CN104834043A - Polarizer, polarized light irradiating apparatus and polarization axis direction adjustment method - Google Patents
Polarizer, polarized light irradiating apparatus and polarization axis direction adjustment method Download PDFInfo
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- CN104834043A CN104834043A CN201510064078.4A CN201510064078A CN104834043A CN 104834043 A CN104834043 A CN 104834043A CN 201510064078 A CN201510064078 A CN 201510064078A CN 104834043 A CN104834043 A CN 104834043A
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- polarizer
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- wiregrating
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Polarising Elements (AREA)
- Liquid Crystal (AREA)
Abstract
The invention provides a polarizer, a polarized light irradiating apparatus and a polarization axis direction adjustment method. In a single polarizer or a polarized light irradiating apparatus that has multiple parallel polarizers, the polarization axis direction of the polarizer is adjusted in high precision. The polarizer comprises a substrate (10) that has a wire grid (G) on the surface; shielding parts (11,11A) that are formed on the substrate (10) and are used to block the light emitting the substrate (10). The boundary (L) of an emitted light emitting area (12A) and the shielding parts (11,11A) is straight in the preset direction relative to the extension direction of the wire grid (G).
Description
Technical field
The present invention relates to a kind of polarizer, use the polarized light illumination device of polarizer and the polarizing axis direction regulating method of polarized light illumination device.
Background technology
Light as never polarization obtains the polarizer of rectilinearly polarized light, there will be a known wire-grid polarizer.Wire-grid polarizer is formed with fine live width/fine spaced and parallel arrangement by the linearity fine rule of electric conductor on light-transmitting substrate.Its manufacture method, such as there will be a known the method being formed linearity fine rule by stripping method, and utilize beamwriter lithography or X-ray lithography to form the method (such as, referenced patent document 1) of pattern to resist when being formed linearity fine rule by stripping method.
Rectilinearly polarized light by polarizer is irradiated to the polarized light illumination device of plane of illumination, such as, is used in light orientation process substrate being formed liquid crystal panel alignment films.This polarized light illumination device possesses: illumination part, possesses bar-shaped lamp and catoptron; And polarizer unit, the multiple wire-grid polarizer of configuration arranged side by side, and, along the illumination part of the Width configuration arranging line grid polarizer of the handling object substrate be arranged on work objective table, and work objective table is moved to the direction orthogonal with the Width of handling object substrate, thus by rectilinearly polarized light, scan exposure (with reference to following patent documentation 2) is carried out to handling object surface.
Patent documentation 1: Japanese Patent Publication 10-153706 publication
Patent documentation 2: Japanese Patent Publication 2009-265290 publication
In described polarized light illumination device, need the alignment settings direction, polarizing axis direction of the multiple wire-grid polarizers making configuration side by side.Therefore, carried out the adjustment in the difference alignment fiducials direction, polarizing axis direction making each polarizer in the past, as its method of adjustment, the direction using polarizing axis is known measurement polarizer (analyzer), and receive the measurement illuminance transducer of the light by regulating object polarizer and further by measurement polarizer, while carry out angular setting to the direction of the regulating object polarizer relative to measurement polarizer, while the output of monitoring measurement illuminance transducer, the output of measurement illuminance transducer is made to be peak value to the direction adjustment of regulating object polarizer.
According to this method of adjustment in the past, near the peak value of the output of measurement illuminance transducer, relative to the fine angular setting of regulating object polarizer, the output of measurement illuminance transducer can not produce too large gap.Therefore, in polarizing axis direction regulating method in the past, there are the following problems, is namely difficult to the high precision adjustment carrying out carrying out adjusting in units of 0.1deg as required.
Summary of the invention
The present invention is to address this is that the example as problem.That is, object of the present invention is,
Configuring in the polarized light illumination device of polarizer monomer or multiple polarizer side by side, the axial adjustment of polarisation etc. of polarizer can be carried out with high precision.
In order to achieve the above object, the present invention possesses the following structure in several inventions described in instructions.
