CN104813140B - 用于通过机床测量工件的方法和设备 - Google Patents

用于通过机床测量工件的方法和设备 Download PDF

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Publication number
CN104813140B
CN104813140B CN201380058806.XA CN201380058806A CN104813140B CN 104813140 B CN104813140 B CN 104813140B CN 201380058806 A CN201380058806 A CN 201380058806A CN 104813140 B CN104813140 B CN 104813140B
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China
Prior art keywords
probe
workpiece
fluid
fluid flow
during
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CN201380058806.XA
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English (en)
Chinese (zh)
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CN104813140A (zh
Inventor
约翰·查尔斯·乌尔德
德里克·马歇尔
保罗·威廉·摩尔
马修·安东尼·李维尔
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Renishaw PLC
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Renishaw PLC
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/047—Accessories, e.g. for positioning, for tool-setting, for measuring probes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
CN201380058806.XA 2012-11-14 2013-11-05 用于通过机床测量工件的方法和设备 Active CN104813140B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP12250176 2012-11-14
EP12250176.0 2012-11-14
PCT/GB2013/052884 WO2014076454A1 (en) 2012-11-14 2013-11-05 Method and apparatus for measuring a workpiece with a machine tool

Publications (2)

Publication Number Publication Date
CN104813140A CN104813140A (zh) 2015-07-29
CN104813140B true CN104813140B (zh) 2019-05-03

Family

ID=47678534

Family Applications (1)

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CN201380058806.XA Active CN104813140B (zh) 2012-11-14 2013-11-05 用于通过机床测量工件的方法和设备

Country Status (7)

Country Link
US (1) US10048065B2 (enExample)
EP (1) EP2920549B1 (enExample)
JP (1) JP6466847B2 (enExample)
KR (1) KR20150082620A (enExample)
CN (1) CN104813140B (enExample)
TW (1) TWI618917B (enExample)
WO (1) WO2014076454A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10393505B2 (en) * 2013-12-06 2019-08-27 Werth Messtechnik Gmbh Device and method for measuring workpieces
JP6076503B2 (ja) * 2013-12-27 2017-02-08 株式会社牧野フライス製作所 工作機械の制御装置
CN106796095B (zh) * 2014-09-02 2021-05-28 瑞尼斯豪公司 操作坐标测量设备的方法、坐标测量设备和计算机程序
GB201603496D0 (en) * 2016-02-29 2016-04-13 Renishaw Plc Method and apparatus for calibrating a scanning probe
JP6663807B2 (ja) * 2016-07-04 2020-03-13 株式会社キーエンス 画像測定装置
JP6663808B2 (ja) * 2016-07-04 2020-03-13 株式会社キーエンス 画像測定装置
JP2018096886A (ja) * 2016-12-15 2018-06-21 株式会社Ｉｚｏｘ 三次元形状測定検査システム及び三次元形状測定検査方法
IT201700064533A1 (it) * 2017-06-12 2018-12-12 Marposs Spa Apparecchiatura optoelettronica per il controllo di parti meccaniche, e relativo dispositivo di protezione
CN111121651A (zh) 2018-10-31 2020-05-08 财团法人工业技术研究院 光学测量稳定性控制系统
CN110244165A (zh) * 2019-06-20 2019-09-17 昆山埃维奥电机有限公司 一种刷架功能测试机构及方法
JP6810882B1 (ja) * 2019-11-27 2021-01-13 株式会社東京精密 検出器、表面性状測定装置及び測定方法
CN112171374A (zh) * 2020-09-25 2021-01-05 陈清 一种数控机床自动寻点加工工艺
JP7030280B2 (ja) * 2020-12-01 2022-03-07 株式会社東京精密 表面性状測定装置及び測定方法
JP7715610B2 (ja) * 2021-11-30 2025-07-30 株式会社ディスコ リニアゲージ
JP2024125793A (ja) * 2023-03-06 2024-09-19 株式会社ミツトヨ 三次元測定機およびインライン測定システム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4436782A1 (de) * 1993-10-21 1995-04-27 Zeiss Carl Fa Verfahren und Vorrichtung zur Vermessung von Prüflingen auf einem Koordinatenmeßgerät
EP1004846A2 (en) * 1998-11-25 2000-05-31 Fuji Seiki Co.,Ltd. Work measuring probe with cleaning function
US6154972A (en) * 1998-07-16 2000-12-05 Mitutoyo Corporation Measuring machine with cleaning device

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4153998A (en) 1972-09-21 1979-05-15 Rolls-Royce (1971) Limited Probes
GB1551218A (en) 1975-05-13 1979-08-22 Rolls Royce Probe for use in displacement measuring apparatus
US4561776A (en) * 1981-03-25 1985-12-31 Diffracto Ltd. Electro-optical sensors for tool and robotic inspection
US4536661A (en) 1982-10-15 1985-08-20 Renishaw Plc Position-sensing apparatus
FR2567265B1 (fr) * 1984-07-04 1988-09-09 Snecma Palpeur de mesure dimensionnelle multidirectionnel etanche
DE3836263C1 (enExample) 1988-10-25 1990-06-07 Mtu Muenchen Gmbh
JP3304994B2 (ja) 1991-08-30 2002-07-22 キヤノン株式会社 研磨方法および研磨装置
JP2000221024A (ja) 1998-11-25 2000-08-11 Fuji Seiki Kk 清掃流体吹き出し口付き加工物測定用接触プロ―ブ及びこれを用いる測定方法
EP1128156A1 (en) 2000-02-10 2001-08-29 General Electric Company Method and apparatus for automatically compensating for measurement error
JP2003042750A (ja) * 2001-07-26 2003-02-13 Canon Inc 水槽を有する３次元形状測定装置
GB0228371D0 (en) * 2002-12-05 2003-01-08 Leland E C E Workpiece inspection method
GB0318388D0 (en) 2003-08-06 2003-09-10 Renishaw Plc Stylus tip for workpiece contacting probe
JP2006007369A (ja) * 2004-06-25 2006-01-12 Nippei Toyama Corp 工作機械における被測定物の表面形状判定装置
JP2006090945A (ja) * 2004-09-27 2006-04-06 Olympus Corp 形状測定機
EP1742011B1 (de) * 2005-07-08 2010-11-03 Dr. Johannes Heidenhain GmbH Tastkopf
JP5666762B2 (ja) * 2007-01-31 2015-02-12 株式会社ミツトヨ 測定機
JP5203028B2 (ja) * 2007-05-30 2013-06-05 株式会社ミツトヨ 形状測定機構の異常検出方法及び形状測定機構
EP2018934A1 (en) * 2007-07-26 2009-01-28 Renishaw plc Measurement device having authentication module
FR2946909B1 (fr) 2009-06-18 2012-06-29 Peugeot Citroen Automobiles Sa Dispositif de recalage/nettoyage de machine d'usinage
EP2665988B1 (en) 2011-01-19 2015-08-12 Renishaw Plc. Analogue measurement probe for a machine tool apparatus
EP2479531A1 (en) 2011-01-19 2012-07-25 Renishaw plc Analogue measurement probe for a machine tool apparatus
KR101990157B1 (ko) * 2011-05-03 2019-06-17 스말테크 인터내셔날, 엘엘씨 미세-방전 기반 계측 시스템
JP2013104721A (ja) * 2011-11-11 2013-05-30 Disco Abrasive Syst Ltd 研削装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4436782A1 (de) * 1993-10-21 1995-04-27 Zeiss Carl Fa Verfahren und Vorrichtung zur Vermessung von Prüflingen auf einem Koordinatenmeßgerät
US6154972A (en) * 1998-07-16 2000-12-05 Mitutoyo Corporation Measuring machine with cleaning device
EP1004846A2 (en) * 1998-11-25 2000-05-31 Fuji Seiki Co.,Ltd. Work measuring probe with cleaning function

Also Published As

Publication number Publication date
EP2920549B1 (en) 2020-01-08
JP2016515192A (ja) 2016-05-26
US20150285629A1 (en) 2015-10-08
WO2014076454A1 (en) 2014-05-22
TWI618917B (zh) 2018-03-21
CN104813140A (zh) 2015-07-29
JP6466847B2 (ja) 2019-02-06
US10048065B2 (en) 2018-08-14
TW201428234A (zh) 2014-07-16
EP2920549A1 (en) 2015-09-23
KR20150082620A (ko) 2015-07-15

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