CN104747466B - 真空泵 - Google Patents

真空泵 Download PDF

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Publication number
CN104747466B
CN104747466B CN201410787893.9A CN201410787893A CN104747466B CN 104747466 B CN104747466 B CN 104747466B CN 201410787893 A CN201410787893 A CN 201410787893A CN 104747466 B CN104747466 B CN 104747466B
Authority
CN
China
Prior art keywords
rotor
exhaust
pump
cylindrical portion
thread groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201410787893.9A
Other languages
English (en)
Chinese (zh)
Other versions
CN104747466A (zh
Inventor
坪川彻也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of CN104747466A publication Critical patent/CN104747466A/zh
Application granted granted Critical
Publication of CN104747466B publication Critical patent/CN104747466B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CN201410787893.9A 2013-12-27 2014-12-17 真空泵 Active CN104747466B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2013-272207 2013-12-27
JP2013272207 2013-12-27
JP2014-042494 2014-03-05
JP2014042494A JP6331491B2 (ja) 2013-12-27 2014-03-05 真空ポンプ

Publications (2)

Publication Number Publication Date
CN104747466A CN104747466A (zh) 2015-07-01
CN104747466B true CN104747466B (zh) 2017-04-12

Family

ID=53481196

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410787893.9A Active CN104747466B (zh) 2013-12-27 2014-12-17 真空泵

Country Status (3)

Country Link
US (1) US9771940B2 (enExample)
JP (1) JP6331491B2 (enExample)
CN (1) CN104747466B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6692635B2 (ja) * 2015-12-09 2020-05-13 エドワーズ株式会社 連結型ネジ溝スペーサ、および真空ポンプ
GB2579665B (en) * 2018-12-12 2021-05-19 Edwards Ltd Multi-stage turbomolecular pump
JP7371852B2 (ja) * 2019-07-17 2023-10-31 エドワーズ株式会社 真空ポンプ
JP7638074B2 (ja) * 2019-09-30 2025-03-03 エドワーズ株式会社 真空ポンプ
GB2588146A (en) * 2019-10-09 2021-04-21 Edwards Ltd Vacuum pump
CN114673671B (zh) * 2020-12-25 2024-04-02 广东美的白色家电技术创新中心有限公司 风机和吸尘装置
JP7672849B2 (ja) * 2021-03-17 2025-05-08 エドワーズ株式会社 真空ポンプ
CN113997197A (zh) * 2021-10-29 2022-02-01 华海清科股份有限公司 一种用于基板减薄的主轴组件及基板减薄装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH056195A (ja) 1991-06-27 1993-01-14 Nec Corp 会話状況表示装置
JPH056195U (ja) * 1991-07-03 1993-01-29 セイコー精機株式会社 真空ポンプ
JP4447684B2 (ja) * 1999-01-13 2010-04-07 株式会社島津製作所 ターボ分子ポンプ
JP2001003890A (ja) 1999-06-23 2001-01-09 Shimadzu Corp 磁気軸受式ターボ分子ポンプ
JP3961273B2 (ja) * 2001-12-04 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ
US7717684B2 (en) * 2003-08-21 2010-05-18 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same
JP2005194921A (ja) * 2004-01-06 2005-07-21 Boc Edwards Kk 分子ポンプ
JP5420323B2 (ja) 2009-06-23 2014-02-19 株式会社大阪真空機器製作所 分子ポンプ
CN102667169B (zh) * 2009-12-11 2016-03-02 埃地沃兹日本有限公司 螺纹槽排气部的筒形固定部件以及使用该部件的真空泵

Also Published As

Publication number Publication date
CN104747466A (zh) 2015-07-01
JP2015143513A (ja) 2015-08-06
JP6331491B2 (ja) 2018-05-30
US9771940B2 (en) 2017-09-26
US20150184666A1 (en) 2015-07-02

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