A kind of polarized light illumination device, it polarizer unit possessing polarizer or configure multiple polarizer side by side, will penetrate from light source and the illumination of transmissive polarizer is mapped to plane of illumination, and wherein, this polarizer possesses: substrate, is formed with wiregrating on surface; And light shielding part, being formed on described substrate and stopping the light of substrate described in transmission, the boundary line of light transmissive light transmission region and described light shielding part is formed as linearity relative to the bearing of trend of described wiregrating on direction initialization.
Invention effect
Possesses the polarized light illumination device of the polarizer of the present invention with this feature or the polarizer unit configuring multiple polarizer side by side, taken the boundary line of light transmissive light transmission region and light shielding part by camera review, the polarizing axis alignment fiducials direction of polarizer can be made.Thereby, it is possible to the polarizing axis direction of high precision adjustment polarizer.
Accompanying drawing explanation
Fig. 1 is that (Fig. 1 (a) represents overall vertical view for the key diagram of the polarizer representing one embodiment of the present invention, Fig. 1 (b) represents S portion enlarged drawing, Fig. 1 (c) represents T portion enlarged drawing, and Fig. 1 (d) represents the shooting picture in shooting U portion).
Fig. 2 is that (Fig. 2 (a) represents overall vertical view for the key diagram of the polarizer representing one embodiment of the present invention, Fig. 2 (b) represents S portion enlarged drawing, Fig. 2 (c) represents T portion enlarged drawing, and Fig. 2 (d) represents the shooting picture in shooting U portion).
Fig. 3 is that (Fig. 3 (a) represents overall vertical view for the key diagram of the polarizer representing one embodiment of the present invention, Fig. 3 (b) represents S portion enlarged drawing, Fig. 3 (c) represents T portion enlarged drawing, and Fig. 3 (d) represents the shooting picture in shooting U portion).
Fig. 4 is the key diagram (Fig. 4 (a) is vertical view, and Fig. 4 (b) is front view) of the polarized light illumination device representing the polarizer using embodiments of the present invention.
Fig. 5 is the key diagram of the polarizing axis method of adjustment representing the polarized light illumination device shown in Fig. 4.
Fig. 6 is that (Fig. 6 (a) represents the 1st operation for the key diagram of another example of the polarizing axis direction regulating method of the Polarizer represented in the polarized light illumination device of embodiments of the present invention, Fig. 6 (b) represents the 2nd operation, and Fig. 6 (c) represents the 3rd operation.)。
In figure: 1,1A, 1B, 1C-polarizer, 1U-polarizer unit, 10-substrate, 11,11A, 11B, 11C-light shielding part, 12A, 12B, 12C, 12C '-light transmission region, G-wiregrating, P-polarizing axis, L-boundary line, L1, L2-datum line, 2-light source, the illuminated substrate of 3-, 3a-plane of illumination, 4-specific wavelength transmission filter, 100-polarized light illumination device, E-video camera.
Embodiment
Below, with reference to accompanying drawing, embodiments of the present invention are described.Fig. 1, Fig. 2, Fig. 3 are that ((a) represents overall vertical view for the key diagram of the polarizer representing one embodiment of the present invention, b () represents S portion enlarged drawing, c () represents T portion enlarged drawing, (d) represents the shooting picture in shooting U portion).
Polarizer 1 (1A, 1B, 1C) is formed with wiregrating G on the surface of substrate 10.Wiregrating G be by multiple linearity electric conductors longer for length: width with configured in parallel at equal intervals, such as, can be formed by chromium, aluminium and titanium dioxide etc.At this, using the bearing of trend of the long side direction of linearity electric conductor as wiregrating G.
The major part of the wiregrating G pair of polarized component parallel with its bearing of trend reflects, and the polarized component orthogonal with its bearing of trend is passed through.Therefore, the polarized light of the polarizing axis with the direction orthogonal with the bearing of trend of wiregrating G is become by the light of wiregrating G.That is, the polarizing axis P of polarizer 1 (1A, 1B, 1C) becomes the direction orthogonal with the bearing of trend of wiregrating G.At this, if the narrower intervals of wiregrating G, the wavelength of the light of polarization can shorten.
