CN104638505A - Method and device for generating broadband continuously tunable coherent extreme ultraviolet source - Google Patents
Method and device for generating broadband continuously tunable coherent extreme ultraviolet source Download PDFInfo
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Abstract
The invention discloses a method and a device for generating a broadband continuously tunable coherent extreme ultraviolet source. The method comprises the following steps of generating a femtosecond laser beam; focusing the laser beam to working gas, wherein the laser beam and the working gas interact under a vacuum environment to generate higher harmonics; adjusting the incident energy of the laser beam or the gas pressure of the working gas so as to change the phase matching conditions of the higher harmonics to cause the red shift or the blue shift of the frequency of the higher harmonics, therefore realizing the continuous tuning of harmonic radiation wavelengths of all orders of the coherent extreme ultraviolet source. The invention also provides a method for realizing the method. By implementing the method and the device disclosed by the invention, the continuous tuning of the harmonic radiation wavelengths of all the orders of the coherent extreme ultraviolet source can be realized.
Description
Technical field
The present invention relates to high field laser physics and attosecond science technical field, more specifically, relate to a kind of method and the device that produce broad band continuously-tuning coherent extreme ultraviolet light light source.
Background technology
The wavelength of extreme ultraviolet is positioned at the spectral regions of 10 ~ 121nm, is a kind of high energy electron irradiation, the species energy transition that it can cause additive method to be difficult to realize and chemical reaction.Tunable EUV light source tool in laser spectroscopy research is of great significance, and it is the main method realizing high-resolution imaging, and this external super-high density optical disc, material processed technology and biomedicine also have very large application prospect.
In existing method, the generation of coherent source is generally realized by the stimulated radiation of working media or the frequency multiplication of crystal or difference frequency, export wave band and be more common in visible waveband and infrared band, be difficult to utilize said method to produce at extreme ultraviolet waveband (10 ~ 121nm).Therefore it is necessary for adopting new ways and means to realize EUV light source.Application number is the method for the generation extreme ultraviolet tunable single chromatic coherent light source of the patent description of 201310188870.1, its relate to Multi Colour Lasers field and gas interaction, macro phase coupling and intratomic phase-matching technique, but it can only the wavelength of tuning particular harmonic order, and can not realize the continuous tuning of each order harmonic radiation wavelength of EUV light source simultaneously.Therefore, the deficiencies in the prior art, constrain the application in practice of tunable EUV light source.
Summary of the invention
For above defect or the Improvement requirement of prior art, the invention provides a kind of method and the device that produce broad band continuously-tuning coherent extreme ultraviolet light light source, femtosecond laser and gas is utilized to interact, on the basis producing high order harmonic component, regulate pulsed laser energy or air pressure, the phase-matching condition of high order harmonic component is changed, produces red shift or blue shift that spectrum is broadened, thus realize the continuous tuning of each order harmonic radiation wavelength of EUV light source.
For achieving the above object, according to the present invention, provide a kind of method producing broad band continuously-tuning coherent extreme ultraviolet light light source, described method is: produce femtosecond laser beam, described femtosecond laser beam is focused on working gas place, and described laser beam and described working gas interact and produce high order harmonic component under vacuum conditions; Adjust the projectile energy of described laser beam or the air pressure of described working gas, to change the phase-matching condition of high order harmonic component, make order harmonic frequencies generation red shift or blue shift, thus realize the continuous tuning of each order harmonic radiation wavelength of EUV light source.
As further preferably, keep working gas air pressure constant, increase pulsed laser energy, make order harmonic frequencies generation red shift.
As further preferably, keep pulsed laser energy constant, increase working gas air pressure, make order harmonic frequencies generation blue shift.
As further preferably, described working gas is the one in inert gas or molecular gas.
