JP2013179733A - Vibrating body holding mechanism, ultrasonic motor, and lens driving device - Google Patents

Vibrating body holding mechanism, ultrasonic motor, and lens driving device Download PDF

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JP2013179733A
JP2013179733A JP2012041146A JP2012041146A JP2013179733A JP 2013179733 A JP2013179733 A JP 2013179733A JP 2012041146 A JP2012041146 A JP 2012041146A JP 2012041146 A JP2012041146 A JP 2012041146A JP 2013179733 A JP2013179733 A JP 2013179733A
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vibrating body
wall surface
vibration
holding mechanism
rolling element
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Naoto Shiga
直人 志賀
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Tamron Co Ltd
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Tamron Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a vibrating body holding mechanism which properly holds a vibrating body while preventing the occurence of resonance due to vibrations of the vibrating body and generates stable vibrations to the vibrating body, and to provide an ultrasonic motor and a lens driving device.SOLUTION: A vibrating body holding mechanism includes a vibrating body and a holding member housing and holding the vibrating body so that the vibrating body may vibrate, and outputs a vibrating force of the vibrating body to the exterior. In the vibrating body holding mechanism, the vibrating body includes: a prismatic trunk part housed in the holding member; and a vibration output part provided at the one end side of the trunk part so as to protrude to the outer side of the holding member. The holding member includes: a vibrating body housing part formed by a wall surface placed along four side surfaces forming the trunk part of the vibrating body so as to be spaced a predetermined distance away from the four side surfaces and be arranged in parallel with the four side surfaces; and resonance prevention means located on an inner surface of the wall surface forming the vibrating body housing part and inhibiting vibrations of the vibrating body from being transmitted to the wall surface. In order to achieve the above object, the vibrating body holding mechanism is adopted.

Description

本件発明は、超音波モータの振動体を保持する振動体保持機構に関する。   The present invention relates to a vibrating body holding mechanism that holds a vibrating body of an ultrasonic motor.

超音波モータは、振動体に1つの固有の超音波振動又は異なる2つの固有の超音波振動を所定の周波数及びタイミングで発生させることにより、当該振動体の振動出力部において、楕円等の回転運動や往復運動を発生させ、この運動を振動出力部に接触させたロータ等の被駆動体に伝達して、当該被駆動体を駆動するものである。当該超音波モータは、低速高トルクを実現可能であり、静粛性に優れ、小型軽量化に適しているといった特徴がある。このため、カメラのオートフォーカス機能や、走査型電子顕微鏡を始めとし、精密な位置決めが要求される様々な可動機構の駆動源として広く用いられている。   The ultrasonic motor generates one specific ultrasonic vibration or two different specific ultrasonic vibrations at a predetermined frequency and timing in the vibration body, so that a rotational motion such as an ellipse is generated at the vibration output unit of the vibration body. Or a reciprocating motion is generated, and this motion is transmitted to a driven body such as a rotor brought into contact with the vibration output section to drive the driven body. The ultrasonic motor can realize low speed and high torque, is excellent in quietness, and is suitable for reduction in size and weight. For this reason, it is widely used as a drive source for various movable mechanisms that require precise positioning, such as a camera autofocus function and a scanning electron microscope.

超音波モータの振動体は、当該振動体の振動が超音波モータのベース部材等、周囲の部材に伝達し難いように、微振動が可能な状態で保持部材等により保持されている。当該振動体の保持方法として、例えば、本件出願人が提案した特許文献1に開示の振動モータユニットは、振動モータのベース部材とは別部材からなる振動子ホルダ(振動体ホルダ)で振動子(振動体)を保持する構成を採用している。具体的に、特許文献1では、溝状の収容部を有する枠体で構成された振動子ホルダの収容部内に、振動子を収容した状態で当該振動子が伸縮及び所望の方向に振動可能に保持したものである。   The vibrating body of the ultrasonic motor is held by a holding member or the like in a state where fine vibration is possible so that the vibration of the vibrating body is not easily transmitted to surrounding members such as the base member of the ultrasonic motor. As a method of holding the vibrating body, for example, the vibration motor unit disclosed in Patent Document 1 proposed by the present applicant is a vibrator holder (vibrating body holder) made of a member different from the base member of the vibration motor. The structure which holds a vibration body is employ | adopted. Specifically, in Patent Document 1, the vibrator can be expanded and contracted and vibrated in a desired direction in a state in which the vibrator is housed in the housing portion of the vibrator holder formed of a frame having a groove-shaped housing portion. It is held.

また、特許文献2には、振動体の上面及び振動体の節の位置近傍に支持部材を設け、当該支持部材により振動体を加圧することにより、圧電モータの振動体を保持する構成が開示されている。   Further, Patent Document 2 discloses a configuration in which a support member is provided in the vicinity of the top surface of the vibration body and the position of the node of the vibration body, and the vibration body of the piezoelectric motor is held by pressurizing the vibration body with the support member. ing.

特開2010−206907号公報JP 2010-206907 A 特許第4878378号公報Japanese Patent No. 4878378

しかしながら、特許文献1の構成では、部品精度のバラツキ等により、振動体ホルダの保持部と振動体との間に僅かな隙間が生じて、当該保持部にて振動体の振動ムラを抑制することができない場合がある。また、特許文献2の構成では、保持部材による加圧により振動体が圧迫されるため、振動体と当該振動体の下面に位置する摩擦部材との間の摩擦力が増大する。その結果、振動体に振動を加えた時の振動体と摩擦部材との間のすべりが抑制され、振動体の振動出力部における所望の運動に繋がる振動が阻害される恐れがある。更に、上述したように、振動体と摩擦部材との間のすべりが抑制されることで、当該振動体の振動が摩擦部材やベース部材等の周囲の部材に伝わりやすくなる。これにより、振動体の振動が摩擦部材やベース部材等の周囲の部材に増幅されて伝わり、これら摩擦部材やベース部材等が共振する恐れがある。   However, in the configuration of Patent Document 1, a slight gap is generated between the holding portion of the vibrating body holder and the vibrating body due to variations in component accuracy, and the vibration unevenness of the vibrating body is suppressed by the holding portion. May not be possible. Moreover, in the structure of patent document 2, since a vibrating body is compressed by the pressurization by a holding member, the frictional force between a vibrating body and the friction member located in the lower surface of the said vibrating body increases. As a result, when the vibration is applied to the vibrating body, the slip between the vibrating body and the friction member is suppressed, and there is a possibility that the vibration that leads to a desired motion in the vibration output portion of the vibrating body may be inhibited. Furthermore, as described above, the slip between the vibrating body and the friction member is suppressed, so that the vibration of the vibrating body is easily transmitted to surrounding members such as the friction member and the base member. As a result, the vibration of the vibrating body is amplified and transmitted to surrounding members such as the friction member and the base member, and these friction members and the base member may resonate.

そこで、本件発明は、振動体の振動による共振の発生を防止しながら、振動体を適切に保持して、振動体に安定した振動を発生可能な振動体保持機構、超音波モータ及びレンズ駆動装置を提供することを目的とする。   Accordingly, the present invention provides a vibrating body holding mechanism, an ultrasonic motor, and a lens driving device capable of appropriately holding the vibrating body and generating stable vibration in the vibrating body while preventing the occurrence of resonance due to vibration of the vibrating body. The purpose is to provide.

本発明者等は、鋭意研究を行った結果、以下の振動体保持機構、超音波モータ及びレンズ駆動装置を採用することで上記目的を達成するに到った。   As a result of intensive studies, the present inventors have achieved the above object by employing the following vibrating body holding mechanism, ultrasonic motor, and lens driving device.

本件発明に係る振動体保持機構は、振動体と、当該振動体を内部に振動自在に収容して保持する保持部材とからなる振動体保持機構であって、当該振動体は、保持部材に収容される四角柱状の胴体部と、この胴体部の一端側に設けられると共に、保持部材の外側に突出して設けられる振動出力部とを有し、当該保持部材は、当該振動体の胴体部を構成する4つの側面に沿って所定の間隔を開けて平行に配置される壁面によって構成される振動体収容部と、当該振動体収容部を構成する壁面の内面に、当該振動体の発する振動が当該壁面に伝達することを抑制する共振防止手段を備えたことを特徴とする。   The vibrating body holding mechanism according to the present invention is a vibrating body holding mechanism including a vibrating body and a holding member that houses and holds the vibrating body in a freely oscillating manner, and the vibrating body is housed in the holding member. And a vibration output portion provided on one end side of the body portion and projecting outside the holding member. The holding member constitutes the body portion of the vibration body. The vibration body accommodating portion constituted by wall surfaces arranged in parallel at predetermined intervals along the four side surfaces, and the vibration generated by the vibration body on the inner surface of the wall surface constituting the vibration body accommodating portion Resonance prevention means for suppressing transmission to the wall surface is provided.

本件発明に係る振動体保持機構は、前記共振防止手段は、前記保持部材の前記振動体収容部を構成する壁面において、一対の相対向する内壁面のうち、一方の内壁面に凹部を設け、この凹部に弾性部材を配置し、他方の内壁面に凹部を設け、この凹部に転動体を配置したものであることが好ましい。   In the vibrating body holding mechanism according to the present invention, the resonance preventing means includes a recess on one inner wall surface of the pair of opposed inner wall surfaces on the wall surface constituting the vibrating body housing portion of the holding member, It is preferable that an elastic member is disposed in the recess, a recess is provided on the other inner wall surface, and a rolling element is disposed in the recess.

本件発明に係る振動体保持機構は、前記共振防止手段は、前記保持部材の前記振動体収容部を構成する壁面において、一対の相対向する内壁面のうち、一方の内壁面に凹部を設け、この凹部に弾性部材及び転動体を配し、他方の内壁面に凹部を設け、この凹部に転動体を配したものであることも好ましい。   In the vibrating body holding mechanism according to the present invention, the resonance preventing means includes a recess on one inner wall surface of the pair of opposed inner wall surfaces on the wall surface constituting the vibrating body housing portion of the holding member, It is also preferable that an elastic member and a rolling element are provided in this recess, a recess is provided on the other inner wall surface, and the rolling element is provided in this recess.

本件発明に係る振動体保持機構は、前記共振防止手段は、前記保持部材の前記振動体収容部を構成する壁面において、一対の相対向する内壁面のうち、一方の内壁面に凹部を設け、この凹部に弾性部材及び転動体を配し、他方の内壁面に凹部を設け、この凹部に弾性部材及び転動体を配したものであることも好ましい。   In the vibrating body holding mechanism according to the present invention, the resonance preventing means includes a recess on one inner wall surface of the pair of opposed inner wall surfaces on the wall surface constituting the vibrating body housing portion of the holding member, It is also preferable that an elastic member and a rolling element are disposed in the recess, a recess is provided on the other inner wall surface, and the elastic member and the rolling element are disposed in the recess.

本件発明に係る振動体保持機構は、前記弾性部材として円錐バネ材を用いるのが好ましい。   The vibrating body holding mechanism according to the present invention preferably uses a conical spring material as the elastic member.

本件発明に係る超音波モータは、上述の振動体保持機構を用いて、且つ、前記角柱状の振動体は、前記一端側に設けた振動出力部を、被駆動体に圧接させるため、他端側の面を当該一端側に押しつけるための付勢手段を備えたことを特徴とする。   The ultrasonic motor according to the present invention uses the above-described vibrating body holding mechanism, and the prism-shaped vibrating body has the other end for pressing the vibration output portion provided on the one end side to the driven body. An urging means for pressing the side surface against the one end side is provided.

本件発明に係るレンズ駆動装置は、撮像装置のレンズ駆動装置であって、上述の超音波モータを用いたことを特徴とする。   A lens driving device according to the present invention is a lens driving device of an imaging apparatus, and is characterized by using the above-described ultrasonic motor.

本件発明に係る振動体保持機構は、振動体収容部を構成する壁面の内面に、振動体の発する振動が当該壁面に伝達することを抑制する共振防止手段を備えることにより、振動体の振動を適切な状態に保つことができる。特に、共振防止手段により振動体の振動が振動体収容部の壁面に伝達される不都合を効果的に防止することができる。その結果、振動体の振動が、振動体保持機構を介してこの振動体保持機構を搭載したベース部材や当該ベース部材上に設けられた周囲の部材等に増幅して伝達され、これらの部材が共振して超音波モータの駆動等に悪影響を及ぼす問題を防ぐことができる。   The vibrating body holding mechanism according to the present invention is provided with a resonance preventing unit that suppresses vibration generated by the vibrating body from being transmitted to the wall surface on the inner surface of the wall surface that constitutes the vibrating body housing portion. It can be kept in an appropriate state. In particular, it is possible to effectively prevent inconvenience that the vibration of the vibrating body is transmitted to the wall surface of the vibrating body housing portion by the resonance preventing means. As a result, the vibration of the vibrating body is amplified and transmitted via the vibrating body holding mechanism to the base member on which the vibrating body holding mechanism is mounted, the surrounding members provided on the base member, and the like. The problem of resonating and adversely affecting the driving of the ultrasonic motor can be prevented.

本件発明に係る超音波モータは、上述したように振動体の振動によって生じる共振の発生を防止しながら、振動体を適切な状態で振動可能に保持することができる振動体保持機構を備えるので、振動ムラが無く、駆動効率の高い超音波モータを提供することができる。また、本件発明に係るレンズ駆動装置は、上述した駆動効率の高い超音波モータを備えるので、消費電力の低減を図りながら、高精度のレンズ移動制御を実現することが可能となる。   Since the ultrasonic motor according to the present invention includes a vibrating body holding mechanism that can hold the vibrating body in an appropriate state while preventing the occurrence of resonance caused by the vibration of the vibrating body as described above, An ultrasonic motor having no vibration unevenness and high driving efficiency can be provided. In addition, since the lens driving device according to the present invention includes the above-described ultrasonic motor with high driving efficiency, it is possible to realize highly accurate lens movement control while reducing power consumption.

本件発明に係る振動体保持機構の一実施の形態を示す平面図である。It is a top view which shows one Embodiment of the vibrating body holding mechanism which concerns on this invention. 振動体の形状を示す模式図である。It is a schematic diagram which shows the shape of a vibrating body. 図1の振動体保持機構のA−A線における断面を矢印方向から見た状態を示す図である。It is a figure which shows the state which looked at the cross section in the AA of the vibrating body holding | maintenance mechanism of FIG. 1 from the arrow direction. 弾性部材の外形状を示す模式図である。It is a schematic diagram which shows the outer shape of an elastic member. 円筒状体の転動体の配置例を示す図である。It is a figure which shows the example of arrangement | positioning of the rolling element of a cylindrical body. 振動体保持機構の形状を示す模式図である。It is a schematic diagram which shows the shape of a vibrating body holding mechanism. 振動体保持機構の形状を示すもう一つの模式図である。It is another schematic diagram which shows the shape of a vibrating body holding | maintenance mechanism. 振動体保持部材の形状を示す別のもう一つの模式図である。It is another schematic diagram which shows the shape of a vibrating body holding member.

以下、本件発明に係る振動体保持機構、超音波モータ及びレンズ駆動装置の好ましい実施の形態に関して、図を参照しながら説明する。なお、本件発明は図示した形態に制限されるものではないことを最初に述べておく。   Hereinafter, preferred embodiments of a vibrating body holding mechanism, an ultrasonic motor, and a lens driving device according to the present invention will be described with reference to the drawings. It should be noted that the present invention is not limited to the illustrated form.

本件発明に係る振動体保持機構は、超音波モータの振動体を保持するための機構である。超音波モータは、振動体を振動させることにより当該振動体の振動出力部に運動を発生させ、この運動を被駆動体に伝達して被駆動体を駆動するための駆動力とするものである。図1は、本件発明に係る振動体保持機構1の一実施形態を示す平面図である。図1に示す振動体保持機構1は、本件発明に係る振動体保持機構1を備えた超音波モータ10を、撮像装置の撮像用フォーカスレンズを移動させるためのフォーカスレンズ駆動装置90に適用した一例である。フォーカスレンズ駆動装置90は、光学フォーカスのためのフォーカスレンズを光軸方向に移動させる駆動源であり、このフォーカスレンズの外周に超音波モータ10が配置される。以下の説明においては、図1に示す形態を用いて主として説明を行うこととする。   The vibrating body holding mechanism according to the present invention is a mechanism for holding the vibrating body of the ultrasonic motor. The ultrasonic motor generates a motion in the vibration output portion of the vibrating body by vibrating the vibrating body, and transmits the motion to the driven body to be a driving force for driving the driven body. . FIG. 1 is a plan view showing an embodiment of a vibrating body holding mechanism 1 according to the present invention. The vibrating body holding mechanism 1 shown in FIG. 1 is an example in which the ultrasonic motor 10 including the vibrating body holding mechanism 1 according to the present invention is applied to a focus lens driving device 90 for moving an imaging focus lens of an imaging device. It is. The focus lens driving device 90 is a drive source that moves the focus lens for optical focusing in the optical axis direction, and the ultrasonic motor 10 is disposed on the outer periphery of the focus lens. In the following description, the description will be made mainly using the form shown in FIG.

[振動体保持機構]
先ず、本件発明に係る振動体保持機構1の構造について説明する。振動体保持機構1は、超音波モータ10の振動体2を保持するものであり、振動体2と、当該振動体2を内部に振動自在に収容して保持する保持部材3とからなる。
[Vibrating body holding mechanism]
First, the structure of the vibrating body holding mechanism 1 according to the present invention will be described. The vibrating body holding mechanism 1 holds the vibrating body 2 of the ultrasonic motor 10 and includes the vibrating body 2 and a holding member 3 that houses and holds the vibrating body 2 so as to vibrate therein.