Be formed with the light shielding part 11 (11A, 11B, 11C) of the light stopping transmission substrate 10 on the substrate 10.In the example depicted in figure 1, light shielding part 11 (11A) is formed as rectangle in the bight of substrate 10.In this example, the whole substrate 10 except light shielding part 11 (11A) becomes wiregrating forming region Ga, and this wiregrating forming region Ga becomes light transmissive light transmission region 12A.
In example shown in Fig. 2, light shielding part 11 (11B) is formed as architrave shape at the periphery of substrate 10.In this example, the inner side of light shielding part 11 (11B) becomes wiregrating forming region Ga, and this wiregrating forming region Ga becomes light transmissive light transmission region 12B.
In example shown in Fig. 3, light shielding part 11 (11C) is formed as architrave shape at the periphery of substrate 10 in the same manner as the example shown in Fig. 2.In this example, the inner side of light shielding part 11 (11C) becomes wiregrating forming region Ga, and this wiregrating forming region Ga becomes light transmissive light transmission region 12C.Further, light transmission region 12C ' has been partially formed at light shielding part 11 (11C).
At this, light shielding part 11 (11A, 11B, 11C) and light transmission region 12A, 12B, 12C ' boundary line L on direction initialization, be formed as linearity relative to the bearing of trend of wiregrating G, light shielding part 11 (11A, 11B, 11C) plays a role as registration mark.Can be the direction identical with the bearing of trend of wiregrating G at this so-called direction initialization, also can be orthogonal relative to the bearing of trend of wiregrating G or with the direction of the angular cross of setting.In example shown in Fig. 1 ~ Fig. 3, boundary line L is all formed on the direction identical with the bearing of trend of wiregrating G, and the direction of boundary line L is formed on the direction orthogonal with the direction of polarizing axis P in polarizer 1 (1A ~ 1C).
In example shown in Fig. 1, rectangle light shielding part 11 (11A) become described boundary line L, and this boundary line L is formed on the direction (that is, identical with the bearing of trend of wiregrating G direction) orthogonal with the direction of polarizing axis P.In example shown in Fig. 2, the inner edge of the light shielding part 11 (11B) of architrave shape becomes described boundary line L, and this boundary line L is formed on the direction (that is, identical with the bearing of trend of wiregrating G direction) orthogonal with the direction of polarizing axis P.In example shown in Fig. 3, at the light transmission region 12C's ' while become described boundary line L be partially formed as rectangle of light shielding part 11 (11C), and this boundary line L is formed on the direction (that is, identical with the bearing of trend of wiregrating G direction) orthogonal with the direction of polarizing axis P.
At this, the bearing of trend of wiregrating G and the direction of described boundary line L, by identical pattern formation process, can make direction be associated with high precision.Give one example, wiregrating G can be formed by stripping method, carry out resist now describing, in the operation of wiregrating G pattern, meanwhile to perform the description of the boundary line L in light shielding part 11 (11A, 11B, 11C).X-ray lithography and electric lithography is used in description now.So, by forming the boundary line L of the light shielding part 11 (11A, 11B, 11C) of the relation be set with between the bearing of trend of wiregrating G, although cannot optical pickup wiregrating G itself, can optical pickup this boundary line L and carry out the adjustment of polarizing axis P.
(d) of Fig. 1 ~ Fig. 3 represents that shooting comprises the shooting picture in the U portion of the boundary line L of light shielding part 11 (11A, 11B, 11C).As shown in the figure, by being used in picture the shooting picture with datum line L1, and by adjustment polarizer 1 (1A, 1B, 1C) polarizing axis direction to make the direction of this datum line L1 aligned boundary line L, the axial adjustment of polarisation can be carried out like a cork and accurately.
Fig. 4 is the key diagram (Fig. 4 (a) is vertical view, and Fig. 4 (b) is front view) representing the polarized light illumination device using described polarizer.Polarized light illumination device 100 possesses the polarizer unit 1U of the side by side multiple described polarizer 1 (1A, 1B, 1C) of configuration, will penetrate and the light (rectilinearly polarized light) of transmissive polarizer 1 is irradiated to the plane of illumination 3a of illuminated substrate 3 from light source 2.As required, specific wavelength transmission filter 4 can be set between light source 2 and polarizer 1.
When the alignment films that illuminated substrate 3 is liquid crystal panel forms substrate, plane of illumination 3a becomes the face being coated with photonasty oriented material.Light orientation process is implemented by there is the polarized light of the polarizing axis of specific direction to whole the irradiation of this plane of illumination 3a.Now, polarizer 1 and light source 2 along illuminated substrate 3 Width (in diagram X-direction) and be arranged, while will penetrate from light source 2 and the polarizing light irradiation of transmissive polarizer 1 to plane of illumination 3a, while make illuminated substrate 3 move along its bearing of trend (in diagram Y-direction) relative to polarizer 1 and light source 2, scan exposure is carried out to plane of illumination 3a.
In this polarized light illumination device 100, need relative to direction of scanning (diagram Y-direction) polarizing axis irradiating polarized light with high precision adjustment.Fig. 5 is the key diagram representing its method of adjustment.This adjustment uses video camera E.As shown in (d) of Fig. 1 ~ Fig. 3, video camera E is the video camera that can obtain the shooting picture with datum line L1, and the also column direction (in diagram X-direction) be equipped to along polarizer 1 is mobile freely, to make the direction of this datum line L1 (reference direction) constant.
In the method for adjustment of the polarizing axis of polarized light illumination device 100, rotate each polarizer 1 of adjustment, to make the shooting image alignment fiducials direction (datum line L1) of the boundary line L taken by video camera E around optical axis.Below, the example of the whole alignment scanning direction (Y-direction) in the direction of the polarizing axis P making polarizer 1 is described.At this, it is well-known that the boundary line L of each polarizer 1 is formed on the direction (direction identical with the bearing of trend of wiregrating G) orthogonal with the direction of polarizing axis P.
Make the direction of the datum line L1 in the shooting picture of video camera E aim at the direction (X-direction) orthogonal with direction of scanning (Y-direction), and the also column direction (X-direction) be equipped to by this video camera E along polarizer 1 is mobile freely.And, take the boundary line L of 1 polarizer 1 (1-1), and the direction of rotation adjustment polarizer 1 (1-1) is to make the direction of this direction alignment fiducials line L1, after this adjustment terminates, keep the direction of datum line L1 constant and video camera E is moved along the X direction, take the boundary line L of next polarizer 1 (1-2), and the direction of rotation adjustment polarizer 1 is to make the direction of this direction alignment fiducials line L1.Repeat this adjustment, the direction of the boundary line L of all polarizers 1 (1-1 ~ 1-4) is adjusted to consistent with the direction of datum line L1.
Fig. 6 is that the key diagram of another example of the polarizing axis direction regulating method of the Polarizer representing polarized light illumination device is (in figure, Fig. 6 (a) represents the 1st operation, Fig. 6 (b) represents the 2nd operation, and Fig. 6 (c) represents the 3rd operation).In this example, polarizer 1 possesses the light shielding part 11 (11B) of architrave shape.When respectively the polarizing axis direction of multiple polarizer 1 (1-1 ~ 1-4) being adjusted, first, as shown in Fig. 6 (a), taken the A portion of first polarizer 1 (1-1) by video camera E, carry out the adjustment of the datum line L2 aligned boundary line L made in this shooting picture.Then, as shown in Fig. 6 (b), in order to take the B portion of identical polarizer 1 (1-1), video camera E is moved in parallel along the Y direction.At this, Y-direction is the conveyance direction (direction of scanning) of illuminated substrate, and X-direction represents the direction orthogonal with it.Further, take B portion by video camera E and datum line L2 in this shooting picture and boundary line L departs from time, the direction of rotatable polarizer 1 carries out adjusting to make datum line L2 aligned boundary line.Like this by adjusting the direction of polarizer 1 making video camera E move in parallel along multiple positions of direction of scanning and Y-direction, the polarizing axis direction of the polarizer 1 relative to direction of scanning (conveyance direction of illuminated substrate) can be adjusted accurately.Afterwards, video camera E is moved along the X direction, repeat same processes relative to the 2nd later polarizer 1 (1-2 ~ 1-4), adjust all polarizers 1 accurately relative to direction of scanning.
As described above, the polarizer 1 of embodiments of the present invention, use in the polarized light illumination device 100 of this polarizer 1, by using the video camera E specifying reference direction, while take the boundary line L of the light shielding part 11 (11A, 11B, 11C) played a role as registration mark, while carry out polarizing axis adjustment, can like a cork and adjust polarizing axis accurately.
Above, embodiments of the present invention are described in detail with reference to accompanying drawing, but concrete structure is not limited to above-mentioned embodiment, is also contained in the present invention not departing from the design alteration etc. in teachings of the present invention.Further, as long as the respective embodiments described above its object and structure etc. do not have special contradiction and problems, then can divert mutual technology and combine.
Claims (6)
1. a polarizer, is characterized in that, possesses:
Substrate, is formed with wiregrating on surface; And
Light shielding part, to be formed on described substrate and to stop the light of substrate described in transmission,
The boundary line of light transmissive light transmission region and described light shielding part is formed as linearity relative to the bearing of trend of described wiregrating on direction initialization.
2. polarizer according to claim 1, is characterized in that,
Described light shielding part is formed as architrave shape at the periphery of described substrate.
3. polarizer according to claim 2, is characterized in that,
Described light transmission region has been partially formed at described light shielding part.
4. polarizer according to claim 2, is characterized in that,
The inner side of described light shielding part is for being formed with the wiregrating forming region of described wiregrating, and the inner edge of described light shielding part is described boundary line.
5. a polarized light illumination device, is characterized in that, possesses:
Polarizer unit, the side by side polarizer of configuration according to any one of multiple Claims 1-4,
Will from light source injection and the illumination of polarizer described in transmission is mapped to plane of illumination.
6. a polarizing axis method of adjustment, it is the polarizing axis method of adjustment of polarized light illumination device according to claim 5, it is characterized in that,
The described polarizer of adjustment is rotated, to make the shooting image alignment fiducials direction of the described boundary line by moving video camera shooting freely along the also column direction of described polarizer around optical axis.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014022098A JP6312454B2 (en) | 2014-02-07 | 2014-02-07 | Polarized light irradiation device |
| JP2014-022098 | 2014-02-07 |
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| Publication Number | Publication Date |
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| CN104834043A true CN104834043A (en) | 2015-08-12 |
| CN104834043B CN104834043B (en) | 2018-12-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520088043.XU Active CN204650013U (en) | 2014-02-07 | 2015-02-06 | Polarizer and polarized light illumination device |
| CN201510064078.4A Active CN104834043B (en) | 2014-02-07 | 2015-02-06 | Polarized light illumination device |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520088043.XU Active CN204650013U (en) | 2014-02-07 | 2015-02-06 | Polarizer and polarized light illumination device |
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| JP (1) | JP6312454B2 (en) |
| KR (1) | KR102272435B1 (en) |
| CN (2) | CN204650013U (en) |
| TW (1) | TWI657274B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109817092A (en) * | 2019-03-21 | 2019-05-28 | 京东方科技集团股份有限公司 | A kind of polaroid alignment device and alignment method |
| CN109959453A (en) * | 2017-12-26 | 2019-07-02 | 上海微电子装备（集团）股份有限公司 | A kind of wiregrating splicing caliberating device and method |
| CN110312922A (en) * | 2017-02-16 | 2019-10-08 | 皇家飞利浦有限公司 | Particle characterization device and method |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI702424B (en) | 2017-10-24 | 2020-08-21 | 日商旭化成股份有限公司 | Image display device, wire grid polarizer and its manufacturing method, observation method of wire grid polarizer, and method of estimating the direction of polarization axis of wire grid polarizer |
| JP6940873B2 (en) * | 2017-12-08 | 2021-09-29 | 株式会社ブイ・テクノロジー | Exposure equipment and exposure method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2089429U (en) * | 1991-01-17 | 1991-11-27 | 沈民 | Motive vehicle light shading device |
| CN1769982A (en) * | 2004-10-28 | 2006-05-10 | 优志旺电机株式会社 | Polarization element unit and polarization light emitting apparatus |
| JP2008083215A (en) * | 2006-09-26 | 2008-04-10 | Seiko Epson Corp | Mask for manufacturing alignment layer and method of manufacturing liquid crystal device |
| CN101592755A (en) * | 2009-04-10 | 2009-12-02 | 友达光电（苏州）有限公司 | Polaroid and manufacture method thereof |
| KR100930495B1 (en) * | 2003-03-24 | 2009-12-09 | 삼성전자주식회사 | LCD Display |
| CN102939551A (en) * | 2010-05-31 | 2013-02-20 | 迪睿合电子材料有限公司 | Polarizing plate and method for producing polarizing plate |
| WO2013051423A1 (en) * | 2011-10-07 | 2013-04-11 | 株式会社ブイ・テクノロジー | Polarizing film application method |
| CN105874365A (en) * | 2014-01-15 | 2016-08-17 | 大日本印刷株式会社 | Polarizer, polarizer manufacturing method, optical alignment device and mounting method of polarizer |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10153706A (en) | 1996-11-25 | 1998-06-09 | Ricoh Co Ltd | Polarizer and its manufacture |
| JP5133239B2 (en) * | 2006-04-05 | 2013-01-30 | シャープ株式会社 | Exposure method and exposure apparatus |
| JP4968165B2 (en) | 2008-04-24 | 2012-07-04 | ウシオ電機株式会社 | Polarized light irradiation device for photo-alignment |
| JP2013228533A (en) * | 2012-04-25 | 2013-11-07 | Iwasaki Electric Co Ltd | Polarizer unit |
-
2014
- 2014-02-07 JP JP2014022098A patent/JP6312454B2/en active Active
-
2015
- 2015-02-04 KR KR1020150017412A patent/KR102272435B1/en active IP Right Grant
- 2015-02-06 CN CN201520088043.XU patent/CN204650013U/en active Active
- 2015-02-06 TW TW104104139A patent/TWI657274B/en active
- 2015-02-06 CN CN201510064078.4A patent/CN104834043B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2089429U (en) * | 1991-01-17 | 1991-11-27 | 沈民 | Motive vehicle light shading device |
| KR100930495B1 (en) * | 2003-03-24 | 2009-12-09 | 삼성전자주식회사 | LCD Display |
| CN1769982A (en) * | 2004-10-28 | 2006-05-10 | 优志旺电机株式会社 | Polarization element unit and polarization light emitting apparatus |
| JP2008083215A (en) * | 2006-09-26 | 2008-04-10 | Seiko Epson Corp | Mask for manufacturing alignment layer and method of manufacturing liquid crystal device |
| CN101592755A (en) * | 2009-04-10 | 2009-12-02 | 友达光电（苏州）有限公司 | Polaroid and manufacture method thereof |
| CN102939551A (en) * | 2010-05-31 | 2013-02-20 | 迪睿合电子材料有限公司 | Polarizing plate and method for producing polarizing plate |
| WO2013051423A1 (en) * | 2011-10-07 | 2013-04-11 | 株式会社ブイ・テクノロジー | Polarizing film application method |
| CN105874365A (en) * | 2014-01-15 | 2016-08-17 | 大日本印刷株式会社 | Polarizer, polarizer manufacturing method, optical alignment device and mounting method of polarizer |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110312922A (en) * | 2017-02-16 | 2019-10-08 | 皇家飞利浦有限公司 | Particle characterization device and method |
| CN110312922B (en) * | 2017-02-16 | 2023-11-03 | 皇家飞利浦有限公司 | Particle characterization apparatus and method |
| CN109959453A (en) * | 2017-12-26 | 2019-07-02 | 上海微电子装备（集团）股份有限公司 | A kind of wiregrating splicing caliberating device and method |
| CN109817092A (en) * | 2019-03-21 | 2019-05-28 | 京东方科技集团股份有限公司 | A kind of polaroid alignment device and alignment method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN204650013U (en) | 2015-09-16 |
| JP2015148746A (en) | 2015-08-20 |
| KR20150093599A (en) | 2015-08-18 |
| KR102272435B1 (en) | 2021-07-01 |
| TWI657274B (en) | 2019-04-21 |
| TW201534997A (en) | 2015-09-16 |
| CN104834043B (en) | 2018-12-11 |
| JP6312454B2 (en) | 2018-04-18 |
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