Correspondingly, the present invention also provides a kind of device of implementation method, described device comprises: the combination of femtosecond laser driving light source, half-wave plate and polarizer, diaphragm, condenser lens, the first vacuum chamber, gas box, and described gas box is positioned at the condenser lens focus place of the first vacuum chamber;
Described femtosecond laser driving light source is for generation of femtosecond laser, half-wave plate and polarizer group are share in carrying out energy adjustment to described femtosecond laser beam, diaphragm is for regulating beam diameter and the laser beam after regulating being impinged perpendicularly on condenser lens, focused on by condenser lens, the working gas in laser beam and gas box interacts at condenser lens focus place and produces high order harmonic component again.
As further preferably, described device also comprises the pressure regulating valve be arranged on gas box breather line, for the pressure of working gas passed in adjustments of gas box.
As further preferably, described device also comprises the second vacuum chamber, slit, flat burnt field grating, MCP fluorescent plate, CCD camera, and described slit, flat burnt field grating are positioned at the second vacuum chamber;
Described high order harmonic component focuses on same plane by putting down burnt field grating through slit, and described MCP fluorescent plate, CCD camera are used for focusing on conplane high order harmonic component signal detect described.
As further preferably, the working gas in described gas box is the one in inert gas or molecular gas.
As further preferably, described condenser lens is planoconvex spotlight, spherical lens or parabolic lens.
In general, the above technical scheme conceived by the present invention compared with prior art, mainly possesses following technological merit: the inventive method utilizes strong femtosecond pulse one-wavelength laser field and gas to interact, produce high order harmonic component, again by regulating pulsed laser energy and air pressure, its phase-matching condition is changed, causes high order harmonic component generation frequency displacement (red shift or blue shift), namely achieve output wavelength tunable.Application the inventive method and device, by accurately controlling the variable quantity of pulsed laser energy and air pressure, realizing the precision tuning of EUV light source output wavelength, also carrying out tuning by phase-matching technique to the harmonic wave of specific order.
Accompanying drawing explanation
Fig. 1 is the apparatus structure schematic diagram that the present invention produces broad band continuously-tuning coherent extreme ultraviolet light light;
Fig. 2 is the apparatus structure schematic diagram of the generation broad band continuously-tuning coherent extreme ultraviolet light light of one embodiment of the invention;
Fig. 3 is apparatus of the present invention air pressure one timing, when laser pulse energy measures different value, and each order harmonic intensity and wavelength change schematic diagram;
Fig. 4 is apparatus of the present invention air pressure one timing, and the centre wavelength of each order (13 ~ 27 times) harmonic wave is with the change schematic diagram of pulsed laser energy;
Fig. 5 is apparatus of the present invention pulsed laser energy one timing, when air pressure gets different value, and the change schematic diagram of each order harmonic intensity and wavelength;
Fig. 6 is apparatus of the present invention pulsed laser energy one timing, and the centre wavelength of each order (13 ~ 27 times) harmonic wave is with the change schematic diagram of air pressure.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.In addition, if below in described each execution mode of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
The invention provides a kind of method producing broad band continuously-tuning coherent extreme ultraviolet light light source, described method is: produce femtosecond laser beam, by laser beam focusing in working gas place, described laser beam and described working gas interact and produce high order harmonic component under vacuum conditions; Adjust the projectile energy of described laser beam or the air pressure of described working gas, to change the phase-matching condition of high order harmonic component, make order harmonic frequencies generation red shift or blue shift, thus realize the continuous tuning of each order harmonic radiation wavelength of EUV light source.
As shown in Figure 1, based on said method, the present invention also provides a kind of device realizing said method.Device comprises: femtosecond laser driving light source 1, half-wave plate and polarizer combination 2, diaphragm 3, condenser lens 4, first vacuum chamber 5 and gas box 9.Wherein, gas box 9 is positioned at the first vacuum chamber 5 inside.