振動体: 本件発明に係る振動体保持機構1において、振動体2は、保持部材3に収容される四角柱状の胴体部21と、この胴体部21に設けられると共に、保持部材3の外側に突出して設けられる振動体出力部22とを有することを特徴とする。図2は、振動体2を上面側から見たときの形状の一例を示す平面図である。振動体2は、図示しない電極に接続された複数の圧電素子20を用いてなるものである。図2に示すように、本実施の形態の超音波モータ10は、振動体2として、胴体部21が略矩形平板状を呈しており、この胴体部21の一端21a側に突起状の振動出力部22を備える。 Vibrating body: In the vibrating body holding mechanism 1 according to the present invention, the vibrating body 2 is provided in the rectangular columnar body portion 21 accommodated in the holding member 3 and the body portion 21, and protrudes outside the holding member 3. And a vibrating body output unit 22 provided. FIG. 2 is a plan view showing an example of the shape when the vibrating body 2 is viewed from the upper surface side. The vibrating body 2 uses a plurality of piezoelectric elements 20 connected to electrodes (not shown). As shown in FIG. 2, in the ultrasonic motor 10 of the present embodiment, the body portion 21 has a substantially rectangular flat plate shape as the vibrating body 2, and a protruding vibration output is provided on one end 21 a side of the body portion 21. The unit 22 is provided.

そして、圧電素子20に接続された各電極にそれぞれ所定の交流電圧が印加されると、胴体部21には、図2の矢印A方向に伸縮する運動(一次縦振動)と、矢印B方向の屈曲振動が発生する。そして、各電極の周波数を揃え、位相を所定量異なるものとすることにより、一次縦振動と屈曲振動とが合成され、振動出力部22に楕円運動や水平往復運動等、所望の運動を発生させることができる。本実施の形態の超音波モータ10は、振動体2の振動出力部22の点Pにおいて、楕円運動を発生させるものである。   When a predetermined alternating voltage is applied to each electrode connected to the piezoelectric element 20, the body portion 21 is caused to expand and contract in the direction of arrow A in FIG. 2 (primary longitudinal vibration), and in the direction of arrow B. Bending vibration occurs. Then, by aligning the frequency of each electrode and changing the phase by a predetermined amount, the primary longitudinal vibration and the bending vibration are combined, and the vibration output unit 22 generates a desired motion such as an elliptical motion or a horizontal reciprocating motion. be able to. The ultrasonic motor 10 according to the present embodiment generates an elliptical motion at a point P of the vibration output unit 22 of the vibrating body 2.

具体的には、振動体2の振動出力部22の点Pを、この出力部22に発生させる運動の中心点とし、当該出力部22の中心点Pを通り、且つ、被駆動体6と出力部22とが当接する当接面に対して垂直に交わる線を基準線Lとした場合、この基準線Lにおいて、胴体部21の縦振動と屈曲振動とが合成され、出力部22の楕円運動に変換されるのである。   Specifically, the point P of the vibration output unit 22 of the vibrating body 2 is set as the center point of the motion generated in the output unit 22, passes through the center point P of the output unit 22, and is output to the driven body 6. When the reference line L is a line perpendicular to the contact surface with which the part 22 comes into contact, the longitudinal vibration and bending vibration of the body part 21 are combined on the reference line L, and the elliptical motion of the output part 22 is synthesized. It is converted into.

当該振動体2は、胴体部21の一端21a側に設けられた振動体出力部22が被駆動体6に当接するように配置され、この胴体部21の他端21b側の面に当該他端21b側の面を一端21a側に押しつけるための付勢手段である与圧機構7が当接するよう配置される。なお、被駆動体6及び与圧機構7については後に詳述する。   The vibrating body 2 is arranged such that a vibrating body output portion 22 provided on the one end 21a side of the body portion 21 contacts the driven body 6, and the other end 21b side surface of the body portion 21 is placed on the other end. The pressurizing mechanism 7 which is an urging means for pressing the surface on the 21b side against the one end 21a side is arranged to contact. The driven body 6 and the pressurizing mechanism 7 will be described in detail later.

保持部材: 本件発明に係る振動体保持機構1の保持部材3は、振動体2の胴体部21を構成する4つの側面に沿って所定の間隔を開けて平行に配置される壁面によって構成される振動体収容部と、当該振動体収容部を構成する壁面の内側に、振動体2の発する振動が壁面に伝達することを抑制する共振防止手段を備えたことを特徴とする。 Holding member: The holding member 3 of the vibrating body holding mechanism 1 according to the present invention is configured by wall surfaces arranged in parallel at predetermined intervals along four side surfaces constituting the body portion 21 of the vibrating body 2. It is characterized in that a vibration body accommodating portion and resonance preventing means for suppressing the vibration generated by the vibrating body 2 from being transmitted to the wall surface are provided inside the wall surface constituting the vibration body accommodating portion.

図3は、図1における振動体保持機構1のA−A線における断面を矢印方向から見た図である。保持部材3の振動体収容部31は、両端が開口した矩形筒状の枠体にて構成されており、内部に振動体2の胴体部21を収容するための空間が形成されている。係る構成により、振動体2は、胴体部21の一端21a側の面と他端21b側の面とが露出した状態で振動体収容部31内に収容される。図1及び図3に示す本実施の形態では、振動体2の胴体部21の振動出力部22が設けられた一端21a側の面及びその周辺と、振動出力部22の反対側の他端21b側の面とが露出され、その他の面が振動体収容部31を構成する壁面で概ね覆われるよう構成される。   FIG. 3 is a view of the cross section taken along the line AA of the vibrating body holding mechanism 1 in FIG. The vibrating body housing portion 31 of the holding member 3 is configured by a rectangular cylindrical frame body having both ends opened, and a space for housing the body portion 21 of the vibrating body 2 is formed therein. With this configuration, the vibrating body 2 is housed in the vibrating body housing portion 31 with the surface on the one end 21a side and the surface on the other end 21b side of the body portion 21 exposed. In the present embodiment shown in FIGS. 1 and 3, the surface of the body 21 of the vibrating body 2 on the side of the one end 21 a where the vibration output portion 22 is provided and its periphery, and the other end 21 b on the opposite side of the vibration output portion 22. The other surface is exposed, and the other surface is substantially covered with the wall surface that constitutes the vibrating body accommodating portion 31.

当該振動体収容部31を構成する4つの壁面(即ち、上壁面32、下壁面33及び両側壁面36、37)は、内部に振動体2の胴体部21を収容した状態で、振動体2の胴体部21を構成する4つの側面(即ち、上面21c、下面21d及び両側面21e、21f)に沿って所定の間隔を空けて平行に配置される。   The four wall surfaces (that is, the upper wall surface 32, the lower wall surface 33, and both side wall surfaces 36 and 37) constituting the vibrating body housing portion 31 are in a state in which the body portion 21 of the vibrating body 2 is housed inside the vibrating body 2. Along the four side surfaces (that is, the upper surface 21c, the lower surface 21d, and the both side surfaces 21e, 21f) constituting the body portion 21, they are arranged in parallel at a predetermined interval.

共振防止手段: 本件発明の振動体保持機構1は、振動体2の胴体部21を構成する4つの側面(21c、21d、21e、21f)と、当該側面の外周に所定の間隔を存して設けられた、振動体収容部31を構成する4つの壁面(32、33、36、37)との間に共振防止手段を備えることを特徴とする。当該共振防止手段は、振動体2の発する振動が振動体収容部31の壁面に伝達することを抑制するためのものである。この基本的技術思想の元に、本件発明に係る振動体保持機構1が備える共振防止手段として、以下のものが存在する。以下、本件発明に係る振動体保持機構1が備える共振防止手段を、「第1の共振防止手段」「第2の共振防止手段」「第3の共振防止手段」と称して大別する。 Resonance prevention means: The vibrating body holding mechanism 1 of the present invention has four side surfaces (21c, 21d, 21e, 21f) constituting the body portion 21 of the vibrating body 2 and a predetermined interval on the outer periphery of the side surfaces. Resonance prevention means is provided between the four wall surfaces (32, 33, 36, 37) that constitute the vibrator housing portion 31 provided. The resonance preventing means is for suppressing the vibration generated by the vibrating body 2 from being transmitted to the wall surface of the vibrating body accommodating portion 31. Based on this basic technical idea, there are the following resonance prevention means provided in the vibrator holding mechanism 1 according to the present invention. Hereinafter, the resonance prevention means provided in the vibrating body holding mechanism 1 according to the present invention is broadly classified as “first resonance prevention means”, “second resonance prevention means”, and “third resonance prevention means”.

「第1の共振防止手段」: 第1の共振防止手段は、保持部材3の振動体収容部を構成する壁面において、一対の相対向する内壁面のうち、一方の内壁面に凹部を設け、この凹部に弾性部材を配置し、他方の内壁面に凹部を設け、この凹部に転動体を配置したものである。 "First resonance prevention means": The first resonance prevention means includes a concave portion provided on one inner wall surface of the pair of opposed inner wall surfaces in the wall surface constituting the vibrating body housing portion of the holding member 3, An elastic member is disposed in the recess, a recess is provided on the other inner wall surface, and a rolling element is disposed in the recess.

「第2の共振防止手段」: そして、第2の共振防止手段は、保持部材3の振動体収容部を構成する壁面において、一対の相対向する内壁面のうち、一方の内壁面に凹部を設け、この凹部に弾性部材及び転動体を配置し、他方の内壁面に凹部を設け、この凹部に転動体を配置したものである。 “Second Resonance Prevention Unit”: The second resonance prevention unit includes a concave portion formed on one inner wall surface of the pair of opposed inner wall surfaces on the wall surface constituting the vibrating body housing portion of the holding member 3. The elastic member and the rolling element are disposed in the recess, the recess is provided on the other inner wall surface, and the rolling element is disposed in the recess.

