CN104753390B - Ultrasonic motor - Google Patents
Ultrasonic motor Download PDFInfo
- Publication number
- CN104753390B CN104753390B CN201410826655.4A CN201410826655A CN104753390B CN 104753390 B CN104753390 B CN 104753390B CN 201410826655 A CN201410826655 A CN 201410826655A CN 104753390 B CN104753390 B CN 104753390B
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- China
- Prior art keywords
- oscillator
- component
- rolling member
- supporting member
- described matrix
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000011159 matrix material Substances 0.000 claims abstract description 30
- 238000005096 rolling process Methods 0.000 claims abstract description 23
- 230000006835 compression Effects 0.000 claims abstract description 14
- 238000007906 compression Methods 0.000 claims abstract description 14
- 230000000994 depressogenic effect Effects 0.000 claims abstract description 3
- 230000004913 activation Effects 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 11
- CNQCVBJFEGMYDW-UHFFFAOYSA-N lawrencium atom Chemical compound [Lr] CNQCVBJFEGMYDW-UHFFFAOYSA-N 0.000 description 6
- 238000010276 construction Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000005060 rubber Substances 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
- G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/005—Mechanical details, e.g. housings
- H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/886—Mechanical prestressing means, e.g. springs
Abstract
A kind of ultrasonic motor is disclosed, it is vibrated with oscillator, the oscillator by putting on the high-frequency driving voltage of the oscillator;Sliding component, the sliding component and the oscillator CONTACT WITH FRICTION;Pressurization part, the pressurization part are used to the oscillator being depressed into the sliding component;Matrix, the oscillator are fixed to described matrix;Oscillator supporting member, the oscillator supporting member keep described matrix;And connecting portion, the connecting portion is used to the oscillator being connected with the oscillator supporting member, the oscillator and the sliding component are relatively moved by vibrating, wherein, the connecting portion includes rolling member and force application component, the rolling member makes described matrix freely be moved to the oscillator supporting member on the compression aspect of the pressurization part, and the force application component exerts a force the rolling member on the direction vertical with the compression aspect of the pressurization part.
Description
Technical field
The present invention relates to the motor applied to Optical devices etc..More particularly, it relates to applied to Optical devices etc.
Ultrasonic motor.
Background technology
Before this, in such ultrasonic motor, by applying the oscillator of high frequency voltage periodic vibration under stress
With contact with sliding members to drive the sliding component.
However, in the description of Japanese Unexamined Patent Publication 2001-292584 publications in the prior art, set spring member
With multiple sheet rubbers and there is vibration nodal point (node) portion for supporting the vibrating body oscillator of the present invention (correspond to) and right
Vibrating body pressurizes to produce the function of frictional force between vibrating body and track (sliding component for corresponding to the present invention), also,
For this purpose, spring member by each sheet rubber between fixed plate and vibrating body.Thus, for example, when due to vibration,
Drop when being applied in impact force, the relative position of fixed plate and oscillating plate can poorly deviate, this, which causes, correctly to control
The problem of position of track.
In order to solve this problem, the purpose of the present invention is do not cause the situation of any flutter (rattle) in the direction of movement
Lower holding oscillator, thus improves the feed accuracy of oscillator supporting member.
The content of the invention
To achieve these goals, according to the present invention, there is provided a kind of motor, it is with oscillator, and the oscillator is by applying
It is added on the high-frequency driving voltage vibration of the oscillator;Sliding component, the sliding component and the oscillator CONTACT WITH FRICTION;Pressurization part,
The pressurization part is used to the oscillator being depressed into the sliding component;Matrix, the oscillator are fixed to described matrix;Oscillator supports
Component, the oscillator supporting member keep described matrix;And connecting portion, the connecting portion are used to shake the oscillator with described
Sub- supporting member connection, the oscillator and the sliding component are relatively moved by vibrating, wherein, the connecting portion includes rolling
Component and force application component, the rolling member make described matrix freely to the oscillator on the compression aspect of the pressurization part
Supporting member moves, and the force application component applies the rolling member on the direction vertical with the compression aspect of the pressurization part
Power.
According to the present invention, the matrix and oscillator supporting member that oscillator is fixed to have pliability on compression aspect
(flexibility) kept relatively in the case of no any flutter in the direction of movement, not draw in the direction of movement
Oscillator is kept in the case of playing any flutter, so that the feed accuracy of oscillator supporting member can be improved.
From will be apparent referring to the drawings to the explanation of illustrative embodiments, other features of the invention.
Brief description of the drawings
Fig. 1 is the sectional view of the major part of ultrasonic motor according to the embodiment of the present invention.
Fig. 2 is the section in the direction of movement of the major part of ultrasonic motor according to the embodiment of the present invention
Figure.
Fig. 3 is to show that ultrasonic motor according to the embodiment of the present invention is combined (incorporate) in optics
The sectional view of the major part of state in the lens barrel portion of device.
Embodiment
Now with reference to the attached drawing preferred embodiment that the present invention will be described in detail.In figure, identical part is with identical
Reference numeral represents.
Fig. 1 is that the sectional view of the major part for the ultrasonic motor for showing embodiments of the present invention (shows driving
Vertical cross-section on direction), Fig. 2 is the major part for the ultrasonic motor for showing embodiments of the present invention in movement side
Upward sectional view.In addition, it will be based on describing this implementation as exemplary directly type of action (linear-type) ultrasonic motor
Mode, but present embodiment applies also for the other types of rotary type etc..
Ultrasonic motor 200 includes oscillating plate 101.Oscillating plate 101 includes part 101a to be joined.The part to be joined
101a is fixed on the engagement protuberance 102a of matrix 102 by bonding etc. (referring to Fig. 2).Matrix 102 be made of square frame and
It is made of resin or metal, the thickness of thickness ratio oscillating plate 101 is big.
In addition, piezoelectric element 103 is fixed in oscillating plate 101 by binding agent etc..Oscillating plate 101 is set to work as high-frequency electrical
Oscillating plate 101 causes resonance on long side direction and short side direction when pressure is applied in piezoelectric element 103.It should be noted that
Oscillating plate 101 and piezoelectric element 103 constitute oscillator 100.Oscillator 100 is configured to when high-frequency driving voltage is applied in oscillator
Cause ultrasonic activation when 100.
As a result, in fig. 2, be formed at the pressure contact portion 101b of oscillating plate 101 top cause it is as shown in Figure 2 this
Elliptic motion.When the frequency or phase place change of the high frequency voltage to be applied to piezoelectric element 103, rotation direction or Elliptical Ratio
Rate can suitably change so as to produce desired movement.As a result, oscillating plate and counter pair, the sliding part i.e. as sliding component
104 CONTACT WITH FRICTIONs, thus produce driving force so that the sliding part relatively moves, so that oscillator 100 itself can be along as shifting
The optical axis (the vertical paper direction in Fig. 1, i.e. left and right directions in Fig. 2) in dynamic direction is driven.Will by fastener (screw)
Sliding part 104 is fixed on unit supports component 116 described later.
In fig. 1 and 2, oscillator supporting member 105 is connected with matrix 102, and oscillator 100 is fixed by following connecting component
In matrix 102.In fig. 2, two rollers 106 as rolling member are arranged in via the pressure contact portion 101b of oscillating plate 101
Both sides.That is, the cylindrical roll 106 as rolling member be arranged in oscillator 100 front and rear in the direction of movement this two
A position.
As shown in Fig. 2, oscillator supporting member 105 has two extension 105a for being formed as extending downwardly, roller 106 and plate
Spring 107 is combined in the space formed by the connecting portion 102b of extension 105a and matrix 102.As with predetermined elasticity
The leaf spring 107 of force application component abuts the connecting portion 102b of matrix 102, roller 106 be sandwiched between leaf spring 107 and extension 105a and
It can be moved on compression aspect.
A roller 106 in the right space of leaf spring 107 and Fig. 2 is combined.Pass through the leaf spring 107 under assembled state
Applying power, oscillator supporting member 105 is subject to applying on left-hand in fig. 2 via (right side in fig. 2) roller 106
Power, matrix 102 are subject to the force in dextrad in fig. 2.
At this time, along direction B (see Fig. 2) applying power vertical with the compression aspect A of oscillator as described later.As a result, with
Above-mentioned identical mode, another roller 106 of left side and combination in another interblock space in Fig. 2 are also sandwiched in work
Between another extension 105a of the connection projection of oscillator supporting member 105 and another connecting portion 102b of matrix 102.
According to above-mentioned construction, following connecting component can be realized:Wherein, by the operation of roller in moving direction (in Fig. 2
Left and right directions) on do not cause any flutter and hardly on compression aspect A described later (above-below direction in Fig. 2) produce cunning
Dynamic resistance.
At this time, the applying power of leaf spring 107 is set to be greater than in oscillator supporting member 105 and portion to be driven described later (ginseng
Accelerate and slow down caused by 305 and the operation beginning and stopping 306) seen in Fig. 3 caused inertia force.Set by this
Fixed, matrix 102, oscillator 100 and oscillator supporting member 105 can not produce since driving period inertia force is led in the direction of movement
Drive control is stably realized in the case of the relative displacement of cause.
As will be described later, elastic component 109 is clipped between increased pressure board and piezoelectric element 103 by increased pressure board 108, and by structure
Cause that the piezoelectric element 103 is pressurizeed and kept using pliability.
Pressing spring 110 is configured to pressing spring list between spring retaining member 111 and spring bottom plate 112
Member.At this time, the large-diameter portion 111a loose fits on the top of spring retaining member 111 are arranged in the fitting portion of spring bottom plate 112
112a, therefore location mode can be retained as resisting the spring force of pressing spring 110 after assembling.
In the outer diameter part of spring bottom plate 112, engaging protrusion 112b is circumferentially formed in some.In this combination shape
Under state, positions of the engaging protrusion 112b on compression aspect A is formed from the snap-fit portion 105c limits of oscillator supporting member 105
It is fixed.At this time, the pressurized part 111b for being arranged in the top of spring retaining member 111 produces plus-pressure, with applying by spring 110
Oscillator 100 is pressed on sliding part 104 by reinforcing via increased pressure board 108 and elastic component 109.Therefore, oscillator 100 can be with slip
104 CONTACT WITH FRICTION of part.It should be noted that pressing spring 110, spring retaining member 111 and spring bottom plate 112 constitute pressurization part
120。
The movable panel 113 for forming a part for guiding elements is fixed on oscillator supporting member 105 by bonding or being spirally connected
Abutting part 105b.In movable panel 113, the groove portion 113b with V-arrangement section is formed, ball 114 is assemblied in groove portion 113b
In with along optical axis direction guide oscillator supporting member 105 (referring to Fig. 1).Cover board 115 is fixed on unit by known screw
Supporting member 116.
Cover board 115 also forms a part for guide sections, and ball 114 is by with V-arrangement section and being arranged in face of removable
The groove portion 115a of the position of the groove portion 113b of plate 113 is kept.Therefore, it is possible to support oscillator supporting member 105 so that the component energy
Direction (the vertical paper direction in Fig. 1, i.e. paper left and right directions in Fig. 2) is enough moved along to move back and forth.According to above-mentioned structure
Make, realize the direct acting type ultrasonic motor of embodiments of the present invention.
The groove portion 113b that ball 114 is clipped in the middle and the respective sections of groove portion 115a with oscillator supporting member 105
It is V-shaped on the vertical direction of driving direction.However, groove portion 113b and groove portion 115a are formed as other shapes, so that each
Section can be formed U-shaped.
Fig. 3 is the sectional view of major part, is shown when the ultrasonic motor 200 of embodiments of the present invention is combined in
Situation during the lens barrel portion 350 of Optical devices.First lens holding member 301 keeps the first lens 302, and the 3rd lens keep structure
Part 303 keeps the 3rd lens 304.Cylindrical portion 303a, and the cylindrical portion are arranged in the peripheral part of the 3rd lens holding member 303
The first lens holding member 301 is anchored on by unshowned screw in front end 303b.
In a part for the outer diameter part of cylindrical portion 303a, the unit receiving division 303c of arrangement mounting ultrasonic motor 200,
And unit receiving division 303c is removably secured by screw.In addition, in the inside diameter of cylindrical portion 303a, arrangement is kept
Second lens holding member 305 of the second lens 306.Second lens 306 pass through according to this as the condenser lens of Optical devices
The ultrasonic motor 200 of the embodiment of invention is mobile along optical axis X (see Fig. 3).
At this time, the second lens holding member 305 is arranged such that guiding bar 307 opposite can fit slidably in bearing
305a, therefore the second lens 306 can be moved along optical axis X.Second lens holding member 305 is for example by being arranged in oscillator branch
Support engagement and the oscillator of the engaging pin 105d and coupling recess 305b being arranged in the second lens holding member 305 of component 105
Supporting member 105 connects.However, it is possible to it is connected by known rack with engaging pin to carry out this.
As described above, oscillator supporting member 105 is connected via roller 106 and leaf spring 107 with matrix 102, oscillator 100 is fixed on
Matrix 102.Therefore, oscillator 100 and matrix 102 can not lose substantially it is stressed in the case of by rolling operation in pressurization part
Oscillator supporting member 105 is held on 120 compression aspect A.In addition, kept in the direction of movement by the operation of leaf spring 107
Oscillator 100 and matrix 102 are without causing any flutter.As a result, as Optical devices condenser lens the second lens 306 along
The direction of optical axis X is accurately driven and is controlled.
Ultrasonic motor according to the embodiment of the present invention described in detail above and the optics dress comprising the motor
The specific example for the barrel portion put, but the invention is not restricted to the above embodiment, in the purport without departing substantially from claim
In the case of can use any construction.In the present embodiment, leaf spring 107 is used as the force application component of the force of two pairs of rollers 106, but can
Using other force application components outside leaf spring, to prevent flutter from producing required applying power as long as the component can be given.
In addition, not to mention, construction of the invention can be applied not only to the ultrasonic motor described in the above embodiment,
It can also be applied to the motor of vibration for allowing oscillator to carry out different from ultrasonic activation.
The present invention is used for the drive control for accurately performing Optical devices.
Although illustrate the present invention with reference to illustrative embodiments, it should be appreciated that, the invention is not restricted to disclosed
Illustrative embodiments.The scope of claims should meet broadest explanation, to include all such modifications, equivalent
Structure and function.
Claims (7)
1. a kind of motor, it is vibrated with oscillator, the oscillator by putting on the high-frequency driving voltage of the oscillator;Slide structure
Part, the sliding component and the oscillator CONTACT WITH FRICTION;Pressurization part, the pressurization part are used to the oscillator being depressed into the slip
Component;Matrix, the oscillator are fixed to described matrix;Oscillator supporting member, the oscillator supporting member keep described matrix;With
And connecting portion, the connecting portion are used to described matrix being connected with the oscillator supporting member, the oscillator and the slip structure
Part is relatively moved by vibrating,
It is characterized in that, the connecting portion includes the first rolling member, the second rolling member and force application component, described first rolls
Component and second rolling member make described matrix freely be supported to the oscillator on the compression aspect of the pressurization part
Component moves, the force application component on the direction vertical with the compression aspect of the pressurization part to first rolling member and
One of described second rolling member exerts a force,
The oscillator mobile by the vibration-type linear,
First rolling member and second rolling member are arranged between described matrix and the oscillator supporting member
At position,
The oscillator be upwardly arranged in the relative movement side of the oscillator and the sliding component first rolling member and
At position between second rolling member.
2. motor according to claim 1, wherein, the connecting portion is included on the compression aspect from the oscillator branch
Support the extension of component extension, and first rolling member and second rolling member be arranged in the extension and
In the space formed between described matrix.
3. motor according to claim 1, wherein, the applying power of the force application component is set to be greater than when the oscillator
The value of inertia force caused by oscillator supporting member when supporting member operation starts and stops caused acceleration and slows down.
4. motor according to claim 1, wherein, the force application component abuts described matrix, and described first rolls
One of component and second rolling member are sandwiched in the force application component and on the compression aspect from the oscillator
Between the extension of supporting member extension.
5. motor according to claim 1, wherein, the force application component is leaf spring.
6. the motor according to any one of Claims 1-4, wherein, first rolling member and second rolling
Dynamic component is cylindrical roll.
7. motor according to claim 1, which is ultrasonic motor, wherein, the oscillator is shaken by putting on this
The high-frequency driving voltage of son carries out ultrasonic activation.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013272337A JP5969976B2 (en) | 2013-12-27 | 2013-12-27 | Vibration wave motor |
JP2013-272337 | 2013-12-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104753390A CN104753390A (en) | 2015-07-01 |
CN104753390B true CN104753390B (en) | 2018-04-27 |
Family
ID=51987041
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410826655.4A Active CN104753390B (en) | 2013-12-27 | 2014-12-25 | Ultrasonic motor |
Country Status (5)
Country | Link |
---|---|
US (1) | US9827593B2 (en) |
EP (1) | EP2889997B1 (en) |
JP (1) | JP5969976B2 (en) |
CN (1) | CN104753390B (en) |
RU (1) | RU2596177C2 (en) |
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JP6652794B2 (en) * | 2015-07-15 | 2020-02-26 | キヤノン株式会社 | Vibration wave motor |
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JP6808344B2 (en) * | 2016-04-28 | 2021-01-06 | キヤノン株式会社 | Electronic devices equipped with vibration wave motors and vibration wave motors, lens barrels, imaging devices |
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JP2013255959A (en) | 2012-06-12 | 2013-12-26 | Seiko Epson Corp | Moving mechanism, electronic component transport device, and electronic component inspection device |
EP2680334A1 (en) | 2012-06-28 | 2014-01-01 | Leica Geosystems AG | Piezo drive with piezo oscillator with a pivoting bearing |
JP2014220988A (en) * | 2013-04-12 | 2014-11-20 | キヤノン株式会社 | Vibration type driving device |
-
2013
- 2013-12-27 JP JP2013272337A patent/JP5969976B2/en not_active Expired - Fee Related
-
2014
- 2014-11-20 US US14/548,755 patent/US9827593B2/en active Active
- 2014-11-26 EP EP14194944.6A patent/EP2889997B1/en active Active
- 2014-12-25 CN CN201410826655.4A patent/CN104753390B/en active Active
- 2014-12-26 RU RU2014153648/28A patent/RU2596177C2/en active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107959397A (en) * | 2016-10-17 | 2018-04-24 | 佳能株式会社 | The vibrating motor and electronic equipment for preventing contact member from resonating |
CN107959397B (en) * | 2016-10-17 | 2020-11-06 | 佳能株式会社 | Vibration motor and electronic apparatus preventing resonance of contact member |
Also Published As
Publication number | Publication date |
---|---|
RU2596177C2 (en) | 2016-08-27 |
US9827593B2 (en) | 2017-11-28 |
US20150183001A1 (en) | 2015-07-02 |
JP5969976B2 (en) | 2016-08-17 |
CN104753390A (en) | 2015-07-01 |
JP2015126692A (en) | 2015-07-06 |
EP2889997A1 (en) | 2015-07-01 |
EP2889997B1 (en) | 2018-11-14 |
RU2014153648A (en) | 2016-07-20 |
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