CN104764477B - Optical detection apparatus with on-line correction function - Google Patents
Optical detection apparatus with on-line correction function Download PDFInfo
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- CN104764477B CN104764477B CN201410007312.5A CN201410007312A CN104764477B CN 104764477 B CN104764477 B CN 104764477B CN 201410007312 A CN201410007312 A CN 201410007312A CN 104764477 B CN104764477 B CN 104764477B
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- module
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- optical detection
- splitting module
- splitting
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Abstract
The present invention provides a kind of optical detection apparatus with on-line correction function, optical detection apparatus includes a splitting module, a light source module group, an optical detection module and a correction module, light source module group, optical detection module and correction module are set around splitting module, correction module has a correcting pattern, to be corrected to optical detection module, and the non-surface for being arranged at a determinand of correction module of the present invention, therefore the precision of correction optical detection module is not influenceed by the configuration of surface of determinand.In addition module is corrected with determinand to be provided separately, and after the completion of the correction of optical detection module, is not necessary to remove correction module, can be carried out the detection of determinand immediately, reduces the time for resetting and removing correction module.
Description
Technical field
The invention relates to a kind of optical detection apparatus, its espespecially a kind of optical detection dress with on-line correction function
Put.
Background technology
Known camera calibration system includes video camera, video display, the clamping device that can adjust multiple frees degree, with
And one the special pattern of correction correcting plate.Correcting plate must be fixed on the surface of a determinand, then shoot correcting plate by video camera
And a correction chart picture is produced, then video camera is corrected according to correction chart picture, but the correcting plate of known calibration system is not easy
The determinand that surface is curved surface is fixed on, causes the precision of camera calibration to reduce；In addition, video camera enters to determinand afterwards
During row detection, correcting plate must be removed, can be detected.
In view of above mentioned problem, the present invention provides a kind of optical detection apparatus with on-line correction function, its be not necessary in
Correcting plate is set on determinand, and the surface of determinand can be any form, have no effect on the precision of correction, and be examined afterwards
During survey, directly determinand can be detected.
The content of the invention
The purpose of the present invention, it is to provide a kind of optical detection apparatus with on-line correction function, it is applied to surface
For the determinand of any form, in carrying out in real time online to bit correction, the effectively accuracy of lifting correction, stability and consistent
Property.
In order to reach above-mentioned censured each purpose and effect, the present invention discloses a kind of optics with on-line correction function
Detection means, it is included：One splitting module, after a light enters the splitting module by the first side of the splitting module, it will divide
Do not projected by the 3rd side of the splitting module and the 4th side, when the light enters the splitting module by the second side of the splitting module
Afterwards, will be projected respectively by the 3rd face of the splitting module and the 4th side；One light source module group, it is arranged at this point of the splitting module
First side of optical mode group, the light source module group is providing the light；One optical detection module, it is arranged at the of the splitting module
Two sides, for the optical detection module to detect a determinand, the determinand is arranged at the 4th side of the splitting module；An and school
Positive module, it is arranged at the 3rd side of the splitting module, and the correction module is to provide a correcting pattern, to correct optics inspection
Survey module.
Implement the beneficial effect comprise that：The present invention provides a kind of optical detection dress with on-line correction function
Put, the correction module of optical detection apparatus is non-to be arranged at the surface of determinand, therefore is not influenceed by the configuration of surface of determinand
Correct the precision of optical detection module.In addition module is corrected with determinand to be provided separately, after the completion of the correction of optical detection module,
It is not necessary to remove correction module, the detection of determinand can be carried out immediately, reduces the time for resetting and removing correction module.Correction
Module has the reflecting optics of different kenels, to carry out correction optical detection module to bit correction and flat field correction.
Brief description of the drawings
Fig. 1：It is the block diagram of the optical detection apparatus of the present invention；
Fig. 2A and Fig. 2 B：It is the schematic diagram of the optical detection apparatus of the first embodiment of the present invention；
Fig. 3：It is the schematic diagram of the optical detection apparatus of the second embodiment of the present invention；And
Fig. 4：It is the schematic diagram of the optical detection apparatus of the third embodiment of the present invention.
【Figure number is to as directed】
1 optical detection apparatus
10 splitting modules
1011 first sides
1012 second sides
1013 the 3rd sides
1014 the 4th sides
11 light source module groups
12 optical detection modules
13 correction modules
131 correction zones
1311 first reflecting optics
13111 correcting patterns
1312 second reflecting optics
132 extinction areas
1321 extinction eyeglasses
133 switching windows
14 masking modules
141 extinction plates
2 determinands
3 rollers
S light
The light of S1 first
The light of S2 second
Embodiment
In order that the present invention architectural feature and it is reached the effect of have a better understanding and awareness, spy with preferably
Embodiment and cooperation detailed description, are described as follows：
Referring to Fig. 1, its block diagram for the optical detection apparatus of the present invention；As illustrated, the optics inspection of the present embodiment
Survey device 1 and include a splitting module 10, a light source module group 11, an optical detection module 12 and a correction module 13, splitting module
10 light path is sequentially named as the first side 1011, the second side 1012, the 3rd side 1013 and the 4th side 1014 in a counterclockwise direction, point
Optical mode group 10 can be that a spectroscope tilts 45 degree of angles, or the regular cube diagonally binded by two triangular prisms,
Splitting module 10 is usually that light half can be allowed to penetrate a half reflection, although declining the service efficiency of light source, can pass through light
The luminous efficiency lifting of source module 11 is as compensation.When a light enter from the first side 1011 of splitting module 10 it is fashionable, light from
3rd side 1013 of splitting module 10 and the 4th side 1014 are projected；When light enter from the second side 1012 of splitting module 10 it is fashionable,
Light projects from the 3rd side 1013 of splitting module 10 and the 4th side 1014.
Also referring to Fig. 2A and Fig. 2 B, it is the schematic diagram of the optical detection apparatus of the first embodiment of the present invention.Light
Source module 11, optical detection module 12 and correction module 13 are set around splitting module 10, and light source module group 11 is arranged at light splitting mould
First side 1011 of group 10；Optical detection module 12 is arranged at the second side 1012 of splitting module 10；Correction module 13 is arranged at
3rd side 1013 of splitting module 10.Wherein correct module 13 and include a correction zone 131, an extinction area 132 and a switching window
133, switching window 133 corresponds to correction zone 131 or extinction area 132, and the correction zone 131 of the present embodiment is with a correcting pattern
13111 one first reflecting optics 1311, extinction area 132 are that the extinction eyeglass 1321 or one that surface has a light absorbent is inhaled
Tabula rasa, the first reflecting optics 1311 are stacked on extinction eyeglass 1321.
The optical detection apparatus 1 of the present embodiment is used to detect a determinand 2, and the determinand 2 of the present embodiment is pliability material
Matter, and being wound on plural roller 3, and make the surface of determinand 2 be curved surface, and it is to be measured through the rotation retracting of those rollers 3
Thing 2, certain determinand 2 or yaw are detected in a plane.Determinand 2 is arranged at the 4th side of splitting module 10
1014, before being detected to determinand 2, first correct optical detection module 12.Now, light source module group 11 supplies a light S extremely
Splitting module 10, light S enter from the first side 1011 of splitting module 10, and a light S part penetrates, and light S's is another in addition
A part is reflected, and the light penetrated is the first light S1, and reflected light line is the second light S2.
First light S1 penetrates splitting module 10 and projected from the 3rd side 1013 of splitting module 10 to correction module 13.Such as
Shown in Fig. 2A, user allows switching window 133 to correspond to correction zone 131, and the first light S1 injects correction zone 131, and correction zone 131 is reflected
To splitting module 10, the first light S1 reflected enters first light S1 from the 3rd side 1013 of splitting module 10, through light splitting
Module 10 reflexes to optical detection module 12.Optical detection module 12 can be one-dimensional scanning probe (l inescan) or two dimension
Capture is popped one's head in (area scan), and optical detection module 12 can be made up of single probe or array probe.Optical detection module
12 receive the first light S1 reflected and produce a correction chart picture, so according to the correcting pattern in correction chart picture and correction zone
131 correcting pattern 13111 corrects the position of optical check module 12, to complete the correction of optical check module 12.In addition, work as
Light S changes to be entered by the second side 1012, and splitting module 10 allows a light S part to penetrate and be projected from the 4th side 1014, and instead
Penetrate light S another part and projected from the 3rd side 1013.
In addition, the second light S2 is split, module 10 reflects and projected from the 4th side 1014 of splitting module 10 to determinand
2.The present embodiment more sets a masking module 14 between determinand 2 and the 4th side 1014 of splitting module 10, covers module 14
Include an extinction plate 141.When the second light S2 shoots to determinand 2, the extinction plate 141 of masking module 14 covers determinand 2, and
The second light S2 is absorbed, avoids determinand 2 from reflecting the second light S2 and disturbs light to splitting module 10 and optical detection module 12
Learn the correction of detection module 12.
After optical detection module 12 complete correction after, as shown in Figure 2 B, only to allow correction module 13 the correspondence of switching window 133
Masking module 14 between extinction area 132 and removal determinand 2 and splitting module 10, you can carry out the detection of determinand 2.Work as correction
When switching the corresponding extinction area 132 of window 133 and removing the masking module 14 between determinand 2 and splitting module 10 of module 13, penetrates
First light S1 of splitting module 10 is absorbed by extinction area 132, and the second light S2 reflexes to splitting module 10, quilt by determinand 2
Second light S2 of reflection enters from the 4th side 1014 of splitting module 10, and penetrate splitting module 10 and from splitting module 10
Second side 1012 is projected, and then optical detection module 12 receives the second light S2 reflected, to be detected to determinand 2.
From the foregoing, the light path that the light path of correction optical detection module 12 is detected with optical detection module 12 to determinand 2 is not
Together.So, correction module 13 is not necessary to be arranged at the surface of determinand 2, during avoiding the surface of determinand 2 as curved surface generation be not easy to set
The problem of putting and correcting.
Referring to Fig. 3, its schematic diagram for the optical detection apparatus of the second embodiment of the present invention；As illustrated, this reality
The correction zone 131 for applying the correction module 13 of example further includes one second reflecting optics 1312 without correcting pattern, the second reflection
Eyeglass 1312 is arranged between the first reflecting optics 1311 and extinction eyeglass 1321.When the first light S1 penetrates splitting module 10 simultaneously
Projected from the 3rd side 1013 of splitting module 10 to correction module 13.User allows switching window 133 to correspond to the second of correction zone 131
Reflecting optics 1312, the second reflecting optics 1312 reflect the first light S1 to splitting module 10, then the light splitting by splitting module 10
Module 10 reflexes to optical detection module 12, and optical detection module 12 receives the first light S1 and produces another correction chart picture, so
Flat field correction is carried out to optical detection module 12 according to correction chart picture.For example, when the center brightness of correction chart picture is compared with its week
Enclose brightness it is high when, optical detection module 12 is adjusted using an adjustment programme, make correction chart picture surrounding brightness and its
Center brightness is identical.
Referring to Fig. 4, its schematic diagram for the optical detection apparatus of the third embodiment of the present invention.When light source module group 11 carries
For a light S, light S enters from the first side 1011 of splitting module 10, and splitting module 10 allows the light S of part to penetrate, in addition
The partial light S modules 10 that are split reflect, and the light S for penetrating the part of splitting module 10 is the first light S1, and be split mould
The light S of the part of the reflection of group 10 is the second light S2.Right first light S1 penetrates splitting module 10 and from splitting module 10
4th side 1014 is projected to determinand 2, to be detected to determinand 2；Second light S2 be split module 10 reflect and from point
Project to correction module 13, to be corrected to optical detection module 12 3rd side 1013 of optical mode group 10.In addition, work as light S
Change and entered by the second side 1012, splitting module 10 allows a light S part to penetrate and be projected from the 3rd side 1013, and reflection light
S another part simultaneously projects from the 4th side 1014.Be in different from first embodiment of 3rd embodiment enters in light S to be divided
Transillumination determinand 2 after module 10, it is other then identical with first embodiment, repeated no more in this.
In summary, the present invention provides a kind of optical detection apparatus with on-line correction function, optical detection apparatus
The non-surface for being arranged at determinand of module is corrected, therefore correction optical detection module is not influenceed by the configuration of surface of determinand
Precision.In addition module is corrected with determinand to be provided separately, and after the completion of the correction of optical detection module, is not necessary to remove correction module,
The detection of determinand can be carried out immediately, reduce the time for resetting and removing correction module.Correction module has different kenels
Reflecting optics, with to correction optical detection module carry out to bit correction and flat field correction.
Above is only presently preferred embodiments of the present invention, is not used for limiting the scope that the present invention is implemented, Fan Yibenfa
The equivalent changes and modifications carried out by shape, construction, feature and spirit described in bright right, all should be included in the present invention
Right in.
Claims (10)
1. a kind of optical detection apparatus with on-line correction function, it is characterised in that it is included：
One splitting module, will be respectively by the light splitting mould after light enters the splitting module by the first side of the splitting module
Group the 3rd side and the 4th side project, after the light enters the splitting module by the second side of the splitting module, will respectively by
3rd side of the splitting module and the 4th side are projected；
One light source module group, it is arranged at the first side of the splitting module, and the light source module group is providing the light；
One optical detection module, it is arranged at the second side of the splitting module, the optical detection module to detect a determinand,
The determinand is arranged at the 4th side of the splitting module；And
One correction module, it is arranged at the 3rd side of the splitting module, and the correction module is to provide a correcting pattern, with correction
The optical detection module.
2. optical detection apparatus as claimed in claim 1, it is characterised in that wherein the correction module further includes：
One correction zone, it is providing the correcting pattern；
One extinction area, it is absorbing the light；And
One switching window, it is selecting the correction zone or the extinction area.
3. optical detection apparatus as claimed in claim 2, it is characterised in that when wherein the optical detection module is corrected,
The switching window selects the correction zone.
4. optical detection apparatus as claimed in claim 2, it is characterised in that when wherein the optical detection module is detected,
The switching window selects the extinction area.
5. optical detection apparatus as claimed in claim 2, it is characterised in that wherein the correction zone includes a reflecting optics, should
Reflecting optics are to optical detection module progress flat field correction.
6. optical detection apparatus as claimed in claim 1, it is characterised in that wherein the optical detection module is visited for one-dimensional scanning
Head or two-dimentional capture probe.
7. optical detection apparatus as claimed in claim 1, it is characterised in that further include：
One masking module, it is arranged between the 4th side of the splitting module and the determinand, and the masking module is examined in the optics
Module is surveyed when being corrected to cover the determinand.
8. optical detection apparatus as claimed in claim 1, it is characterised in that wherein the splitting module be a spectroscope or one by
The regular cube that two triangular prisms diagonally bind.
9. optical detection apparatus as claimed in claim 1, it is characterised in that wherein when the light by the splitting module first
After side enters the splitting module, a part for the light penetrates the splitting module and projected by the 3rd side of the splitting module, and
Another part of the light is reflected and projected by the 4th side of the splitting module by the splitting module, when the light is by the light splitting mould
After second side of group enters the splitting module, a part for the light penetrates the splitting module and by the 4th side of the splitting module
Project, and another part of the light is reflected by the splitting module and is projected by the 3rd side of the splitting module.
10. optical detection apparatus as claimed in claim 1, it is characterised in that wherein when the light by the splitting module
After side enters the splitting module, a part for the light penetrates the splitting module and projected by the 4th side of the splitting module,
And another part of the light is reflected by the splitting module and is projected by the 3rd side of the splitting module, when the light is by the light splitting
After second side of module enters the splitting module, a part for the light penetrates the splitting module and by the 3rd of the splitting module the
Side is projected, and another part of the light is reflected by the splitting module and is projected by the 4th side of the splitting module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201410007312.5A CN104764477B (en) | 2014-01-08 | 2014-01-08 | Optical detection apparatus with on-line correction function |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410007312.5A CN104764477B (en) | 2014-01-08 | 2014-01-08 | Optical detection apparatus with on-line correction function |
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| CN104764477A CN104764477A (en) | 2015-07-08 |
| CN104764477B true CN104764477B (en) | 2018-01-12 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4652931A (en) * | 1983-12-29 | 1987-03-24 | Asahi Kogaku Kogyo Kabushiki Kaisha | Optical system for TTL automatic focusing video camera |
| CN101349579A (en) * | 2007-07-20 | 2009-01-21 | 上海宏力半导体制造有限公司 | Correcting device of measuring system |
| CN101799318A (en) * | 2010-03-22 | 2010-08-11 | 电子科技大学 | Laser homodyne vibration detection optical system and method for processing signals by using same |
| CN102879109A (en) * | 2012-09-12 | 2013-01-16 | 中国科学院西安光学精密机械研究所 | Dynamic wave-front testing device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3023771B2 (en) * | 1997-07-15 | 2000-03-21 | 工業技術院長 | Vibration sensor calibration device |
-
2014
- 2014-01-08 CN CN201410007312.5A patent/CN104764477B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4652931A (en) * | 1983-12-29 | 1987-03-24 | Asahi Kogaku Kogyo Kabushiki Kaisha | Optical system for TTL automatic focusing video camera |
| CN101349579A (en) * | 2007-07-20 | 2009-01-21 | 上海宏力半导体制造有限公司 | Correcting device of measuring system |
| CN101799318A (en) * | 2010-03-22 | 2010-08-11 | 电子科技大学 | Laser homodyne vibration detection optical system and method for processing signals by using same |
| CN102879109A (en) * | 2012-09-12 | 2013-01-16 | 中国科学院西安光学精密机械研究所 | Dynamic wave-front testing device |
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