CN104753390B - Ultrasonic motor - Google Patents

Ultrasonic motor Download PDF

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Publication number
CN104753390B
CN104753390B CN201410826655.4A CN201410826655A CN104753390B CN 104753390 B CN104753390 B CN 104753390B CN 201410826655 A CN201410826655 A CN 201410826655A CN 104753390 B CN104753390 B CN 104753390B
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CN
China
Prior art keywords
oscillator
component
rolling member
supporting member
described matrix
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201410826655.4A
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Chinese (zh)
Other versions
CN104753390A (en
Inventor
山本晴滋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN104753390A publication Critical patent/CN104753390A/en
Application granted granted Critical
Publication of CN104753390B publication Critical patent/CN104753390B/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/08Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005Mechanical details, e.g. housings
    • H02N2/0055Supports for driving or driven bodies; Means for pressing driving body against driven body
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/88Mounts; Supports; Enclosures; Casings
    • H10N30/886Mechanical prestressing means, e.g. springs

Abstract

A kind of ultrasonic motor is disclosed, it is vibrated with oscillator, the oscillator by putting on the high-frequency driving voltage of the oscillator;Sliding component, the sliding component and the oscillator CONTACT WITH FRICTION;Pressurization part, the pressurization part are used to the oscillator being depressed into the sliding component;Matrix, the oscillator are fixed to described matrix;Oscillator supporting member, the oscillator supporting member keep described matrix;And connecting portion, the connecting portion is used to the oscillator being connected with the oscillator supporting member, the oscillator and the sliding component are relatively moved by vibrating, wherein, the connecting portion includes rolling member and force application component, the rolling member makes described matrix freely be moved to the oscillator supporting member on the compression aspect of the pressurization part, and the force application component exerts a force the rolling member on the direction vertical with the compression aspect of the pressurization part.

Description

Ultrasonic motor
Technical field
The present invention relates to the motor applied to Optical devices etc..More particularly, it relates to applied to Optical devices etc. Ultrasonic motor.
Background technology
Before this, in such ultrasonic motor, by applying the oscillator of high frequency voltage periodic vibration under stress With contact with sliding members to drive the sliding component.
However, in the description of Japanese Unexamined Patent Publication 2001-292584 publications in the prior art, set spring member With multiple sheet rubbers and there is vibration nodal point (node) portion for supporting the vibrating body oscillator of the present invention (correspond to) and right Vibrating body pressurizes to produce the function of frictional force between vibrating body and track (sliding component for corresponding to the present invention), also, For this purpose, spring member by each sheet rubber between fixed plate and vibrating body.Thus, for example, when due to vibration, Drop when being applied in impact force, the relative position of fixed plate and oscillating plate can poorly deviate, this, which causes, correctly to control The problem of position of track.
In order to solve this problem, the purpose of the present invention is do not cause the situation of any flutter (rattle) in the direction of movement Lower holding oscillator, thus improves the feed accuracy of oscillator supporting member.
The content of the invention
To achieve these goals, according to the present invention, there is provided a kind of motor, it is with oscillator, and the oscillator is by applying It is added on the high-frequency driving voltage vibration of the oscillator;Sliding component, the sliding component and the oscillator CONTACT WITH FRICTION;Pressurization part, The pressurization part is used to the oscillator being depressed into the sliding component;Matrix, the oscillator are fixed to described matrix;Oscillator supports Component, the oscillator supporting member keep described matrix;And connecting portion, the connecting portion are used to shake the oscillator with described Sub- supporting member connection, the oscillator and the sliding component are relatively moved by vibrating, wherein, the connecting portion includes rolling Component and force application component, the rolling member make described matrix freely to the oscillator on the compression aspect of the pressurization part Supporting member moves, and the force application component applies the rolling member on the direction vertical with the compression aspect of the pressurization part Power.
According to the present invention, the matrix and oscillator supporting member that oscillator is fixed to have pliability on compression aspect (flexibility) kept relatively in the case of no any flutter in the direction of movement, not draw in the direction of movement Oscillator is kept in the case of playing any flutter, so that the feed accuracy of oscillator supporting member can be improved.
From will be apparent referring to the drawings to the explanation of illustrative embodiments, other features of the invention.
Brief description of the drawings
Fig. 1 is the sectional view of the major part of ultrasonic motor according to the embodiment of the present invention.
Fig. 2 is the section in the direction of movement of the major part of ultrasonic motor according to the embodiment of the present invention Figure.
Fig. 3 is to show that ultrasonic motor according to the embodiment of the present invention is combined (incorporate) in optics The sectional view of the major part of state in the lens barrel portion of device.
Embodiment
Now with reference to the attached drawing preferred embodiment that the present invention will be described in detail.In figure, identical part is with identical Reference numeral represents.
Fig. 1 is that the sectional view of the major part for the ultrasonic motor for showing embodiments of the present invention (shows driving Vertical cross-section on direction), Fig. 2 is the major part for the ultrasonic motor for showing embodiments of the present invention in movement side Upward sectional view.In addition, it will be based on describing this implementation as exemplary directly type of action (linear-type) ultrasonic motor Mode, but present embodiment applies also for the other types of rotary type etc..
Ultrasonic motor 200 includes oscillating plate 101.Oscillating plate 101 includes part 101a to be joined.The part to be joined 101a is fixed on the engagement protuberance 102a of matrix 102 by bonding etc. (referring to Fig. 2).Matrix 102 be made of square frame and It is made of resin or metal, the thickness of thickness ratio oscillating plate 101 is big.
In addition, piezoelectric element 103 is fixed in oscillating plate 101 by binding agent etc..Oscillating plate 101 is set to work as high-frequency electrical Oscillating plate 101 causes resonance on long side direction and short side direction when pressure is applied in piezoelectric element 103.It should be noted that Oscillating plate 101 and piezoelectric element 103 constitute oscillator 100.Oscillator 100 is configured to when high-frequency driving voltage is applied in oscillator Cause ultrasonic activation when 100.
As a result, in fig. 2, be formed at the pressure contact portion 101b of oscillating plate 101 top cause it is as shown in Figure 2 this Elliptic motion.When the frequency or phase place change of the high frequency voltage to be applied to piezoelectric element 103, rotation direction or Elliptical Ratio Rate can suitably change so as to produce desired movement.As a result, oscillating plate and counter pair, the sliding part i.e. as sliding component 104 CONTACT WITH FRICTIONs, thus produce driving force so that the sliding part relatively moves, so that oscillator 100 itself can be along as shifting The optical axis (the vertical paper direction in Fig. 1, i.e. left and right directions in Fig. 2) in dynamic direction is driven.Will by fastener (screw) Sliding part 104 is fixed on unit supports component 116 described later.
In fig. 1 and 2, oscillator supporting member 105 is connected with matrix 102, and oscillator 100 is fixed by following connecting component In matrix 102.In fig. 2, two rollers 106 as rolling member are arranged in via the pressure contact portion 101b of oscillating plate 101 Both sides.That is, the cylindrical roll 106 as rolling member be arranged in oscillator 100 front and rear in the direction of movement this two A position.
As shown in Fig. 2, oscillator supporting member 105 has two extension 105a for being formed as extending downwardly, roller 106 and plate Spring 107 is combined in the space formed by the connecting portion 102b of extension 105a and matrix 102.As with predetermined elasticity The leaf spring 107 of force application component abuts the connecting portion 102b of matrix 102, roller 106 be sandwiched between leaf spring 107 and extension 105a and It can be moved on compression aspect.
A roller 106 in the right space of leaf spring 107 and Fig. 2 is combined.Pass through the leaf spring 107 under assembled state Applying power, oscillator supporting member 105 is subject to applying on left-hand in fig. 2 via (right side in fig. 2) roller 106 Power, matrix 102 are subject to the force in dextrad in fig. 2.
At this time, along direction B (see Fig. 2) applying power vertical with the compression aspect A of oscillator as described later.As a result, with Above-mentioned identical mode, another roller 106 of left side and combination in another interblock space in Fig. 2 are also sandwiched in work Between another extension 105a of the connection projection of oscillator supporting member 105 and another connecting portion 102b of matrix 102.
According to above-mentioned construction, following connecting component can be realized:Wherein, by the operation of roller in moving direction (in Fig. 2 Left and right directions) on do not cause any flutter and hardly on compression aspect A described later (above-below direction in Fig. 2) produce cunning Dynamic resistance.
At this time, the applying power of leaf spring 107 is set to be greater than in oscillator supporting member 105 and portion to be driven described later (ginseng Accelerate and slow down caused by 305 and the operation beginning and stopping 306) seen in Fig. 3 caused inertia force.Set by this Fixed, matrix 102, oscillator 100 and oscillator supporting member 105 can not produce since driving period inertia force is led in the direction of movement Drive control is stably realized in the case of the relative displacement of cause.
As will be described later, elastic component 109 is clipped between increased pressure board and piezoelectric element 103 by increased pressure board 108, and by structure Cause that the piezoelectric element 103 is pressurizeed and kept using pliability.
Pressing spring 110 is configured to pressing spring list between spring retaining member 111 and spring bottom plate 112 Member.At this time, the large-diameter portion 111a loose fits on the top of spring retaining member 111 are arranged in the fitting portion of spring bottom plate 112 112a, therefore location mode can be retained as resisting the spring force of pressing spring 110 after assembling.
In the outer diameter part of spring bottom plate 112, engaging protrusion 112b is circumferentially formed in some.In this combination shape Under state, positions of the engaging protrusion 112b on compression aspect A is formed from the snap-fit portion 105c limits of oscillator supporting member 105 It is fixed.At this time, the pressurized part 111b for being arranged in the top of spring retaining member 111 produces plus-pressure, with applying by spring 110 Oscillator 100 is pressed on sliding part 104 by reinforcing via increased pressure board 108 and elastic component 109.Therefore, oscillator 100 can be with slip 104 CONTACT WITH FRICTION of part.It should be noted that pressing spring 110, spring retaining member 111 and spring bottom plate 112 constitute pressurization part 120。
The movable panel 113 for forming a part for guiding elements is fixed on oscillator supporting member 105 by bonding or being spirally connected Abutting part 105b.In movable panel 113, the groove portion 113b with V-arrangement section is formed, ball 114 is assemblied in groove portion 113b In with along optical axis direction guide oscillator supporting member 105 (referring to Fig. 1).Cover board 115 is fixed on unit by known screw Supporting member 116.
Cover board 115 also forms a part for guide sections, and ball 114 is by with V-arrangement section and being arranged in face of removable The groove portion 115a of the position of the groove portion 113b of plate 113 is kept.Therefore, it is possible to support oscillator supporting member 105 so that the component energy Direction (the vertical paper direction in Fig. 1, i.e. paper left and right directions in Fig. 2) is enough moved along to move back and forth.According to above-mentioned structure Make, realize the direct acting type ultrasonic motor of embodiments of the present invention.
The groove portion 113b that ball 114 is clipped in the middle and the respective sections of groove portion 115a with oscillator supporting member 105 It is V-shaped on the vertical direction of driving direction.However, groove portion 113b and groove portion 115a are formed as other shapes, so that each Section can be formed U-shaped.
Fig. 3 is the sectional view of major part, is shown when the ultrasonic motor 200 of embodiments of the present invention is combined in Situation during the lens barrel portion 350 of Optical devices.First lens holding member 301 keeps the first lens 302, and the 3rd lens keep structure Part 303 keeps the 3rd lens 304.Cylindrical portion 303a, and the cylindrical portion are arranged in the peripheral part of the 3rd lens holding member 303 The first lens holding member 301 is anchored on by unshowned screw in front end 303b.
In a part for the outer diameter part of cylindrical portion 303a, the unit receiving division 303c of arrangement mounting ultrasonic motor 200, And unit receiving division 303c is removably secured by screw.In addition, in the inside diameter of cylindrical portion 303a, arrangement is kept Second lens holding member 305 of the second lens 306.Second lens 306 pass through according to this as the condenser lens of Optical devices The ultrasonic motor 200 of the embodiment of invention is mobile along optical axis X (see Fig. 3).
At this time, the second lens holding member 305 is arranged such that guiding bar 307 opposite can fit slidably in bearing 305a, therefore the second lens 306 can be moved along optical axis X.Second lens holding member 305 is for example by being arranged in oscillator branch Support engagement and the oscillator of the engaging pin 105d and coupling recess 305b being arranged in the second lens holding member 305 of component 105 Supporting member 105 connects.However, it is possible to it is connected by known rack with engaging pin to carry out this.
As described above, oscillator supporting member 105 is connected via roller 106 and leaf spring 107 with matrix 102, oscillator 100 is fixed on Matrix 102.Therefore, oscillator 100 and matrix 102 can not lose substantially it is stressed in the case of by rolling operation in pressurization part Oscillator supporting member 105 is held on 120 compression aspect A.In addition, kept in the direction of movement by the operation of leaf spring 107 Oscillator 100 and matrix 102 are without causing any flutter.As a result, as Optical devices condenser lens the second lens 306 along The direction of optical axis X is accurately driven and is controlled.
Ultrasonic motor according to the embodiment of the present invention described in detail above and the optics dress comprising the motor The specific example for the barrel portion put, but the invention is not restricted to the above embodiment, in the purport without departing substantially from claim In the case of can use any construction.In the present embodiment, leaf spring 107 is used as the force application component of the force of two pairs of rollers 106, but can Using other force application components outside leaf spring, to prevent flutter from producing required applying power as long as the component can be given.
In addition, not to mention, construction of the invention can be applied not only to the ultrasonic motor described in the above embodiment, It can also be applied to the motor of vibration for allowing oscillator to carry out different from ultrasonic activation.
The present invention is used for the drive control for accurately performing Optical devices.
Although illustrate the present invention with reference to illustrative embodiments, it should be appreciated that, the invention is not restricted to disclosed Illustrative embodiments.The scope of claims should meet broadest explanation, to include all such modifications, equivalent Structure and function.

Claims (7)

1. a kind of motor, it is vibrated with oscillator, the oscillator by putting on the high-frequency driving voltage of the oscillator;Slide structure Part, the sliding component and the oscillator CONTACT WITH FRICTION;Pressurization part, the pressurization part are used to the oscillator being depressed into the slip Component;Matrix, the oscillator are fixed to described matrix;Oscillator supporting member, the oscillator supporting member keep described matrix;With And connecting portion, the connecting portion are used to described matrix being connected with the oscillator supporting member, the oscillator and the slip structure Part is relatively moved by vibrating,
It is characterized in that, the connecting portion includes the first rolling member, the second rolling member and force application component, described first rolls Component and second rolling member make described matrix freely be supported to the oscillator on the compression aspect of the pressurization part Component moves, the force application component on the direction vertical with the compression aspect of the pressurization part to first rolling member and One of described second rolling member exerts a force,
The oscillator mobile by the vibration-type linear,
First rolling member and second rolling member are arranged between described matrix and the oscillator supporting member At position,
The oscillator be upwardly arranged in the relative movement side of the oscillator and the sliding component first rolling member and At position between second rolling member.
2. motor according to claim 1, wherein, the connecting portion is included on the compression aspect from the oscillator branch Support the extension of component extension, and first rolling member and second rolling member be arranged in the extension and In the space formed between described matrix.
3. motor according to claim 1, wherein, the applying power of the force application component is set to be greater than when the oscillator The value of inertia force caused by oscillator supporting member when supporting member operation starts and stops caused acceleration and slows down.
4. motor according to claim 1, wherein, the force application component abuts described matrix, and described first rolls One of component and second rolling member are sandwiched in the force application component and on the compression aspect from the oscillator Between the extension of supporting member extension.
5. motor according to claim 1, wherein, the force application component is leaf spring.
6. the motor according to any one of Claims 1-4, wherein, first rolling member and second rolling Dynamic component is cylindrical roll.
7. motor according to claim 1, which is ultrasonic motor, wherein, the oscillator is shaken by putting on this The high-frequency driving voltage of son carries out ultrasonic activation.
CN201410826655.4A 2013-12-27 2014-12-25 Ultrasonic motor Active CN104753390B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013272337A JP5969976B2 (en) 2013-12-27 2013-12-27 Vibration wave motor
JP2013-272337 2013-12-27

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CN104753390A CN104753390A (en) 2015-07-01
CN104753390B true CN104753390B (en) 2018-04-27

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US (1) US9827593B2 (en)
EP (1) EP2889997B1 (en)
JP (1) JP5969976B2 (en)
CN (1) CN104753390B (en)
RU (1) RU2596177C2 (en)

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Also Published As

Publication number Publication date
RU2596177C2 (en) 2016-08-27
US9827593B2 (en) 2017-11-28
US20150183001A1 (en) 2015-07-02
JP5969976B2 (en) 2016-08-17
CN104753390A (en) 2015-07-01
JP2015126692A (en) 2015-07-06
EP2889997A1 (en) 2015-07-01
EP2889997B1 (en) 2018-11-14
RU2014153648A (en) 2016-07-20

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