Above-mentioned femtosecond laser driving light source 1 is for generation of femtosecond laser, and half-wave plate and polarizer combination 2 are for carrying out femtosecond laser beam energy adjustment; Regulate beam diameter (i.e. spot size) by diaphragm 3 again, the laser beam after adjustment impinges perpendicularly on condenser lens 4 through diaphragm 3, and line focus lens 4 focus on.Described gas box 9 is positioned at lens focus place after regulating, and the working gas in above-mentioned femtosecond laser and gas box 9 interacts and produces high order harmonic component.
Wherein, half-wave plate and polarizer combine 2 for carrying out the adjustment of beam energy, by controlling the rotational angle of half-wave plate to regulate the emergent light energy of femtosecond laser driving light source.Also can have with other in the present invention regulates the device of beam energy to replace.
Condenser lens 4 can select planoconvex spotlight, spherical lens or parabolic lens.
First vacuum chamber 5 is also connected with the first molecular pump 7, and the first molecular pump 7, for vacuumizing the first vacuum chamber 5, makes it remain on vacuum state.Laser and air can interact, vacuum state ensure that light beam only with the pure gas effect of specifying.
Gas box 9 of the present invention is connected with air inlet pipe 10, and the working gas of its input is inert gas or N2, O2, H2, D2 equimolecular gases such as Ne, Ar, Kr, Xe.Also arrange by a pressure regulating valve between gas box 9 and air inlet pipe 10, regulated the flow of the working gas passed into by pressure regulating valve, thus realize the adjustment to air pressure in gas box.Meanwhile, also control the position of gas box by the displacement platform controlled in the first vacuum chamber, make condenser lens 4 focus on the focus obtained and be positioned at gas box 9 centre.Gas box 9 can select copper pipe or nickel pipe etc.
As shown in Figure 2, as the preferred mode of one, apparatus of the present invention also comprise the second vacuum chamber 6, slit 11, flat burnt field grating 12, MCP fluorescent plate 13, CCD camera 14.Slit 11, flat burnt field grating 12 are positioned at the second vacuum chamber 6 inside, high order harmonic component focuses on same plane through slit 11 by flat burnt field grating 12, carry out the detection to described high order harmonic component signal by MCP fluorescent plate 13, CCD camera 14 again, observe red shift or the blue-shifted phenomenon of order harmonic frequencies.
Wherein, the second vacuum chamber 6 is also connected with the second molecular pump 8, and the second molecular pump 8, for vacuumizing the second vacuum chamber 6, makes it remain on vacuum state.Vacuum state is conducive to avoiding other gases in laser beam and air to interact, and makes it possible to red shift or the blue-shifted phenomenon of more clearly observing order harmonic frequencies.
The course of work of apparatus of the present invention is:
S1, startup femtosecond laser driving light source, adjustment diaphragm, condenser lens make laser beam be positioned at slit central authorities;
Under S2, gas box are in vacuum state, working gas is filled with to gas box, half-wave plate angle is regulated to make laser beam reach into institute's energy requirement, adjustments of gas cassette positions is located at condenser lens focal position, and the working gas in gas box and laser beam interact and produce high order harmonic component;
S3, rotation half-wave plate angle, regulate the air pressure passing into working gas in the incident laser pulse energy of femtosecond laser driving light source or adjustments of gas box, make frequency generation red shift or the blue shift of described high order harmonic component, thus realize the continuous tuning of EUV light source output wavelength.
In above-mentioned steps S2, specific implementation is: first check whether gas box leaks gas, and under the gastight state of gas box, the displacement platform at adjustments of gas box place, makes laser beam in gas box central authorities.Regulate laser energy adjusting deice (if half-wave plate and polarizer combine, then adjustment half-wave plate rotational angle), make laser energy reach into energy needed for silk.Find lens focus position (silk position), make gas box be in lens focus place.Then use protection screen (light barrier) to block laser beam, seal two vacuum chambers, start two molecular pumps and vacuum chamber is evacuated, and maintain high vacuum state.Take down light barrier, start femtosecond laser driving light source, the femtosecond laser being 800nm wavelength squeezes into vacuum chamber after lens focus; Now be filled with working gas to gas box, femtosecond laser and working gas interact in gas box, and become silk at focus (in the gas box) place of lens, produce high order harmonic component, namely produce EUV light source.
The inventive method utilizes strong femtosecond pulse one-wavelength laser field and gas to interact, produce high order harmonic component, again by regulating pulsed laser energy and air pressure, its phase-matching condition is changed, cause high order harmonic component generation frequency displacement (red shift or blue shift), namely achieve output wavelength tunable.Certain functional relation is there is in the present invention according to the value of the wavelength of each order harmonic radiation and pulsed laser energy, air pressure, by accurately controlling the variable quantity of pulsed laser energy and air pressure, the precision tuning of EUV light source output wavelength can be realized, also carry out tuning by phase-matching technique to the harmonic wave of specific order.
Below in conjunction with specific embodiment, the present invention program is described further.
In an embodiment of the invention, femtosecond laser driving light source adopts can emission center wavelength be the strong femtosecond laser driving light source of pulse of 800nm, pulsewidth 35fs, energy 10mJ, repetition rate 1KHz; Gas box adopts diameter to be the copper pipe of 3mm, and the working gas passed into adopts N2; Flat swept grating angle, burnt field gets 87 °, average grating constant d=1/1200mm; MCP (microchannel plate) is respectively 1.3KV, 3.5KV with institute's making alive on fluorescent plate.
Fig. 3 is that air pressure gets 29.4torr, when incident laser power gets 1mJ, 2mJ, 3mJ respectively, and the change of each order harmonic intensity and centre wavelength.As shown in Figure 3, for same pulsed laser energy, harmonic order is higher, and its humorous intensity of wave is less; To the harmonic wave of specific a certain order, along with the increase of pulsed laser energy, the direction that harmonic wave increases to wavelength is moved (i.e. Red Shift Phenomena).
Fig. 4 is when air pressure gets 29.4torr, with the change of pulsed laser energy, and the change of 13rd ~ 27 subharmonic centre wavelengths.As can be seen from Figure, along with the increase of pulsed laser energy, harmonic wave increases (i.e. Red Shift Phenomena).There is certain linear relationship (and after matching, slope size is very close) in the wavelength of each order harmonic radiation and pulsed laser energy, therefore accurately controls the size of pulsed laser energy, can realize the precision tuning of EUV light source output wavelength.
Fig. 5 can measure 3mJ for working as incident laser pulse, when air pressure gets 7.9torr, 30.5torr, 49.0torr, and the change of each order harmonic intensity and centre wavelength.As can be seen from Figure, to same atmospheric pressure value, harmonic order is higher, and its humorous intensity of wave is less; To the harmonic wave of specific a certain order, along with the increase of air pressure, the direction that harmonic wave reduces to wavelength is moved (i.e. blue-shifted phenomenon).
Fig. 6 is when incident laser pulse can measure 3mJ, with the change of air pressure, and the change of 13rd ~ 27 subharmonic centre wavelengths.As can be seen from Figure, along with the increase of air pressure, harmonic wave reduces (i.e. blue-shifted phenomenon).There is certain linear relationship (and after matching, slope size is very close) in the wavelength of each order harmonic radiation and air pressure, therefore accurately controls the size of air pressure, can realize the precision tuning of EUV light source output wavelength.
Table 1 is the wavelength tuning range of 13rd ~ 27 subharmonic under different pulsed laser energy (1mJ ~ 3.35mJ) or air pressure (2.6torr ~ 62.9torr) and energy broadness of tuning.As can be seen from the table, to the harmonic wave of specific a certain order, change pulsed laser energy or air pressure, the wavelength tuning range that Einstein shift, blue shift cause has certain intersection, wavelength tuning width about 0.4 ~ 1.0nm; The total wavelength tuning region of harmonic wave is 27 ~ 62nm; Regulate pulsed laser energy, the harmonic energy broadness of tuning of specific order can reach 0.9ev.
Table 1
Table 2 is linear relationships of 13rd ~ 27 subharmonic wavelength and incident laser pulse energy, air pressure.As can be seen from the table, accurately control the size of incident laser pulse energy and air pressure, the precision tuning of EUV light source output wavelength can be realized.3rd row, the 6th column data represent respectively when air pressure 22.9torr (pulsed laser energy is 0), when pulsed laser energy 3mJ (air pressure is 0), the wavelength value of 13rd ~ 27 subharmonic.
Table 2
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. one kind produces the method for broad band continuously-tuning coherent extreme ultraviolet light light source, it is characterized in that, described method is: produce femtosecond laser beam, by laser beam focusing in working gas place, described laser beam and described working gas interact and produce high order harmonic component under vacuum conditions; Adjust the projectile energy of described laser beam or the air pressure of described working gas, to change the phase-matching condition of high order harmonic component, make order harmonic frequencies generation red shift or blue shift, thus realize the continuous tuning of each order harmonic radiation wavelength of EUV light source.
2. the method producing broad band continuously-tuning coherent extreme ultraviolet light light source as claimed in claim 1, is characterized in that, keeps working gas air pressure constant, increases pulsed laser energy, make order harmonic frequencies generation red shift.
3. the method producing broad band continuously-tuning coherent extreme ultraviolet light light source as claimed in claim 1, is characterized in that, keeps pulsed laser energy constant, increases working gas air pressure, make order harmonic frequencies generation blue shift.
4. the method for the generation broad band continuously-tuning coherent extreme ultraviolet light light source as described in any one of claim 1-3, is characterized in that, described working gas is the one in inert gas or molecular gas.
5. one kind realizes the device of method as described in any one of claim 1-4, it is characterized in that, described device comprises: the combination of femtosecond laser driving light source, half-wave plate and polarizer, diaphragm, condenser lens, the first vacuum chamber, gas box, and described gas box is positioned at the condenser lens focus place of the first vacuum chamber;
Described femtosecond laser driving light source is for generation of femtosecond laser, half-wave plate and polarizer group are share in carrying out energy adjustment to described femtosecond laser beam, diaphragm is for regulating beam diameter and the laser beam after regulating being impinged perpendicularly on condenser lens, focused on by condenser lens, the working gas in laser beam and gas box interacts at condenser lens focus place and produces high order harmonic component again.
6. the device producing broad band continuously-tuning coherent extreme ultraviolet light light source as claimed in claim 5, it is characterized in that, described device also comprises the pressure regulating valve be arranged on gas box breather line, for the pressure of working gas passed in adjustments of gas box.
7. the device producing broad band continuously-tuning coherent extreme ultraviolet light light source as claimed in claim 5, it is characterized in that, described device also comprises the second vacuum chamber, slit, flat burnt field grating, MCP fluorescent plate, CCD camera, and described slit, flat burnt field grating are positioned at the second vacuum chamber;
Described high order harmonic component focuses on same plane by putting down burnt field grating through slit, and described MCP fluorescent plate, CCD camera are used for focusing on conplane high order harmonic component signal detect described.
8. the as claimed in claim 5 device producing broad band continuously-tuning coherent extreme ultraviolet light light source, is characterized in that, the working gas in described gas box is the one in inert gas or molecular gas.
9. the device producing broad band continuously-tuning coherent extreme ultraviolet light light source as claimed in claim 5, it is characterized in that, described condenser lens is planoconvex spotlight, spherical lens or parabolic lens.
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| CN114545704A (en) * | 2022-02-23 | 2022-05-27 | 吉林大学 | High-voltage differential beam source gas chamber and method for generating high-energy extreme ultraviolet photons by using same |
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