line L shot.Hereinafter, to the inclined of polarizer 1 is made
The example that the direction of optical axis P is all directed at scanning direction (Y-direction) is illustrated.Here, the boundary line L of each polarizer 1 is formed
It is well-known on the direction (with the extending direction of wiregrating G identical direction) orthogonal with the direction of polarizing axis P.
The direction of the reference line L1 in the shooting picture of video camera E is set to be directed at the direction orthogonal with scanning direction (Y-direction)
(X-direction), and video camera E is equipped to move freely along the parallel direction (X-direction) of polarizer 1.Also, shooting 1
The boundary line L of a polarizer 1 (1-1), and the direction of adjustment polarizer 1 (1-1) is rotated so that direction alignment fiducials line L1
Direction after the adjustment, keeps the direction of reference line L1 constant and moves video camera E along the X direction, shoots next inclined
Shake device 1 (1-2) boundary line L, and rotate adjustment polarizer 1 direction so that direction alignment fiducials line L1 direction.It repeats
The direction of the boundary line L of all polarizers 1 (1-1~1-4) is adjusted to consistent with the direction of reference line L1 by the adjustment.
Fig. 6 is the explanatory diagram for indicating another example of polarizing axis direction regulating method of the polarizer of polarized light illumination device
(in figure, Fig. 6 (a) indicates the 1st process, and Fig. 6 (b) indicates the 2nd process, and Fig. 6 (c) indicates the 3rd process).In the example, polarizer 1 has
The light shielding part 11 (11B) of standby architrave shape.It is first when being adjusted respectively to the polarisation axis direction of multiple polarizers 1 (1-1~1-4)
First, as shown in Fig. 6 (a), the portion A of first polarizer 1 (1-1) is shot by video camera E, carries out making the base in the shooting picture
The adjustment of directrix L2 aligned boundary line L.Then, as shown in Fig. 6 (b), in order to shoot the portion B of identical polarizer 1 (1-1), make to take the photograph
Camera E is moved in parallel along the Y direction.Here, Y-direction be illuminated substrate conveyance direction (scanning direction), X-direction indicate with
Its orthogonal direction.Also, when shooting reference line L2 and the boundary line L deviation in the portion B and the shooting picture by video camera E,
The direction of rotatable polarizer 1 is adjusted so that reference line L2 aligned boundary line.Like this by along scanning direction, that is, Y-direction
Multiple positions so that video camera E is moved in parallel and adjust the direction of polarizer 1, can accurately adjust relative to scanning direction
The polarisation axis direction of the polarizer 1 of (conveyance direction of illuminated substrate).Later, move video camera E along the X direction, relatively
Repeat same processes in the 2nd later polarizer 1 (1-2~1-4), is accurately adjusted relative to scanning direction all
Polarizer 1.
As described above, the polarizer 1 of embodiments of the present invention, the polarized light illumination device 100 using the polarizer 1
In, by using the video camera E of specified reference direction, the light shielding part 11 to play a role as registration mark is shot on one side
The boundary line L of (11A, 11B, 11C) carries out polarisation axial adjustment on one side, can easily and accurately adjust polarizing axis.
More than, detailed narration is carried out to embodiments of the present invention with reference to attached drawing, but specific structure is not limited to
Embodiment is stated, is also contained in the present invention in the design alteration etc. not departed within the scope of spirit of the invention.Also, above-mentioned each reality
As long as applying its purpose of mode and structure etc. without special contradiction and problem, mutual technology can be diverted and be combined.
Claims (4)
1. a kind of polarized light illumination device, has: polarizer or the polarizer unit for configuring multiple polarizers side by side, it will be from light source
It projects and the illumination for transmiting the polarizer is mapped to plane of illumination,
The polarized light illumination device is characterized in that,
The polarizer has: substrate, is formed with wiregrating on surface；And light shielding part, it is formed on the substrate and stops transmission
The boundary line of the light of the substrate, light transmissive light transmission region and the light shielding part is in the extending direction relative to the wiregrating
And be formed as linear on the direction set,
The polarized light illumination device has:
Scanner section moves the plane of illumination relatively in a scanning direction relative to the polarizer and the light source；And
Adjustment section adjusts the polarizer around optical axis rotation, so as to pass through the video camera moved in parallel on the scanning direction
The shooting image of the boundary line of shooting is directed at the reference direction of the moving direction along the video camera.
2. polarized light illumination device according to claim 1, which is characterized in that
The light shielding part is formed as architrave shape in the peripheral portion of the substrate.
3. polarized light illumination device according to claim 2, which is characterized in that
The light transmission region is partially formed in the light shielding part.
4. polarized light illumination device according to claim 2, which is characterized in that
The inside of the light shielding part is the wiregrating forming region for being formed with the wiregrating, and the inner edge of the light shielding part is the boundary
Line.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014022098A JP6312454B2 (en) | 2014-02-07 | 2014-02-07 | Polarized light irradiation device |
| JP2014-022098 | 2014-02-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104834043A CN104834043A (en) | 2015-08-12 |
| CN104834043B true CN104834043B (en) | 2018-12-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510064078.4A Active CN104834043B (en) | 2014-02-07 | 2015-02-06 | Polarized light illumination device |
| CN201520088043.XU Active CN204650013U (en) | 2014-02-07 | 2015-02-06 | Polarizer and polarized light illumination device |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520088043.XU Active CN204650013U (en) | 2014-02-07 | 2015-02-06 | Polarizer and polarized light illumination device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6312454B2 (en) |
| KR (1) | KR102272435B1 (en) |
| CN (2) | CN104834043B (en) |
| TW (1) | TWI657274B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110312922B (en) * | 2017-02-16 | 2023-11-03 | 皇家飞利浦有限公司 | Particle characterization apparatus and method |
| TWI702424B (en) * | 2017-10-24 | 2020-08-21 | 日商旭化成股份有限公司 | Image display device, wire grid polarizer and its manufacturing method, observation method of wire grid polarizer, and method of estimating the direction of polarization axis of wire grid polarizer |
| JP6940873B2 (en) * | 2017-12-08 | 2021-09-29 | 株式会社ブイ・テクノロジー | Exposure equipment and exposure method |
| CN109959453A (en) * | 2017-12-26 | 2019-07-02 | 上海微电子装备（集团）股份有限公司 | A kind of wiregrating splicing caliberating device and method |
| CN109817092A (en) * | 2019-03-21 | 2019-05-28 | 京东方科技集团股份有限公司 | A kind of polaroid alignment device and alignment method |
| CN117518621A (en) * | 2023-11-07 | 2024-02-06 | 成都瑞波科材料科技有限公司 | Optical alignment device |
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- 2015-02-06 TW TW104104139A patent/TWI657274B/en active
- 2015-02-06 CN CN201520088043.XU patent/CN204650013U/en active Active
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Also Published As
| Publication number | Publication date |
|---|---|
| CN104834043A (en) | 2015-08-12 |
| JP6312454B2 (en) | 2018-04-18 |
| KR102272435B1 (en) | 2021-07-01 |
| TWI657274B (en) | 2019-04-21 |
| TW201534997A (en) | 2015-09-16 |
| CN204650013U (en) | 2015-09-16 |
| JP2015148746A (en) | 2015-08-20 |
| KR20150093599A (en) | 2015-08-18 |
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