CN104644212A - 超声波器件及其制造方法、电子设备及超声波图像装置 - Google Patents
超声波器件及其制造方法、电子设备及超声波图像装置 Download PDFInfo
- Publication number
- CN104644212A CN104644212A CN201410654181.XA CN201410654181A CN104644212A CN 104644212 A CN104644212 A CN 104644212A CN 201410654181 A CN201410654181 A CN 201410654181A CN 104644212 A CN104644212 A CN 104644212A
- Authority
- CN
- China
- Prior art keywords
- acoustic lens
- ultrasonic device
- acoustic
- matching layer
- ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 61
- 239000010409 thin film Substances 0.000 claims abstract description 14
- 238000003384 imaging method Methods 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims description 119
- 229920005989 resin Polymers 0.000 claims description 54
- 239000011347 resin Substances 0.000 claims description 54
- 239000004020 conductor Substances 0.000 claims description 49
- 230000000873 masking effect Effects 0.000 claims description 43
- 238000000034 method Methods 0.000 claims description 8
- 239000012530 fluid Substances 0.000 claims description 7
- 239000010408 film Substances 0.000 description 49
- 230000001681 protective effect Effects 0.000 description 35
- 239000000523 sample Substances 0.000 description 19
- 239000012528 membrane Substances 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 238000010008 shearing Methods 0.000 description 5
- 239000013039 cover film Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 238000002604 ultrasonography Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
- A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4427—Device being portable or laptop-like
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
- A61B8/4455—Features of the external shape of the probe, e.g. ergonomic aspects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/02—Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/18—Methods or devices for transmitting, conducting or directing sound
- G10K11/26—Sound-focusing or directing, e.g. scanning
- G10K11/30—Sound-focusing or directing, e.g. scanning using refraction, e.g. acoustic lenses
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4411—Device being modular
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Medical Informatics (AREA)
- Animal Behavior & Ethology (AREA)
- Radiology & Medical Imaging (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Biophysics (AREA)
- Molecular Biology (AREA)
- Surgery (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Mechanical Engineering (AREA)
- Gynecology & Obstetrics (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-240277 | 2013-11-20 | ||
| JP2013240277A JP6252130B2 (ja) | 2013-11-20 | 2013-11-20 | 超音波デバイスおよびその製造方法並びに電子機器および超音波画像装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104644212A true CN104644212A (zh) | 2015-05-27 |
Family
ID=52020931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410654181.XA Pending CN104644212A (zh) | 2013-11-20 | 2014-11-17 | 超声波器件及其制造方法、电子设备及超声波图像装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20150141825A1 (enExample) |
| EP (1) | EP2875783A1 (enExample) |
| JP (1) | JP6252130B2 (enExample) |
| CN (1) | CN104644212A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106388856A (zh) * | 2015-07-29 | 2017-02-15 | 精工爱普生株式会社 | 超声波器件、压电器件、超声波测定装置及电子设备 |
| CN106859703A (zh) * | 2015-11-09 | 2017-06-20 | 富士胶片株式会社 | 超声波内窥镜以及超声波内窥镜的制造方法 |
| CN110314834A (zh) * | 2018-03-28 | 2019-10-11 | 中国科学院深圳先进技术研究院 | 一种超声换能器及其制备方法 |
| CN110596010A (zh) * | 2019-10-24 | 2019-12-20 | 南昌洋深电子科技有限公司 | 一种可接收和发射超声的微透镜阵列 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5990929B2 (ja) | 2012-02-24 | 2016-09-14 | セイコーエプソン株式会社 | 超音波トランスデューサー装置およびプローブ並びに電子機器および超音波診断装置 |
| JP6597026B2 (ja) * | 2015-07-30 | 2019-10-30 | セイコーエプソン株式会社 | 超音波デバイス及び超音波モジュール |
| US20170055948A1 (en) * | 2015-08-27 | 2017-03-02 | Tyco Electronics Corporation | Probe assembly and system including a modular device and a cable assembly |
| JP6922300B2 (ja) * | 2017-03-22 | 2021-08-18 | セイコーエプソン株式会社 | 超音波デバイスユニット、超音波探触子、及び超音波装置 |
