CN204154671U - A kind of many redundancies hydrogen gas sensor - Google Patents

A kind of many redundancies hydrogen gas sensor Download PDF

Info

Publication number
CN204154671U
CN204154671U CN201420455974.4U CN201420455974U CN204154671U CN 204154671 U CN204154671 U CN 204154671U CN 201420455974 U CN201420455974 U CN 201420455974U CN 204154671 U CN204154671 U CN 204154671U
Authority
CN
China
Prior art keywords
pcb
pedestal
hydrogen
circuit board
printed circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201420455974.4U
Other languages
Chinese (zh)
Inventor
王玉明
谢贵久
颜志红
景涛
王栋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CETC 48 Research Institute
Original Assignee
CETC 48 Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CETC 48 Research Institute filed Critical CETC 48 Research Institute
Priority to CN201420455974.4U priority Critical patent/CN204154671U/en
Application granted granted Critical
Publication of CN204154671U publication Critical patent/CN204154671U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

The utility model discloses a kind of many redundancies hydrogen gas sensor, mainly for detection of the composition existed in air-flow, belong to gas sensor.Described many redundancies hydrogen gas sensor comprises pedestal, is contained in the shell on pedestal, sealing adaptor and sensor probe, circuit carriers, PCB printed circuit board (PCB), electric connector mount pad; Described pedestal is provided with detect aperture, and described sealing adaptor, circuit carriers and PCB printed circuit board (PCB) are all positioned at shell, and described PCB printed circuit board (PCB) is electrically connected with sensor probe; Described pedestal sidewall has air intake opening and gas outlet, and this air intake opening is communicated with by gas port with gas outlet, and described gas port is communicated with described detect aperture.The utility model reliability is high, the life-span is long, lightweight, reduce because rugged surroundings and oneself factor cause the probability of fault, within the whole system cycle of operation to greatest extent, can the concentration change information of Obtaining Accurate hydrogen in real time, structure is simple, with low cost, convenient and practical.