「第3の共振防止手段」: また、第3の共振防止手段は、保持部材3の振動体収容部を構成する壁面において、一対の相対向する内壁面のうち、一方の内壁面に凹部を設け、この凹部に弾性部材及び転動体を配し、他方の内壁面に凹部を設け、この凹部に弾性部材及び転動体を配したものである。 “Third resonance preventing means”: Further, the third resonance preventing means includes a concave portion formed on one inner wall surface of the pair of opposed inner wall surfaces on the wall surface constituting the vibrating body housing portion of the holding member 3. Provided, an elastic member and a rolling element are provided in the recess, a recess is provided on the other inner wall surface, and the elastic member and the rolling element are provided in the recess.

ここで、上述した各共振防止手段に共通する構成要素である「弾性部材」と「転動体」について説明する。   Here, “elastic member” and “rolling element”, which are components common to the above-described resonance preventing means, will be described.

「弾性部材」: 先ず、「弾性部材」について説明する。弾性部材は、ゴム、バネ、弾性樹脂成分等の弾性材料からなるもので、振動体2の胴体部21に押圧力を付与する部材である。図4は、弾性部材の形状を説明するための模式図である。図4(a)に示すように、弾性部材4は、一端面41から他端面42に向かって先窄まりの形状であり、一端面41の中心点と他端面42の中心点とを結ぶ中心線4Lを含む断面形状が中心線4Lに対して線対称となるよう構成されている。当該弾性部材4の外形として、例えば、円錐台形状、四角錐台形状等が考えられるが、特に、円錐体形状とすると、振動体2の胴体部21を安定して保持する効果が高いので好ましい。更に、製造コストや取付安定性等を考慮すれば、弾性部材4として図4(b)に示すようなバネ材を用いることが好ましい。 “Elastic Member”: First, the “elastic member” will be described. The elastic member is made of an elastic material such as rubber, a spring, or an elastic resin component, and is a member that applies a pressing force to the body portion 21 of the vibrating body 2. FIG. 4 is a schematic diagram for explaining the shape of the elastic member. As shown in FIG. 4A, the elastic member 4 has a tapered shape from the one end face 41 toward the other end face 42, and a center connecting the center point of the one end face 41 and the center point of the other end face 42. The cross-sectional shape including the line 4L is configured to be line symmetric with respect to the center line 4L. As the outer shape of the elastic member 4, for example, a truncated cone shape, a quadrangular pyramid shape, and the like can be considered. . Furthermore, in consideration of manufacturing cost, mounting stability, and the like, it is preferable to use a spring material as shown in FIG.

弾性部材4は、保持部材3の振動体収容部31を構成する壁面に設けられた当該弾性部材4の収容部である凹部内において、当該凹部の底面に弾性部材4の一端面41が面接触するよう配置される。このため、弾性部材4の一端面41は、当該凹部の底面と略同一形状を呈していることが好ましい。このように、弾性部材4の一端面41の形状と凹部の底面の形状とを略同一とすることで、弾性部材4を取り付ける際の位置決めが容易となり、また、弾性部材4を取り付けた後においては、当該弾性部材4の位置ズレを生じ難くすることができる。   In the elastic member 4, the one end surface 41 of the elastic member 4 is in surface contact with the bottom surface of the concave portion in the concave portion which is the accommodating portion of the elastic member 4 provided on the wall surface constituting the vibrating body accommodating portion 31 of the holding member 3. Arranged to do. For this reason, it is preferable that the one end surface 41 of the elastic member 4 has substantially the same shape as the bottom surface of the concave portion. Thus, by making the shape of the one end surface 41 of the elastic member 4 substantially the same as the shape of the bottom surface of the recess, positioning when attaching the elastic member 4 is facilitated, and after attaching the elastic member 4 Can prevent the displacement of the elastic member 4 from occurring.

また、弾性部材4は、振動体2の胴体部21に対して、垂直に押圧力を付与することができるように、前述した中心線4Lが振動体2の基準線Lに対して略90度となる位置に配置することが好ましい。更に、弾性部材4は、振動出力部22における楕円運動に繋がる、弾性体2に発生させる振動を妨げないために、その振動の節となる位置に配置されることが好ましい。更にまた、後述する第2の共振防止手段又は第3の共振防止手段のように、弾性部材4の他端面42に転動体が当接するよう配置する場合、位置ズレ等生じることなく、他端面42と転動体とが安定的に当接配置されるように、他端面42の面積を設定することが好ましい。   Further, the elastic member 4 has the center line 4L described above approximately 90 degrees with respect to the reference line L of the vibrating body 2 so that a pressing force can be applied vertically to the body portion 21 of the vibrating body 2. It is preferable to arrange in the position. Further, the elastic member 4 is preferably arranged at a position that becomes a node of the vibration so as not to hinder the vibration generated in the elastic body 2 that leads to the elliptical motion in the vibration output unit 22. Furthermore, when the rolling elements are arranged so as to contact the other end face 42 of the elastic member 4 as in the second resonance preventing means or the third resonance preventing means described later, the other end face 42 does not cause misalignment. It is preferable to set the area of the other end face 42 so that the rolling element and the rolling element are stably in contact with each other.

「転動体」: 次に、転動体について説明する。転動体は、振動体2の振動が振動体収容部31の壁面に伝達される不都合を抑制するために設けられたものである。即ち、振動体2は、上述した弾性部材4の押圧力により弾性部材4の胴体部21が圧迫されることによって生じる不都合(具体的には、振動体出力部22における楕円運動に繋がる振動体2の振動の阻害、ベース部材9等の周囲部材への振動の伝達や共振の発生等)を防ぐために設けられたものである。 “Rolling body”: Next, the rolling element will be described. The rolling element is provided in order to suppress inconvenience that the vibration of the vibrating body 2 is transmitted to the wall surface of the vibrating body housing 31. That is, the vibrating body 2 has a disadvantage caused by the body portion 21 of the elastic member 4 being pressed by the pressing force of the elastic member 4 described above (specifically, the vibrating body 2 that leads to elliptical motion in the vibrating body output portion 22). This is provided to prevent the vibrations of the base member 9 and the like, the transmission of vibrations to surrounding members such as the base member 9 and the occurrence of resonance).

当該転動体は、保持部材3の振動体収容部31を構成する壁面に設けられた転動体の収容部である凹部内で転動可能に設けられる。この転動体として、剛性を有する球状体、若しくは、図5に示すような円筒状体50等の部材を用いることができるが、特に、本実施の形態に示すように球状体を用いることが好ましい。このように、転動体として、球状体を用いることで、振動体2の前述した一次縦振動及び屈曲振動を阻害せずに、効率よく振動出力部22の楕円運動に変換することが可能となる。   The rolling element is provided so as to be able to roll in a recess that is a receiving part of the rolling element provided on a wall surface constituting the vibrating body accommodating part 31 of the holding member 3. As the rolling element, a rigid spherical body or a member such as a cylindrical body 50 as shown in FIG. 5 can be used, and it is particularly preferable to use a spherical body as shown in the present embodiment. . As described above, by using a spherical body as the rolling element, it is possible to efficiently convert the vibration body 2 into the elliptical motion of the vibration output unit 22 without inhibiting the above-described primary longitudinal vibration and bending vibration. .

ここで、上述した各共振防止手段について、図面を用いて詳しく説明する。先ず、第1及び第2の共振防止手段を備えた振動体保持機構の一実施形態を図6及び図7を用いて説明する。図6は、図1の振動体保持機構1を側面側から見たとき配置を示す模式図であり、図7は、振動体保持機構1を上面側から見たときの配置を示す模式図である。図6及び図7に示すように、この実施の形態の振動体保持機構1は、第1の共振防止手段を保持部材3の振動体収容部31を構成する上下壁面32、33間に備え、第2の共振防止手段を側壁面36、37間に備える。   Here, each resonance preventing means described above will be described in detail with reference to the drawings. First, an embodiment of a vibrating body holding mechanism having first and second resonance preventing means will be described with reference to FIGS. 6 is a schematic diagram showing an arrangement when the vibrating body holding mechanism 1 of FIG. 1 is viewed from the side surface side, and FIG. 7 is a schematic diagram showing an arrangement when the vibrating body holding mechanism 1 is viewed from the upper surface side. is there. As shown in FIGS. 6 and 7, the vibrating body holding mechanism 1 of this embodiment includes a first resonance preventing means between the upper and lower wall surfaces 32 and 33 constituting the vibrating body housing portion 31 of the holding member 3. A second resonance preventing means is provided between the side wall surfaces 36 and 37.

具体的な構成について、先ず、保持部材3の振動体収容部31を構成する壁面のうち、一対の相対向する上下壁面32、33間に設けられた第1の共振防止手段について説明する。図6に示すように、保持部材3には、振動体収容部31の上壁面32の内面に2箇所の凹部34が設けられ、下壁面33の内面に4箇所の凹部35が設けられる。これら2箇所の凹部34は、振動体収容部31の上壁面32において、振動体2の上面21cに対向する当該上壁面32の内面から上側に向かって形成された円筒状のくぼみである。両凹部34は、前述した振動体2の基準線Lと平行に直線状に並ぶように配置される。   Regarding a specific configuration, first, the first resonance preventing means provided between the pair of opposing upper and lower wall surfaces 32 and 33 among the wall surfaces constituting the vibrating body accommodating portion 31 of the holding member 3 will be described. As shown in FIG. 6, in the holding member 3, two recesses 34 are provided on the inner surface of the upper wall surface 32 of the vibration body accommodating portion 31, and four recesses 35 are provided on the inner surface of the lower wall surface 33. These two concave portions 34 are cylindrical recesses formed on the upper wall surface 32 of the vibrating body housing portion 31 from the inner surface of the upper wall surface 32 facing the upper surface 21c of the vibrating body 2 toward the upper side. Both concave portions 34 are arranged so as to be arranged in a straight line parallel to the reference line L of the vibrator 2 described above.

また、凹部35は、振動体収容部31の下壁面33において、振動体2の下面21dに対向する当該下壁面33の内面から下側に向かって形成された角筒状、略角錐状又は略円錐状のくぼみである。凹部35は、図7に示すように、前述した上壁面32に設けた凹部34と、振動体2の基準線Lに対して、線対称となる位置を中心点Cとして、当該中心点Cから両側に等間隔に離間した位置であって、且つ、中心点Cを通り、基準線Lに対する角度が90度となる中心線3L上にそれぞれ1つずつ配置される。そして、上述した上壁面32の凹部34には、弾性部材4が配置され、下壁面33の凹部35には、転動体5がそれぞれ配置される。   In addition, the recess 35 is formed in a rectangular tube shape, a substantially pyramid shape, or a substantially pyramid shape formed from the inner surface of the lower wall surface 33 facing the lower surface 21d of the vibrating body 2 toward the lower side on the lower wall surface 33 of the vibrating body housing 31. It is a conical depression. As shown in FIG. 7, the concave portion 35 has a center point C at a position that is symmetrical with respect to the concave portion 34 provided on the upper wall surface 32 and the reference line L of the vibrating body 2. One on each side of the center line 3L that is spaced apart at equal intervals, passes through the center point C, and has an angle of 90 degrees with respect to the reference line L. And the elastic member 4 is arrange | positioned at the recessed part 34 of the upper wall surface 32 mentioned above, and the rolling element 5 is arrange | positioned at the recessed part 35 of the lower wall surface 33, respectively.

そして、弾性部材4の一端面41が凹部34の底面(上面)に当接し、他端面42が振動体2の胴体部21の上面21cに当接するよう配置される。また、転動体5は凹部35に配置された状態で、その上端部が振動体2の胴体部21の下面21dに点接触するよう配置される。これにより、振動体2の胴体部21の上下方向は、弾性部材4の他端面42と、転動体5の接点のみとの当接によって保持される。即ち、振動体2は、弾性部材4により上方向から押圧され、当該押圧力を、受け面側となる下面21dに設けられた転動体5で受けることとなる。   The elastic member 4 is arranged such that one end surface 41 abuts on the bottom surface (upper surface) of the recess 34 and the other end surface 42 abuts on the upper surface 21 c of the body portion 21 of the vibrating body 2. In addition, the rolling element 5 is disposed in the recess 35 so that the upper end portion thereof is in point contact with the lower surface 21 d of the body portion 21 of the vibrating body 2. Accordingly, the vertical direction of the body portion 21 of the vibrating body 2 is held by contact between the other end surface 42 of the elastic member 4 and only the contact point of the rolling element 5. That is, the vibrating body 2 is pressed from above by the elastic member 4, and the pressing force is received by the rolling element 5 provided on the lower surface 21d on the receiving surface side.

この場合、振動体2が振動出力部22の楕円運動に繋がる所望の振動をすると、当該振動に応じて転動体5が凹部35内で転動するため、振動体2の動きが弾性部材4の押圧力により阻害され難くなる。これにより、振動体2は転動体5の転動によって、当該振動体2の所望の振動が抑制されること無く、当該振動を効率よく振動出力部22の楕円運動に変えることが可能となる。また、転動体5によって、振動体2の振動が保持部材3に伝達され難くなる。これにより、振動体2の振動が保持部材3及びベース部材9等の周囲の部材に増幅されて伝わり、これらが共振する問題を防止することができる。   In this case, when the vibrating body 2 performs a desired vibration that leads to the elliptical motion of the vibration output unit 22, the rolling element 5 rolls in the recess 35 in accordance with the vibration, so that the movement of the vibrating body 2 is caused by the elastic member 4. It becomes difficult to be disturbed by the pressing force. Thereby, the vibration body 2 can efficiently change the vibration to the elliptical motion of the vibration output unit 22 without suppressing the desired vibration of the vibration body 2 by the rolling of the rolling element 5. Further, the rolling element 5 makes it difficult for the vibration of the vibrating element 2 to be transmitted to the holding member 3. Thereby, the vibration of the vibrating body 2 is amplified and transmitted to surrounding members such as the holding member 3 and the base member 9, and the problem that these resonate can be prevented.

次に、保持部材3の振動体収容部31を構成する壁面のうち、一対の相対向する側面壁36、37間に設けられた第2の共振防止手段について説明する。図7に示すように、振動体収容部31の一方の側壁面36の内面に2箇所の凹部38が設けられ、他方の側壁面37の内面に2箇所の凹部39が設けられている。一方の側壁面36に設けられた2箇所の凹部38は、振動体収容部31の一方の側壁面36において、振動体2の側面21eに対向する当該側壁面36の内面から外面側に向かって形成されたくぼみである。両凹部38は、前述した振動体2の基準線Lと平行に直線状に並ぶように配置される。   Next, a description will be given of the second resonance preventing means provided between the pair of opposed side walls 36 and 37 among the wall surfaces constituting the vibrating body accommodating portion 31 of the holding member 3. As shown in FIG. 7, two concave portions 38 are provided on the inner surface of one side wall surface 36 of the vibration body accommodating portion 31, and two concave portions 39 are provided on the inner surface of the other side wall surface 37. The two concave portions 38 provided on the one side wall surface 36 are formed on the one side wall surface 36 of the vibration body accommodating portion 31 from the inner surface of the side wall surface 36 facing the side surface 21e of the vibration body 2 toward the outer surface side. It is a hollow formed. Both concave portions 38 are arranged so as to be arranged in a straight line parallel to the reference line L of the vibrator 2 described above.

また、他方の側壁面37に形成された2箇所の凹部39は、振動体収容部31の側壁面37において、振動体2の側面21fに対向する当該側壁面37の内面から外面側に方向に向かって形成されたくぼみである。両凹部39は、上述した凹部38と同様に前述した振動体2の基準線Lと平行に直線状に並ぶように配置される。更に、両凹部39は、凹部38と、振動体2の基準線Lに対して、線対称となる位置にそれぞれ設けられる。そして、一方の側壁面36の凹部38には、弾性部材4及び転動体5が配置され、他方の側壁面37の凹部39には、転動体5がそれぞれ配置される。   Further, the two concave portions 39 formed on the other side wall surface 37 are formed in the direction from the inner surface of the side wall surface 37 facing the side surface 21 f of the vibrating body 2 to the outer surface side in the side wall surface 37 of the vibrating body housing portion 31. It is a dent formed towards. Both concave portions 39 are arranged so as to be linearly arranged in parallel with the reference line L of the vibrator 2 described above, similarly to the concave portion 38 described above. Further, the both concave portions 39 are provided at positions that are line symmetric with respect to the concave portion 38 and the reference line L of the vibrating body 2. The elastic member 4 and the rolling element 5 are disposed in the recess 38 of the one side wall surface 36, and the rolling element 5 is disposed in the recess 39 of the other side wall surface 37.

そして、弾性部材4の一端面41が凹部38の底面に当接し、他端面42が転動体5に当接して、この転動体5において弾性部材4の他端面42に当接する面とは、反対側の面が振動体2の側面21eに点接触するよう配置される。また、凹部39に配置された転動体5は、当該凹部39に配置された状態でその側面が振動体2の胴体部21の側面21fに点接触するよう配置される。これにより、振動体2の胴体部21の側面方向は、転動体5との点接触のみによって保持される。即ち、振動体2の側面方向は、一側面21e側から転動体5を介して、弾性部材4の押圧力を受け、その受け面側となる他側面21fに設けられた転動体5で受けることとなる。   The one end surface 41 of the elastic member 4 is in contact with the bottom surface of the recess 38 and the other end surface 42 is in contact with the rolling element 5, which is opposite to the surface of the rolling element 5 that contacts the other end surface 42 of the elastic member 4. The side surface is arranged so as to make point contact with the side surface 21 e of the vibrating body 2. Further, the rolling elements 5 arranged in the recesses 39 are arranged so that the side surfaces thereof are in point contact with the side surfaces 21 f of the body part 21 of the vibrating body 2 in the state of being arranged in the recesses 39. Thereby, the side surface direction of the trunk | drum 21 of the vibrating body 2 is hold | maintained only by the point contact with the rolling element 5. FIG. That is, the lateral direction of the vibrating body 2 is received by the rolling element 5 provided on the other side surface 21f that receives the pressing force of the elastic member 4 through the rolling element 5 from the one side surface 21e. It becomes.

この場合、振動体2が振動出力部22における楕円運動に繋がる所望の振動をすると、当該振動に応じて両側面21e、21fに点接触する転動体5が各凹部38、39内で転動するため、振動体2の動きが弾性部材4の押圧力(加圧)により阻害され難くなる。これにより、振動体2は、転動体5の回転により所望の振動を阻害されること無く、振動出力部22の楕円運動に変えることが可能となる。また、転動体5によって、振動体2の運動が保持部材3に伝達され難くなる。これにより、振動体2の振動が保持部材3及びベース部材9等の周囲の部材に増幅されて伝わり、これらが共振する問題を防止することができる。   In this case, when the vibrating body 2 performs a desired vibration that leads to an elliptical motion in the vibration output unit 22, the rolling element 5 that makes point contact with both side surfaces 21 e and 21 f rolls within the recesses 38 and 39 according to the vibration. For this reason, the movement of the vibrating body 2 is not easily inhibited by the pressing force (pressurization) of the elastic member 4. Thereby, the vibrating body 2 can be changed to the elliptical motion of the vibration output unit 22 without being hindered by a desired vibration by the rotation of the rolling element 5. Further, the motion of the vibrating body 2 is hardly transmitted to the holding member 3 by the rolling element 5. Thereby, the vibration of the vibrating body 2 is amplified and transmitted to surrounding members such as the holding member 3 and the base member 9, and the problem that these resonate can be prevented.

上述したように、当該実施の形態に示す振動体保持機構1は、振動体2の上下方向を第1の共振防止手段により保持され、側面方向が第2の共振防止手段によって保持される。これにより、振動体2の振動による共振の発生を防止しながら、振動体2を適切に保持して、振動体2に安定した振動を発生することが可能となる。このため、超音波モータ10の駆動等に悪影響を及ぼす問題を防ぐことが可能となる。   As described above, in the vibrating body holding mechanism 1 shown in this embodiment, the vertical direction of the vibrating body 2 is held by the first resonance preventing unit, and the side surface direction is held by the second resonance preventing unit. Accordingly, it is possible to appropriately hold the vibrating body 2 and to generate a stable vibration in the vibrating body 2 while preventing the occurrence of resonance due to the vibration of the vibrating body 2. For this reason, it becomes possible to prevent the problem which has a bad influence on the drive of the ultrasonic motor 10, etc.

なお、上述した本実施の形態における共振防止手段や各凹部の配置や形状は、あくまでも本件発明の一例であって、当該実施の形態に制限されるものではない。例えば、本実施の形態では、振動体2の上下方向に第1の共振防止手段を設け、側面方向に第2の共振防止手段を設けるものとしたが、上下方向に第2の共振防止手段を設けても良いし、側面方向に第1の共振防止手段を設けるものとしても差し支えない。また、これらに変えて、以下で詳述する第3の共振防止手段を設けることも有効である。   In addition, the arrangement | positioning and shape of the resonance prevention means and each recessed part in this Embodiment mentioned above are an example of this invention to the last, Comprising: It is not restrict | limited to the said embodiment. For example, in the present embodiment, the first resonance prevention means is provided in the vertical direction of the vibrating body 2 and the second resonance prevention means is provided in the side surface direction. However, the second resonance prevention means is provided in the vertical direction. It may be provided, or the first resonance preventing means may be provided in the side surface direction. In place of these, it is also effective to provide a third resonance preventing means described in detail below.

次に、第3の共振防止手段について、図8の振動体保持機構1の模式図を用いて説明する。第3の共振防止手段は、図8に示すように、振動体収容部31の一方の側壁面36の内面に2箇所の凹部38が設けられ、他方の側壁面37の内面に2箇所の凹部40が設けられている。一方の側壁面36に設けられた2箇所の凹部38は、振動体収容部31の一方の側壁面36において、振動体2の側面21eに対向する当該側壁面36の内面から外面側に向かって形成されたくぼみである。両凹部38は、前述した振動体2の基準線Lと平行に直線状に並ぶように配置される。   Next, the third resonance preventing means will be described with reference to the schematic view of the vibrating body holding mechanism 1 shown in FIG. As shown in FIG. 8, the third resonance preventing means is provided with two concave portions 38 on the inner surface of one side wall surface 36 of the vibrator accommodating portion 31 and two concave portions on the inner surface of the other side wall surface 37. 40 is provided. The two concave portions 38 provided on the one side wall surface 36 are formed on the one side wall surface 36 of the vibration body accommodating portion 31 from the inner surface of the side wall surface 36 facing the side surface 21e of the vibration body 2 toward the outer surface side. It is a hollow formed. Both concave portions 38 are arranged so as to be arranged in a straight line parallel to the reference line L of the vibrator 2 described above.

また、他方の側壁面37に形成された2箇所の凹部40は、振動体収容部31の側壁面37において、振動体2の側面21fに対向する当該側壁面37の内面から外面側に方向に向かって形成されたくぼみである。両凹部40は、上述した凹部38と同様に前述した振動体2の基準線Lと平行に直線状に並ぶように配置される。更に、両凹部40は、凹部38と、振動体2の基準線Lに対して、線対称となる位置にそれぞれ設けられる。そして、一方の側壁面36の凹部38には、弾性部材4及び転動体5が配置され、他方の側壁面37の凹部40には、凹部38と同様に、弾性部材4及び転動体5が配置される。   Further, the two concave portions 40 formed on the other side wall surface 37 are formed in the direction from the inner surface of the side wall surface 37 facing the side surface 21 f of the vibrating body 2 to the outer surface side in the side wall surface 37 of the vibrating body housing portion 31. It is a dent formed towards. Both concave portions 40 are arranged so as to be arranged in a straight line parallel to the reference line L of the vibrating body 2 described above, similarly to the concave portion 38 described above. Further, the both concave portions 40 are provided at positions that are line symmetric with respect to the concave portion 38 and the reference line L of the vibrating body 2. The elastic member 4 and the rolling element 5 are disposed in the concave portion 38 of the one side wall surface 36, and the elastic member 4 and the rolling element 5 are disposed in the concave portion 40 of the other side wall surface 37 in the same manner as the concave portion 38. Is done.

そして、弾性部材4の一端面41が凹部38の底面に当接し、他端面42が転動体5に当接して、この転動体5の弾性部材4の他端面42に当接する側の面と反対側の面が振動体2の側面21eにて接触するよう配置される。また、凹部40に配置された弾性部材4及び転動体5は、当該凹部40の底面に弾性部材4の一端面41が当接し、他端面42が転動体5に当接して、この転動体5において弾性部材4の他端面42に当接する側と反対側の面が振動体2の側面21fに点接触するよう配置される。これにより、この実施の形態の振動体2の胴体部21の側面方向は、転動体5との点接触のみによって保持される。即ち、両側面21e、21fは、両側から転動体5を介して弾性部材4の押圧力を受け、且つ、両側の転動体5で反対側からの押圧力を受けることとなる。   The one end surface 41 of the elastic member 4 is in contact with the bottom surface of the recess 38 and the other end surface 42 is in contact with the rolling element 5, opposite to the surface of the rolling element 5 on the side contacting the other end surface 42 of the elastic member 4. It arrange | positions so that the surface of a side may contact in the side surface 21e of the vibrating body 2. FIG. Further, the elastic member 4 and the rolling element 5 disposed in the recess 40 are in contact with the bottom surface of the recess 40 at one end surface 41 of the elastic member 4 and the other end surface 42 are in contact with the rolling element 5. The surface opposite to the side contacting the other end surface 42 of the elastic member 4 is disposed so as to make point contact with the side surface 21 f of the vibrating body 2. Thereby, the side surface direction of the trunk | drum 21 of the vibrating body 2 of this embodiment is hold | maintained only by the point contact with the rolling element 5. FIG. That is, the side surfaces 21e and 21f receive the pressing force of the elastic member 4 from both sides via the rolling elements 5, and the pressing force from the opposite side by the rolling elements 5 on both sides.

この場合、振動体2が所望の振動をすると、当該振動に応じて両側面21e、21fに点接触する転動体5が各凹部38、40内で転動するため、振動体2の動きが両側から押圧される弾性部材4の押圧力により阻害され難くなる。これにより、振動体2は転動体5の回転により所望の振動を阻害されること無く、振動出力部22の運動に変えることが可能となる。また、転動体5によって、振動体2の振動が保持部材3に伝達され難くなる。これにより、振動体2の振動が保持部材3及びベース部材9等の周囲の部材に増幅されて伝わり、これらが共振する問題を防止することができる。   In this case, when the vibrating body 2 vibrates in a desired manner, the rolling element 5 that makes point contact with both side surfaces 21e and 21f rolls within the recesses 38 and 40 in accordance with the vibration. It becomes difficult to be disturbed by the pressing force of the elastic member 4 pressed from above. Thereby, the vibrating body 2 can be changed to the movement of the vibration output unit 22 without being hindered by the desired vibration by the rotation of the rolling element 5. Further, the rolling element 5 makes it difficult for the vibration of the vibrating element 2 to be transmitted to the holding member 3. Thereby, the vibration of the vibrating body 2 is amplified and transmitted to surrounding members such as the holding member 3 and the base member 9, and the problem that these resonate can be prevented.

[超音波モータ]
次に、上述した振動体保持機構1を備えた超音波モータ10の構造について説明する。超音波モータ10は、四角柱状の振動体2と、被駆動体6と、与圧機構7と、与圧源8とを備える。なお、振動体2の構成は、上述した通りであるので、ここでは詳細な説明を省略して、以下にその他の構成部材について説明するものとする。
[Ultrasonic motor]
Next, the structure of the ultrasonic motor 10 provided with the vibrating body holding mechanism 1 described above will be described. The ultrasonic motor 10 includes a quadrangular columnar vibrating body 2, a driven body 6, a pressurizing mechanism 7, and a pressurizing source 8. In addition, since the structure of the vibrating body 2 is as above-mentioned, detailed description is abbreviate | omitted here and the other structural member shall be demonstrated below.

被駆動体6は、振動体2の振動出力部22の楕円運動によって、回転駆動されるものである。図1に示す本実施の形態の被駆動体6は、ロータ61と、シャフト62と、駆動力出力部63とを有する。   The driven body 6 is rotationally driven by the elliptical motion of the vibration output unit 22 of the vibrating body 2. The driven body 6 of the present embodiment shown in FIG. 1 has a rotor 61, a shaft 62, and a driving force output unit 63.

ロータ61は、外形形状が略円柱状を呈しており、当該ロータ61の外周面には、振動体2の振動出力部22が圧接するよう配置される。ロータ61はシャフト62を中心に回転可能にベース部材9に取り付けられる。駆動力出力部63もロータ61と同様にシャフト62を中心に回転可能に設けられている。   The rotor 61 has a substantially columnar outer shape, and is arranged so that the vibration output portion 22 of the vibrating body 2 is in pressure contact with the outer peripheral surface of the rotor 61. The rotor 61 is attached to the base member 9 so as to be rotatable about a shaft 62. Similarly to the rotor 61, the driving force output unit 63 is also provided to be rotatable around the shaft 62.

係る構成により、ロータ61が回転すると、当該ロータ61の回転に同期して駆動力出力部63が回転する。具体的には、振動体2の振動出力部22が所望の運動をすると、当該振動出力部22とロータ61との摩擦力により、ロータ61が回転する。そして、ロータ61の回転に同期して駆動力出力部63も回転する。当該駆動力出力部63には、図示しないフォーカスレンズ駆動機構が接続されており、フォーカスレンズ駆動装置90の駆動源として作用する。なお、被駆動体6は、超音波モータ10により直接駆動される駆動対象物自体であってもよいし、駆動対象物に駆動力を伝達する間接部材であっても良い。   With this configuration, when the rotor 61 rotates, the driving force output unit 63 rotates in synchronization with the rotation of the rotor 61. Specifically, when the vibration output unit 22 of the vibrating body 2 performs a desired motion, the rotor 61 is rotated by the frictional force between the vibration output unit 22 and the rotor 61. The driving force output unit 63 also rotates in synchronization with the rotation of the rotor 61. A focus lens drive mechanism (not shown) is connected to the drive force output unit 63 and acts as a drive source for the focus lens drive device 90. The driven body 6 may be a driving object itself that is directly driven by the ultrasonic motor 10, or may be an indirect member that transmits a driving force to the driving object.

次に、与圧機構7について説明する。与圧機構7は、振動体2の一端21a側に設けた振動体出力部22を、前述した被駆動体6のロータ61に圧接させるための付勢手段である。即ち、本件発明に係る超音波モータ10は、振動体2の振動体出力部22を、被駆動体6のロータ61に圧接させるため、振動体2の他端21b側の面を一端21a側に押しつけるための付勢手段を備える。   Next, the pressurizing mechanism 7 will be described. The pressurizing mechanism 7 is an urging means for bringing the vibrating body output unit 22 provided on the one end 21 a side of the vibrating body 2 into pressure contact with the rotor 61 of the driven body 6 described above. That is, in the ultrasonic motor 10 according to the present invention, the surface on the other end 21b side of the vibrating body 2 is placed on the one end 21a side in order to press the vibrating body output portion 22 of the vibrating body 2 to the rotor 61 of the driven body 6. An urging means for pressing is provided.

本実施の形態の与圧機構7は、図1に示すように、与圧源8と、与圧伝達部材71と、与圧補正部72とを備える。与圧源8は、スプリングコイルからなり、振動体2と離間した位置に配置される。そして、当該スプリングコイルの一端の端部81がベース部材9に固定され、他端の端部82が与圧伝達部材71に接続される。   As shown in FIG. 1, the pressurizing mechanism 7 of the present embodiment includes a pressurization source 8, a pressurization transmission member 71, and a pressurization correction unit 72. The pressurizing source 8 is formed of a spring coil and is disposed at a position separated from the vibrating body 2. The end 81 at one end of the spring coil is fixed to the base member 9, and the end 82 at the other end is connected to the pressurizing transmission member 71.

与圧伝達部材71は、与圧源8の与圧力を振動体2に伝達するための部材である。本実施の形態の与圧伝達部材71は、アーム状を呈している。そして、このアーム状の与圧伝達部材71は、支軸15を介してベース部材9に取り付けられ、当該支軸15を中心に回転可能に設けられる。当該与圧伝達部材71は、与圧源8と接続するための与圧源接続部73が設けられている。そして、この与圧源接続部73と与圧源8とを接続することにより、与圧源接続部73には矢印D方向に力が作用し、支軸15を中心に回動する。これにより、与圧源接続部73の振動体2と対向する端部が振動体2に近付く方向に力が作用する。この結果、与圧機構7には、振動体2を被駆動体6側に押圧する力が生じる。   The pressurizing transmission member 71 is a member for transmitting the pressurizing force of the pressurizing source 8 to the vibrating body 2. The pressurizing transmission member 71 of the present embodiment has an arm shape. The arm-shaped pressurizing transmission member 71 is attached to the base member 9 via the support shaft 15 and is provided to be rotatable about the support shaft 15. The pressurizing transmission member 71 is provided with a pressurizing source connecting portion 73 for connecting to the pressurizing source 8. Then, by connecting the pressurizing source connecting portion 73 and the pressurizing source 8, a force acts on the pressurizing source connecting portion 73 in the direction of the arrow D and rotates around the support shaft 15. As a result, a force acts in a direction in which the end of the pressurizing source connection portion 73 facing the vibrating body 2 approaches the vibrating body 2. As a result, a force that presses the vibrating body 2 toward the driven body 6 is generated in the pressurizing mechanism 7.

また、前述した与圧補正部72は、振動体2の他端21b側の面に対して、与圧伝達部材71の押し圧力の角度を補正して、振動体2に対して所定の角度で圧力を付与するためのものである。当該与圧補正部72は、エンジニアリングプラスチックからなり、振動体2との当接位置に回動自在に設けられている。この与圧補正部72は、図1に示すように、与圧伝達部材71と振動体2の他端21b側の面との間に配置される。これにより、振動体2の他端21b側の面に対して、与圧伝達部材71の押圧力の角度を補正して振動体2に対して所定の角度で圧力を付与することができる。この結果、振動体2を被駆動体6側に適切な角度で安定して圧接することができる。   Further, the pressurizing correction unit 72 described above corrects the angle of the pressing force of the pressurizing transmission member 71 with respect to the surface on the other end 21 b side of the vibrating body 2, and makes a predetermined angle with respect to the vibrating body 2. This is for applying pressure. The pressurizing correction unit 72 is made of engineering plastic and is rotatably provided at a contact position with the vibrating body 2. As shown in FIG. 1, the pressurizing correction unit 72 is disposed between the pressurizing transmission member 71 and the surface on the other end 21 b side of the vibrating body 2. Thereby, it is possible to apply pressure to the vibrating body 2 at a predetermined angle by correcting the angle of the pressing force of the pressurizing transmission member 71 to the surface on the other end 21 b side of the vibrating body 2. As a result, the vibrating body 2 can be stably pressed against the driven body 6 side at an appropriate angle.

このように、本件発明に係る超音波モータ10は、上述した振動体保持機構1を備えるので、振動体2の振動によって生じる共振の発生を防止しながら、振動体2を適切な状態で振動可能に保持することができるため、振動ムラが無く、駆動効率の向上を図ることができる。また、本件発明に係るフォーカスレンズ駆動装置90は、このように駆動効率の良い超音波モータ10を用いるので、消費電力の低減と高精度のレンズ駆動制御との両立を実現することができるため、フォーカスレンズ駆動装置の駆動源として好適である。なお、本実施の形態では、上述したように、本件発明に係る振動体保持機構を備えた超音波モータを、フォーカスレンズ駆動装置の駆動源に適用するものとして説明した。しかしながら、本件発明は、このようなフォーカスレンズ駆動装置への適用に制限されるものではなく、他の駆動装置等に適用することも可能である。例えば、本件発明に係る振動体保持機構を備えた超音波モータを、光学ズームのためのズームレンズを移動させるズームレンズ駆動装置の駆動源として用いることも有効である。   Thus, since the ultrasonic motor 10 according to the present invention includes the vibrating body holding mechanism 1 described above, it is possible to vibrate the vibrating body 2 in an appropriate state while preventing the occurrence of resonance caused by the vibration of the vibrating body 2. Therefore, there is no vibration unevenness and the driving efficiency can be improved. In addition, since the focus lens driving device 90 according to the present invention uses the ultrasonic motor 10 with high driving efficiency in this way, it is possible to achieve both reduction in power consumption and high-precision lens driving control. It is suitable as a drive source for the focus lens drive device. In the present embodiment, as described above, the ultrasonic motor including the vibrating body holding mechanism according to the present invention has been described as being applied to the drive source of the focus lens drive device. However, the present invention is not limited to application to such a focus lens driving device, and can also be applied to other driving devices. For example, it is also effective to use an ultrasonic motor provided with a vibrating body holding mechanism according to the present invention as a drive source of a zoom lens drive device that moves a zoom lens for optical zoom.

本件発明に係る振動体保持機構は、超音波モータの振動体を、振動体の振動による共振の発生を防止しながら、出力効率の低下や出力誤差に繋がる不要な振動を抑えて、所望の振動が可能な状態で適切に保持することができる。このため、当該振動体保持機構を備えた超音波モータは、駆動効率が高く、且つ、駆動制御能の優れている。従って、動画撮影用のカメラのように、ズーミングやフォーカシングの敏捷性が望まれるレンズ駆動装置においても効果を発揮する。また、駆動効率が良いことから、電池式のカメラ等のレンズ駆動装置に使用すれば、使用時間の向上を図ることができる。   The vibrating body holding mechanism according to the present invention prevents the vibration body of the ultrasonic motor from generating resonance due to vibration of the vibrating body, and suppresses unnecessary vibration that leads to a decrease in output efficiency and an output error, thereby reducing desired vibration. Can be appropriately held in a possible state. For this reason, the ultrasonic motor provided with the vibrating body holding mechanism has high drive efficiency and excellent drive control ability. Therefore, the present invention is also effective in a lens driving device that requires zooming and focusing agility, such as a camera for moving image shooting. In addition, since the drive efficiency is good, the use time can be improved when used in a lens drive device such as a battery-powered camera.

1 振動体保持機構
2 振動体
3 保持部材
4 弾性部材
5 転動体
6 被駆動体
7 与圧機構
8 与圧源
9 ベース部材
10 超音波モータ
15 支軸
20 圧電素子
21 胴体部
21a 一端
21b 他端
21c 上面
21d 下面
21e、21f 側面
22 振動出力部
31 振動体収容部
32 上壁面
33 下壁面
34、35 凹部
36 一方の側壁面
37 他方の側壁面
38、39、40 凹部
41 一端面
42 他端面
61 ロータ
62 シャフト
63 駆動力出力部
71 与圧伝達部材
72 与圧補正部
73 与圧源接続部
81 スプリングコイルの一端部
82 スプリングコイルの他端部
90 レンズ駆動装置
L 基準線
3L 中心線
4L 中心線
P 出力部に発生させる運動の中心点
DESCRIPTION OF SYMBOLS 1 Vibrating body holding mechanism 2 Vibrating body 3 Holding member 4 Elastic member 5 Rolling body 6 Driven body 7 Pressurizing mechanism 8 Pressurizing source 9 Base member 10 Ultrasonic motor 15 Support shaft 20 Piezoelectric element 21 Body 21a One end 21b The other end 21c Upper surface 21d Lower surface 21e, 21f Side surface 22 Vibration output part 31 Vibrating body accommodating part 32 Upper wall surface 33 Lower wall surface 34, 35 Recess 36 One side wall surface 37 Other side wall surface 38, 39, 40 Recessed portion 41 One end surface 42 Other end surface 61 Rotor 62 Shaft 63 Driving force output section 71 Pressurizing transmission member 72 Pressurizing correction section 73 Pressurizing source connecting section 81 One end of spring coil 82 Other end of spring coil 90 Lens driving device L Reference line 3L Center line 4L Center line P The center point of the motion generated in the output section

Claims (7)

振動体と、当該振動体を内部に振動自在に収容して保持する保持部材とからなる振動体保持機構であって、
当該振動体は、保持部材に収容される四角柱状の胴体部と、この胴体部の一端側に設けられると共に、保持部材の外側に突出して設けられる振動出力部とを有し、
当該保持部材は、当該振動体の胴体部を構成する4つの側面に沿って所定の間隔を開けて平行に配置される壁面によって構成される振動体収容部と、当該振動体収容部を構成する壁面の内面に、当該振動体の発する振動が当該壁面に伝達することを抑制する共振防止手段を備えたことを特徴とする振動体保持機構。
A vibrating body holding mechanism comprising a vibrating body and a holding member that houses and holds the vibrating body in a freely oscillating manner,
The vibration body includes a quadrangular columnar body portion accommodated in the holding member, and a vibration output portion provided on one end side of the body portion and protruding outside the holding member,
The holding member constitutes a vibrating body housing portion constituted by wall surfaces arranged in parallel at predetermined intervals along four side surfaces constituting the body portion of the vibrating body, and the vibrating body housing portion. A vibrating body holding mechanism comprising a resonance preventing means for suppressing vibration generated by the vibrating body from being transmitted to the wall surface on the inner surface of the wall surface.
前記共振防止手段は、前記保持部材の前記振動体収容部を構成する壁面において、一対の相対向する内壁面のうち、一方の内壁面に凹部を設け、この凹部に弾性部材を配置し、他方の内壁面に凹部を設け、この凹部に転動体を配置したものである請求項1に記載の振動体保持機構。   The resonance prevention means includes a concave portion provided on one inner wall surface of the pair of opposing inner wall surfaces, and an elastic member disposed in the concave portion, on the wall surface constituting the vibrating body housing portion of the holding member. The vibrating body holding mechanism according to claim 1, wherein a concave portion is provided on the inner wall surface of the, and a rolling element is disposed in the concave portion. 前記共振防止手段は、前記保持部材の前記振動体収容部を構成する壁面において、一対の相対向する内壁面のうち、一方の内壁面に凹部を設け、この凹部に弾性部材及び転動体を配し、他方の内壁面に凹部を設け、この凹部に転動体を配したものである請求項1に記載の振動体保持機構。   The resonance preventing means includes a concave portion provided on one inner wall surface of the pair of opposing inner wall surfaces on the wall surface constituting the vibrating body housing portion of the holding member, and the elastic member and the rolling element are disposed in the concave portion. The vibrating body holding mechanism according to claim 1, wherein a recess is provided on the other inner wall surface, and a rolling element is disposed in the recess. 前記共振防止手段は、前記保持部材の前記振動体収容部を構成する壁面において、一対の相対向する内壁面のうち、一方の内壁面に凹部を設け、この凹部に弾性部材及び転動体を配し、他方の内壁面に凹部を設け、この凹部に弾性部材及び転動体を配したものである請求項1に記載の振動体保持機構。   The resonance preventing means includes a concave portion provided on one inner wall surface of the pair of opposing inner wall surfaces on the wall surface constituting the vibrating body housing portion of the holding member, and the elastic member and the rolling element are disposed in the concave portion. The vibrating body holding mechanism according to claim 1, wherein a recess is provided on the other inner wall surface, and an elastic member and a rolling element are disposed in the recess. 前記弾性部材として、円錐バネ材を用いた請求項1〜請求項4のいずれかに記載の振動体保持機構。   The vibrating body holding mechanism according to claim 1, wherein a conical spring material is used as the elastic member. 請求項1〜請求項5のいずれかに記載の振動体保持機構を用いて、且つ、前記角柱状の振動体は、前記一端側に設けた振動出力部を、被駆動体に圧接させるため、他端側の面を当該一端側に押しつけるための付勢手段を備えたことを特徴とする超音波モータ。   The vibrating body holding mechanism according to any one of claims 1 to 5, and the prismatic vibrating body is configured to press the vibration output portion provided on the one end side against the driven body. An ultrasonic motor comprising urging means for pressing a surface on the other end side against the one end side. 撮像装置のレンズ駆動装置であって、
請求項6に記載の超音波モータを用いたことを特徴とするレンズ駆動装置。
A lens driving device for an imaging device,
A lens driving device using the ultrasonic motor according to claim 6.
JP2012041146A 2012-02-28 2012-02-28 Vibrating body holding mechanism, ultrasonic motor, and lens driving device Pending JP2013179733A (en)

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JP2016174534A (en) * 2016-07-08 2016-09-29 キヤノン株式会社 Vibration wave motor
US9827593B2 (en) 2013-12-27 2017-11-28 Canon Kabushiki Kaisha Ultrasonic motor
JP2018061399A (en) * 2016-10-07 2018-04-12 キヤノン株式会社 Vibration wave motor and electronic apparatus

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JP6305377B2 (en) 2015-08-04 2018-04-04 キヤノン株式会社 Vibrating actuator, device and optical instrument

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CN101581818B (en) * 2008-05-16 2012-11-07 德昌电机(深圳)有限公司 Lens drive device
CN101728971B (en) * 2008-10-17 2013-10-30 德昌电机(深圳)有限公司 Piezoelectric type moving system and lens driving device with same
EP2200101A1 (en) * 2008-12-22 2010-06-23 Physik Instrumente (PI) GmbH & Co. KG Ultrasound motor

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Publication number Priority date Publication date Assignee Title
US9827593B2 (en) 2013-12-27 2017-11-28 Canon Kabushiki Kaisha Ultrasonic motor
JP2016174534A (en) * 2016-07-08 2016-09-29 キヤノン株式会社 Vibration wave motor
JP2018061399A (en) * 2016-10-07 2018-04-12 キヤノン株式会社 Vibration wave motor and electronic apparatus

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