CN104749223B - A kind of hydrogen gas sensor monitored on-line for oil-filled transformer density of hydrogen and its application method - Google Patents
A kind of hydrogen gas sensor monitored on-line for oil-filled transformer density of hydrogen and its application method Download PDFInfo
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
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Abstract
The present invention relates to a kind of hydrogen gas sensor monitored on-line for oil-filled transformer density of hydrogen and its application method, sensor is popped one's head in including hydrogen sensitive, hydrogen sensitive probe includes the hydrogen sensitive chip directly contacted with transformer oil, hydrogen sensitive chip includes substrate, the electric insulation layer being arranged in substrate and the hydrogen sensitive element being arranged on electric insulation layer, and hydrogen sensitive element surface, which is provided with, to be used to suppress the hydrogen selectivity coating that gas molecule in addition to the hydrogen is diffused through.Inventive sensor can be contacted directly with transformer oil, save gas and oil separating plant, improved the reliability of sensor, reduced maintenance cost；On the other hand, using hydrogen selectivity coating, sensor is eliminated to CO, C2H2And C2H4Deng the cross response of failure gas, the density of hydrogen and its rate of change in transformer oil can continuously, be reliably monitored, reliable basis are provided for the accurate operation conditions for understanding transformer.
Description
Technical field
It is more particularly to a kind of to be used for oil-filled transformer hydrogen the invention belongs to oil-filled transformer on-line monitoring technique field
The hydrogen gas sensor and its application method of gas concentration on-line monitoring.
Background technology
Transformer fault is to cause the main cause that power plant, transformer station are stopped transport and local power grid accident occurs, and reduces and becomes
The failure of depressor, it is meant that improve the economic benefit of power network, it is ensured that economic security of the country and social stability.Therefore, transformer exists
Line monitoring is the important component of electrical equipment online supervision system.
The concentration of ordinary dissolution of on-line monitoring oil-filled transformer failure gas is the important composition of transformer online monitoring system
Part.The monitoring of transformer oil failure gas routinely uses laboratory periodic sampling, detects molten in oil using gas-chromatography instrument
The failure gas of solution, has that operation link is more, waste time and energy, the shortcomings of test period is long, to develop faster failure can not and
Shi Jinhang early warning.Therefore, the large power plant transformer of construction of setting up the project in recent years supports the use online inspection in design and installation mostly
Device is surveyed, to be monitored in real time to gas dissolved in transformer oil etc..
When producing hot-spot, shelf depreciation and arc discharge in oil-filled transformer, transformer oil therein, insulation
Material may be broken down into gas, mainly including H2、CO、CO2、CH4、C2H2、C2H4And C2H6Seven kinds of failure gas.
More or less H can be all produced under all malfunctions of oil-filled transformer2, H2The obvious increase of content is transformer
It is existing or the reliable markers of various failures will be caused.H2Low soluble and high diffusibility in oil make it in low concentration just by
Detect, pass through online H2Measurement apparatus accurately measures the H dissolved in oil2, in its most starting stage can be to be detected by initial failure
Measure and, scientific basis can not only be provided for the repair based on condition of component of transformer, and non-programmed halt and calamity can be reduced or avoided
The generation of difficult sexual behavior event, and the life-span of transformer can be extended.
The solution of prior art, for example, Shenzhen is difficult to understand special fast in the C of patent CN 1261195, describes a kind of oil gas
Seperation film, its manufacture method and the gas sensor being made of it, Oil-gas Separation film is one of core component of sensor, is passed through
Oil-gas Separation film separates the failure gas dissolved in oil, failure gas can just be surveyed using fuel cell sensor
Amount.Oil-gas Separation film processing technology in the patent is complicated, and the intrinsic problem of aging of Oil-gas Separation film causes its working life
Also it is difficult to the application demand for meeting transformer, considerably increases the maintenance cost of system, and reduce the reliability of system operation.
On the other hand, fuel cell sensor is to H2、CO、CH4Deng failure gas there is cross sensitivity the problem of, that is to say, that fuel
Battery sensor can not be simultaneously realized to H2Selectivity, and the patent is not described solution.
In the B of patent CN 102033041, describe a kind of based on fiber Bragg grating sensor transformer fault prison
Examining system.The system is by portions such as gas sensor array, Fiber Bragg Grating FBG demodulated equipment and transformer fault monitoring center
It is grouped into.System inhales hydrogen deformation using five nickel lanthanums so that the wavelength of light changes in Fiber Bragg Grating FBG, so as to realize
The detection of density of hydrogen.But, fiber-optic grating sensor normal work needs the appointed conditions such as light source, fiber grating demodulation to match somebody with somebody
Set, therefore, system composition is complicated, cost is high, and arranges that related corollary equipment is obviously the increase in the set around transformer
The limitation and complexity of system application.
In the A of patent CN 104406885, Wang Hongbin etc., which is described, dissolves hydrogen limit value biography in a kind of electric power transformer oil
Sensor and detecting system.System that employs the fiber-optic grating sensor based on palladium, body after hydrogen is absorbed using hydrogen sensitized metal palladium
Product expansion causes fiber grating flexural deformation, so as to produce wavelength change, and has one between wavelength variable quantity and density of hydrogen
Fixed proportionate relationship, is achieved in the purpose of hydrogen measurement.But, on the one hand the problem of patent has several aspects use
Pure palladium is unstable as the quick material of hydrogen, particularly when hydrogen bias is higher, there is irreversible hydrogen embrittlement process, causes palladium film to take off
Fall；On the other hand, the isallobaric device failure gas of CO easily produces competitive adsorption on palladium film surface, occupies the absorption of hydrogen molecule
Position, causes sensor to the sensitivity decrease of hydrogen, the speed of response is slack-off.
The content of the invention
The technical problems to be solved by the invention are to overcome the deficiencies in the prior art to be used for oil-filled transformer there is provided one kind
The hydrogen gas sensor of density of hydrogen on-line monitoring.
The present invention also provides a kind of method of use hydrogen gas sensor monitoring hydrogen concentration.
To solve above technical problem, the present invention is adopted the following technical scheme that：
A kind of hydrogen gas sensor monitored on-line for oil-filled transformer density of hydrogen, the hydrogen gas sensor includes hydrogen
Gas sensing probe and the circuit module that electric signal is changed and outwards exported for signal, hydrogen sensitive probe include one end and
The cable arrange-line of the circuit module electrical connection, the hydrogen sensitive probe also includes the other end electricity with the cable arrange-line
Gas connection, the hydrogen sensitive chip directly contacted with transformer oil, the hydrogen sensitive chip include substrate, are arranged on the base
Electric insulation layer on bottom and the hydrogen sensitive element being arranged on the electric insulation layer, the hydrogen sensitive element surface are set
There is the hydrogen selectivity coating diffused through for the gas molecule suppressed in addition to the hydrogen.
Further, the change of resistance or I-E characteristic is produced after the hydrogen sensitive element is contacted with hydrogen, from
And reach the effect of detection hydrogen.The hydrogen sensitive element includes the sensing first being separately positioned on the electric insulation layer
Second sensing element of the second density of hydrogen scope of the first sensing element and sensing of density of hydrogen scope, first hydrogen is dense
Degree scope is 1000~20000ppm, and the second density of hydrogen scope is 10~1000ppm.
Preferably, the surface of first sensing element and second sensing element is respectively equipped with the hydrogen selectivity
Coating.
Preferably, first sensing element is catalytic metal film resistor, and second sensing element is catalytic metal
Thin Film MOS pipe, the material of the two is respectively palladium-evanohm, palladium-nickel alloy or palladium-billon.Make first sensing element
It is selected from the material of the second sensing element to metal material of the hydrogen with catalysis, decomposition, it is preferable that the material of the two
Respectively palladium-evanohm, palladium-nickel alloy or palladium-billon.
Further, the hydrogen selectivity coating can allow hydrogen molecule free diffusing, can suppress or stop dehydrogenation
Other failure gas molecules outside gas are diffused through, and the intersection that other failure gas are reduced or eliminated to hydrogen sensitive element is quick
Sense, improves the measurement accuracy of hydrogen gas sensor, wherein, other failure gas include CO, CH4、C2H2、C2H4、C2H6Deng gas.
Preferably, the hydrogen selectivity coating is SiO2Film layer, Al2O3Film layer, Si3N4One kind in film layer or the two
Composite deposite above.Most preferably, the hydrogen selectivity coating is SiO2Film layer, Al2O3Film layer, Si3N4Film layer three's
Composite deposite.
Further, the hydrogen sensitive chip also include be arranged on the electric insulation layer be used for control the hydrogen
The operating temperature of sensing element is in the temperature control unit of steady temperature.
The temperature control unit includes the heating element heater being separately positioned on the electric insulation layer and TEMP member
Part.
The heating element heater is metallic resistance formula adding thermal resistance, and its material is selected from the stable material of physicochemical properties, excellent
Choosing gold or platinum, are most preferably gold.The temperature-sensing element is metal film temperature detecting resistance, and its material, which is selected from, has high electrical resistance temperature
Spend coefficient and extremely stable material, preferably platinum, nickel or copper, most preferably platinum.
Further, the electric insulation layer is used for the electric insulation of the substrate and thin-film device, it is preferable that the electricity
Edge layer of drawing last breath is SiO2Film layer, Si3N4A kind of or composite film of the two in film layer.Due to H2Molecule easily spreads, adsorbed
In SiO2In material, hydrogen gas sensor response balance time lengthening is caused, bad stability, the present invention is preferably, described electric
Insulating barrier is SiO2Film layer, Si3N4The composite bed of both film layers.
Preferably, the preferred silicon of the material of the substrate.
Further, the hydrogen gas sensor also include with tube chamber shell and with having that the shell is fixedly connected
The shell of inner chamber, the inner chamber of the shell is connected with the tube chamber of the shell, the institute of the circuit module and the cable arrange-line
The interior intracavitary that one end is located at the shell is stated, the other end of the cable arrange-line is fixedly installed on described by fixed mechanism
In the tube chamber of shell, the hydrogen sensitive chip is suspended in the tube chamber of the shell.
Preferably, the fixed mechanism includes the first fixed sleeving with cavity, is set in first fixed sleeving
Outside and positioned at the second fixed sleeving between first fixed sleeving and the shell and it is set in second fixed sleeving
Sealing ring that is outer and being located between second fixed sleeving and the shell, one end of first fixed sleeving is provided with envelope
Lid, the other end of the cable arrange-line is located in the cavity of first fixed sleeving, and described the one of the cable arrange-line
End through it is described capping and the cable arrange-line be fixedly installed with first fixed sleeving, the hydrogen sensitive chip is suspended in
In the cavity of first fixed sleeving.
Preferably, the circuit module is provided with the communication interface for being used for being connected with other equipment.The other equipment is such as
Computer.
The hydrogen gas sensor also includes being arranged on the intraluminal for protecting the hydrogen sensitive chip of the shell
Screen cloth and be arranged on the intraluminal of the shell and be used to fix the pressure ring of the screen cloth, the fixed mechanism, screen cloth, pressure ring
Set gradually in the tube chamber of the shell along the length direction of the shell.
The another technical scheme that the present invention takes is：One kind is supervised online using above-mentioned for oil-filled transformer density of hydrogen
The method of the hydrogen gas sensor monitoring hydrogen concentration of survey, the described method comprises the following steps：
（1）By in the hydrogen sensitive chip insertion transformer oil of hydrogen gas sensor so that the hydrogen sensitive chip and institute
State transformer oil directly to contact, and control the hydrogen sensitive element of the hydrogen sensitive chip to be in constant operating temperature；
（2）The circuit module of hydrogen gas sensor becomes the resistance variations of the hydrogen sensitive element or I-E characteristic
Change the analog signal output for changing into voltage, electric current, the resistance variations of the hydrogen sensitive element, current-voltage characteristic curve
Change direct proportionality with the density of hydrogen in the transformer oil；
（3）The analog signal that the circuit module is exported is sent to computer, and by conversion, the change is monitored in real time
Density of hydrogen and its rate of change in depressor oil.
Due to the implementation of above-mentioned technical proposal, the present invention has the following advantages that compared with prior art：
The hydrogen gas sensor of the present invention is expanded using the gas molecule for only allowing hydrogen molecule to diffuse through, suppressing in addition to the hydrogen
The hydrogen selectivity coating technology passed through is dissipated, using selection suppression mechanism of the hydrogen selectivity coating to gas molecule, is eliminated
Hydrogen gas sensor is to CO, C2H2、C2H4Deng the cross sensitivity of gas, the measurement accuracy of hydrogen in oil is improved, can be accurately reflected
Density of hydrogen and variation tendency in transformer oil, reliable basis are provided for the accurate operation conditions for understanding transformer.
The hydrogen gas sensor configuration of the present invention is simple, directly hydrogen sensitive probe can be placed directly within transformer oil, nothing
Gas and oil separating plant and without movable member, improves the reliability and stability of plant running.
Hydrogen sensitive probe is placed directly within transformer oil by the hydrogen gas sensor of the present invention, it is not necessary to Oil-gas Separation film pair
Failure gas is separated, and solves the short key issue of low separation efficiency, the service life brought using Oil-gas Separation film.
The hydrogen gas sensor of the present invention is available for hydrogen in the hydrogen and conservator failure gas dissolved in oil-filled transformer oil
Measurement etc., density of hydrogen can survey scope for 10~20000ppm.
Brief description of the drawings
Fig. 1 is the stereogram of hydrogen gas sensor of the present invention；
Fig. 2 is the explosive view of hydrogen gas sensor of the present invention；
Fig. 3 is the explosive view of the hydrogen sensitive probe of hydrogen gas sensor of the present invention；
Fig. 4 is installation diagram when hydrogen gas sensor of the present invention is used for monitoring hydrogen concentration；
In figure：1st, hydrogen gas sensor；2nd, hydrogen sensitive is popped one's head in；3rd, circuit module；4th, cable arrange-line；5th, hydrogen sensitive core
Piece；6th, shell；7th, the first fixed sleeving；8th, the second fixed sleeving；9th, sealing ring；10th, cover；11st, shell；12nd, it is open；13、
Screen cloth；14th, pressure ring；15th, transformer；16th, transformer oil；17th, connecting line.
Embodiment
Below by specific embodiment, the invention will be further described.
As shown in Fig. 1 ~ 3, a kind of hydrogen gas sensor 1 monitored on-line for oil-filled transformer density of hydrogen, the hydrogen
Sensor 1 includes hydrogen sensitive probe 2 and the circuit module 3 of electric signal is changed and outwards exported for signal, and hydrogen sensitive is visited
First 2 include the cable arrange-line 4 that one end is electrically connected with circuit module 3, other end electrical connection and transformation with cable arrange-line 4
The hydrogen sensitive chip 5 that directly contacts of device oil, hydrogen sensitive chip 5 include substrate, the electric insulation layer being arranged in substrate and
The hydrogen sensitive element on electric insulation layer is arranged on, hydrogen sensitive element surface is provided with the gas point for being used to suppress in addition to the hydrogen
The hydrogen selectivity coating that son is diffused through.
In this example, cable arrange-line 4 is flexible flat cable winding displacement.
In this example, hydrogen sensitive element includes sensing the first density of hydrogen scope being separately positioned on electric insulation layer
First sensing element and sensing the second density of hydrogen scope the second sensing element, the first density of hydrogen scope be 1000~
20000ppm, the second density of hydrogen scope is 10~1000ppm.
The surface of first sensing element and the second sensing element is respectively equipped with hydrogen selectivity coating.First sensing element is
Catalytic metal film resistor, the second sensing element is catalytic metal Thin Film MOS pipe, and the material of the two is palladium-evanohm.
In this example, hydrogen selectivity coating is the SiO for being successively set on hydrogen sensitive element surface2Film layer and Al2O3Film
Layer.
In the present invention, hydrogen sensitive chip 5 also controls hydrogen sensitive element including being arranged on being used on electric insulation layer
Operating temperature be in steady temperature temperature control unit.Temperature control unit includes being separately positioned on electric insulation layer
Heating element heater and temperature-sensing element.The material of heating element heater is gold.The material of temperature-sensing element is platinum.
In this example, electric insulation layer is SiO in the one side for be successively set on substrate2Film layer and Si3N4Film layer.
The hydrogen gas sensor 1 also includes the shell 6 with tube chamber and the shell with inner chamber being fixedly connected with shell 6
11, the inner chamber of shell 11 is connected with the tube chamber of shell 6, and one end of circuit module 3 and cable arrange-line 4 is located at the inner chamber of shell 11
Interior, the other end of cable arrange-line 4 is fixedly installed on by fixed mechanism in the tube chamber of shell 6, and hydrogen sensitive chip 5 is suspended in pipe
In the tube chamber of shell 6.
Specifically, fixed mechanism includes the first fixed sleeving 7 with cavity, is set in the outer and position of the first fixed sleeving 7
The second fixed sleeving 8 between the first fixed sleeving 7 and shell 6 and to be set in the second fixed sleeving 8 outer and consolidate positioned at second
Determine the sealing ring 9 between sleeve pipe 8 and shell 6, one end of the first fixed sleeving 7 is provided with capping 10, and one end of cable arrange-line 4 is passed through
Simultaneously cable arrange-line 4 is fixedly installed with the first fixed sleeving 7 for capping 10, and the other end of cable arrange-line 4 is located at the first fixed sleeving 7
In cavity, hydrogen sensitive chip 5 is suspended in the cavity of the first fixed sleeving 7.The material of sealing ring 9 is oil resistant fluorubber.The
The setting capping 10 of one fixed sleeving 7 is to prevent transformer oil by the cavity of the first fixed sleeving 7 further to close
The direction of circuit module 3 is flowed, and the gap between the first fixed sleeving 7 and the second fixed sleeving 8 uses sealant sealing.
Circuit module 3 is provided with the communication interface for being used for being connected with other equipment, shell 11 and offers opening 12, communicates
Interface is connected through opening 12 with other equipment.Other equipment can be computer.
Hydrogen gas sensor 1 also include be arranged on shell 6 it is intraluminal be used for protect hydrogen sensitive chip 5 screen cloth 13 and
It is arranged on the intraluminal pressure ring 14 for fixed grit 13 of shell 6, the pipe of fixed mechanism, screen cloth 13, pressure ring 14 in shell 6
Length direction of the intracavitary along shell 6 is set gradually.
The preparation method of above-mentioned hydrogen sensitive chip 5, comprises the following steps：
（1）Selection thickness is used as substrate, the Ω cm of resistivity 1~3 for 0.5mm p-type single crystalline Si；
（2）By thermal oxidation method, in substrate surface oxidation generation SiO2Film layer, 50~100nm of thickness, then in SiO2Film
The Si that surface is deposited by CVDs such as LPCVD or PECVD3N4Film layer, 10~50nm of thickness, is used as electric insulation layer；
（3）By photoetching technique, temperature-sensing element mask pattern is made in electric insulation layer surface, magnetron sputtering is selected
Or electron beam evaporation deposits platinum film, 50~200nm of thickness, resistance is used as temperature-sensing element in 200~500 Ω；
（4）Heating element heater mask pattern, selection magnetron sputtering or electricity are made in electric insulation layer surface by photoetching technique
Beamlet evaporation deposition golden film, 200~500nm of thickness, resistance is used as heating element heater in 10~100 Ω；
（5）The mask pattern of catalytic metal resistor nano thin-film, choosing are made in electric insulation layer surface by photoetching technique
Select the double targets of magnetron sputtering to splash altogether, deposit prepares palladium-evanohm film, 50~100nm of thickness, resistance is made in 500~1000 Ω
To detect the catalytic metal film resistor of the first density of hydrogen scope；
（6）The mask pattern of metal-oxide-semiconductor is made in electric insulation layer surface by photoetching technique, the double targets of magnetron sputtering splash altogether,
Deposit prepares palladium-evanohm, and 10~20nm of thickness forms Thin Film MOS pipe；
（7）Ti/Au electrodes are deposited at the back side of substrate, another electrode zone of metal-oxide-semiconductor is formed；
（8）By photoetching technique electric insulation layer surface make wirebonding region mask pattern, electrode Ti/Au,
Form wire bonding area；
（9）By LPCVD technologies in catalytic metal film resistor and Thin Film MOS pipe electrode 5~50nm of surface deposition SiO2
Film, then deposits 2~20nm Al using electron beam evaporation technique2O3Film, forms hydrogen selectivity coating；
（10）Silicon chip basal cleavages are one single chip by emery wheel scribing；
（11）Core body back electrode is welded in by probe base electrode zone by eutectic welding technique；
（12）By gold wire bonder, using spun gold by the wire bonding area of chip surface and the respective electrode of probe base
Connection, forms electrical interconnection.
It is typically to make multiple hydrogen sensitive chips, Ran Houjing simultaneously in whole silicon chip substrate in above-mentioned preparation method
Cross scribing breaking machine and multiple hydrogen sensitive chips in substrate are separated into single hydrogen sensitive chip.
The method monitored on-line using above-mentioned hydrogen gas sensor in oil-filled transformer density of hydrogen, is comprised the following steps：
（1）Hydrogen gas sensor is installed on the transformer, as shown in figure 4, by the hydrogen sensitive chip of hydrogen gas sensor 1
Inserted by the reserved oilhole of transformer 15 in transformer oil 16 so that hydrogen sensitive chip is directly contacted with transformer oil 16,
Hydrogen gas sensor 1 is threadedly coupled with the reserved oilhole of transformer 15 using external screw thread cutting ferrule, and it is anti-by other auxiliary elements
Only transformer oil seepage, is connected the communication interface of computer and hydrogen gas sensor with connecting line 17；
（2）During test, the operating temperature of the hydrogen sensitive element of hydrogen sensitive chip 5 is kept to be in steady temperature, transformation
Hydrogen molecule in device oil 16 diffuses to the surface of hydrogen sensitive chip 5, causes the first sensing element palladium-evanohm film resistor member
Part resistance produces change, and the second sensing element palladium-evanohm Thin Film MOS tube current-voltage characteristic produces change, hydrogen sensing
The electrical characteristic change of part and the density of hydrogen change direct proportionality in transformer oil 16, wherein, the constant temperature of chip 5 passes through
Temperature control unit is controlled；
（3）The circuit module 3 of hydrogen gas sensor 1 turns the resistance variations of hydrogen sensitive element, I-E characteristic change
The analog signal output of formation voltage, electric current, the analog signal for then exporting circuit module 3 is sent to computer, and is passed through
Conversion, monitors density of hydrogen and its rate of change in transformer oil 16 in real time.
The failure gas such as Oil-gas Separation film of the prior art and CO are overcome using the hydrogen gas sensor of the present invention to cause
The single-minded sex chromosome mosaicism of hydrogen, simplify sensor construction, improve hydrogen gas sensor measurement accuracy, and effectively reduce sensor
Safeguard and use cost.
Using the hydrogen gas sensor of the present invention, it can directly be contacted with transformer oil, eliminate gas and oil separating plant, improve
The reliability of device, reduces maintenance cost；On the other hand, hydrogen selectivity coating technology is employed, sensor pair is eliminated
CO、C2H2And C2H4Deng the cross response of failure gas, density of hydrogen and its change in transformer oil can continuously, be reliably monitored
Change speed, reliable basis are provided for the accurate operation conditions for understanding transformer.
The hydrogen gas sensor of the present invention is without complicated auxiliary facility or equipment, and installation operation is simple.
The hydrogen gas sensor of the present invention is available for hydrogen in the hydrogen and conservator failure gas dissolved in oil-filled transformer oil
Measurement etc., density of hydrogen can survey scope for 10~20000ppm.
The present invention is described in detail above, its object is to allow the personage for being familiar with this art to understand this
The content of invention is simultaneously carried out, and it is not intended to limit the scope of the present invention, and the invention is not restricted to above-mentioned implementation
Example, the equivalent change or modification that all Spirit Essences according to the present invention are made, should all be included within the scope of the present invention.
Claims (8)
1. a kind of hydrogen gas sensor monitored on-line for oil-filled transformer density of hydrogen, the hydrogen gas sensor includes hydrogen
Sensing probe and the circuit module that electric signal is changed and outwards exported for signal, the hydrogen sensitive probe include one end and institute
State the cable arrange-line of circuit module electrical connection, it is characterised in that：The hydrogen sensitive probe also includes and the cable arrange-line
Other end electrical connection, the hydrogen sensitive chip that is directly contacted with transformer oil, the hydrogen sensitive chip including substrate, set
The hydrogen sensitive element put electric insulation layer on the substrate and be arranged on the electric insulation layer, the hydrogen sensitive
Element surface, which is provided with, to be used to suppress the hydrogen selectivity coating that gas molecule in addition to the hydrogen is diffused through；
The hydrogen gas sensor also includes the shell with tube chamber and the shell with inner chamber being fixedly connected with the shell, institute
The inner chamber for stating shell is connected with the tube chamber of the shell, and described one end of the circuit module and the cable arrange-line is positioned at described
The interior intracavitary of shell, the other end of the cable arrange-line is fixedly installed on by fixed mechanism in the tube chamber of the shell,
The hydrogen sensitive chip is suspended in the tube chamber of the shell；
The fixed mechanism includes the first fixed sleeving with cavity, is set in outside first fixed sleeving and positioned at described
The second fixed sleeving between first fixed sleeving and the shell and to be set in second fixed sleeving outer and positioned at described
Sealing ring between second fixed sleeving and the shell, one end of first fixed sleeving is provided with capping, the cable row
The other end of line is located in the cavity of first fixed sleeving, and described one end of the cable arrange-line passes through the capping
And the cable arrange-line is fixedly installed with first fixed sleeving, the hydrogen sensitive chip is suspended in first fixed cover
In the cavity of pipe.
2. hydrogen gas sensor according to claim 1, it is characterised in that：The hydrogen sensitive element includes being separately positioned on
The second density of hydrogen scope of the first sensing element and sensing of sensing the first density of hydrogen scope on the electric insulation layer
Second sensing element, the first density of hydrogen scope be 1000~20000ppm, the second density of hydrogen scope be 10~
1000ppm。
3. hydrogen gas sensor according to claim 2, it is characterised in that：First sensing element and second sensing
The surface of element is respectively equipped with the hydrogen selectivity coating.
4. the hydrogen gas sensor according to Claims 2 or 3, it is characterised in that：First sensing element is catalytic metal
Film resistor, second sensing element be Thin Film MOS pipe, the material of the two be respectively palladium-evanohm, palladium-nickel alloy or palladium-
Billon.
5. the hydrogen gas sensor according to claim 1 or 3, it is characterised in that：The hydrogen selectivity coating is SiO2Film
Layer, Al2O3Film layer, Si3N4A kind of or more than the two composite deposite in film layer.
6. hydrogen gas sensor according to claim 1, it is characterised in that：The hydrogen sensitive chip also includes being arranged on institute
State the temperature control unit for being used to control the operating temperature of the hydrogen sensitive element to be in steady temperature of electric insulation layer.
7. the hydrogen gas sensor according to claim 1 or 2 or 6, it is characterised in that：The electric insulation layer is SiO2Film layer,
Si3N4A kind of or composite film of the two in film layer.
8. a kind of usage right requires being supervised online for oil-filled transformer density of hydrogen described in any one of 1 ~ 7 claim
The method of the hydrogen gas sensor monitoring hydrogen concentration of survey, it is characterised in that：It the described method comprises the following steps：
（1）By in the hydrogen sensitive chip insertion transformer oil of hydrogen gas sensor so that the hydrogen sensitive chip becomes with described
Depressor oil is directly contacted, and controls the hydrogen sensitive element of the hydrogen sensitive chip to be in constant operating temperature；
（2）The circuit module of hydrogen gas sensor turns the resistance variations of the hydrogen sensitive element or I-E characteristic change
The analog signal of formation voltage, electric current, resistance variations or the I-E characteristic change of the hydrogen sensitive element becomes with described
Density of hydrogen change in depressor oil is proportional；
（3）The analog signal that the circuit module is exported is sent to computer, and by conversion, the transformer is monitored in real time
Density of hydrogen and its rate of change in oil.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510175955.5A CN104749223B (en) | 2015-04-15 | 2015-04-15 | A kind of hydrogen gas sensor monitored on-line for oil-filled transformer density of hydrogen and its application method |
| PCT/CN2015/099403 WO2016165398A1 (en) | 2015-04-15 | 2016-02-29 | Hydrogen gas sensor for online monitoring of hydrogen gas concentration in oil-immersed transformer and method for using same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510175955.5A CN104749223B (en) | 2015-04-15 | 2015-04-15 | A kind of hydrogen gas sensor monitored on-line for oil-filled transformer density of hydrogen and its application method |
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| CN105445425B (en) * | 2015-11-27 | 2017-12-05 | 中国电子科技集团公司第四十八研究所 | Single hydrogen sensor of oil-filled transformer |
| CN105318915B (en) * | 2015-12-07 | 2018-01-19 | 苏州正秦电气有限公司 | A kind of moisture, hydrogen content and temperature transmitter suitable for transformer state on-line monitoring |
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