CN104764477A - Optical detector capable of online correction - Google Patents

Optical detector capable of online correction Download PDF

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Publication number
CN104764477A
CN104764477A CN201410007312.5A CN201410007312A CN104764477A CN 104764477 A CN104764477 A CN 104764477A CN 201410007312 A CN201410007312 A CN 201410007312A CN 104764477 A CN104764477 A CN 104764477A
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China
Prior art keywords
module
splitting module
optical detection
light
splitting
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CN201410007312.5A
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Chinese (zh)
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CN104764477B (en
Inventor
陈昌隆
宋新岳
简宏达
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Chroma ATE Suzhou Co Ltd
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Chroma ATE Suzhou Co Ltd
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Abstract

The invention provides an optical detector capable of online correction. The detector comprises a light splitting module, a light source module, an optical detection module and a correction module, wherein the light source module, the optical detection module and the correction module are arranged surrounding the light splitting module, and the correction module includes a correction pattern to correct the optical detection module. The correction module is not arranged at the surface of an object to be detected, so that the precision of the optical detection module is not influenced by the surface form of the object to be detected. The correction module is arranged separate from the object to be detected, it is not required to move the correction away after the optical detection module completes correction, instead, the object to be detected can be detected immediately, and time for rearranging and moving away the correction module is reduced.

Description

There is the optical detection apparatus of on-line correction function
Technical field
The invention relates to a kind of optical detection apparatus, its espespecially a kind of optical detection apparatus with on-line correction function.
Background technology
Known camera calibration system comprises the clamping device of video camera, video display, the multiple degree of freedom of adjustable, and the correction plate of the special pattern of a correction.Correction plate must be fixed on the surface of a determinand, then take correction plate by video camera and produce a correcting image, then according to correcting image, video camera is corrected, but the correction plate of known calibration system is not easily fixed on the determinand of surface for curved surface, causes the precision of camera calibration to reduce; In addition, when video camera detects determinand afterwards, correction plate must be removed, can detect.
Because the problems referred to above, the invention provides a kind of optical detection apparatus with on-line correction function, it must not arrange correction plate on determinand, the surface of determinand can be any form, do not affect the precision of correction, and when detecting afterwards, can directly detect determinand.
Summary of the invention
Object of the present invention, is to provide a kind of optical detection apparatus with on-line correction function, and it is applicable to the determinand of surface for any form, in carrying out in real time bit correction online, effectively promotes the degree of accuracy, degree of stability and the consistance that correct.
In order to reach above-mentioned censured each object and effect, the present invention discloses a kind of optical detection apparatus with on-line correction function, it comprises: a splitting module, after a light enters this splitting module by the first side of this splitting module, to be penetrated by the 3rd side of this splitting module and the 4th side respectively, after this light enters this splitting module by the second side of this splitting module, will be penetrated by the 3rd of this splitting module and the 4th side respectively; One light source module, it is arranged at the first side of this splitting module of this splitting module, and this light source module is in order to provide this light; One optical detection module, it is arranged at the second side of this splitting module, and this optical detection module is in order to detect a determinand, and this determinand is arranged at the 4th side of this splitting module; And one correct module, it is arranged at the 3rd side of this splitting module, this correction module in order to provide a correcting pattern, to correct this optical detection module.
The beneficial effect implementing the present invention's generation is: the invention provides a kind of optical detection apparatus with on-line correction function, the non-surface being arranged at determinand of correction module of optical detection apparatus, does not therefore affect the precision that calibrating optical detects module by the configuration of surface of determinand.In addition correction module and determinand are for being provided separately, and after optical detection module has corrected, must not remove correction module, can carry out the detection of determinand immediately, reduce the time resetting and remove and correct module.Correct the reflecting optics that module has different kenel, carry out bit correction and flat field correction to detect module to calibrating optical.
Accompanying drawing explanation
Fig. 1: it is the calcspar of optical detection apparatus of the present invention;
Fig. 2 A and Fig. 2 B: it is the schematic diagram of the optical detection apparatus of the first embodiment of the present invention;
Fig. 3: it is the schematic diagram of the optical detection apparatus of the second embodiment of the present invention; And
Fig. 4: it is the schematic diagram of the optical detection apparatus of the third embodiment of the present invention.
[figure number is to as directed]
1 optical detection apparatus
10 splitting module
1011 first sides
1012 second sides
1013 the 3rd sides
1014 the 4th sides
11 light source modules
12 optical detection modules
13 correct module
131 correction zone
1311 first reflecting optics
13111 correcting patterns
1312 second reflecting optics
132 extinction districts
1321 extinction eyeglasses
133 switch window
14 cover module
141 extinction plates
2 determinands
3 rollers
S light
S1 first light
S2 second light
Embodiment
In order to make architectural feature of the present invention and effect of reaching have a better understanding and awareness, spy's preferred embodiment and coordinate detailed description, is described as follows:
Refer to Fig. 1, it is the calcspar of optical detection apparatus of the present invention, as shown in the figure, the optical detection apparatus 1 of the present embodiment comprises a splitting module 10, one light source module 11, one optical detection module 12 and corrects module 13, the light path of splitting module 10 is with counter clockwise direction sequentially called after first side 1011, second side 1012, 3rd side 1013 and the 4th side 1014, splitting module 10 can be a spectroscope inclination miter angle, or the regular cube diagonally to be binded by two triangular prisms, splitting module 10 is generally and light half can be allowed to penetrate a half reflection, although make the service efficiency of light source decline, but the luminescence efficiency that can pass through light source module 11 promotes as compensating.When a light enters from the first side 1011 of splitting module 10, light penetrates from the 3rd side 1013 of splitting module 10 and the 4th side 1014; When light enters from the second side 1012 of splitting module 10, light penetrates from the 3rd side 1013 of splitting module 10 and the 4th side 1014.
See also Fig. 2 A and Fig. 2 B, it is the schematic diagram of the optical detection apparatus of the first embodiment of the present invention.Light source module 11, optical detection module 12 and correction module 13 are arranged around splitting module 10, and light source module 11 is arranged at the first side 1011 of splitting module 10; Optical detection module 12 is arranged at the second side 1012 of splitting module 10; Correct the 3rd side 1013 that module 13 is arranged at splitting module 10.Wherein correct module 13 and comprise extinction district, correction zone 131, one 132 and a switching window 133, switch the corresponding correction zone 131 of window 133 or extinction district 132, the correction zone 131 of the present embodiment is for having one first reflecting optics 1311 of a correcting pattern 13111, extinction district 132 is extinction eyeglass 1321 or the extinction plate that surface has a light absorbent, and the first reflecting optics 1311 is stacked on extinction eyeglass 1321.
The optical detection apparatus 1 of the present embodiment is for detecting a determinand 2, the determinand 2 of the present embodiment is flexible materials, and be wound on plural roller 3, and make the surface of determinand 2 be curved surface, and furling determinand 2 through the rotation of those rollers 3, certain determinand 2 also can be yaw and detects in a plane.Determinand 2 is arranged at the 4th side 1014 of splitting module 10, and before detecting determinand 2, first calibrating optical detects module 12.Now, light source module 11 supplies a light S to splitting module 10, and light S enters from the first side 1011 of splitting module 10, a part of light S penetrates, another part of light S is reflected in addition, and the light penetrated is the first light S1, is the second light S2 by the light reflected.
First light S1 penetrates splitting module 10 and penetrates from the 3rd side 1013 of splitting module 10 to correction module 13.As shown in Figure 2 A, user allows and switches the corresponding correction zone 131 of window 133, first light S1 injects correction zone 131, the first light S1 is reflected to splitting module 10 in correction zone 131, entered from the 3rd side 1013 of splitting module 10 by the first light S1 reflected, reflex to optical detection module 12 through splitting module 10.Optical detection module 12 can be one-dimensional scanning probe (linescan) or two-dimentional capture probe (areascan), and optical detection module 12 can be made up of single probe or array probe.Optical detection module 12 receives by the first light S1 of reflecting and produces a correcting image, so checks the position of module 12 according to correcting pattern 1311 calibrating optical of the correcting pattern in correcting image and correction zone 131, to complete the correction of optical check module 12.In addition, entered by the second side 1012 when light S changes, splitting module 10 allows a part of light S penetrate and penetrates from the 4th side 1014, and another part of reflection ray S penetrating from the 3rd side 1013.
In addition, the second light S2 module 10 that is split reflects and penetrates to determinand 2 from the 4th side 1014 of splitting module 10.The present embodiment more arranges one and covers module 14 between determinand 2 and the 4th side 1014 of splitting module 10, covers module 14 and comprises an extinction plate 141.When the second light S2 shoots to determinand 2, the extinction plate 141 covering module 14 covers determinand 2, and absorbs the second light S2, avoid determinand 2 to reflect the second light S2 disturbs optical detection module 12 correction to splitting module 10 and optical detection module 12.
After optical detection module 12 completes correction, as shown in Figure 2 B, only to allow the corresponding extinction district 132 of switching window 133 that corrects module 13 and remove and cover module 14 between determinand 2 and splitting module 10, the detection of determinand 2 can be carried out.When correct module 13 the corresponding extinction district 132 of switching window 133 and remove between determinand 2 and splitting module 10 cover module 14 time, the the first light S1 penetrating splitting module 10 is absorbed by extinction district 132, second light S2 is reflexed to splitting module 10 by determinand 2, entered from the 4th side 1014 of splitting module 10 by the second light S2 reflected, and penetrate splitting module 10 and penetrate from the second side 1012 of splitting module 10, then optical detection module 12 receives by the second light S2 reflected, to detect determinand 2.From the above, the light path that light path and optical detection module 12 pairs of determinands 2 that calibrating optical detects module 12 detect is different.So, correct the surface that module 13 must not be arranged at determinand 2, to avoid the surface of determinand 2 for producing the problem not easily arranging and correct during curved surface.
Refer to Fig. 3, it is the schematic diagram of the optical detection apparatus of the second embodiment of the present invention; As shown in the figure, the correction zone 131 of the correction module 13 of the present embodiment more comprises one second reflecting optics 1312, second reflecting optics 1312 without correcting pattern and is arranged between the first reflecting optics 1311 and extinction eyeglass 1321.Penetrate splitting module 10 as the first light S1 and penetrate from the 3rd side 1013 of splitting module 10 to correction module 13.User allows and switches the second reflecting optics 1312 of the corresponding correction zone 131 of window 133, second reflecting optics 1312 reflects the first light S1 to splitting module 10, optical detection module 12 is reflexed to again by the splitting module 10 of splitting module 10, optical detection module 12 receives the first light S1 and produces another correcting image, so carries out flat field correction according to correcting image to optical detection module 12.Illustrate, when the center brightness of correcting image is compared with its surrounding brightness height, an adjustment programme can be utilized to adjust optical detection module 12, make the surrounding brightness of correcting image identical with its center brightness.
Refer to Fig. 4, it is the schematic diagram of the optical detection apparatus of the third embodiment of the present invention.When light source module 11 provides a light S, light S enters from the first side 1011 of splitting module 10, splitting module 10 allows the light S of part penetrate, the light S module 10 that is split of part reflects in addition, the light S penetrating the part of splitting module 10 is the first light S1, and the light S of the part of the module 10 that is split reflection is the second light S2.Right first light S1 penetrates splitting module 10 and penetrates to determinand 2, to detect determinand 2 from the 4th side 1014 of splitting module 10; Second light S2 be split module 10 reflect and penetrate from the 3rd side 1013 of splitting module 10 to correction module 13, to correct optical detection module 12.In addition, entered by the second side 1012 when light S changes, splitting module 10 allows a part of light S penetrate and penetrates from the 3rd side 1013, and another part of reflection ray S penetrating from the 4th side 1014.What the 3rd embodiment was different from the first embodiment is in transillumination determinand 2 after light S enters splitting module 10, and other is then identical with the first embodiment, repeats no more in this.
In sum, the invention provides a kind of optical detection apparatus with on-line correction function, the non-surface being arranged at determinand of correction module of optical detection apparatus, therefore do not affect the precision that calibrating optical detects module by the configuration of surface of determinand.In addition correction module and determinand are for being provided separately, and after optical detection module has corrected, must not remove correction module, can carry out the detection of determinand immediately, reduce the time resetting and remove and correct module.Correct the reflecting optics that module has different kenel, carry out bit correction and flat field correction to detect module to calibrating optical.
Above is only preferred embodiment of the present invention, not be used for limiting scope of the invention process, all equalizations of doing according to shape, structure, feature and the spirit described in the claims in the present invention scope change and modify, and all should be included in right of the present invention.

Claims (10)

1. have an optical detection apparatus for on-line correction function, it is characterized in that, it comprises:
One splitting module, after a light enters this splitting module by the first side of this splitting module, to be penetrated by the 3rd side of this splitting module and the 4th side respectively, after this light enters this splitting module by the second side of this splitting module, will be penetrated by the 3rd side of this splitting module and the 4th side respectively;
One light source module, it is arranged at the first side of this splitting module, and this light source module is in order to provide this light;
One optical detection module, it is arranged at the second side of this splitting module, and this optical detection module is in order to detect a determinand, and this determinand is arranged at the 4th side of this splitting module; And
One correct module, it is arranged at the 3rd side of this splitting module, this correction module in order to provide a correcting pattern, to correct this optical detection module.
2. optical detection apparatus as claimed in claim 1, it is characterized in that, wherein this correction module more comprises:
One correction zone, it is in order to provide this correcting pattern;
One extinction district, it is in order to absorb this light; And
One switches window, and it is in order to select this correction zone or this extinction district.
3. optical detection apparatus as claimed in claim 2, it is characterized in that, wherein this optical detection module carries out timing, and this switching window selects this correction zone.
4. optical detection apparatus as claimed in claim 2, it is characterized in that, when wherein this optical detection module detects, this switching window selects this extinction district.
5. optical detection apparatus as claimed in claim 2, it is characterized in that, wherein this correction zone comprises a reflecting optics, and this reflecting optics is in order to carry out flat field correction to this optical detection module.
6. optical detection apparatus as claimed in claim 1, is characterized in that, wherein this optical detection module is one-dimensional scanning probe or two-dimentional capture probe.
7. optical detection apparatus as claimed in claim 1, is characterized in that, more comprise:
One covers module, and it is arranged between the 4th side of this splitting module and this determinand, and this covers module and carries out timing in order to cover this determinand in this optical detection module.
8. optical detection apparatus as claimed in claim 1, it is characterized in that, wherein this splitting module is a spectroscope or a regular cube diagonally binded by two triangular prisms.
9. optical detection apparatus as claimed in claim 1, it is characterized in that, wherein after this light enters this splitting module by the first side of this splitting module, a part for this light penetrates this splitting module and is penetrated by the 3rd side of this splitting module, and another part of this light is reflected by this splitting module and penetrated by the 4th side of this splitting module, after this light enters this splitting module by the second side of this splitting module, a part for this light penetrates this splitting module and is penetrated by the 4th side of this splitting module, and another part of this light is reflected by this splitting module and penetrated by the 3rd side of this splitting module.
10. optical detection apparatus as claimed in claim 1, it is characterized in that, wherein after this light enters this splitting module by the first side of this splitting module, a part for this light penetrates this splitting module and is penetrated by the 4th side of this splitting module, and another part of this light is reflected by this splitting module and penetrated by the 3rd side of this splitting module, after this light enters this splitting module by the second side of this splitting module, a part for this light penetrates this splitting module and is penetrated by the 3rd side of this splitting module, and another part of this light is reflected by this splitting module and penetrated by the 4th side of this splitting module.
CN201410007312.5A 2014-01-08 2014-01-08 Optical detection apparatus with on-line correction function Active CN104764477B (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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CN104764477B CN104764477B (en) 2018-01-12

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4652931A (en) * 1983-12-29 1987-03-24 Asahi Kogaku Kogyo Kabushiki Kaisha Optical system for TTL automatic focusing video camera
JPH1137807A (en) * 1997-07-15 1999-02-12 Agency Of Ind Science & Technol Equipment for calibrating vibration sensor
CN101349579A (en) * 2007-07-20 2009-01-21 上海宏力半导体制造有限公司 Correcting device of measuring system
CN101799318A (en) * 2010-03-22 2010-08-11 电子科技大学 Laser homodyne vibration detection optical system and method for processing signals by using same
CN102879109A (en) * 2012-09-12 2013-01-16 中国科学院西安光学精密机械研究所 dynamic wavefront testing device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4652931A (en) * 1983-12-29 1987-03-24 Asahi Kogaku Kogyo Kabushiki Kaisha Optical system for TTL automatic focusing video camera
JPH1137807A (en) * 1997-07-15 1999-02-12 Agency Of Ind Science & Technol Equipment for calibrating vibration sensor
CN101349579A (en) * 2007-07-20 2009-01-21 上海宏力半导体制造有限公司 Correcting device of measuring system
CN101799318A (en) * 2010-03-22 2010-08-11 电子科技大学 Laser homodyne vibration detection optical system and method for processing signals by using same
CN102879109A (en) * 2012-09-12 2013-01-16 中国科学院西安光学精密机械研究所 dynamic wavefront testing device

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