Description

A kind of many redundancies hydrogen gas sensor
Technical field
The utility model relates to a kind of sensor for detecting the composition existed in air-flow.More specifically, the utility model relates to a kind of many redundancies hydrogen gas sensor encapsulating structure.
Background technology
In order to ensure in various hydrogeneous industrial processes, the use of hydrogen as energy source, the security of the application aspect such as transfer and storage, the hydrogen gas sensor of development good reliability detects hydrogen gas leakage and density of hydrogen etc., become the current problem needing solution badly, study the important research direction that high performance many redundancies diaphragm type hydrogen gas sensor has also become sensor field.
Current, the hydrogen gas sensor detected for density of hydrogen is many based on principles such as catalytic combustion-type, galvanochemistry type and sintered oxide types, all there is comparatively serious zero point drift in product, easily poisoning, long continuous operation reliability, poor stability, serviceable life is limited, selectivity, environment resistant interference performance difference etc., the severe complex environment of more difficult adaptation long continuous operation.
Chinese invention patent CN 103760195A discloses a kind of manufacture method of polarium film hydrogen gas sensor core body, although the method achieves the stability that density of hydrogen detects, cannot reach the reliability of high sensitivity and long continuous operation; Chinese invention patent CN101158662A provides a kind of Mg and Ni alloy firm hydrogen gas sensor, and fast response time, highly sensitive, measurement range extensively, do not need frequent check, reusable, but stability is not high.
Therefore, research has many redundancies film hydrogen gas sensor of the features such as high sensitivity, high reliability and high stability, meets the demand that the fields such as current oil chemical industry, Aeronautics and Astronautics are detected hydrogen, has important practical significance.
Utility model content
For research and development have the hydrogen gas sensor of reliability of stability and high sensitivity, long continuous operation concurrently, the utility model aims to provide that a kind of reliability is high, the life-span is long, lightweight many redundancies hydrogen gas sensor, this hydrogen gas sensor reduces because rugged surroundings and oneself factor cause the probability of fault to greatest extent, within the whole system cycle of operation, can the concentration change information of Obtaining Accurate hydrogen in real time, structure is simple, with low cost, convenient and practical.
For achieving the above object, the utility model employing technical scheme is:
A kind of many redundancies hydrogen gas sensor, its design feature comprises pedestal, is contained in the shell on pedestal, is positioned at the sealing adaptor of shell, circuit carriers, sensor probe and PCB printed circuit board (PCB); Described sealing adaptor and sensor probe are all fixed on pedestal, and the described circuit carriers for installing PCB printed circuit board (PCB) is fixed on sealing adaptor; In described sealing adaptor, circuit carriers, sensor probe and the integrated sealed package casing of PCB printed circuit board (PCB); Described cover top portion is equipped with the electric connector mount pad for installing electric connector; Described pedestal is provided with the detect aperture for sensor installation probe, and described sensor probe is electrically connected with PCB printed circuit board (PCB) by many lead-in wires; Described pedestal sidewall has air intake opening and gas outlet, and this air intake opening is communicated with by the gas port running through pedestal with gas outlet, and described gas port is communicated with described detect aperture.
It is below the utility model preferred technical scheme further.
Preferably, described sensor probe is multiple, and described pedestal has multiple detect aperture, and each sensor probe is arranged in a detect aperture, and each detect aperture is all communicated with gas port.
Further, described sensor probe is primarily of the quick core body of hydrogen, the flexible circuit be electrically connected with the quick core body of hydrogen, form for the ceramics pole of the quick core body of fixing hydrogen, non-metal shell; The quick core surface of described hydrogen adheres to many bridges resistance bars, and is electrically connected into flexible circuit and is integrated.
Described ceramics pole comprises two pieces for clamping the ceramic clamping element of the quick core body of hydrogen, and the quick core body of described hydrogen and ceramic clamping element have gap, make the quick core body of hydrogen be vacant state, and its pros and cons can expose in atmosphere completely; The quick core body of described hydrogen and ceramic clamping element integrally insert in described non-metal shell after fixing.
Described non-metal shell adopts the good macromolecular material of thermal insulation to make, and in outside wall surface, be provided with O type circle seal groove.
Described pedestal has three detect aperture, the sidewall of described pedestal is provided with the mounting interface of extension; Described air intake opening and gas outlet are plunger tube threaded sealing structure, and namely junction surface adopts O-ring seal radial compression, and adopts cap nut to be tightened; Described sensor probe is fixed in corresponding detect aperture by jump ring.
Described sealing adaptor comprises metal pedestal, is located at the multiple pin hole in metal pedestal, and by embedded 1 pin leads of glass sintering in each pin hole, gap filling glass matter sinters; Described pin leads is connected with described PCB printed circuit board (PCB), the transducing signal treatment circuit of this PCB printed circuit board (PCB) is brushed with dubbin, is provided with rubber blanket between described electric connector and electric connector mount pad.
Described PCB printed circuit board (PCB) has three pieces, and the bottom of every block PCB printed circuit board (PCB) is fixed in circuit carriers, and top is fixed on cover top portion.
Described pedestal, shell, circuit carriers, sealing adaptor, electric connector mount pad all adopt corrosion-resistant, density is little TC4 titanium machine-shaping.
Described base bottom face is provided with a blind hole, and this blind hole is equipped with the plug for conduction detection hole and gas port, and described plug upper surface is provided with annular groove, and described gas port is separated into two sections by blind hole.
Described sealing adaptor and pedestal under vacuum conditions electron beam welding are melted into one.
The utility model will be further described below.
A kind of many redundancies hydrogen gas sensor, mainly comprise pedestal, shell, circuit carriers, sealing adaptor, sensor probe, PCB printed circuit board (PCB), electric connector, electric connector mount pad, insulating mat, all component carries out integrated sealed encapsulation.Described sensor probe is arranged in pedestal detect aperture; Described sealing adaptor welds with described pedestal; Described circuit carriers is threaded with described sealing adaptor; Described shell welds with described pedestal; Described PCB printed circuit board (PCB) is fixedly mounted in described shell; Described electric connector mount pad welds with described shell; Described electric connector is fixedly mounted on described mount pad, the embedded rubber seal in composition surface.
Described pedestal is complicated profiled piece, and requirement on machining accuracy is higher, is provided with mounting interface, ring surveys interface, gas port, detect aperture etc.Described gas port is communicated with described ring and surveys interface turnover, and inlet, outlet interface is plunger tube thread seal form, and namely junction surface adopts O RunddichtringO radial compression, and adopts cap nut to be tightened; Described mounting interface is 4 lugs of uniform arrangement centered by described pedestal axle, for avoiding stress to concentrate, and equal rounding transition.Described detect aperture has 3, and uniform arrangement centered by described pedestal axle, is all communicated with described gas port.
Described sensor probe has 3, is arranged in 3 uniform detect aperture of described pedestal array respectively, adopts O type rubber ring plunger seal form and jump ring flexible fastening;
Described sensor probe shell adopts the good macromolecular material of thermal insulation, and is provided with O type circle seal groove.
Described sensor probe internal hydrogen sensitive core body is unsettled stuck, and pros and cons exposes in atmosphere completely;
Described sensor probe inside is sealed to outer lead place by embedding fluid sealant.
Described sealing adaptor is provided with 24 pin hole, and each pin hole, by embedded 1 pin leads of glass sintering technique, ensure that electrical insulating property and bore seal.
Described PCB printed circuit board (PCB) is provided with 4 mounting holes, and adopt screw one end to be fixed in described circuit carriers, the other end is fixed on shell upper installed surface, and the uniform arrangement of 3 pieces of described PCB printed circuit board (PCB)s is that triangle body is encapsulated in described enclosure.
Described PCB printed circuit sensor signal processing circuit is brushed with dubbin.
Above-mentioned many redundancies hydrogen gas sensor, wherein, described pedestal, shell, circuit carriers, sealing adaptor, electric connector mount pad all adopt corrosion-resistant, density is little TC4 titanium machine-shaping.
Above-mentioned many redundancies hydrogen gas sensor, wherein, described welding technology adopts electron beam melting to weld completely.
Compared with prior art, the utility model is by multiple hydrogen gas sensor Integration Design, has the advantages such as reliability is high, the life-span long, lightweight.Meanwhile, assembling form and the advanced welding method of compact conformation improve product vibration resistance, the thermal insulation when packing forms of core parts sensitive core body substantially increases product work.Thus reduce because rugged environment and oneself factor cause the probability of fault to greatest extent, within the whole system cycle of operation, guarantee that product can the concentration change information of Obtaining Accurate hydrogen in real time, structure is simple, with low cost, convenient and practical.
In a word, multiple functional unit assemblies of sensor of the present utility model are packaged into one, and especially core component sensing probe unique package method substantially increases properties of product.
Below in conjunction with drawings and Examples, the utility model is further elaborated.
Accompanying drawing explanation
The outside drawing of Fig. 1 a kind of many redundancies hydrogen gas sensor of the present utility model;
The wiring layout of Fig. 2 a kind of many redundancies hydrogen gas sensor of the present utility model;
The pedestal outside drawing of Fig. 3 a kind of many redundancies hydrogen gas sensor of the present utility model;
The pedestal cut-open view of Fig. 4 a kind of many redundancies hydrogen gas sensor of the present utility model;
The casing appearance figure of Fig. 5 a kind of many redundancies hydrogen gas sensor of the present utility model;
The circuit carriers outside drawing of Fig. 6 a kind of many redundancies hydrogen gas sensor of the present utility model;
The sealing adaptor outside drawing of Fig. 7 a kind of many redundancies hydrogen gas sensor of the present utility model;
The sensor probe decomposing schematic representation of Fig. 8 a kind of many redundancies hydrogen gas sensor of the present utility model.
Embodiment
A kind of many redundancies hydrogen gas sensor, as shown in Figure 1 and 2, comprise pedestal 1, shell 4, circuit carriers 3, sealing adaptor 2, plug 6, sensor probe 9, PCB printed circuit board (PCB) 10, electric connector 8, electric connector mount pad 5, insulating mat 7, all component carries out integrated sealed encapsulation.Described sensor probe 9 is arranged in pedestal detect aperture; Described sealing adaptor 2 welds with described pedestal 1; Described circuit carriers 3 is threaded with described sealing adaptor 6 and welds; Described shell 4 welds with described pedestal 1; Described PCB printed circuit board (PCB) 10 is fixedly mounted in described shell 1; Described electric connector mount pad 5 welds with described shell 1; Described electric connector 8 is fixedly mounted on described mount pad 5, the embedded rubber gasket in composition surface.
At Fig. 3 and Fig. 4, described pedestal 1 belongs to the profiled piece of mechanical processing technique complexity, is provided with mounting interface 16, ring surveys air intake opening 12, ring measures gas port 13, gas port 14a, 14b, 3 detect aperture 15a, 15b, 15c, and the strict demand having sealing surface, face of weld dimensional tolerence and form and position tolerance.Mounting interface 16 presses anticreep design, is provided with 4 lugs 17, requires screw lock, handled easily and good reliability.Ring surveys air intake opening 12 and the design of plunger tube thread forms is pressed in gas outlet 13, and cap nut is locked, and meets sensor and installs seal request.Base bottom surface is provided with a blind hole 18, and be furnished with plug conducting two detect aperture 15b, 15c and gas port 14a, 14b, wherein, plug 6 is provided with annular groove, make to enter Sensor Gas, flow through gas port 14a and divide again through a detect aperture 15a and flow through another two detect aperture 15b, 15c, then converge gas port 14b and flow out sensor.
Referring to Fig. 3,3 sensor probes 9 are arranged on 3 detect aperture 15a, 15b of pedestal 1 respectively, in 15c, joint is furnished with O type rubber ring plunger seal, simultaneously, for preventing interiors of products gas pressure from causing sensor probe 9 to depart from, hole is built with special stainless steel jump ring; 3 sensor probes 9 totally 24 lead-in wires are connected with PCB printed circuit board (PCB) 10,24 probe middle transition of sealing adaptor 2, lead-in wire is preferably Covar contact pin, wherein, for preventing gas by detect aperture 15a, 15b, 15c are seeped on printed circuit board (PCB) 10, and sealing adaptor 2 and pedestal 1 carry out electron beam welding melting adult under vacuum conditions; Circuit carriers 3 and sealing adaptor 2 junction surface are welded after adopting and being threaded; 3 PCB printed circuit board (PCB)s 10 are fastened by screws in same circuit carriers 3 and shell 4 upper end, in triangle body array installment state, wherein, Fig. 5 shows installation 3 PCB printed circuit board (PCB)s 6 screw holes 19, Fig. 6 on shell 4 and shows installation 3 PCB printed circuit board (PCB)s 6 screw holes 20 in circuit carriers 3; To install from electric connector 8 for preventing air and moisture and engage sealing and infiltrate, electric connector 8 is installed is furnished with rubber blanket, and meanwhile, PCB printed circuit board (PCB) 10 upper sensor signal processing circuit has done moistureproof technique, and namely surface is brushed with dubbin.
As shown in Figure 2, the overall integrative packaging design of sensor of the present utility model, pedestal 1 adopts electron beam welding melting adult with shell 4, electric connector mount pad 5 respectively with shell 4 joint.Under guarantee applicability condition, the gentliest change loss of weight designing requirement by components and parts, sensor base 1, shell 4, circuit carriers 3, sealing adaptor 2, electric connector mount pad 5 all adopt TC4 titanium alloy material to process.Above structural design and assembly technology, make interiors of products compact conformation, good looking appearance, enhances Total Product rigidity simultaneously.
In the figure 7, the making of described sealing adaptor 2 adopts metal and glass sealing process, 24 Covar contact pins 23 are embedded metal pedestal 21 pin hole 22 respectively, gap filling glass matter sintering, its seal size precision is ensured by special high purity graphite sintering mold completely, makes product have good insulativity and impermeability.
As shown in Figure 8, described sensing probe 9 by the quick core body 24 of hydrogen, flexible circuit 25, partly cut open ceramics pole 26a and 26b, non-metal shell 27, O RunddichtringO 28 form.Hydrogen quick core body 24 surface attachment 13 bridge resistance bars, are integrated by being electrically connected into flexible circuit 25.Hydrogen quick core body 24 clip is in the middle of two arcuation potsherd 26a and 26b, in unsettled, be exposed to state in atmosphere completely, then one is inserted in cylinder non-metal shell 27, inter-module gap is filled with fluid sealant and is set in together, casting glue not only makes flexible circuit 25 be completely fixed, meanwhile, sensing probe body sealing is protected.Sensing probe packing forms improves the sensor test response time, also significantly solves hydrogen test to the requirement of sensing probe thermal insulation.
Many redundancies hydrogen gas sensor of the present utility model designs based on theory, verification experimental verification, professional experiences, and properties of product have passed the qualification of various experimental enviroment, good reliability, is applicable to applying.
The content that above-described embodiment is illustrated should be understood to these embodiments only for being illustrated more clearly in the utility model, and be not used in restriction scope of the present utility model, after having read the utility model, the amendment of those skilled in the art to the various equivalent form of value of the present utility model has all fallen within the application's claims limited range.

Claims (10)

1. the hydrogen gas sensor of redundancy more than, is characterized in that, comprises pedestal (1), is contained in the shell (4) on pedestal (1), is positioned at the sealing adaptor (2) of shell (4), circuit carriers (3), sensor probe (9) and PCB printed circuit board (PCB) (10); Described sealing adaptor (2) and sensor probe (9) are all fixed on pedestal (1), and the described circuit carriers (3) for installing PCB printed circuit board (PCB) (10) is fixed on sealing adaptor (2); In described sealing adaptor (2), circuit carriers (3), sensor probe (9) and PCB printed circuit board (PCB) (10) integrated sealed package casing (4); The electric connector mount pad (5) for installing electric connector (8) is equipped with at described shell (4) top; Described pedestal (1) is provided with the detect aperture for sensor installation probe (9), and described sensor probe (9) is electrically connected with PCB printed circuit board (PCB) (10) by many lead-in wires; Described pedestal (1) sidewall has air intake opening (12) and gas outlet (13), and this air intake opening (12) is communicated with by the gas port running through pedestal (1) with gas outlet (13), and described gas port is communicated with described detect aperture.
2. many redundancies hydrogen gas sensor according to claim 1, it is characterized in that, described sensor probe (9) is for multiple, and (1) has multiple detect aperture to described pedestal, each sensor probe (9) is arranged in a detect aperture, and each detect aperture is all communicated with gas port.
3. many redundancies hydrogen gas sensor according to claim 2, is characterized in that, described pedestal (1) has three detect aperture (15a, 15b, 15c), and the sidewall of described pedestal (1) is provided with the mounting interface (16) of extension; Described air intake opening (12) and gas outlet (13) are plunger tube threaded sealing structure, and namely junction surface adopts O-ring seal radial compression, and adopts cap nut to be tightened; Described sensor probe (9) is fixed in corresponding detect aperture (15a, 15b, 15c) by jump ring.
4. according to the many redundancies hydrogen gas sensor one of claim 1-3 Suo Shu, it is characterized in that, described sensor probe (9) is primarily of the quick core body of hydrogen (24), the flexible circuit (25) be electrically connected with the quick core body of hydrogen (24), form for the ceramics pole (26a, 26b) of the quick core body of fixing hydrogen (24), non-metal shell (27); The quick core body of described hydrogen (24) surface attachment many bridges resistance bars, and be electrically connected into flexible circuit (25) and be integrated.
5. many redundancies hydrogen gas sensor according to claim 4, is characterized in that, described non-metal shell (27) adopts the good macromolecular material of thermal insulation to make, and in outside wall surface, be provided with O type circle seal groove.
6. many redundancies hydrogen gas sensor according to claim 4, it is characterized in that, described ceramics pole comprises two pieces for clamping the ceramic clamping element of the quick core body of hydrogen (24), the quick core body of described hydrogen (24) and ceramic clamping element have gap, make the quick core body of hydrogen (24) in vacant state, and its pros and cons can expose in atmosphere completely; The quick core body of described hydrogen (24) and ceramic clamping element integrally insert in described non-metal shell (27) after fixing.
7. many redundancies hydrogen gas sensor according to claim 1, it is characterized in that, described sealing adaptor (2) comprises metal pedestal (21), is located at the multiple pin hole in metal pedestal (21), by embedded 1 pin leads of glass sintering in each pin hole, gap filling glass matter sinters; Described pin leads is connected with described PCB printed circuit board (PCB) (10), and the transducing signal treatment circuit of this PCB printed circuit board (PCB) (10) is brushed with dubbin, is provided with rubber blanket between described electric connector (8) and electric connector mount pad (5).
8. many redundancies hydrogen gas sensor according to claim 1, is characterized in that, described PCB printed circuit board (PCB) (10) has three pieces, and the bottom of every block PCB printed circuit board (PCB) (10) is fixed in circuit carriers (3), and top is fixed on shell (4) top.
9. according to the many redundancies hydrogen gas sensor one of claim 1 ~ 3 Suo Shu, it is characterized in that, described pedestal (1), shell (4), circuit carriers (3), sealing adaptor (2), electric connector mount pad (5) all adopt corrosion-resistant, density is little TC4 titanium machine-shaping.
10. according to the many redundancies hydrogen gas sensor one of claim 1 ~ 3 Suo Shu, it is characterized in that, described pedestal (1) bottom face is provided with a blind hole (18), this blind hole (18) is equipped with the plug (6) for conduction detection hole and gas port, described plug (6) upper surface is provided with annular groove, described gas port is separated into two sections (14a, 14b) by blind hole (18).
CN201420455974.4U 2014-08-13 2014-08-13 A kind of many redundancies hydrogen gas sensor Active CN204154671U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420455974.4U CN204154671U (en) 2014-08-13 2014-08-13 A kind of many redundancies hydrogen gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420455974.4U CN204154671U (en) 2014-08-13 2014-08-13 A kind of many redundancies hydrogen gas sensor

Publications (1)

Publication Number Publication Date
CN204154671U true CN204154671U (en) 2015-02-11

Family

ID=52512775

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420455974.4U Active CN204154671U (en) 2014-08-13 2014-08-13 A kind of many redundancies hydrogen gas sensor

Country Status (1)

Country Link
CN (1) CN204154671U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104181202A (en) * 2014-08-13 2014-12-03 中国电子科技集团公司第四十八研究所 Multi-redundancy hydrogen sensor
WO2016165398A1 (en) * 2015-04-15 2016-10-20 海卓赛思(苏州)传感技术有限公司 Hydrogen gas sensor for online monitoring of hydrogen gas concentration in oil-immersed transformer and method for using same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104181202A (en) * 2014-08-13 2014-12-03 中国电子科技集团公司第四十八研究所 Multi-redundancy hydrogen sensor
CN104181202B (en) * 2014-08-13 2017-03-15 中国电子科技集团公司第四十八研究所 A kind of many redundancy hydrogen gas sensors
WO2016165398A1 (en) * 2015-04-15 2016-10-20 海卓赛思(苏州)传感技术有限公司 Hydrogen gas sensor for online monitoring of hydrogen gas concentration in oil-immersed transformer and method for using same

Similar Documents

Publication Publication Date Title
US7036385B2 (en) Pressure sensor and related method
US9989390B2 (en) Thermal airflow measuring device
CN1914494A (en) Isolated pressure transducer
CN1749721A (en) Pressure sensor
US20210239560A1 (en) Combined temperature and pressure sensor
US20130098160A1 (en) Sensor with fail-safe media seal
CN204154671U (en) A kind of many redundancies hydrogen gas sensor
CN110567632B (en) Core body composite silicon piezoresistive pressure sensor
CN105236343A (en) Dielectric isolation type pressure sensor encapsulating structure
CN109696273B (en) Automobile brake boosting vacuum pressure sensor device
CN104181202A (en) Multi-redundancy hydrogen sensor
CN114354033A (en) Force sensor and manufacturing method thereof
CN101390259A (en) Electrical plug with sealed-off metal insert parts
KR101297141B1 (en) Pressure sensor and attachment structure of pressure sensor
JP4968179B2 (en) Temperature sensor integrated pressure sensor device
WO2005008233A1 (en) Gas sensor and method of producing gas sensor
JP2007285750A (en) Pressure sensor
CN202631163U (en) Inner hole sealing structure of ceramic pressure sensor
CN103728093A (en) Pressure sensor with robustness against mounting stress
CN103698042A (en) High-temperature temperature sensor
CN113788451B (en) Packaging method of composite range pressure sensing system
CN207280672U (en) A kind of flush type installs ultra thin dimensions pressure sensor
CN220568176U (en) Automobile temperature and pressure integrated sensor structure
EP2977729A1 (en) Thermal type flow meter
CN221124396U (en) Gas purity monitoring sealing dustproof thermal conductivity sensor device

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant