CN104821171B - 具有窄轨道宽度和小读间隙的磁传感器 - Google Patents
具有窄轨道宽度和小读间隙的磁传感器 Download PDFInfo
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- CN104821171B CN104821171B CN201510178423.7A CN201510178423A CN104821171B CN 104821171 B CN104821171 B CN 104821171B CN 201510178423 A CN201510178423 A CN 201510178423A CN 104821171 B CN104821171 B CN 104821171B
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- antiferromagnet
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- 230000005291 magnetic effect Effects 0.000 title claims abstract description 169
- 238000004519 manufacturing process Methods 0.000 claims abstract description 7
- 230000015572 biosynthetic process Effects 0.000 claims abstract 2
- 238000000034 method Methods 0.000 claims description 18
- 230000008878 coupling Effects 0.000 claims description 14
- 238000010168 coupling process Methods 0.000 claims description 14
- 238000005859 coupling reaction Methods 0.000 claims description 14
- 239000000696 magnetic material Substances 0.000 claims description 10
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 6
- 230000001815 facial effect Effects 0.000 claims description 4
- 238000003475 lamination Methods 0.000 claims description 3
- 239000002885 antiferromagnetic material Substances 0.000 claims 1
- 230000004888 barrier function Effects 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 17
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 9
- 150000002500 ions Chemical class 0.000 description 9
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 8
- 230000005415 magnetization Effects 0.000 description 8
- 230000008569 process Effects 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 238000012856 packing Methods 0.000 description 4
- 229910003321 CoFe Inorganic materials 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 230000004224 protection Effects 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 229910019041 PtMn Inorganic materials 0.000 description 2
- 230000005290 antiferromagnetic effect Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 229910001291 heusler alloy Inorganic materials 0.000 description 2
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- 229910017750 AgSn Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
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Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/398—Specially shaped layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3906—Details related to the use of magnetic thin film layers or to their effects
- G11B5/3912—Arrangements in which the active read-out elements are transducing in association with active magnetic shields, e.g. magnetically coupled shields
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
- Hall/Mr Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/170,487 US9047893B1 (en) | 2014-01-31 | 2014-01-31 | Magnetic sensor having narrow trackwidth and small read gap |
| US14/170,487 | 2014-01-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104821171A CN104821171A (zh) | 2015-08-05 |
| CN104821171B true CN104821171B (zh) | 2019-03-12 |
Family
ID=53190727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510178423.7A Active CN104821171B (zh) | 2014-01-31 | 2015-01-30 | 具有窄轨道宽度和小读间隙的磁传感器 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9047893B1 (enExample) |
| JP (1) | JP6559965B2 (enExample) |
| CN (1) | CN104821171B (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9269383B1 (en) * | 2015-01-23 | 2016-02-23 | HGST Netherlands B.V. | Multi-sensor (MIMO) head having a back side antiferromagnetic middle shield |
| US9747933B1 (en) * | 2016-02-16 | 2017-08-29 | Tdk Corporation | Magneto-resistive effect element having side shield integrated with upper shield |
| US11170808B1 (en) * | 2021-01-14 | 2021-11-09 | Western Digital Technologies, Inc. | Dual free layer reader head with magnetic seed layer decoupled from shield |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1697025A (zh) * | 2004-04-30 | 2005-11-16 | 日立环球储存科技荷兰有限公司 | 具有形成于端部区域的反铁磁钉扎层结构的自旋阀传感器 |
| CN1967893A (zh) * | 2005-11-17 | 2007-05-23 | 日立环球储存科技荷兰有限公司 | 在磁阻传感器中用于改进交换偏置结构的斜角蚀刻的衬层 |
| CN1983659A (zh) * | 2005-12-14 | 2007-06-20 | 日立环球储存科技荷兰有限公司 | 电流垂直平面磁致电阻传感器 |
| CN1988002A (zh) * | 2005-12-22 | 2007-06-27 | 日立环球储存科技荷兰有限公司 | 控制磁致电阻传感器的自由层中的磁致伸缩的方法 |
| US8320080B1 (en) * | 2011-05-31 | 2012-11-27 | Hitachi Global Storage Technologies Netherlands B.V. | Three-terminal spin-torque oscillator (STO) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3959881B2 (ja) * | 1999-02-08 | 2007-08-15 | Tdk株式会社 | 磁気抵抗効果センサの製造方法 |
| JP2000331316A (ja) * | 1999-05-20 | 2000-11-30 | Tdk Corp | 磁気抵抗効果型ヘッド |
| JP2003158311A (ja) * | 2001-11-20 | 2003-05-30 | Sony Corp | 磁気抵抗効果素子、磁気抵抗効果型磁気ヘッド、およびこれらの製造方法 |
| US6865062B2 (en) | 2002-03-21 | 2005-03-08 | International Business Machines Corporation | Spin valve sensor with exchange biased free layer and antiparallel (AP) pinned layer pinned without a pinning layer |
| JP2003318460A (ja) * | 2002-04-24 | 2003-11-07 | Alps Electric Co Ltd | 磁気検出素子及びその製造方法 |
| US7040005B2 (en) * | 2003-03-19 | 2006-05-09 | Headway Technologies, Inc. | Process of making a GMR improvement in CPP spin valve head by inserting a current channeling layer (CCL) |
| US7265946B2 (en) * | 2003-04-30 | 2007-09-04 | Hitachi Global Storage Technologies Netherlands B.V. | Multilayer self-pinned structure for CPP GMR |
| US7245463B2 (en) * | 2003-07-25 | 2007-07-17 | Hitachi Global Storage Technologies Netherlands B.V. | Apparatus for extended self-pinned layer for a current perpendicular to plane head |
| US7171741B2 (en) * | 2003-07-25 | 2007-02-06 | Hitachi Global Storage Technologies Netherlands B.V. | Method for extended self-pinned layer for a current perpendicular to plane head |
| US7099123B2 (en) * | 2003-07-29 | 2006-08-29 | Hitachi Global Storage Technologies | Self-pinned abutted junction heads having an arrangement of a second hard bias layer and a free layer for providing a net net longitudinal bias on the free layer |
| US7092220B2 (en) * | 2003-07-29 | 2006-08-15 | Hitachi Global Storage Technologies | Apparatus for enhancing thermal stability, improving biasing and reducing damage from electrostatic discharge in self-pinned abutted junction heads having a first self-pinned layer extending under the hard bias layers |
| US6980406B2 (en) * | 2003-07-30 | 2005-12-27 | Hitachi Global Storage Technologies Netherlands, B.V. | Magnetic bias pinning layer for GMR sensor of a magnetic head for a hard disk drive |
| US7092221B2 (en) | 2003-12-12 | 2006-08-15 | Hitachi Global Storage Technologies Netherlands, B.V. | Top CPP GMR/TV with back end of stripe pinned by insulating AFM |
| US7280325B1 (en) * | 2004-03-31 | 2007-10-09 | Western Digital (Fremont), Llc | Ferromagnetic structure including a first section separated from a ferromagnetic layer by an electrically conductive nonmagnetic spacer and a second section elongated relative to the first section in at least one dimension |
| JP4002909B2 (ja) * | 2004-06-04 | 2007-11-07 | アルプス電気株式会社 | Cpp型巨大磁気抵抗効果ヘッド |
| US7342753B2 (en) * | 2005-01-20 | 2008-03-11 | Hitachi Global Storage Technologies Netherlands B.V. | In-stack biasing of the free layer of a magnetoresistive read element |
| US8068317B2 (en) * | 2005-07-22 | 2011-11-29 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic tunnel transistor with high magnetocurrent |
| US7472469B2 (en) | 2005-09-20 | 2009-01-06 | Hitachi Global Storage Technologies Netherlands B.V. | Method for fabricating a magnetic head having a sensor stack and two lateral stack |
| JP2007164831A (ja) * | 2005-12-09 | 2007-06-28 | Alps Electric Co Ltd | 薄膜磁気ヘッド及びその製造方法 |
| JP2008153295A (ja) * | 2006-12-14 | 2008-07-03 | Fujitsu Ltd | 磁気抵抗効果素子、磁気ヘッドおよび磁気記憶装置 |
| US7869166B2 (en) * | 2007-02-20 | 2011-01-11 | Tdk Corporation | Thin film magnetic head having a bias magnetic layer provided with antiferromagnetic layer and a pinned layer provided with hard magnetic layer |
| US7961440B2 (en) | 2007-09-27 | 2011-06-14 | Hitachi Global Storage Technologies Netherlands B.V. | Current perpendicular to plane magnetoresistive sensor with reduced read gap |
| US8305715B2 (en) | 2007-12-27 | 2012-11-06 | HGST Netherlands, B.V. | Magnetoresistance (MR) read elements having an active shield |
| US20090168235A1 (en) * | 2007-12-27 | 2009-07-02 | Kochan Ju | Enhanced cpp read sensors with lateral spin transport |
| US8953285B2 (en) | 2010-05-05 | 2015-02-10 | Headway Technologies, Inc. | Side shielded magnetoresistive (MR) read head with perpendicular magnetic free layer |
| US8582249B2 (en) | 2011-04-26 | 2013-11-12 | Seagate Technology Llc | Magnetic element with reduced shield-to-shield spacing |
| US8570690B2 (en) | 2011-06-20 | 2013-10-29 | HGST Netherlands B.V. | Magnetic sensor having a hard bias seed structure |
| US20120327537A1 (en) * | 2011-06-23 | 2012-12-27 | Seagate Technology Llc | Shield Stabilization Configuration With Applied Bias |
| US8711528B1 (en) * | 2012-06-29 | 2014-04-29 | Western Digital (Fremont), Llc | Tunnel magnetoresistance read head with narrow shield-to-shield spacing |
| US8941954B2 (en) * | 2012-12-19 | 2015-01-27 | HGST Netherlands B.V. | Magnetic sensor with extended pinned layer and partial wrap around shield |
| US8842395B2 (en) * | 2012-12-19 | 2014-09-23 | HGST Netherlands B.V. | Magnetic sensor having an extended pinned layer and shape enhanced bias structure |
-
2014
- 2014-01-31 US US14/170,487 patent/US9047893B1/en active Active
-
2015
- 2015-01-30 CN CN201510178423.7A patent/CN104821171B/zh active Active
- 2015-01-30 JP JP2015016384A patent/JP6559965B2/ja active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1697025A (zh) * | 2004-04-30 | 2005-11-16 | 日立环球储存科技荷兰有限公司 | 具有形成于端部区域的反铁磁钉扎层结构的自旋阀传感器 |
| CN1967893A (zh) * | 2005-11-17 | 2007-05-23 | 日立环球储存科技荷兰有限公司 | 在磁阻传感器中用于改进交换偏置结构的斜角蚀刻的衬层 |
| CN1983659A (zh) * | 2005-12-14 | 2007-06-20 | 日立环球储存科技荷兰有限公司 | 电流垂直平面磁致电阻传感器 |
| CN1988002A (zh) * | 2005-12-22 | 2007-06-27 | 日立环球储存科技荷兰有限公司 | 控制磁致电阻传感器的自由层中的磁致伸缩的方法 |
| US8320080B1 (en) * | 2011-05-31 | 2012-11-27 | Hitachi Global Storage Technologies Netherlands B.V. | Three-terminal spin-torque oscillator (STO) |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015146224A (ja) | 2015-08-13 |
| CN104821171A (zh) | 2015-08-05 |
| US9047893B1 (en) | 2015-06-02 |
| JP6559965B2 (ja) | 2019-08-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20190128 Address after: American California Applicant after: Western Digital Technologies, Inc. Address before: Amsterdam Applicant before: Hitachi Global Storage Technologies Netherlands B. V. |
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| GR01 | Patent grant |