CN109959453A - A kind of wiregrating splicing caliberating device and method - Google Patents
A kind of wiregrating splicing caliberating device and method Download PDFInfo
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- CN109959453A CN109959453A CN201711433097.5A CN201711433097A CN109959453A CN 109959453 A CN109959453 A CN 109959453A CN 201711433097 A CN201711433097 A CN 201711433097A CN 109959453 A CN109959453 A CN 109959453A
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- splices
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- 238000000034 method Methods 0.000 title claims abstract description 20
- 230000007246 mechanism Effects 0.000 claims abstract description 27
- 230000010287 polarization Effects 0.000 claims abstract description 16
- 108091008695 photoreceptors Proteins 0.000 claims abstract description 13
- 239000005357 flat glass Substances 0.000 claims description 14
- 229910052753 mercury Inorganic materials 0.000 claims description 10
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 9
- 239000011159 matrix material Substances 0.000 claims description 5
- 238000000609 electron-beam lithography Methods 0.000 claims description 4
- 238000001259 photo etching Methods 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 4
- 230000009885 systemic effect Effects 0.000 claims description 4
- 238000003491 array Methods 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 238000003860 storage Methods 0.000 claims description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000005457 optimization Methods 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 4
- 239000002070 nanowire Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000009897 systematic effect Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 239000000839 emulsion Substances 0.000 description 3
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- 238000004519 manufacturing process Methods 0.000 description 3
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
- G01J4/04—Polarimeters using electric detection means
Abstract
The invention discloses a kind of wiregrating splicing caliberating device and methods.The device includes light source assembly, wiregrating component and wiregrating adjustment mechanism, wiregrating component includes filter plate and wiregrating, identification lines are provided on the wiregrating, at an angle, which can be obtained by way of known off-line calibration for the identification line orientations and polarization direction；The wiregrating adjustment mechanism includes the CCD photoreceptor being sequentially connected, compares processor and angle demodulator.Its method is the angle information that the identification lines are obtained using CCD photoreceptor, it compares processor it is compared with the system error of permission, when the angle information of the identification lines is greater than the system error allowed, revision directive is issued to be adjusted to the wiregrating, to realize quickly splicing to the angle demodulator.
Description
Technical field
The invention belongs to technical field of electronic equipment, and in particular to a kind of wiregrating splicing caliberating device and method.
Background technique
In recent years, as field of liquid crystal display is using expanding, demand increases, and is strongly required to improve liquid crystal display device
Field angle, contrast, response speed etc..
The alignment technique of extensive utilization the most is polish-brush orientation (Rubbingalignment) in TFT-LCD production at present
Method.Polish-brush orientation method can provide stronger orientation ability for liquid crystal molecule, but during polish-brush, due to utilizing flannelette
The friction of contact, therefore the pollution of electrostatic and particle (particle) can be generated, and these pollutions often directly contribute liquid crystal
The damage of element.Therefore whether academia or all contactless in the continuous Improvement orientation mode of industry, in addition to can
To avoid the pollution of electrostatic and particle, the orientation mode of control liquid crystal molecule can also be easier.Matched using contactless
To mode, the orientation of small area can be made in mask according to some specific figures, and then makes some special demands
Liquid crystal cell.Matching for emulsion is most wherein had to go to irradiate with line polar biased ultraviolet light by known contactless alignment method
To agent, we term it ultraviolet light alignment method, abbreviation light orientations.
Light orientation utilizes the ultraviolet light of linear polar biased on the high molecular polymer alignment film with emulsion, so that
High molecular polymer has orientation ability.Its advantage is the pollution that can avoid glass baseplate surface, can carry out matching for small area
It can control liquid crystal cells using the angle of incident light and the length of irradiation time to, the orientation that can make through light shield figure
Parameter, such as pre-tilt angle, surface orientation intensity.In LCD alignment, in order to which liquid crystal molecule to be made can be arranged along orientation molecule
The direction of column and arrange, after selected monomer bond, form long key molecule.
Along with the enlargement of liquid crystal display panel, multiple polarization original parts are arranged into multiple deflection devices along adjacent direction, at this moment,
Deflection device is played usually to be made of multiple wire-grid polarizers.The polarizer is the optical component made of quartz, multiple polarizer meetings
Lead to the problem of that polarization direction is inconsistent, this can make the liquid crystal display produced image unevenness occur.In order to inhibit this unevenness,
It is detected by polarization sensor, analysis is polarized angle, then adjusts to the setting angle for being polarized original part (that is, wiregrating)
It is whole.In existing structure, needs that sunk type sensor is arranged in work stage or detection sensor is arranged outside in work stage, also
The analyzer in XY to movement is needed, 9 points are fitted in the range of 100 × 100.Then it could detect and correct.This
Sample measuring speed is very slow, and there are many workpiece for needing to participate in.
It is detected using the above method, it is very high to frame requirement on machining accuracy in wiregrating processing, to reach nanoscale, ability
Enough to be found in time by various sensors, this proposes very high processing to the frame of the machining accuracy especially wiregrating of wiregrating and wants
It asks, increases production cost.
Summary of the invention
In view of the above shortcomings of the prior art, the present invention provides a kind of wiregrating splicing caliberating device and method, it is intended to
Solve the technical problem that measuring speed in existing caliberating device and method is slow, participation workpiece is more and processing request is high.
To achieve the goals above, The technical solution adopted by the invention is as follows:
A kind of wiregrating splicing caliberating device, including light source assembly, wiregrating component and wiregrating adjustment mechanism；The light source assembly
Above the wiregrating component, the wiregrating component is used for the linear polar biased ultraviolet light that conversion light orientation utilizes；The wiregrating
Component includes filter plate and wiregrating, the filter plate and wiregrating be integrally in it is horizontally disposed, the filter plate is located at the wiregrating
Top, the wiregrating are fixed on wiregrating frame, are provided with identification lines on the wiregrating frame；The wiregrating adjustment mechanism
It is connect with the wiregrating, for adjusting the position of the wiregrating according to the angle information of the identification lines, to control polarizing angle
Degree.
Further, the wiregrating adjustment mechanism includes CCD photoreceptor, compares processor and angle demodulator；The CCD sense
Light device is used to obtain the angle information of the identification lines；The input terminal for comparing processor is connect with the CCD photoreceptor,
For receiving the angle information of the identification lines and being compared with the system error being stored in it, when the identification line
When the angle of item is greater than the system error, revision directive is issued；The angle demodulator compares the defeated of processor with described
Enter end to be connected, for receiving the revision directive and driving the wiregrating to transport in Rz axis direction when receiving the revision directive
It is dynamic.
Further, the light source assembly includes mercury lamp and reflector, and the reflector is arc-shaped and downward, and the mercury lamp can
It is releasably connected to below the reflector.
Further, the downside of the wiregrating is provided with protection sheet glass, is adopted between the wiregrating and protection sheet glass
With sealed connection and therebetween filled with protective gas.
Further, the filter plate, wiregrating, protection sheet glass and wiregrating adjustment mechanism have multiple, and are in matrix
It arranges and is stitched together；Wherein, the filter plate gap setting is provided with shield bars between adjacent two filter plate；The line
Grid and protection sheet glass correspond, and each wiregrating is fixed on corresponding wiregrating frame and is fixed by intermediate plate
Matrix, each wiregrating are connect with a wiregrating adjustment mechanism.
Further, the wiregrating component package is in a box body.
Further, the light source assembly is at least two sets, and every set is encapsulated in a box body；Cover the light source assembly more
It is arranged in parallel.
Further, the wiregrating frame is in rectangle, and it is micro- for being each provided with a width at the both ends of a line of the rectangle
The identification of meter level marks, and the identification label is in cross, the polarization of two the criss-cross lines of centres and the wiregrating
Direction is parallel, which constitutes the identification lines.
A kind of wiregrating splicing scaling method, splices caliberating device based on above-mentioned wiregrating, comprising the following steps:
1) two identification labels, the line of described two identification labels are formed by mask projection photoetching or electron beam lithography
Constitute identification lines；
2) angle of the identification line orientations and wire grid polarization direction is obtained by off-line calibration, the angle is as comparison
The systemic presupposition value of processor compensates；
3) angle information of the identification lines is obtained using CCD photoreceptor and is sent to the comparison processor；It is described
It compares processor the angle information of the identification lines received is compared with the system error being stored in it, when
When the angle of the identification lines is greater than system error, Xiang Suoshu angle demodulator issues revision directive.
4) angle demodulator is adjusted the wiregrating, so that the angle of the identification lines is less than systematic error
Value.
It further include step 5): each line when the filter plate, wiregrating and the wiregrating adjustment mechanism are multiple
Grid adjustment mechanism carries out step 3-4 simultaneously) corresponding wiregrating is adjusted, to realize splicing.
Compared with prior art, the invention has the following beneficial effects:
1, the processing request of wiregrating is reduced.The linear polarization of wiregrating is vertical with nano wire direction, so knowing nanometer
Line direction is it is known that linear polarization, since nano wire can not be directly found by alignment, made on wiregrating frame
Making two width is 80 μm of cross shape marks, and establishes the pass between the line of centres and polarization direction of two cross shape marks
System is the position that can determine the line of centres by two cross shape marks of detection, and then realizes the direction of each wiregrating of detection simultaneously
Rotary splicing.
2, accuracy is high.Nano wire exposes to be formed using immersion interference lithographic equipment, and bottom sheet is exposed with conventional lithography device
Alignment mark has one at this time and is obtained in two cross marks because of angle caused by platform difference by off-line calibration SEM
Angle of the heart line relative to nano wire is spliced as systematic error by alignment.
3, the splicing speed of wiregrating matrix is fast, it is few to participate in workpiece.When measuring polarization direction, it is only necessary to it is measured with CCD,
The line between two cross mark central points is calculated, by measurement result, to infer the polarization direction of wiregrating.
Detailed description of the invention
Fig. 1 is the overall structure diagram of one embodiment of the invention；
Fig. 2 is the structural plan of the light source assembly of one embodiment of the invention, wiregrating component and substrate；
Fig. 3 is the light source assembly layout drawing of one embodiment of the invention；
Fig. 4 is the location diagram of the light source assembly of one embodiment of the invention, wiregrating component and substrate；
Fig. 5 is the relational graph of a wiregrating and wiregrating adjustment mechanism of one embodiment of the invention.
In attached drawing: 1-mercury lamp；2-reflectors；3-filter plates；4-wiregratings；5-protection sheet glass；6-substrates；7—
Bracket I；8-bracket II；9-CCD photoreceptors；10-identification labels；11-compare processor；12-angle demodulators；13—
Wiregrating component.
Specific embodiment
Invention is further described in detail combined with specific embodiments below.
A kind of wiregrating splicing caliberating device, as shown in Figs. 1-5, including light source assembly, wiregrating component 13, substrate 6 and wiregrating 4
Adjustment mechanism, the light source assembly is located at 13 top of wiregrating component, for providing natural light；The wiregrating component 13 is used for
Natural light is converted into the linear polar biased ultraviolet light that light orientation utilizes, the substrate 6 is located at the lower section for stating wiregrating component 13, is used for
Carrying tool has the high molecular polymer alignment film of emulsion；4 adjustment mechanism of wiregrating is connect with the wiregrating component 13, is used for
The position for adjusting 4 adjustment mechanism of wiregrating is obtained, angle is polarized with control；The wiregrating component 13 includes filter plate 3 and line
Grid 4, the filter plate 3 and wiregrating 4 are whole in being horizontally disposed with, and the filter plate 3 is located at the top of the wiregrating 4, the wiregrating 4
It is fixed on wiregrating frame, identification lines is provided on the wiregrating frame, identify the polarization direction of lines and the wiregrating 4
At an angle, which can be obtained by way of known off-line calibration, and be can be used as systemic presupposition value and compensated；Institute
It states wiregrating adjustment mechanism to connect with the wiregrating 4, for adjusting the position of the wiregrating 4 according to the angle information of the identification lines
It sets, angle is polarized with control.
4 adjustment mechanism of wiregrating includes CCD photoreceptor 9, compares processor 11 and angle demodulator 12；The CCD sense
Light device 9 is arranged between the wiregrating 4 and substrate 6, for obtaining the angle information of the identification lines；The comparison processor
11 input terminal is connect with the CCD photoreceptor 9, for receive it is described identification lines angle information and be stored in it
System error is compared, and when the angle of the identification lines is greater than the system error, issues revision directive；It is described
Angle demodulator 12 is connected with the input terminal for comparing processor 11, for receiving the revision directive and receiving described repair
The wiregrating 4 is driven to move when positive order in Rz axis direction.
In the prior art, systematic error has been set in systems, can be by system adjust automatically, so institute of the present invention
Solve the problems, such as to be adjusted to the systematic error of permission.
The transmittance curve characteristic of filter plate 3 need to be polarized performance with wiregrating 4 and photoresist characteristic matches.Wiregrating 4 is used for
The natural light that light source assembly issues is polarized as polarised light.And comparing processor 11 is programmable controller, commercially available each model is equal
The function can be achieved, such as DVP-ES2 series, DVP-EX2 series, DVP-ES2-C series.And angle demodulator 12 and the prior art
In it is identical, do not describe excessively.The light source assembly, wiregrating component 13, substrate 6 and 4 adjustment mechanism of wiregrating are installed in base
On, base is fixed on ground.
As optimization, the light source assembly includes mercury lamp 1 and reflector 2, and the reflector 2 is arc-shaped and downward, described
Mercury lamp 1 is fluorescent tube, is detachably connected to 2 lower section of reflector.Mercury lamp 1 is for providing natural light, and reflector 2 is to mercury lamp 1
Light be collected.
As optimization, the downside of the wiregrating 4 is provided with protection sheet glass 5, the wiregrating 4 and protection sheet glass 5
Between using be tightly connected and therebetween filled with protective gas.The protective gas is nitrogen.This is in order to prevent on wiregrating 4
Nano-structure in production by ozone corrosion, the nanometer line side of wiregrating 4 need to fill nitrogen, and protection sheet glass 5 is used for and wiregrating 4
Constitute the airtight cavity of nitrogen.
As optimization, to control cost, the filter plate 3, wiregrating 4, protection sheet glass 5 and wiregrating adjustment mechanism have more
It is a and arranged in arrays and be stitched together；Wherein, 3 gap setting of filter plate is arranged between adjacent two filter plate 3
There are shield bars；The wiregrating 4 is corresponded with protection sheet glass 5, and each wiregrating 4 is fixed on corresponding wiregrating frame
It goes up and passes through intermediate plate and be fixed into matrix；Each wiregrating is connect with a wiregrating adjustment mechanism.Along fluorescent tube trend pass filtering piece 3 according to
Secondary arrangement to realize rectangular light spots visual field, and is fixed by elastic slice.To prevent from damaging filter plate 3 due to thermal expansion,
Certain gap is reserved between filter plate 3.To prevent the splicing of filter plate 3 from impacting to polarizing properties, at 3 splicing seams of filter plate
Design shield bars are to prevent from not being irradiated on wiregrating 4 by the light that filter plate 3 filters.
As further optimization, the wiregrating component 13 is encapsulated in a box body, in order to load and unload and repair.For side
Just maintenance maintenance, wiregrating component 13 are replaced from the extraction of complete machine side surface direction.
As advanced optimizing, the light source assembly is at least two sets, and every set is encapsulated in a box body；The light source group
Part is arranged in parallel, and the two neighboring light source assembly is at a distance of 260mm.For convenience of maintenance maintenance, light source assembly is from complete machine side
Direction extraction is replaced.Equipment dosage and cost consideration are taken into account, in the equipment scanning direction (side vertical with the arrow in Fig. 1
To) at least arrange two light source assemblies, the fluorescent tube length of each light source assembly need to meet integral uniformity, hot spot visual field, polarisation
The optical properties such as angle.From yield angle analysis is improved, the distance of two mercury lamps 1 is smaller, and the yield in the case where same illumination is got over
Height, while in view of the limitation of the bulk of lamp box and Lamp case frame, the distance of two lamp boxes is set as 260mm.
To reduce influence of the light source assembly vibration to wiregrating 4, light source assembly, wiregrating component 13 are respectively by mutually independent
Bracket I7 and bracket II8 are fixed on base.
As optimization, the wiregrating frame is in rectangle, is each provided with an identification mark at the both ends of a line of the rectangle
The width of note 10, the identification label is 80 μm.The identification label 10 is in cross, two criss-cross lines of centres
Constitute identification lines.The identification label 10 can be formed by method known to mask projection photoetching or electron beam lithography etc..
As shown in figure 5, CCD photoreceptor 9 is by observation identification label 10, calculate wiregrating 4 is polarized direction and reality side
To gap, by compare processor 11 give 12 1 adjustment amounts of angle demodulator, make polarize original part (wiregrating 4) direction of vibration
Relative to reference direction (direction shown in arrow in figure) deviation minimum.The angle that the deflection of angle demodulator 12 needs to adjust,
Complete the quick adjustment of 4 polarization direction of wiregrating.
A kind of wiregrating splicing scaling method, as shown in figure 5, caliberating device is spliced to realize based on above-mentioned wiregrating, including with
Lower step:
1) two identification labels, described two knowledges are formed by method known to mask projection photoetching or electron beam lithography etc.
The line not marked constitutes identification lines；
2) angle of the identification line orientations and wire grid polarization direction is obtained by way of off-line calibration, which makees
It is compensated to compare the systemic presupposition value of processor；3) angle information of the identification lines is obtained simultaneously using CCD photoreceptor 9
It is sent to the comparison processor 11；The angle information for comparing the identification lines that processor 11 will receive and storage
System error in it is compared, when the angle of the identification lines is greater than the system error, the angle Xiang Suoshu
It spends adjuster 12 and issues revision directive.
4) angle demodulator 12 is adjusted the wiregrating 4, so that the angle of the identification lines is less than system
Error amount.
It further include step 5): each line when the filter plate, wiregrating and the wiregrating adjustment mechanism are multiple
Grid adjustment mechanism carries out step 3-4 simultaneously) corresponding wiregrating 4 is adjusted, to realize splicing.
The above embodiment of the present invention is only example to illustrate the invention, and is not to implementation of the invention
The restriction of mode.For those of ordinary skill in the art, other can also be made not on the basis of the above description
With the variation and variation of form.Here all embodiments can not be exhaustive.It is all to belong to technical solution of the present invention
Changes and variations that derived from are still in the scope of protection of the present invention.
Claims (10)
1. a kind of wiregrating splices caliberating device, including light source assembly, wiregrating component and wiregrating adjustment mechanism；The light source assembly position
Above the wiregrating component, the wiregrating component is used for the linear polar biased ultraviolet light that conversion light orientation utilizes；It is characterized in that,
The wiregrating component includes filter plate and wiregrating, the filter plate and wiregrating be integrally in it is horizontally disposed, the filter plate is located at institute
The top of wiregrating is stated, the wiregrating is fixed on wiregrating frame, is provided with identification lines on the wiregrating frame；The wiregrating
Adjustment mechanism is connect with the wiregrating, for adjusting the position of the wiregrating according to the angle information of the identification lines, with control
System is polarized angle.
2. wiregrating splices caliberating device according to claim 1, which is characterized in that the wiregrating adjustment mechanism includes CCD sense
Light device compares processor and angle demodulator；The CCD photoreceptor is used to obtain the angle information of the identification lines；It is described
Compare processor input terminal connect with the CCD photoreceptor, for receive it is described identify lines angle information and with storage
System error in it is compared, and when the angle of the identification lines is greater than the system error, issues amendment
Instruction；The angle demodulator is connected with the input terminal for comparing processor, for receiving the revision directive and receiving
The wiregrating is driven to move when the revision directive in Rz axis direction.
3. wiregrating splices caliberating device according to claim 1, which is characterized in that the light source assembly includes mercury lamp and reflection
Cover, the reflector are arc-shaped and downward, and the mercury lamp is detachably connected to below the reflector.
4. wiregrating splices caliberating device according to claim 2, which is characterized in that the downside of the wiregrating is provided with guarantor
Sheet glass is protected, using sealed connection and therebetween filled with protective gas between the wiregrating and protection sheet glass.
5. wiregrating splices caliberating device according to claim 4, which is characterized in that the filter plate, wiregrating, protection sheet glass
Have with wiregrating adjustment mechanism multiple and arranged in arrays and is stitched together；Wherein, the filter plate gap setting, phase
Shield bars are provided between adjacent two filter plates；The wiregrating and protection sheet glass correspond, each wiregrating be fixed on
Corresponding wiregrating frame on and matrix is fixed by intermediate plate, each wiregrating is connect with a wiregrating adjustment mechanism.
6. wiregrating splices caliberating device according to claim 1, which is characterized in that the wiregrating component package is in a box body
It is interior.
7. wiregrating splices caliberating device according to claim 3, which is characterized in that the light source assembly is at least two sets, often
Set is encapsulated in a box body；The light source assembly is covered to be arranged in parallel more.
8. wiregrating splices caliberating device according to claim 1, which is characterized in that the wiregrating frame is in rectangle, in the square
The both ends of a line of shape are each provided with a width as micron-sized identification label, and identification label is in cross, and two
The criss-cross line of centres is parallel with the polarization direction of the wiregrating, which constitutes the identification lines.
9. a kind of wiregrating splices scaling method, which is characterized in that caliberating device is spliced based on wiregrating described in claim 2, including
Following steps:
1) two identification labels are formed by mask projection photoetching or electron beam lithography, the line of described two identification labels is constituted
Identify lines；
2) angle of the identification line orientations and wire grid polarization direction is obtained by off-line calibration, which is handled as comparison
The systemic presupposition value of device compensates；
3) angle information of the identification lines is obtained using CCD photoreceptor and is sent to the comparison processor；The comparison
The angle information of the identification lines received is compared processor with the system error being stored in it, when described
When identifying that the angle of lines is greater than system error, Xiang Suoshu angle demodulator issues revision directive；
4) angle demodulator is adjusted the wiregrating, so that the angle of the identification lines is less than system error.
10. wiregrating splices scaling method according to claim 9, which is characterized in that when the filter plate, wiregrating and the line
Further include step 5) when grid adjustment mechanism is multiple: each wiregrating adjustment mechanism and meanwhile carry out step 3-4) adjust
Corresponding wiregrating, to realize splicing.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711433097.5A CN109959453A (en) | 2017-12-26 | 2017-12-26 | A kind of wiregrating splicing caliberating device and method |
| PCT/CN2018/123060 WO2019128916A1 (en) | 2017-12-26 | 2018-12-24 | Wire grid splicing and calibration device and method |
| TW107147217A TWI694243B (en) | 2017-12-26 | 2018-12-26 | Wire grid splicing calibration device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711433097.5A CN109959453A (en) | 2017-12-26 | 2017-12-26 | A kind of wiregrating splicing caliberating device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109959453A true CN109959453A (en) | 2019-07-02 |
Family
ID=67022196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711433097.5A Pending CN109959453A (en) | 2017-12-26 | 2017-12-26 | A kind of wiregrating splicing caliberating device and method |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN109959453A (en) |
| TW (1) | TWI694243B (en) |
| WO (1) | WO2019128916A1 (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1605042A (en) * | 2001-12-21 | 2005-04-06 | 皇家飞利浦电子股份有限公司 | Sealed enclosure for a wire-grid polarizer and subassembly for a display system |
| CN100501533C (en) * | 2004-10-28 | 2009-06-17 | 优志旺电机株式会社 | Polarization element unit and polarization light emitting apparatus |
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| US20090219617A1 (en) * | 2005-10-31 | 2009-09-03 | Kabushiki Kaisha Toshiba | Short-wavelength polarizing elements and the manufacture and use thereof |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW201940849A (en) | 2019-10-16 |
| WO2019128916A1 (en) | 2019-07-04 |
| TWI694243B (en) | 2020-05-21 |
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