| JP6776481B1 (ja) * | 2020-01-30 | 2020-10-28 | サンコール株式会社 | 超音波トランスデューサー及びその製造方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5897503A (en) * | 1997-08-01 | 1999-04-27 | Acuson Corporation | Ultrasound transducer probe having case handle grip surfaces |
| CN101006361A (zh) * | 2004-08-18 | 2007-07-25 | 皇家飞利浦电子股份有限公司 | 二维超声换能器阵列 |
| US20080077017A1 (en) * | 2006-09-26 | 2008-03-27 | Fujifilm Corporation | Ultrasonic probe, ultrasonic endoscope, and ultrasonic diagnostic apparatus |
| CN101797166A (zh) * | 2009-02-10 | 2010-08-11 | 忽门史肯股份有限公司 | 超声波探头、超声波成像设备及其制造方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58166195U (ja) * | 1982-04-30 | 1983-11-05 | ティーディーケイ株式会社 | 超音波プロ−ブ |
| JPS60191600A (ja) * | 1983-11-08 | 1985-09-30 | Tokyo Keiki Co Ltd | 音響整合層の形成方法およびその装置 |
| JPH06201664A (ja) * | 1992-12-29 | 1994-07-22 | Olympus Optical Co Ltd | 超音波トランスデューサ製造法 |
| US5577507A (en) * | 1994-11-21 | 1996-11-26 | General Electric Company | Compound lens for ultrasound transducer probe |
| US6142947A (en) * | 1998-12-04 | 2000-11-07 | General Electric Company | Ultrasound probe and related methods of assembly/disassembly |
| US6558323B2 (en) * | 2000-11-29 | 2003-05-06 | Olympus Optical Co., Ltd. | Ultrasound transducer array |
| JP2003061957A (ja) * | 2001-08-28 | 2003-03-04 | Seiko Instruments Inc | 圧電トランスデューサ及び該圧電トランスデューサを用いた脈波検出装置 |
| JP4776349B2 (ja) * | 2005-11-14 | 2011-09-21 | 株式会社日立メディコ | 超音波撮像装置 |
| JP4961224B2 (ja) | 2007-02-02 | 2012-06-27 | 株式会社日立メディコ | 超音波探触子 |
| US20090082673A1 (en) * | 2007-09-26 | 2009-03-26 | Xuanming Lu | Semiconductor matching layer in a layered ultrasound transducer array |
| US8784319B2 (en) * | 2009-02-12 | 2014-07-22 | Konica Minolta Medical & Graphic, Inc. | Ultrasonic probe and ultrasonic diagnostic device |
| DE102012002540B4 (de) * | 2012-02-09 | 2018-07-19 | Sartorius Stedim Biotech Gmbh | Filtermodul und modulares Filtersystem |
| JP6229431B2 (ja) * | 2013-10-28 | 2017-11-15 | セイコーエプソン株式会社 | 超音波デバイス、超音波プローブヘッド、超音波プローブ、電子機器および超音波画像装置 |
-
2013
- 2013-11-20 JP JP2013240277A patent/JP6252130B2/ja active Active
-
2014
- 2014-10-27 US US14/524,260 patent/US20150141825A1/en not_active Abandoned
- 2014-11-17 CN CN201410654181.XA patent/CN104644212A/zh active Pending
- 2014-11-18 EP EP14193632.8A patent/EP2875783A1/en not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5897503A (en) * | 1997-08-01 | 1999-04-27 | Acuson Corporation | Ultrasound transducer probe having case handle grip surfaces |
| CN101006361A (zh) * | 2004-08-18 | 2007-07-25 | 皇家飞利浦电子股份有限公司 | 二维超声换能器阵列 |
| US20080077017A1 (en) * | 2006-09-26 | 2008-03-27 | Fujifilm Corporation | Ultrasonic probe, ultrasonic endoscope, and ultrasonic diagnostic apparatus |
| CN101797166A (zh) * | 2009-02-10 | 2010-08-11 | 忽门史肯股份有限公司 | 超声波探头、超声波成像设备及其制造方法 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106388856A (zh) * | 2015-07-29 | 2017-02-15 | 精工爱普生株式会社 | 超声波器件、压电器件、超声波测定装置及电子设备 |
| CN106388856B (zh) * | 2015-07-29 | 2021-05-18 | 精工爱普生株式会社 | 超声波器件、压电器件、超声波测定装置及电子设备 |
| CN106859703A (zh) * | 2015-11-09 | 2017-06-20 | 富士胶片株式会社 | 超声波内窥镜以及超声波内窥镜的制造方法 |
| US10772605B2 (en) | 2015-11-09 | 2020-09-15 | Fujifilm Corporation | Ultrasonic endoscope and method of manufacturing the same |
| CN106859703B (zh) * | 2015-11-09 | 2021-02-09 | 富士胶片株式会社 | 超声波内窥镜以及超声波内窥镜的制造方法 |
| CN110314834A (zh) * | 2018-03-28 | 2019-10-11 | 中国科学院深圳先进技术研究院 | 一种超声换能器及其制备方法 |
| CN110596010A (zh) * | 2019-10-24 | 2019-12-20 | 南昌洋深电子科技有限公司 | 一种可接收和发射超声的微透镜阵列 |
| CN110596010B (zh) * | 2019-10-24 | 2022-07-08 | 南昌洋深电子科技有限公司 | 一种可接收和发射超声的微透镜阵列 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015097734A (ja) | 2015-05-28 |
| EP2875783A1 (en) | 2015-05-27 |
| US20150141825A1 (en) | 2015-05-21 |
| JP6252130B2 (ja) | 2017-12-27 |
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| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150527 |
|
| WD01 | Invention patent application deemed withdrawn after publication |