CN104769422B - 组合共焦x射线荧光和x射线计算机断层扫描的系统和方法 - Google Patents

组合共焦x射线荧光和x射线计算机断层扫描的系统和方法 Download PDF

Info

Publication number
CN104769422B
CN104769422B CN201380056545.8A CN201380056545A CN104769422B CN 104769422 B CN104769422 B CN 104769422B CN 201380056545 A CN201380056545 A CN 201380056545A CN 104769422 B CN104769422 B CN 104769422B
Authority
CN
China
Prior art keywords
ray
xrf
sample
subsystem
interest
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201380056545.8A
Other languages
English (en)
Chinese (zh)
Other versions
CN104769422A (zh
Inventor
迈克尔·费泽
斯里瓦特桑·塞萨德里
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ka Er Zeiss X-Ray Microscope Co
Original Assignee
Ka Er Zeiss X-Ray Microscope Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ka Er Zeiss X-Ray Microscope Co filed Critical Ka Er Zeiss X-Ray Microscope Co
Publication of CN104769422A publication Critical patent/CN104769422A/zh
Application granted granted Critical
Publication of CN104769422B publication Critical patent/CN104769422B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/046Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2206Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/24Earth materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/07Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076X-ray fluorescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/40Imaging
    • G01N2223/419Imaging computed tomograph

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Radiology & Medical Imaging (AREA)
  • Pulmonology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Remote Sensing (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CN201380056545.8A 2012-09-07 2013-09-06 组合共焦x射线荧光和x射线计算机断层扫描的系统和方法 Active CN104769422B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261698137P 2012-09-07 2012-09-07
US61/698,137 2012-09-07
PCT/US2013/058464 WO2014039793A1 (en) 2012-09-07 2013-09-06 Combined confocal x-ray fluorescence and x-ray computerised tomographic system and method

Publications (2)

Publication Number Publication Date
CN104769422A CN104769422A (zh) 2015-07-08
CN104769422B true CN104769422B (zh) 2018-06-12

Family

ID=49213145

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380056545.8A Active CN104769422B (zh) 2012-09-07 2013-09-06 组合共焦x射线荧光和x射线计算机断层扫描的系统和方法

Country Status (5)

Country Link
US (2) US9488605B2 (https=)
EP (1) EP2893331B1 (https=)
JP (1) JP6353450B2 (https=)
CN (1) CN104769422B (https=)
WO (1) WO2014039793A1 (https=)

Families Citing this family (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5907375B2 (ja) * 2011-12-28 2016-04-26 株式会社テクノエックス 蛍光x線分析装置及び蛍光x線分析方法
JP6036321B2 (ja) * 2012-03-23 2016-11-30 株式会社リガク X線複合装置
RU2580174C1 (ru) * 2012-06-09 2016-04-10 Шлюмберже Текнолоджи Б.В. Способ определения пористости образца породы
CN110376223B (zh) * 2013-04-04 2023-03-31 伊利诺斯工具制品有限公司 X射线成像系统及方法及数据存储媒介
CA2904111C (en) * 2013-04-12 2017-05-16 Illnois Tool Works Inc. High-resolution computed tomography
JP6361871B2 (ja) * 2014-07-07 2018-07-25 住友金属鉱山株式会社 データ処理装置、データ処理プログラム、データ処理方法および処理条件決定方法
CN107076684B (zh) * 2014-09-02 2021-04-02 株式会社尼康 测量处理装置、测量处理方法和测量处理程序
WO2016035147A1 (ja) 2014-09-02 2016-03-10 株式会社ニコン 測定処理装置、測定処理方法、測定処理プログラムおよび構造物の製造方法
CN104502374A (zh) * 2014-12-17 2015-04-08 中国石油天然气股份有限公司 一种岩心ct扫描射线硬化的校正方法
US9368321B1 (en) * 2014-12-22 2016-06-14 Fei Company Fiducial-based correlative microscopy
CZ201527A3 (cs) * 2015-01-20 2016-07-27 Pixel R&D S.R.O. Způsob trojrozměrného skenování pomocí fluorescence vyvolané elektromagnetickým zářením a zařízení k provádění tohoto způsobu
JP6869950B2 (ja) * 2015-04-02 2021-05-12 ソレック ニュークリア リサーチ センター X線蛍光標識を読み取るためのシステムおよび方法
US10697908B2 (en) * 2015-06-01 2020-06-30 Xwinsys Ltd. Metrology inspection apparatus
US20170023495A1 (en) * 2015-07-20 2017-01-26 Apple Inc. Universal computerized tomography fixture system with a multi-scan robotic positioning apparatus
WO2017039475A1 (en) * 2015-09-03 2017-03-09 Schlumberger Technology Corporation A computer-implemented method and a system for creating a three-dimensional mineral model of a sample of a heterogenerous medium
US10107769B2 (en) 2016-01-11 2018-10-23 Carl Zeiss X-Ray Microscopy Inc. Multimodality mineralogy segmentation system and method
US10607049B2 (en) * 2016-04-04 2020-03-31 Soreq Nuclear Research Center Method and a system for XRF marking and reading XRF marks of electronic systems
US11029267B2 (en) 2016-04-04 2021-06-08 Security Matters Ltd. Method and a system for XRF marking and reading XRF marks of electronic systems
GB201611357D0 (en) * 2016-06-30 2016-08-17 Cirdan Imaging Ltd A cabinet x-ray system for imaging a specimen and associated method
GB2551980A (en) * 2016-06-30 2018-01-10 Commw Scient Ind Res Org Method and system for low level metal analysis of mineral samples
US10359376B2 (en) * 2016-07-20 2019-07-23 Malvern Panalytical B.V. Sample holder for X-ray analysis
UA125139C2 (uk) * 2016-09-19 2022-01-19 Сорек'Ю Нукліар Ресьорч Сентер Система управління роботою системи рентгенівської флуоресценції для виявлення матеріалу, система рентгенівської флуоресценції для виявлення матеріалу та спосіб вимірювання на зразку для ідентифікації матеріалу з використанням рентгенівської флуоресценції
EP3537137A1 (en) * 2016-11-01 2019-09-11 Shimadzu Corporation Imaging magnification calibration method for radiation tomography device
SE540371C2 (en) * 2017-02-06 2018-08-21 Orexplore Ab A sample holder for holding a drill core sample or drill cuttings, an apparatus and system comprising the holder
CN110662962B (zh) 2017-03-14 2022-05-17 沙特阿拉伯石油公司 用于感测和预测烃源岩的成熟度的系统和方法
CN118058764A (zh) * 2017-07-25 2024-05-24 清华大学 射线透射和荧光ct成像系统和成像方法
CN110691547A (zh) * 2017-11-28 2020-01-14 奥里斯医疗有限公司 光学相干断层扫描系统
US10788435B2 (en) * 2017-12-21 2020-09-29 Hamilton Sundstrand Corporation Fixtures for radiographically imaging industrial articles
JP6994952B2 (ja) * 2018-01-12 2022-01-14 株式会社ミツトヨ 計測用x線ct装置、及び、その校正方法
US10764555B2 (en) * 2018-02-02 2020-09-01 II William G. Behenna 3-dimensional physical object dynamic display
KR102278675B1 (ko) * 2018-03-28 2021-07-16 포항공과대학교 산학협력단 엑스레이를 이용한 도금두께 측정 장치
GB2572569C (en) * 2018-04-03 2022-12-14 Mineral Explor Network Finland Ltd Nugget effect grade assessment
CN108597018A (zh) * 2018-04-28 2018-09-28 清能艾科(深圳)能源技术有限公司 对土壤实现数值模拟的方法和装置
CA3100580A1 (en) 2018-05-18 2019-11-21 Enersoft Inc. Geological analysis system and methods using x-ray flurescence and spectroscopy
SE543606C2 (en) * 2018-08-03 2021-04-13 Orexplore Ab Density analysis of geological sample
JP7052643B2 (ja) * 2018-08-29 2022-04-12 住友金属鉱山株式会社 試料分析方法
CN109596657A (zh) * 2018-11-29 2019-04-09 石家庄铁道大学 高速动车组走行部运动部件早期缺陷扩展诊断方法
JP7198078B2 (ja) * 2018-12-27 2022-12-28 株式会社堀場製作所 分析装置、分析方法、及びプログラム
CN109632854B (zh) * 2019-01-14 2022-10-11 东华理工大学 一种双探测结构的块状铀矿多元素在线x荧光分析仪
JP7234821B2 (ja) * 2019-02-13 2023-03-08 住友金属鉱山株式会社 粉末試料の分析方法、x線ct測定用試料の作製方法およびx線ct測定用試料
JP7150638B2 (ja) * 2019-02-27 2022-10-11 キオクシア株式会社 半導体欠陥検査装置、及び、半導体欠陥検査方法
KR102628712B1 (ko) * 2019-05-08 2024-01-25 주식회사 히타치하이테크 패턴 계측 장치 및 계측 방법
CN110152557A (zh) * 2019-06-14 2019-08-23 清华大学深圳研究生院 一种气体水合物高通量并行反应系统及方法
JP7286485B2 (ja) * 2019-09-06 2023-06-05 株式会社ミツトヨ 計測用x線ct装置
EP4030164A4 (en) * 2019-09-09 2023-01-25 Universidad De La Frontera INTEGRATED SYSTEM OF ORTHOVOLTAGE SOURCES THAT INDUCE IONIZING RADIATION
US11604152B2 (en) * 2019-10-09 2023-03-14 Baker Hughes Oilfield Operations Llc Fast industrial computed tomography for large objects
WO2021127522A1 (en) * 2019-12-20 2021-06-24 Carl Zeiss X-ray Microscopy, Inc. Edge phase effects removal using wavelet correction and particle classification using combined absorption and phase contrast
CN111751394B (zh) 2020-04-17 2021-08-27 山东大学 基于图像与xrf矿物反演的岩性识别方法及系统
CN111624218B (zh) * 2020-06-30 2022-01-04 中国科学院南京地质古生物研究所 非破坏性立体化石及文物表面化学元素分布特征分析方法
CA3192988A1 (en) * 2020-09-16 2022-03-24 Grant I. Sanden Multiple-sensor analysis of geological samples
WO2022107148A1 (en) * 2020-11-21 2022-05-27 Bar Ilan University System and method for mapping chemical elements in a sample
CN113418949B (zh) * 2020-12-16 2024-02-23 中航复合材料有限责任公司 复合材料x射线测试的标准尺寸样品制备方法及测试方法
US11790598B2 (en) * 2020-12-16 2023-10-17 Nvidia Corporation Three-dimensional tomography reconstruction pipeline
EP4019951A1 (en) 2020-12-24 2022-06-29 Inel S.A.S Apparatuses and methods for combined simultaneous analyses of materials
JP7499194B2 (ja) * 2021-01-27 2024-06-13 大成建設株式会社 分析方法および分析装置
CA3223962A1 (en) 2021-06-25 2022-12-29 Grant I. Sanden Laser induced breakdown spectroscopy for geological analysis
EP4177596A1 (en) * 2021-11-05 2023-05-10 Carl Zeiss X-Ray Microscopy, Inc. Multi-fraction sample holder for 3d particle analysis
CN118235038A (zh) 2021-11-08 2024-06-21 深圳帧观德芯科技有限公司 用于x射线荧光成像的装置和方法
CN114813798B (zh) * 2022-05-18 2023-07-07 中国工程物理研究院化工材料研究所 用于表征材料内部结构及成分的ct检测装置和成像方法
CN115420764A (zh) * 2022-09-30 2022-12-02 苏州锂影科技有限公司 基于长方形x射线光束的二维掠入射x射线散射测试装置
CN115656238B (zh) * 2022-10-17 2023-05-12 中国科学院高能物理研究所 一种微区xrf元素分析与多维成像方法及系统
CN116678909A (zh) * 2023-06-08 2023-09-01 深圳综合粒子设施研究院 一种共聚焦荧光实验装置、荧光信号的探测方法
US12444099B2 (en) * 2023-06-15 2025-10-14 Baker Hughes Holdings Llc Systems and methods for computed tomography inaccuracy compensation
US12436123B2 (en) * 2023-09-06 2025-10-07 Schlumberger Technology Corporation XRF measurements of multiphase oilfield fluids
CN119091600B (zh) * 2024-08-02 2025-05-16 山东盛泰矿业科技有限公司 一种钛铁矿下料报警装置
CN118837396B (zh) * 2024-08-16 2025-11-28 天津大学 一种三维图像辅助xrf光谱分析的磨粒颗粒度效应校正方法
CN121350324B (zh) * 2025-12-18 2026-03-20 四川省自然资源实验测试研究中心(四川省核应急技术支持中心) 一种基于三维建模的矿石元素分布可视化方法及系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009261456A (ja) * 2008-04-22 2009-11-12 Toshiba Corp X線ct装置
CN201417256Y (zh) * 2008-10-20 2010-03-03 北京师范大学 毛细管x光透镜共聚焦微区x射线荧光谱仪
CN101862200A (zh) * 2010-05-12 2010-10-20 中国科学院上海应用物理研究所 一种快速x射线荧光ct方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5192869A (en) 1990-10-31 1993-03-09 X-Ray Optical Systems, Inc. Device for controlling beams of particles, X-ray and gamma quanta
US5497008A (en) 1990-10-31 1996-03-05 X-Ray Optical Systems, Inc. Use of a Kumakhov lens in analytic instruments
JPH0560702A (ja) 1991-09-04 1993-03-12 Hitachi Ltd X線を用いた断層像撮像方法及び装置
US5570408A (en) 1995-02-28 1996-10-29 X-Ray Optical Systems, Inc. High intensity, small diameter x-ray beam, capillary optic system
US5604353A (en) 1995-06-12 1997-02-18 X-Ray Optical Systems, Inc. Multiple-channel, total-reflection optic with controllable divergence
US6697454B1 (en) 2000-06-29 2004-02-24 X-Ray Optical Systems, Inc. X-ray analytical techniques applied to combinatorial library screening
JP3998556B2 (ja) * 2002-10-17 2007-10-31 株式会社東研 高分解能x線顕微検査装置
WO2007130857A2 (en) * 2006-05-05 2007-11-15 American Science And Engineering, Inc. Combined x-ray ct/neutron material identification system
WO2009023847A1 (en) * 2007-08-16 2009-02-19 Caldera Pharmaceuticals, Inc. Well plate
JP5557266B2 (ja) 2008-07-17 2014-07-23 国立大学法人 筑波大学 蛍光エックス線検出装置
US8565376B2 (en) 2010-01-07 2013-10-22 The Board Of Trustees Of The University Of Illinois Method and apparatus for measuring properties of a compound
WO2013058672A1 (en) * 2011-10-18 2013-04-25 Schlumberger Holdings Limited A method for 3d mineral mapping of a rock sample
JP6036321B2 (ja) 2012-03-23 2016-11-30 株式会社リガク X線複合装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009261456A (ja) * 2008-04-22 2009-11-12 Toshiba Corp X線ct装置
CN201417256Y (zh) * 2008-10-20 2010-03-03 北京师范大学 毛细管x光透镜共聚焦微区x射线荧光谱仪
CN101862200A (zh) * 2010-05-12 2010-10-20 中国科学院上海应用物理研究所 一种快速x射线荧光ct方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
A compact MicroCT/MicroXRF scanner for non-destructive 3D chemical analysis;Alexander Sasov et al.;《Proc. of SPIE》;20081231;第7078卷;70780R-2至70780R-6页,2. MATERIALS AND METHODS和3.1 Phantom study,图1、图3和图5 *

Also Published As

Publication number Publication date
US20150253263A1 (en) 2015-09-10
US9488605B2 (en) 2016-11-08
EP2893331B1 (en) 2020-01-15
CN104769422A (zh) 2015-07-08
JP2015531480A (ja) 2015-11-02
WO2014039793A1 (en) 2014-03-13
US20140072095A1 (en) 2014-03-13
JP6353450B2 (ja) 2018-07-04
US9739729B2 (en) 2017-08-22
EP2893331A1 (en) 2015-07-15

Similar Documents

Publication Publication Date Title
CN104769422B (zh) 组合共焦x射线荧光和x射线计算机断层扫描的系统和方法
Gardette et al. Laser-induced breakdown spectroscopy imaging for material and biomedical applications: recent advances and future perspectives
Sutton et al. Techniques for virtual palaeontology
US11399788B2 (en) Systems and methods for tissue discrimination via multi-modality coded aperture x-ray imaging
RU2610216C2 (ru) Способ и система двойного изображения для генерации многомерного изображения образца
CN110662961B (zh) 分析岩石样本
Bleuet et al. Probing the structure of heterogeneous diluted materials by diffraction tomography
EP2546638B1 (en) Clustering of multi-modal data
US9201026B2 (en) Method and system for estimating properties of porous media such as fine pore or tight rocks
EP2713884B1 (en) An x-ray tomography device
CN114729907A (zh) 用于计算机层析x射线荧光成像的系统和方法
Cordes et al. Three dimensional subsurface elemental identification of minerals using confocal micro-X-ray fluorescence and micro-X-ray computed tomography
Heimler et al. Confocal micro X-ray fluorescence analysis for the non-destructive investigation of structured and inhomogeneous samples
McIntosh et al. Laboratory-based characterization of plutonium in soil particles using micro-XRF and 3D confocal XRF
Englisch et al. 3d analysis of equally x-ray attenuating mineralogical phases utilizing a correlative tomographic workflow across multiple length scales
Miller et al. Elemental imaging for pharmaceutical tablet formulation analysis by micro X-ray fluorescence
Hsieh Procedure and analysis of mineral samples using high resolution X-ray micro tomography
Sharps et al. A dual beam SEM-based EDS and micro-XRF method for the analysis of large-scale Mesoamerican obsidian tablets
Ménez et al. X-ray fluorescence micro-tomography of an individual fluid inclusion using a third generation synchrotron light source
Sørensen et al. Non-destructive identification of micrometer-scale minerals and their position within a bulk sample
Qiu et al. Internal elemental imaging by scanning X-ray fluorescence microtomography at the hard X-ray microprobe beamline of the SSRF: Preliminary experimental results
Bam Developing protocols for XCT scanning of dense mineral ore samples with applications to geology and minerals processing
Marguí et al. State-of-the-art X-ray Fluorescence Instrumentation for Chemical Analysis
Fittschen et al. Full-Field X-ray Fluorescence Microscopy Using a Color X-ray Camera
US12487194B2 (en) 3D particle analysis and separation using dual seeding

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
EXSB Decision made by sipo to initiate substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant