CN101750462B - Solid thermal conductivity detector for cylindrical thermal sensitive region - Google Patents
Solid thermal conductivity detector for cylindrical thermal sensitive region Download PDFInfo
- Publication number
- CN101750462B CN101750462B CN2008102299830A CN200810229983A CN101750462B CN 101750462 B CN101750462 B CN 101750462B CN 2008102299830 A CN2008102299830 A CN 2008102299830A CN 200810229983 A CN200810229983 A CN 200810229983A CN 101750462 B CN101750462 B CN 101750462B
- Authority
- CN
- China
- Prior art keywords
- thermal conductivity
- solid
- flow cell
- conductivity detector
- tcd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
The invention relates to a solid thermal conductivity detector for a cylindrical thermal sensitive region, which is a gas thermal conductivity sensor for the detection of gas chromatography and change of the gas composition. The solid thermal conductivity detector comprises a cylindrical thermal element and a flow cell body. The cylindrical thermal element comprises a cylindrical support body the surface of which is fixed with a thermal sensitive electrode. Both ends of a metal wire or a thermal sensitive coating film are respectively connected with extraction electrodes fixed at the same end of the cylindrical support body. The inner cavity of the flow cell body takes a shape of cylinder. The space formed from the cylindrical thermal element and the inner cavity of the flow cell body serves as a detection cell. The cylindrical thermal element is embedded in the flow cell body. The axis of the cylindrical support body is coaxial to that of the detection cell. Both ends of the flow cell body are respectively provided with a gas inlet and a gas outlet. The gas inlet is arranged on the axis of the detection cell. The extraction electrodes are electrically connected with an external circuit by extraction wires. The temperature resisting stability of the detector of the invention is different according to the use different thermo-sensitive materials. When the metal wire is used, the temperature can reach 400 DEG C so as to not only improve the temperature resistance of the device, but also simplify the manufacturing process and requirements and widen the application field.
Description
Technical field
The present invention relates to solid-state thermal conductivity detector (TCD), is a kind of heat conductivity of gas sensor, is used for the detection that gas chromatography and gas composition change, and is applied in widely in industrial in-line meter and the laboratory analytical instrument.
Background technology
The microminiaturization of analytical instrument is the development main flow of 21 century analytical instrument, and microminiaturization has not only reduced the volume and weight of instrument, and has reduced the power consumption and the material consumption of instrument.And the microminiaturized crucial part of instrument is exactly the microminiaturization of detecting device or sensor, detection cell volume and power consumption is reduced more than 90%, and then can use more tiny separation chromatography post and power supply, energy consumption and carrier gas is consumed significantly reduce.
Solid-state thermal conductivity detector (TCD) (Solid State Thermal Conductivity Detector; Be called for short SSD) come down to a kind of heat conductivity of gas sensor, be mainly used in detecting device, the detecting device in the industrial in-line meter of gas chromatography and need measurement gas to form the sensor that changes.
SSD can use two kinds of technology to realize.The one, utilize the oxidable one-tenth of monocrystalline silicon surface SiO
2Film and further in the above sputter one deck Pyrex glass, sputter again
About nickel dam, etch pectination or netted nickel electrode with photoetching process.For the heat-insulating property that improves the heat-sensor electrode basal area and reduce thermal capacity, utilize the orientable corrosive property of monocrystalline silicon, the monocrystalline silicon at the back side, heat-sensor electrode district is eroded, form with SiO
2The hot suspension zone of film and Pyrex glass support makes detecting device that high detection sensitivity arranged.The cavity loam cake of detecting device also is to be processed by monocrystalline silicon, because it has good heat-conducting.Realize with above-mentioned technology like the SSD of U.S. Agilent company production and the SSD of the IMTEK Research Institute of the Freiburg university of Germany.
But, SiO
2The difference of thermal expansion coefficients of film, Pyrex glass and nickel metal electrode is very big, when detector temperature when 150 ℃ drop to room temperature, not only the Pyrex glassy layer can the generation of cracks phenomenon, and nickel electrode also can peel off with the Pyrex glassy layer, and detecting device is damaged.Therefore the maximum operating temperature of this detecting device is 90 ℃.Can only be used for measuring the lower group of boiling point, application is restricted.
Another technology is used the microcrystal glass-ceramic substrate; Sputter in the above or chemical deposited nickel or platinum film, the method for carving with photoetching or machinery is then produced heat-sensor electrode, and the material that the reusable heat conductance is good is processed the flow cell cavity; The sidewall of above-mentioned temperature-sensitive substrate, form SSD as cavity.Like the said technology of Chinese invention patent ZL200410046348.0.
In the SSD flow cell of use microcrystal glass-ceramic substrate 2 corners are arranged, air-flow can produce disturbance and increase noise and bands of a spectrum melange effect through out-of-date.
The metallic film of the heat-sensor electrode of existing SSD all gets on sputter or chemogenic deposit, and thickness has only 0.1～1 μ m, and the crystal structure of metal has more defective, so long-time stability are bad, and the temperature of heated filament generally can not surpass 200 ℃ to prevent damage.
Thermal sensing element in traditional thermal conductivity detector (TCD) is to use simple helix or double helix thermometal filament winding system, and two lead-in wires are fixed on to be used on the shelf of processing than crude metal, and tinsel passes insulating base and draws, as electrical lead.Vibration elastic will take place when small vibrations are arranged in the external world in this shelf type thermosensitive wire, and causing exporting signal has very big noise.Therefore can not in motion process, use.In addition, such thermal conductivity detector (TCD) pond volume minimum is 20 microlitres, is not suitable for joining capillary chromatographic column and uses.
Summary of the invention
In order to overcome the defective of prior art; The purpose of this invention is to provide a kind of cylindrical thermal sensing element with stretching metal temperature-sensitive filament winding system, detection cell is the solid-state thermal conductivity detector (TCD) of coaxial configuration, can at high temperature detect; The broadening that chromatogram is flowed out bands of a spectrum is little; Detector noise is low, and the detector performance long-time stability are good, and its manufacture craft is simple.
For achieving the above object, the technical solution that the present invention adopts is:
A kind of solid-state thermal conductivity detector (TCD) of cylindricality thermal sensible section; Comprise cylindricality thermal sensing element and flow cell body; Said cylindricality thermal sensing element is to be made up of the columnar supporting body that the surface is fixed with heat-sensor electrode, and the two ends of tinsel or temperature-sensitive plated film are connected with the extraction electrode that is fixed on the same end of columnar supporting body respectively; The inner chamber of said flow cell body is a tubular, as detection cell; The cylindricality thermal sensing element is embedded in the flow cell body, and the axis coaxle of the axis of columnar supporting body and detection cell, be respectively equipped with gas access and gas vent at two ends of flow cell body, and the gas access is arranged on the axis of detection cell; Extraction electrode is electrically connected with external circuit through drawing lead.
Said flow cell body and function thermal conductivity good metal or silicon materials are processed, and the gas access connects chromatographic column, gas vent emptying; Distance between heat-sensor electrode and the flow cell body inwall is 25～500 microns.
Said heat-sensor electrode is meant by thermometal silk that is wrapped in the columnar stays surface or the temperature-sensitive plated film that is plated in the columnar stays surface and constitutes; At heat-sensor electrode surface-coated anti-oxidation protection layer;
The diameter of said thermometal silk is 7～70 microns, and on columnar supporting body, two line ends are connected with the metal lead wire that is fixed in the columnar supporting body bottom; Said tinsel has higher temperature-coefficient of electrical resistance and performance steady in a long-term, and it is nickel, platinum, tungsten-rhenium alloy or other alloy;
Said temperature-sensitive plated film is thermometal film, metal oxide film or semiconductor film, and the temperature-sensitive plated film can be etched into tubular, dressing or spiral electrode, and the exit of electrode is connected with the metal lead wire that is fixed in the columnar supporting body bottom respectively.
Said anti-oxidation protection layer thickness is
～2 μ m, and it is one deck high temperature resistant inorganic compound or the high temperature resistant organic compound of one deck or the layer of metal passivation layer that generates of spraying or is the surface gold-plating layer.
Said columnar supporting body is right cylinder or cylinder, and it adopts ceramic rod, ceramic pipe, glass bar, quartz pushrod, glass tube or quartz ampoule material to process; The columnar stays external surface is coarse or the thread-shaped shallow slot arranged.
Said thermal sensing element can be a pair of and fixed resistance is formed Wheatstone bridge; Or two pairs of composition Wheatstone bridges, to increase the response and the sensitivity of detecting device, draw lead and stretch out from cylindricality thermal sensing element inlaying on the flow cell body.
Active volume 0.5～50 microlitre of said detection cell is preferably at 1～5 microlitre; When being used in gas chromatography detector, be fit to capillary chromatographic column and little chromatography column, carrier gas flux is 0.5～30 ml/min.
Advantage of the present invention is: 1) with existing solid-state thermal conductivity detector (TCD) ratio; Thermal sensing element with the heated filament coiling has good especially long-time stability; The solid-state thermal conductivity detector (TCD) that heat resistance is made than existing thin-film technique is high 200 ℃; Therefore can under higher temperature, use, analyze the component of higher, greatly expand range of application; 2) compare with the little pond of existing conventional type thermal conductivity detector (TCD), thermal sensing element anti-vibration of the present invention, the tinsel that do not suspend can use in motion process; 3) little 1 one magnitude of thermal conductivity detector (TCD) pond, little pond volume that the solid-state thermal conductance detector cell of the present invention volume ratio is traditional is fit to join capillary chromatographic column and needs make-up gas? not, significantly improves practical sensitivity; 4) inlet of the solid-state thermal conductivity detector (TCD) of the present invention is coaxial with detection cell; The chromatogram eluting gas gets into the back and keeps laminar condition, avoided existing thermal conductivity detector (TCD) Way in become with the detection cell direction 90 ° and the gas that causes mixes again and detection cell in concentration of component exponential damping and the problem that causes chromatographic peak to trail in time; 5) heat-sensor electrode of the present invention is evenly distributed on the support cylinder outside surface, and surface area is big, and the gas composition that makes entering is the contact electrode surface fully.Therefore the repetition performance of response is superior to conventional thermal conductivity detector (TCD) and existing solid-state thermal conductivity detector (TCD).
Filament of the present invention supports on pole or the pipe around thermal insulation, and applies the anti-oxidation protection film outward, and when detector temperature and heat-sensor electrode temperature have 400 ℃ during with interior variation, tinsel does not come off on the cylinder supporter, and base material does not chap, and is indeformable.The coaxial shape detection cell structure that the present invention adopts has significantly reduced flow perturbation, increases simultaneously to measure the sensitive area that thermal conductivity changes, and improves detection sensitivity and stability, has improved the broadening effect to the chromatogram bands of a spectrum.Not only improve the overall performance of device, and simplified manufacturing process and requirement, widened application.
Description of drawings
Fig. 1 is the thermo-sensitive element structure figure of the solid-state thermal conductivity detector (TCD) of the present invention; 1 synoptic diagram that is the doubling of thermometal silk on the support stick wherein; 2 is the directly synoptic diagram on the stay pipe of thermometal silk, and (down with) sealed with inorganic material in the top; 3 is thermometal film/metal oxide film/semiconductor alloy compound film thermal sensing element synoptic diagram, and thermosensitive film is immobilized on stay pipe; 4 structural representations for etching thermosensitive film formation thermistor; 5 for after thermosensitive film being plated in support stick or pipe, carries out the double helix etching again, and afterwards with two conducting end short circuits on top, two following conducting end are welded with fixed electorde respectively, form thermistor.
Fig. 2 .1 is the structural drawing of the solid-state thermal conductivity detector (TCD) basic structural unit of the present invention; Right figure is the detector cell body structure, and left figure is the detector arrangement behind the embedding thermal sensing element;
Fig. 2 .2 is the structure principle chart of the solid-state thermal conductivity detector (TCD) of the present invention's four arms.
Fig. 3 is for constituting the schematic diagram of measuring bridge with 1 pair of thermal sensing element; 1 district is the thermistor element of measurement and reference arm, R among the figure
1Be gage beam, R
2Be reference arm, R
0, R
3And R
4Be bridge resistance;
Fig. 4 is for constituting the schematic diagram of measuring bridge with 2 pairs of thermal sensing elements.
Fig. 5 is solid-state thermal conductivity detector (TCD) of the present invention and chromatography column logotype, the spectrogram of dissolved gas sample in the Transformer Oil Analysis.Wherein, sample: 5ppm C
2H
4, C
2H
6, C
2H
2, C
3H
8Normal mixture, peak number corresponding component: 1:CO
22:C
2H
43:C
2H
64:C
2H
25:C
3H
8
Embodiment
See Fig. 1, shown in Figure 2, be the structural drawing of the solid-state thermal conductivity detector (TCD) of the present invention, comprise thermal sensing element 100 and flow cell 200 two parts.Thermal sensing element 100 is by the cylindrical ceramic/glass/quartz pushrod as supporter 101, is wrapped in thermometal silk on 101 as heat-sensor electrode 102 or be plated in heat-sensor electrode 102, heat-sensor electrode that the thermometal film/metal-oxide film/semiconductor alloy compound films on 101 surfaces constitute and draw 103 and be connected and anti-oxidation protection layer 105 composition with extension line 104 melting welding.Thermal sensing element 100 is installed in the flow cell 200, and 100 basal seat area puts resilient material 205, is embedded in 204 position fixing seals.The extension line 104 of thermal sensing element is stretched out by a side, is electrically connected with external circuit.
The thermometal silk can be rhenium tungsten filament, platinum filament, nickel wire and the higher heating wire of other temperature coefficient, and thermosensitive material film can be the material that metallic films such as nickel, platinum, alloy or rhenium tungsten or metal oxide or semiconductor material etc. have high electrical resistance temperature coefficient and stable performance.See Fig. 3, Fig. 4 and Fig. 5, film heat-sensor electrode 102 is to be made into etch process, to increase the temperature difference between resistance value or heat-sensor electrode and the circulation pool wall.Thermal sensing element 100 can be a pair of, also can be two pairs, like Fig. 3 and shown in Figure 4.Can increase response and sensitivity with 2 pairs of thermal sensing elements, but increase the pond volume.
Solid-state thermal conductivity detector (TCD) of the present invention; By around or immobilized thermometal silk or thermosensitive film resistance on cylindrical support body 101 be energized from body and be heated as thermal sensing element 100; When the gas composition of flowing through heat-sensor electrode 102 changes and the thermal conductivity of gas is changed; The heat dissipation degree of the heat-sensor electrode 102 of heating changes, and the temperature of heat-sensor electrode 102 also changes thereupon, makes the corresponding change of resistance.The variation of in view of the above can measurement gas forming.
By the type of tinsel on the cylindrical support body, more satisfactory because of metallic crystalline structure, ORC is fixing in addition, so heatproof can reach 400 ℃ (with platinum, rhenium tungsten filaments etc.) in the thermal sensing element of the present invention.
For hollow type cylindrical support body 101 (realizing with pipe end-blocking head), the response that makes heat-sensor electrode 102 because of its good heat insulating function and response speed be all than higher, to the unusual sensitivity of the variation of gas conductance coefficient.Solid-state thermal conductivity detector (TCD) of the present invention can detect in the hydrogen≤and 3 * 10
-6The caused thermal conductivity of butane gas changes.
Solid-state thermal conductivity detector (TCD); On the ceramic rod 101 of diameter 0.6mm; With the thermistor 102 of 100 ohm/0 ℃ of the tungsten-rhenium alloy filament winding of diameter 15 μ m, draw tinsel 103 and be connected, then at the low-temp ceramics protective seam 105 of surface-coated 2 micron thick with extension line 104 melting welding.This assembly is called thermal sensing element 100.2 thermal sensing elements 100 making are mounted to respectively in 2 flow cells 201, form detection cell, gas access 202 and gas vent 203 are arranged respectively.Thermosensitive wire 102 and the distance that detects between the pool wall are 100～200 microns.This connects into Wheatstone bridge to thermal sensing element and external circuit.
With 20 meters of two length, internal diameter 0.53mm, the fused-silica capillary column of inner coating color spectrum stationary phase is connected respectively to two inlets of detecting device, and one another is as measurement as reference, and the inlet of measurement capillary column is received on the chromatic spectrum sample feeder.Two-way all feeds carrier gas, flow 3 ml/min hydrogen.On the extension line of detecting device, apply voltage, make the temperature of heat-sensor electrode be higher than 60 ℃～220 ℃ of detector temperatures.Total system all is placed in the constant temperature oven.With sample introduction needle sample is injected from injector, on detecting device, produce signal through the chromatographic column components separated, the amplitude of signal is proportional to the difference of component concentrations and component and carrier gas thermal conductivity.Fig. 5 is the spectrogram of analytic sample.
Solid-state thermal conductivity detector (TCD); Go up heat-sensor electrode 102 at the glass tube (as supporter 101) of external diameter 1mm with 22 ohm/0 ℃ of the platinum filament coiled resistance of diameter 20 μ m; Platinum filament draw 103 with 104 welding of fixing extension line, at the thick formation diaphragm 105 of the about 1 μ m of thermal sensible section surface-coated glass glaze.2 thermal sensing elements making are mounted to respectively in 2 flow cells 201, form two independently detection cells.Thermal sensible section surface and the distance that detects between the pool wall are 200～300 microns.The inlet 202 of detection cell connects chromatographic column outlet, outlet 203 emptying of detection cell.This connects into Wheatstone bridge to thermal sensing element and external circuit.
With 2 meters of two length, internal diameter 1mm, in fill out the stainless steel column of little filling of 100-120 order chromatographic stationary phase, be connected respectively to two inlets of detecting device, one another is as measurement as reference, the inlet of measurement column is received on the sampling valve.Two-way all feeds carrier gas, flow 8 ml/min hydrogen.On the extension line of detecting device, apply voltage, make the temperature of heat-sensor electrode be higher than 80 ℃ of detector temperatures.Total system all is placed in the constant temperature oven.Sample gas is injected sample hose from sampling valve, and the rotating valve sample introduction produces signal through the chromatographic column components separated on detecting device, and the amplitude of signal is proportional to the difference of component concentrations and component and carrier gas thermal conductivity.
Go up heat-sensor electrode 102 at the quartz ampoule (as supporter 101) of external diameter 0.8mm with 100 ohm/0 ℃ of the platinum filament coiled resistance of diameter 10 μ m; Platinum filament draw 103 with 104 welding of fixing extraction electrode, constitute protective seam 105 at thermal sensible section surface-coated 0.5 μ m polyimide.2 thermal sensing elements making are mounted to respectively in 2 flow cells 201, form two independently detection cells.Thermistor wire surface and the distance that detects between the pool wall are the 50-180 micron, and the inlet 202 of detection cell connects chromatographic column outlet, outlet 203 emptying of detection cell.This connects into Wheatstone bridge to thermal sensing element and external circuit.
With 30 meters of two length, internal diameter 0.53mm, the fused-silica capillary column of inner coating color spectrum stationary phase is connected respectively to two inlets of detecting device, and one another is as measurement as reference, and the inlet of measurement capillary column is received on the chromatic spectrum sample feeder.Two-way all feeds carrier gas, flow 5 ml/min hydrogen.On the extension line of detecting device, apply voltage, make the temperature of heat-sensor electrode be higher than 150 ℃ of detector temperatures.Total system all is placed in the constant temperature oven.With sample introduction needle sample is injected from injector, on detecting device, produce signal through the chromatographic column components separated, the amplitude of signal is proportional to the difference of component concentrations and component and carrier gas thermal conductivity.
Solid-state thermal conductivity detector (TCD); On the ceramic pipe (as supporter 101) of diameter 0.5mm; With the platinum filament doubling of the diameter 17 μ m heat-sensor electrode 102 around 20 ohm/0 ℃, platinum filament is drawn 103 and is connected with extension line 104 melting welding, then at the low-temp ceramics protective seam 105 of about 3 micron thick of surface-coated.42 pairs of thermal sensing elements 100 making are mounted to respectively in 2 flow cells 301, form detection cell, gas access 302 and outlet 303 are arranged respectively.Heat-sensor electrode 102 and the distance that detects between the pool wall are 50～100 microns.These 2 pairs of thermal sensing elements and external circuit connect into Wheatstone bridge.
With 50 meters of two length, internal diameter 0.32mm, the fused-silica capillary column of inner coating color spectrum stationary phase is connected respectively to two inlets of detecting device, and one as reference, and another is as measurement.The inlet of the capillary column of gage beam is received on the chromatic spectrum sample feeder.Two-way all feeds carrier gas, flow 3 ml/min hydrogen.On the extension line of detecting device, apply voltage, make the temperature of heat-sensor electrode be higher than 200 ℃ of detector temperatures.Total system all is placed in the constant temperature oven.With sample introduction needle sample is injected from injector, on detecting device, produce signal through the chromatographic column components separated, the amplitude of signal is proportional to the difference of component concentrations and component and carrier gas thermal conductivity.
Solid-state thermal conductivity detector (TCD) is gone up mold pressing spiral shallow slot at the glass bar (as supporter 101) of diameter 1.0mm, goes out 50 ohm/0 ℃ heat-sensor electrode 102 with the platinum filament coiling of 22 microns of diameters, then platinum filament is drawn 103 and welds with extension line 104.In that sputter covers the glass of 1～2 micron thick around the platinum filament district, through the stable protective seam 105 that forms of annealing.2 thermal sensing elements of making are mounted to respectively in 2 flow cells 201, form two independently detection cells, gas access and outlet are arranged respectively.The surface of heat-sensor electrode 102 and the distance that detects between the pool wall 201 are 150 microns.These 2 thermistors and external electric bridging connect the formation measuring bridge.
Claims (9)
1. the solid-state thermal conductivity detector (TCD) of a cylindricality thermal sensible section; Comprise cylindricality thermal sensing element (100) and flow cell body (200); It is characterized in that: said cylindricality thermal sensing element is columnar supporting body (101) formation that is fixed with heat-sensor electrode (102) by the surface, and the two ends (103) of tinsel or temperature-sensitive plated film are connected with the extraction electrode that is fixed on the same end of columnar supporting body (104) respectively;
The inner chamber of said flow cell body is a tubular, and the cylindricality thermal sensing element is embedded in the flow cell body, and the axis coaxle of the axis of columnar supporting body and detection cell, and the space that cylindricality thermal sensing element and flow cell intracoelomic cavity form is as detection cell; Two ends at the flow cell body are respectively equipped with gas access (202) and gas vent (203), and the gas access is arranged on the axis of detection cell; Extraction electrode is electrically connected with external circuit through drawing lead.
2. solid-state thermal conductivity detector (TCD) according to claim 1 is characterized in that: said flow cell body and function thermal conductivity good metal or silicon materials are processed, and the gas access connects chromatographic column, gas vent emptying; Distance between heat-sensor electrode and the flow cell body inwall is 25～500 microns.
3. solid-state thermal conductivity detector (TCD) according to claim 1 is characterized in that: said heat-sensor electrode is meant by thermometal silk that is wrapped in the columnar stays surface or the temperature-sensitive plated film that is plated in the columnar stays surface and constitutes; At heat-sensor electrode surface-coated anti-oxidation protection layer.
4. solid-state thermal conductivity detector (TCD) according to claim 3 is characterized in that: the diameter of said thermometal silk is 7～70 microns, and on columnar supporting body, two line ends are connected with the metal lead wire that is fixed in the columnar supporting body bottom; Said tinsel has higher temperature-coefficient of electrical resistance and performance steady in a long-term, and it is nickel, platinum, tungsten-rhenium alloy.
5. solid-state thermal conductivity detector (TCD) according to claim 3; It is characterized in that: said temperature-sensitive plated film is thermometal film, metal oxide film or semiconductor film; The temperature-sensitive plated film is etched into tubular, dressing or spiral electrode, and the exit of electrode is connected with the metal lead wire that is fixed in the columnar supporting body bottom respectively.
6. solid-state thermal conductivity detector (TCD) according to claim 3; It is characterized in that: said anti-oxidation protection layer thickness is
～2 μ m, and it is one deck high temperature resistant inorganic compound or the high temperature resistant organic compound of one deck or the layer of metal passivation layer that generates of spraying or is the surface gold-plating layer.
7. solid-state thermal conductivity detector (TCD) according to claim 1 is characterized in that: said columnar supporting body is right cylinder or cylinder, and it adopts ceramic rod, ceramic pipe, glass bar, quartz pushrod, glass tube or quartz ampoule material to process; The columnar stays external surface is coarse or the thread-shaped shallow slot arranged.
8. solid-state thermal conductivity detector (TCD) according to claim 1 is characterized in that: said cylindricality thermal sensing element is a pair of and fixed resistance is formed Wheatstone bridge; Or two pairs of composition Wheatstone bridges, to increase the response and the sensitivity of detecting device, draw lead and stretch out from cylindricality thermal sensing element inlaying on the flow cell body.
9. solid-state thermal conductivity detector (TCD) according to claim 1 is characterized in that: active volume 0.5～50 microlitre of said detection cell; When being used in gas chromatography detector, be fit to capillary chromatographic column and little chromatography column, carrier gas flux is 0.5～30 ml/min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102299830A CN101750462B (en) | 2008-12-19 | 2008-12-19 | Solid thermal conductivity detector for cylindrical thermal sensitive region |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102299830A CN101750462B (en) | 2008-12-19 | 2008-12-19 | Solid thermal conductivity detector for cylindrical thermal sensitive region |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101750462A CN101750462A (en) | 2010-06-23 |
| CN101750462B true CN101750462B (en) | 2012-06-20 |
Family
ID=42477755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008102299830A Active CN101750462B (en) | 2008-12-19 | 2008-12-19 | Solid thermal conductivity detector for cylindrical thermal sensitive region |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101750462B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105891394B (en) * | 2014-12-09 | 2018-05-29 | 山东鲁南瑞虹化工仪器有限公司 | A kind of thermal conductivity cell detector |
| CN105277586A (en) * | 2015-07-13 | 2016-01-27 | 西华大学 | Minisize air chamber of thermal conductance sensor |
| CN108178122B (en) * | 2016-12-08 | 2024-06-18 | 中国科学院上海微系统与信息技术研究所 | Micro heat conduction detector and preparation method thereof |
| EP3671195A1 (en) * | 2018-12-17 | 2020-06-24 | Siemens Aktiengesellschaft | Thermoresistive gas sensor |
| CN113203769B (en) * | 2021-04-15 | 2022-11-04 | 电子科技大学 | High-air-tightness micro thermal conductivity detector and manufacturing method thereof |
-
2008
- 2008-12-19 CN CN2008102299830A patent/CN101750462B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN101750462A (en) | 2010-06-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101750462B (en) | Solid thermal conductivity detector for cylindrical thermal sensitive region | |
| CN104749223A (en) | Hydrogen gas sensor for monitoring concentration of hydrogen gas of oil-immersed transformer in online manner and using method thereof | |
| JP2001033295A (en) | Capacitive probe for measuring level of conductive liquid in vessel and manufacture of the probe | |
| EP3470829B1 (en) | Dew point measuring method | |
| CN101620192A (en) | Test structure for measuring thermal conductivity of film | |
| JPS5917175A (en) | Detecting element of magnetic field for extremely low temperature | |
| CN204479506U (en) | A kind of hydrogen gas sensor for oil-filled transformer density of hydrogen on-line monitoring | |
| CN110993778A (en) | Heat flow sensor based on transverse thermoelectric effect of thin film | |
| CN102589739B (en) | Multi-purpose thermocouple microelectrode and manufacturing method thereof | |
| CN104406644A (en) | MEMS (Micro Electro Mechanical System) thermal flow sensor and manufacturing method thereof | |
| CN105784183A (en) | SMD temperature sensor and preparation technology therefor | |
| CN203337199U (en) | Array thermal flow sensor for horizontal well liquid producing profile phase splitting flow measurement | |
| CN205642668U (en) | SMD temperature sensor | |
| CN106768159B (en) | Nuclear power station reactor core liquid level detector | |
| CN1317559C (en) | Solid thermal conductivity detector | |
| CN110274649A (en) | A kind of hot temperature difference type flow sensor and preparation method thereof based on MEMS technology | |
| JP3756919B2 (en) | How to measure dead volume fluctuation | |
| Chanal et al. | Micronic-size cryogenic thermometer for turbulence measurements | |
| Garnier et al. | A new transient hot-wire instrument for measuring the thermal conductivity of electrically conducting and highly corrosive liquids using small samples | |
| CN113969930A (en) | Multi-section high-precision temperature measurement bolt for hydraulic system | |
| CN117434193B (en) | High-sensitivity TCD detector for corrosive gas | |
| JP3612413B2 (en) | Variation measurement method | |
| US20180332667A1 (en) | Thick film element having coated substrate with high heat conductivity | |
| KR101070998B1 (en) | Heat capacity measurement device at high temperature | |
| Miller et al. | Heat transfer to water in an annulus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |