JP6271901B2 - Ultrasonic motor and optical apparatus equipped with ultrasonic motor - Google Patents

Ultrasonic motor and optical apparatus equipped with ultrasonic motor Download PDF

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JP6271901B2
JP6271901B2 JP2013159214A JP2013159214A JP6271901B2 JP 6271901 B2 JP6271901 B2 JP 6271901B2 JP 2013159214 A JP2013159214 A JP 2013159214A JP 2013159214 A JP2013159214 A JP 2013159214A JP 6271901 B2 JP6271901 B2 JP 6271901B2
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vibrator
vibration motor
base
connecting member
sliding member
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JP2015033165A5 (en
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晴滋 山本
晴滋 山本
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Canon Inc
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Description

本発明は、デジタルカメラなどに適用される超音波モータ及び超音波モータを備えた光学機器に関する。   The present invention relates to an ultrasonic motor applied to a digital camera and the like, and an optical apparatus including the ultrasonic motor.

従来この種の超音波モータ及び超音波モータ付光学機器において、高周波電圧の印加により周期的に振動する振動子を摺動部材に圧接することで摺動部材を駆動する技術が知られている。   2. Description of the Related Art Conventionally, in this type of ultrasonic motor and optical apparatus with an ultrasonic motor, a technique for driving a sliding member by pressing a vibrator that periodically vibrates by application of a high-frequency voltage to the sliding member is known.

特開2001−292584号公報JP 2001-292484 A

しかしながら、上述の特許文献に開示された従来技術では、振動体14(本件の振動子に相当)の振動節部を支持する機能と、振動体を加圧し振動体とレール11a(本件の摺動部材に相当)に摩擦力を生じさせる機能とを一つのバネ部材17と複数のゴムシート15、16、18を用い、このバネ部材17を固定板19と振動体14との間に、それぞれゴムシートを介して組み込んでいる。   However, in the prior art disclosed in the above-mentioned patent document, the function of supporting the vibration node of the vibrating body 14 (corresponding to the vibrator of the present case) and the vibration body and the rail 11a (sliding of the present case) by pressurizing the vibrating body. The spring member 17 and the plurality of rubber sheets 15, 16, and 18 have a function of generating a frictional force (corresponding to a member), and the spring member 17 is placed between the fixing plate 19 and the vibrating body 14 with rubber. It is installed via a sheet.

このため、たとえば振動落下などにより衝撃力がかかった時や、微小往復運動による合焦動作であるところの所謂ウォブリング動作、さらには起動、停止時の加減速による慣性力等により、固定板と振動板の相対位置がずれてしまい、レール11aに対する振動体14の駆動方向位置を精度高く制御できなくなるという問題が発生する。この問題を解決する方法に関しては、なんら技術的な開示がなされていない。   For this reason, for example, when an impact force is applied due to vibration drop or the like, the so-called wobbling operation, which is a focusing operation by a minute reciprocating motion, and the inertial force by acceleration / deceleration at the time of starting and stopping, etc. The relative position of the plate is shifted, and there arises a problem that the position in the driving direction of the vibrating body 14 with respect to the rail 11a cannot be controlled with high accuracy. There is no technical disclosure regarding how to solve this problem.

そこで、本発明の目的は、高精度な駆動が可能な超音波モータ及び超音波モータを備えた光学機器を提供することである。   Accordingly, an object of the present invention is to provide an ultrasonic motor that can be driven with high accuracy and an optical apparatus including the ultrasonic motor.

上記目的を達成するために本発明の超音波モータは、高周波電圧の印加により超音波振動する振動子と、前記振動子が加圧され、前記振動子に対して相対的に移動自在な摺動部材と、前記振動子が固定される基台と、前記基台を保持し、前記振動子を進退自在に支持する支持部材と、前記基台と前記支持部材を連結する連結部材とを有し、前記連結部材は、前記摺動部材の移動方向にはガタなく、かつ前記振動子が前記摺動部材に加圧される方向には可撓性を有するように前記基台と前記支持部材を連結していることを特徴とする。
上記目的を達成するために本発明の超音波モータを備えた光学機器は、超音波モータと、ガイドバーにより光軸方向に移動自在に保持され、合焦用レンズを有するレンズホルダとを備え、前記摺動部材は前記振動子と前記レンズホルダとの間に挟持され、前記超音波モータの駆動により前記レンズホルダが前記摺動部材の移動方向に移動することで、前記合焦用レンズが光軸方向に移動して合焦動作をすることを特徴としている。
In order to achieve the above object, an ultrasonic motor of the present invention includes a vibrator that vibrates ultrasonically when a high-frequency voltage is applied, and a sliding that is movable relative to the vibrator when the vibrator is pressurized. A member, a base on which the vibrator is fixed, a support member that holds the base and supports the vibrator so as to advance and retreat, and a connecting member that connects the base and the support member. The connecting member has the base and the support member so that there is no backlash in the moving direction of the sliding member and flexibility in the direction in which the vibrator is pressed against the sliding member. It is connected.
In order to achieve the above object, an optical apparatus including the ultrasonic motor of the present invention includes an ultrasonic motor and a lens holder that is held by a guide bar so as to be movable in the optical axis direction and has a focusing lens. The sliding member is sandwiched between the vibrator and the lens holder, and the lens holder is moved in the moving direction of the sliding member by driving the ultrasonic motor, so that the focusing lens is optically moved. It is characterized by moving in the axial direction and performing a focusing operation.

以上のように構成することで、従来例のように落下衝撃、ウォブリング、加減速による慣性力等の影響により、振動子の位置ずれが起きて、送り制御精度が悪くなることがなくなり、高精度な駆動が可能な超音波モータ及び超音波モータを備えた光学機器を提供することが可能になる。   By configuring as described above, unlike the conventional example, the position of the vibrator does not shift due to the effects of drop impact, wobbling, inertial force due to acceleration / deceleration, etc. It is possible to provide an ultrasonic motor that can be driven smoothly and an optical device including the ultrasonic motor.

本発明の第1実施例を示す、超音波モータを備えた光学機器の要部分解斜視図である。It is a principal part disassembled perspective view of the optical apparatus provided with the ultrasonic motor which shows 1st Example of this invention. 超音波モータの要部の構成を示す斜視図である。It is a perspective view which shows the structure of the principal part of an ultrasonic motor. 連結部材の拡大斜視図である。It is an expansion perspective view of a connection member. 第2実施例を示す超音波モータを備えた光学機器の要部分解斜視図である。It is a principal part disassembled perspective view of the optical apparatus provided with the ultrasonic motor which shows 2nd Example.

以下に、本発明の好ましい実施の形態を、添付の図面に基づいて詳細に説明する。各図面において同一部分は同一符号で示している。   Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same parts are denoted by the same reference numerals.

[第1実施例]
図1は、本発明の第1実施例を示す、超音波モータを備えた光学機器の要部分解斜視図である。光学機器は、超音波モータ及びデジタルカメラに適用されるフォーカス駆動機構を有する。矩形の振動子101は長手方向の両端に被接合部101eを備えている。被接合部101eは、基台102の接合部102bに対して溶接などにより固定され、これにより振動子101が基台102に固定されている。
[First embodiment]
FIG. 1 is an exploded perspective view of an essential part of an optical apparatus equipped with an ultrasonic motor, showing a first embodiment of the present invention. The optical apparatus has a focus drive mechanism applied to an ultrasonic motor and a digital camera. The rectangular vibrator 101 includes joined portions 101e at both ends in the longitudinal direction. The joined portion 101e is fixed to the joining portion 102b of the base 102 by welding or the like, and thereby the vibrator 101 is fixed to the base 102.

連結部材103は被固定穴部103aを備え、被固定穴部103aと基台102に形成されたねじ穴102aに対して、ねじ104を挿通することにより連結部材103が基台102に固定される。振動子101を支持する支持部材105はねじ部105bを備え、ねじ部105bと連結部材103の被固定穴部103bに対してねじ106を挿通することによって支持部材105は連結部材103に固定される。   The connecting member 103 includes a fixed hole portion 103a, and the connecting member 103 is fixed to the base 102 by inserting the screw 104 into the screw hole 102a formed in the fixed hole portion 103a and the base 102. . The support member 105 that supports the vibrator 101 includes a screw portion 105 b, and the support member 105 is fixed to the connection member 103 by inserting the screw 106 through the screw portion 105 b and the fixed hole portion 103 b of the connection member 103. .

図2は超音波モータの要部の構成を示す斜視図である。超音波モータの要部を構成する振動子101は、図2に示すように、振動子本体101a、圧電素子101c及び101d、によって構成されている。圧電素子101c及び101dは高周波電圧が印加されると、振動子本体101aが長手方向及び短手方向で、それぞれ超音波振動による共振を起こすように設定されている。   FIG. 2 is a perspective view showing a configuration of a main part of the ultrasonic motor. As shown in FIG. 2, the vibrator 101 constituting the main part of the ultrasonic motor is constituted by a vibrator body 101a and piezoelectric elements 101c and 101d. The piezoelectric elements 101c and 101d are set so that when a high frequency voltage is applied, the vibrator body 101a resonates by ultrasonic vibration in the longitudinal direction and the lateral direction, respectively.

その結果、振動子本体101aに形成された圧接部101bの先端が図2に示すような楕円運動を起こし、それぞれの圧電素子101c及び101dに印加する高周波電圧の周波数や位相を変えることで、回転方向や楕円比を適宜変化させて所望の動きを発生させることができる。よって圧電素子101c及び101dと接触して、振動子101に対して相対的に移動自在(摺動自在)な摺動部材107(図1参照)との摩擦力により相対駆動力を発生させ、振動子101自身を光軸に沿って進退させることが可能となる。   As a result, the tip of the pressure contact portion 101b formed on the vibrator body 101a causes an elliptical motion as shown in FIG. 2, and rotates by changing the frequency and phase of the high-frequency voltage applied to each of the piezoelectric elements 101c and 101d. Desired motion can be generated by appropriately changing the direction and ellipticity ratio. Therefore, a relative driving force is generated by a frictional force with the sliding member 107 (see FIG. 1) that is movable (slidable) relative to the vibrator 101 in contact with the piezoelectric elements 101c and 101d. The child 101 itself can be moved back and forth along the optical axis.

ここで図1を参照すると、ローラホルダ108は、摺動抵抗軽減部材である複数の回転ローラ109を備えている。ローラ109は、ローラピン110により回転自在に固定されている。ローラホルダ108の被係止部108aは、組み立て時、105の係止爪部105aと係合し、摺動部材107を圧接部101bとローラ109との間で挟持する。その結果、振動子101自身が光軸に沿って進退する際、ローラ109は摺動部材107の当接面上で転動し、抵抗なく振動子101が光軸方向に沿って進退自在となることを可能としている。   Referring now to FIG. 1, the roller holder 108 includes a plurality of rotating rollers 109 that are sliding resistance reducing members. The roller 109 is rotatably fixed by a roller pin 110. The engaged portion 108a of the roller holder 108 is engaged with the engaging claw portion 105a of 105 at the time of assembly, and the sliding member 107 is clamped between the press contact portion 101b and the roller 109. As a result, when the vibrator 101 moves back and forth along the optical axis, the roller 109 rolls on the contact surface of the sliding member 107, and the vibrator 101 can move forward and backward along the optical axis without resistance. Making it possible.

レンズホルダ11は、光学素子であり、デジタルカメラなどの光学機器に適用される撮影レンズの一部をなし、光軸方向に移動して合焦動作をする合焦用レンズ111bを内包している。レンズホルダ111は、2つのガイドバー112,113により光軸方向に進退可能に支持されている。ガイドバー112,113は、レンズホルダ111を挟んでかつレンズホルダ111の上下に互いに平行に配置されている。ガイドバー112,113は、光軸に平行に配置することが好ましい。   The lens holder 11 is an optical element, forms a part of a photographing lens applied to an optical device such as a digital camera, and includes a focusing lens 111b that moves in the optical axis direction and performs a focusing operation. . The lens holder 111 is supported by two guide bars 112 and 113 so as to advance and retreat in the optical axis direction. The guide bars 112 and 113 are arranged in parallel with each other across the lens holder 111 and above and below the lens holder 111. The guide bars 112 and 113 are preferably arranged in parallel to the optical axis.

ガイドバー112側に設けられたレンズホルダ111の被駆動部111aには支持部材105に形成された不図示の駆動突部が係合している。これにより超音波モータが駆動されると、レンズホルダ111を光軸方向の決められた位置に駆動制御することが可能である。ガイドバー112,113、そして摺動部材107は不図示の地板に公知の固定手段で保持されている。ガイドバー112及びレンズホルダ111がデジタルカメラに適用されるフォーカス駆動機構を構成している。   A driving protrusion (not shown) formed on the support member 105 is engaged with the driven portion 111a of the lens holder 111 provided on the guide bar 112 side. Thus, when the ultrasonic motor is driven, the lens holder 111 can be driven and controlled to a predetermined position in the optical axis direction. The guide bars 112 and 113 and the sliding member 107 are held by a known fixing means on a ground plate (not shown). The guide bar 112 and the lens holder 111 constitute a focus driving mechanism applied to the digital camera.

振動子101を加圧する加圧板114は、基台102と連結部材103との間に設けられている。後述のように、連結部材103に設けられた複数の加圧腕部103c(図3参照)は、加圧板114に当接し、加圧板114の当接面に押圧力を加える。加圧腕部103cは少なくとも2か所以上設けられる。   A pressure plate 114 that pressurizes the vibrator 101 is provided between the base 102 and the connecting member 103. As will be described later, a plurality of pressure arm portions 103 c (see FIG. 3) provided on the connecting member 103 abuts on the pressure plate 114 and applies a pressing force to the contact surface of the pressure plate 114. There are at least two pressing arm portions 103c.

加圧板114は、基台102に設けた貫通孔102cに遊嵌する大きさである。そのため、加圧腕部103cから加圧板114に加えられた加圧力は基台102を介することなく、直接振動子101に加えられる。   The pressure plate 114 is sized to loosely fit into a through hole 102 c provided in the base 102. For this reason, the pressure applied to the pressure plate 114 from the pressure arm 103 c is directly applied to the vibrator 101 without going through the base 102.

その結果、振動子101を摺動部材107に対して必要な荷重で押しつけることで摩擦力を発生させ上述のように振動子101自身を光軸に沿って進退させることを可能としている。   As a result, by pressing the vibrator 101 against the sliding member 107 with a necessary load, a frictional force is generated, and the vibrator 101 itself can be advanced and retracted along the optical axis as described above.

図3は連結部材の拡大斜視図である。前述の通り、連結部材103の被固定穴部103aと振動子101が溶接された基台102とがねじ104(図1参照)により締結される。さらに支持部材105の取り付けねじ部105bと被固定穴部103bとがねじ106により締結される。   FIG. 3 is an enlarged perspective view of the connecting member. As described above, the fixed hole 103a of the connecting member 103 and the base 102 to which the vibrator 101 is welded are fastened by the screw 104 (see FIG. 1). Further, the mounting screw portion 105 b and the fixed hole portion 103 b of the support member 105 are fastened by the screw 106.

この締結により連結部材103は支持部材105に対して加圧方向には腕部103fの機能により十分な可撓性を有し、摺動部材107の移動方向である光軸方向にはガタなく支持することを実現している。よって、従来例のように落下衝撃、ウォブリング、加減速による慣性力等の影響により、振動子101の位置ずれが起きて、送り制御精度が悪くなることを防ぐことができる。 By this fastening, the connecting member 103 has sufficient flexibility by the function of the arm portion 103f in the pressurizing direction with respect to the support member 105, and is supported without play in the optical axis direction that is the moving direction of the sliding member 107. Has realized that. Therefore, unlike the conventional example, it is possible to prevent the position of the vibrator 101 from being displaced and the feed control accuracy from being deteriorated due to the influence of drop impact, wobbling, inertial force due to acceleration / deceleration, and the like.

前述のように連結部材103の四隅に設けられた被固定穴部103aが画成する空間の内側には複数の加圧腕部103cが形成されている。加圧腕部103cは、被固定穴部103bの近傍から光軸に沿って延設される第1の延設部103dと、先端で折り返して逆向きに延設される第2の延設部103eとから一体的に構成されている。これにより制限されたスペース内であってもバネ定数の小さいバネを実現している。加圧腕部103c、第1の延設部103d、第2の延設部103eが加圧手段を構成している。また、加圧腕部103cの先端部103gが加圧部を構成している。   As described above, a plurality of pressure arm portions 103 c are formed inside the space defined by the fixed hole portions 103 a provided at the four corners of the connecting member 103. The pressurizing arm portion 103c includes a first extension portion 103d extending along the optical axis from the vicinity of the fixed hole portion 103b, and a second extension portion extending in the opposite direction by folding back at the tip. 103e. This realizes a spring having a small spring constant even in a limited space. The pressurizing arm portion 103c, the first extending portion 103d, and the second extending portion 103e constitute a pressurizing unit. Further, the tip portion 103g of the pressure arm portion 103c constitutes a pressure portion.

連結部材103において、加圧腕部103cの4つの先端部103gは、加圧板114に確実に当接できるように、被固定穴部103aの底面が画成する平面から、加圧板114の方向(加圧方向)に所定距離突出して設けられている。   In the connecting member 103, the four distal end portions 103g of the pressure arm portion 103c are arranged in the direction of the pressure plate 114 (from the plane that the bottom surface of the fixed hole portion 103a defines so that the pressure plate 114 can be surely contacted. It is provided to protrude a predetermined distance in the pressurizing direction).

組み立て状態においては、ローラホルダ108の被係止部108aと支持部材105の係止爪部105aとが係合しているので、連結部材103の加圧腕部103cは加圧板114を介して振動子101を摺動部材107に加圧(押圧)する力を発生する。   In the assembled state, since the locked portion 108a of the roller holder 108 and the locking claw portion 105a of the support member 105 are engaged, the pressure arm portion 103c of the connecting member 103 vibrates via the pressure plate 114. A force for pressing (pressing) the child 101 against the sliding member 107 is generated.

この結果、振動子101の圧接部101bは摺動部材107に対して押圧保持され、振動子101に印加された高周波電圧の作用により相対駆動力を発生し、振動子101自身を光軸に沿って進退させることを可能としている。この際、ローラ109の作用により、押圧力の反力による摺動摩擦抵抗はローラ109の作用により低減され駆動力の損失を回避することができる。   As a result, the pressure contact portion 101b of the vibrator 101 is pressed and held against the sliding member 107, generates a relative driving force by the action of the high frequency voltage applied to the vibrator 101, and moves the vibrator 101 itself along the optical axis. It is possible to move forward and backward. At this time, the sliding frictional resistance due to the reaction force of the pressing force is reduced by the action of the roller 109, and the loss of the driving force can be avoided.

[第2実施例]
図4は、本発明の第2実施例を示す、超音波モータを備えた光学機器の要部分解斜視図である。光学機器は、超音波モータ及びデジタルカメラに適用されるフォーカス駆動機構を有する。
[Second Embodiment]
FIG. 4 is an exploded perspective view of an essential part of an optical apparatus equipped with an ultrasonic motor, showing a second embodiment of the present invention. The optical apparatus has a focus drive mechanism applied to an ultrasonic motor and a digital camera.

第1の実施例とその構成はほとんど同じなので、構成が異なる連結部材401と加圧用のコイルバネ402に関してのみ説明する。また、その他同一機能の部材は図1と同じ番号を付してある。   Since the configuration is almost the same as the first embodiment, only the connection member 401 and the coil spring 402 for pressurization having different configurations will be described. Other members having the same function are denoted by the same reference numerals as in FIG.

連結部材401の被固定穴部401aと振動子101の溶接された基台102とが第1の実施例と同様に不図示のねじにより締結されている。さらに支持部材105の取り付けねじ部105c(図4参照)と被固定穴部401bとが不図示のねじにより締結される。この締結により連結部材401は第1実施例と同様に支持部材105に対して加圧方向には腕部401cの機能により十分な可撓性を有し、光軸方向にはガタなく支持することを実現している。よって第1実施例と同様に、落下衝撃、ウォブリング、加減速による慣性力等の影響により、振動子101の位置ずれが起きて、送り制御精度が悪くなることを防ぐことができる。 The fixed hole 401a of the connecting member 401 and the base 102 to which the vibrator 101 is welded are fastened by screws (not shown) as in the first embodiment. Further, the mounting screw portion 105c (see FIG. 4) of the support member 105 and the fixed hole portion 401b are fastened by screws (not shown). By this fastening, the connecting member 401 is sufficiently flexible by the function of the arm portion 401c in the pressurizing direction with respect to the supporting member 105 as in the first embodiment, and is supported without play in the optical axis direction. Is realized. Therefore, similarly to the first embodiment, it is possible to prevent the position of the vibrator 101 from being displaced due to the impact of drop impact, wobbling, acceleration / deceleration, and the like, thereby preventing the feed control accuracy from being deteriorated.

連結部材401の下方には加圧手段としての複数のコイルバネ402が設けられている。第2実施例ではコイルバネ402は2個設けられているが、この個数は2個に限定されるものでなく、他の個数でも良い。   A plurality of coil springs 402 as pressure means are provided below the connecting member 401. In the second embodiment, two coil springs 402 are provided, but this number is not limited to two, and other numbers may be used.

コイルバネ402は連結部材401の2つの腕部401cの間に配置され、一端を支持部材105の上面裏側の壁に、他端を加圧板403のバネ受け部403aに支持される。組み立て状態においては、第1実施例と同様に、ローラホルダ108の被係止部108aと支持部材105の係止爪部105aとが係合しているので、コイルバネ402は圧縮され、加圧板403を介して振動子101を摺動部材107に加圧する力を発生する。腕部401cは少なくとも2つ設けられれば良く、2個以上の複数個設けることも可能である。 The coil spring 402 is disposed between the two arm portions 401 c of the connecting member 401, and one end is supported by the wall on the back side of the upper surface of the support member 105 and the other end is supported by the spring receiving portion 403 a of the pressure plate 403. In the assembled state, as in the first embodiment, since the locked portion 108a of the roller holder 108 and the locking claw portion 105a of the support member 105 are engaged, the coil spring 402 is compressed and the pressure plate 403 is compressed. The force which presses the vibrator | oscillator 101 to the sliding member 107 via is generated. It suffices that at least two arm portions 401c are provided, and two or more arm portions 401c may be provided.

加圧板403は、基台102に設けた貫通孔102cに遊嵌する大きさである。そのため、コイルバネ402から加圧板403に加えられた押圧力は基台102を介することなく、直接振動子101に加えられる。   The pressure plate 403 is sized to loosely fit into a through hole 102 c provided in the base 102. Therefore, the pressing force applied from the coil spring 402 to the pressure plate 403 is directly applied to the vibrator 101 without passing through the base 102.

この結果、振動子101の圧接部101bは摺動部材107に対して加圧保持され、振動子101に印加された高周波電圧の作用により相対駆動力を発生し、振動子101自身を光軸に沿って進退させることを可能としている。この際、ローラ109の作用により、押圧力の反力による摺動摩擦抵抗はローラ109の作用により低減され駆動力の損失を回避することができる。   As a result, the pressure contact portion 101b of the vibrator 101 is pressed against the sliding member 107, generates a relative driving force by the action of the high frequency voltage applied to the vibrator 101, and uses the vibrator 101 itself as an optical axis. It is possible to advance and retreat along. At this time, the sliding frictional resistance due to the reaction force of the pressing force is reduced by the action of the roller 109, and the loss of the driving force can be avoided.

以上、本発明に関わる超音波モータ及び超音波モータを備えた光学機器に関してその具体例を詳述したが、本発明は上記実施例に限定されるものではなく、請求項記載の範囲に示したものであればどのような形態をとることも可能である。   Specific examples of the ultrasonic motor and the optical apparatus including the ultrasonic motor according to the present invention have been described in detail above. However, the present invention is not limited to the above-described embodiments, and is shown in the scope of the claims. Any form can be used.

振動子101を摺動部材107へ加圧する連結部材103は加圧手段と一体または別体とすることができる。 The connecting member 103 that pressurizes the vibrator 101 against the sliding member 107 can be integrated with or separate from the pressing means.

光学機器の制御性、信頼性を向上させる。   Improve the controllability and reliability of optical equipment.

101 振動子
102 基台
103、401 連結部材
104、106 ねじ
105 支持部材
107 摺動部材
108 ローラホルダ
109 ローラ
110 ローラピン
111 レンズホルダ
112,113 ガイドバー
114、403 加圧板
402 コイルバネ
101 vibrator 102 base 103, 401 connecting member 104, 106 screw 105 support member 107 sliding member 108 roller holder 109 roller 110 roller pin 111 lens holder 112, 113 guide bar 114, 113 pressure plate 402 coil spring

Claims (6)

高周波電圧の印加により振動する振動子と、
前記振動子が加圧され、前記振動子に対して相対的に移動自在な摺動部材と、
前記振動子が固定される基台と、
前記基台を保持し、前記振動子を進退自在に支持する支持部材と、
前記基台と前記支持部材を連結する連結部材とを有し、
前記連結部材は前記基台に固定されるとともに、前記支持部材は前記連結部材に固定されることにより連結がなされ、
前記連結部材は、前記摺動部材の移動方向にはガタなく、かつ前記振動子が前記摺動部材に加圧される方向には可撓性を有するように前記基台と前記支持部材を連結していることを特徴とする振動モータ。
A vibrator that vibrates when a high-frequency voltage is applied;
A sliding member in which the vibrator is pressurized and relatively movable with respect to the vibrator;
A base on which the vibrator is fixed;
A support member that holds the base and supports the vibrator so as to freely advance and retract;
A connecting member that connects the base and the support member;
The connection member is fixed to the base, and the support member is connected to the connection member to be connected,
The connecting member connects the base and the supporting member so that there is no backlash in the moving direction of the sliding member and flexibility in the direction in which the vibrator is pressed against the sliding member. A vibration motor characterized by that.
請求項1に記載の振動モータにおいて、
前記連結部材は前記振動子と前記摺動部材が相対的に移動する方向へ延設される腕部を有し、
該腕部の先端が前記基台に固定されるとともに、
前記振動子を前記摺動部材へ加圧する加圧手段を備え、前記加圧手段は前記連結部材と一体または別体に設けられていることを特徴とする振動モータ。
The vibration motor according to claim 1,
The connecting member has an arm portion extending in a direction in which the vibrator and the sliding member relatively move,
The tip of the arm is fixed to the base,
A vibration motor comprising pressurizing means for pressurizing the vibrator to the sliding member, wherein the pressurizing means is provided integrally with or separately from the connecting member.
請求項2に記載の振動モータにおいて、
前記加圧手段は前記連結部材と一体に設けられていることを特徴とする振動モータ。
The vibration motor according to claim 2,
The vibration motor characterized in that the pressurizing means is provided integrally with the connecting member.
請求項2または3に記載の振動モータにおいて、
前記連結部材に設けられた前記腕部は少なくとも2か所に配置され、
前記加圧手段は、2か所の前記腕部の間に配置されることを特徴とする振動モータ。
The vibration motor according to claim 2 or 3,
The arm portions provided on the connecting member are disposed in at least two places,
The vibration motor is characterized in that the pressurizing means is disposed between the two arm portions.
請求項1乃至4のいずれか1項に記載の振動モータにおいて、
前記振動モータは、前記振動子が高周波電圧の印加により超音波振動する超音波モータであることを特徴とする振動モータ。
The vibration motor according to any one of claims 1 to 4,
The vibration motor is an ultrasonic motor in which the vibrator is ultrasonically vibrated by application of a high frequency voltage.
請求項1乃至5のいずれか1項に記載の振動モータと、
ガイドバーにより光軸方向に移動自在に保持され、合焦用レンズを有するレンズホルダとを備え、
前記摺動部材は前記振動子と前記レンズホルダとの間に挟持され、前記振動モータの駆動により前記レンズホルダが前記摺動部材の移動方向に移動することで、前記合焦用レンズが光軸方向に移動して合焦動作をすることを特徴とする光学機器。
A vibration motor according to any one of claims 1 to 5,
A lens holder that is held movably in the optical axis direction by a guide bar and has a focusing lens;
The sliding member is sandwiched between the vibrator and the lens holder, and the lens is moved in the moving direction of the sliding member by driving the vibration motor, whereby the focusing lens is moved to the optical axis. An optical apparatus characterized by moving in a direction to perform a focusing operation.
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