CN103427323B - Single higher-harmonic ultraviolet monochromatic light source - Google Patents
Single higher-harmonic ultraviolet monochromatic light source Download PDFInfo
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- CN103427323B CN103427323B CN201310371236.1A CN201310371236A CN103427323B CN 103427323 B CN103427323 B CN 103427323B CN 201310371236 A CN201310371236 A CN 201310371236A CN 103427323 B CN103427323 B CN 103427323B
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Abstract
A kind of single higher-harmonic ultraviolet monochromatic light source, comprises the compositions such as 800nm high field polarization laser, beam shaping, light energy modulator, optical phase modulator, plus lens, long range interaction gas box, aluminium film, vacuum cavity.The present invention can produce single high order harmonic component.This high monochromatic high relevant ultra-violet radiation can be used for high accuracy processing and the detection of micro-nano structure, and the field such as high-precision holographic coherent imaging, is widely used.
Description
Technical field
The present invention relates to ultraviolet monochromatic light source, particularly a kind of single higher-harmonic ultraviolet monochromatic light source.
Background technology
At present, monochromaticjty and the best light source of coherence are laser, generally produced by the stimulated radiation of working media, or carry out frequency inverted by crystal double frequency or difference frequency again, make the laser produced in this way mostly be visible light wave range and infrared band, be difficult to adopt said method to produce at ultraviolet light wave band.This is because the phase matched of crystal cannot be met and the own absorption of working media causes, but ultraviolet monochromatic light source but has epochmaking application in modern science and technology with in producing.
Summary of the invention
The object of this invention is to provide a kind of ultraviolet monochromatic light source of single high order harmonic component, monochromaticjty be good to obtain, degree of coherence and all high ultra-violet radiation of contrast.
Technical solution of the present invention is as follows:
A kind of single higher-harmonic ultraviolet monochromatic light source, feature is that its formation comprises 800nm high field polarization laser, outbound course along this 800nm high field polarization laser is the beam shaping of same optical axis, light energy modulator, plus lens, optical phase modulator, long range interaction gas box and aluminium film successively, described beam shaping is the through hole diaphragm of the circular burr of band, and its through-hole diameter is slightly less than the diameter of laser beam; Described light energy modulator is made up of half-wave plate and analyzer, and described half-wave plate has automatically controlled rotating mechanism, described optical phase modulator by frequency-doubling crystal successively, time delay crystal with and frequently crystal form, described time delay crystal has electric controlled rotating mechanism; Described long range interaction gas box is made up of PVC plastic cylinder and the packed-piston being placed in these plastic cylinder two ends, the packed-piston at two ends has the laser channeling sealed by stalloy, gas box cavity is formed between the packed-piston at two ends and plastic cylinder, this cavity communicates with gas cylinder through air intake valve through air inlet pipe, gas box length by two ends packed-piston between distance regulate, air pressure is controlled by air intake valve; Described optical phase modulator, long range interaction gas box are placed in the second vacuum cavity, and described aluminium film is the output window of the second vacuum cavity.
The generation of high order harmonic component usually with the mode radiation of frequency comb, and has similar intensity in platform area, this is because the non-integrate pile characteristic in high order harmonic component process.The present invention is interacted by high field visible laser and inert gas and produces high order harmonic component, then utilizes beam shaping technology, phase-matching technique and gas transmission effects that high order harmonic component is suppressed all the other orders completely while the single order of selective enhancement from multiple order.The present invention carries out shaping by beam shaping to beam shape, by light energy modulator, beam energy is regulated and controled, by optical phase modulator, beam phase is modulated, focus of the light beam into long range interaction gas box by plus lens and produce certain single high order harmonic component, then by aluminium film, driving laser field is filtered, make it through High-order Harmonic Generation, so just obtain the good and ultra-violet radiation that degree of coherence is high of monochromaticjty.
The present invention has following outstanding feature:
(1) by beam shaping, shaping is carried out to beam shape, improve focusing power and beam quality, thus improve the conversion efficiency of ultraviolet monochromatic light source and the contrast of single high order harmonic component;
(2) by light energy modulator, beam energy is regulated, thus select the output wavelength of single high order harmonic component (energy of input laser is larger, then the wavelength of output harmonic wave is shorter);
(3) produced and tuning Multi Colour Lasers field by optical phase modulator, thus improve microcosmic phase-matching condition (contrast of the single high order harmonic component of output determines primarily of microcosmic phase-matching condition);
(4) by the air pressure adjustment of air inlet pipe, thus macro phase matching condition (intensity of the single high order harmonic component of output or conversion efficiency determine primarily of macro phase matching condition) is improved;
(5) by the optimization of gas box action length, thus obtain best gas transport effect, this effect can strengthen single high order harmonic component further and fully suppress all the other high order harmonic components, thus improves contrast further.
Above-mentioned five features determine the superiority of the single higher-harmonic ultraviolet monochromatic light source that the present invention exports jointly.
Accompanying drawing explanation
Fig. 1 is device schematic diagram of the present invention.
Fig. 2 is beam shaping structural representation of the present invention.
Fig. 3 is light energy modulator structural representation of the present invention.
Fig. 4 is optical phase modulator structural representation of the present invention.
Fig. 5 is long range interaction gas box structural representation of the present invention.
Fig. 6 is the experiment test device figure of a specific embodiment of the present invention.
Fig. 7 is multistage the high order harmonic component spectrogram not yet optimized that the present invention exports.
Fig. 8 is the spectrogram of the ultraviolet monochromatic light source after the optimization that exports of the present invention.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the invention will be further described, but should not limit the scope of the invention with this.
First refer to Fig. 1, Fig. 1 is device schematic diagram of the present invention.As seen from the figure, the single higher-harmonic ultraviolet monochromatic light source of the present invention, comprise 800nm high field polarization laser 1, outbound course along this 800nm high field polarization laser 1 is the beam shaping 2 of same optical axis successively, light energy modulator 3, plus lens 4, optical phase modulator 5, long range interaction gas box 6 and aluminium film 7, described beam shaping 2 is through hole diaphragms of the circular burr of band, as shown in Figure 2, through-hole diameter is slightly less than the diameter of laser beam, burr structure can reduce beam diffraction, improve light beam focusing power, and improve beam quality, thus improve the conversion efficiency of ultraviolet monochromatic light source and the contrast of single high order harmonic component, described light energy modulator 3 as shown in Figure 3, described light energy modulator 3 is made up of half-wave plate 11 and analyzer 12, described half-wave plate 11 has automatically controlled rotating mechanism, half-wave plate 11 is made to rotate the angle changed between laser polarization and analyzer 12 around optical axis by automatically controlled rotating mechanism, thus regulate the energy size of driving laser, its size determines the output wavelength of single high order harmonic component, and driving laser energy is larger, and output wavelength is shorter, described optical phase modulator 5 as shown in Figure 4, can directly produce 400nm laser field by frequency-doubling crystal 13(), time delay crystal 14(is by rotating the phase delay between 800nm and 400nm around optical axis) with and frequently crystal 15(can directly produce 267nm laser field) form, described time delay crystal 14 has electric controlled rotating mechanism, light phase adjustable extent 0 ~ 2 π, its value determines microcosmic phase-matching condition, optimum phase time delay is π, phase matched now can a certain order of selective enhancement high order harmonic component and suppress the high order harmonic component of all the other orders simultaneously, namely drastically increase the contrast of single high order harmonic component, described long range interaction gas box 6 is made up of PVC plastic cylinder 16 and the packed-piston 17 being placed in these plastic cylinder 16 two ends, the packed-piston 17 at two ends has the laser channeling sealed by stalloy 18, gas box cavity is formed between the packed-piston 17 at two ends and plastic cylinder 16, this cavity communicates with gas cylinder 20 through air inlet pipe 19 and air intake valve 21, and air pressure is controlled by air intake valve 21, described optical phase modulator 5, long range interaction gas box 6 are placed in the second vacuum cavity 10, and described aluminium film 7 is the output window of the second vacuum cavity 10.Laser can pierce steel disc 18, interacts with the inert gas in filling cavity, and its action length is determined by the plunger distance at two ends, and action length determines the transmission effects of gas, can optimize the contrast of single high order harmonic component further; Air pressure adjustable extent 0 ~ 1bar, is controlled by the air intake valve of gas cylinder, and this value determines macro phase matching condition, and optimum value is 0.2bar, now maximum by the output intensity of the single high order harmonic component of selective enhancement; The effect of plus lens 4 focuses of the light beam on long range interaction gas box 6; The object of vacuum cavity 9 and 10 is that (pressure is lower than 1 × 10 for the high vacuum state maintained in chamber
-3handkerchief), avoid ultraviolet monochromatic light source in chamber by Atmospheric Absorption; Aluminium film 7 is used to the driving laser field of visible light wave band, only has the ultraviolet source 8 of High-order Harmonic Generation form could be through.
The use step of above-mentioned single higher-harmonic ultraviolet monochromatic light source is as follows:
(1) set optical element successively by shown in Fig. 1, and regulate light path;
(2) connect gas cylinder, open air intake valve, to long range interaction gas box perfusion inert gas;
(3) airtight vacuum chamber, will be evacuated in chamber by vacuum pump and maintain high vacuum state, when pressure is lower than 1 × 10
-3during handkerchief, just can start working;
(4) regulate the air pressure of beam shape, beam energy, beam phase and gas box, thus optimize the output of ultraviolet monochromatic light source;
(5) after use terminates, block driving laser, close the power supply of all devices;
(6) vacuum chamber also needs to keep sealing at ordinary times, maintains vacuum.
Fig. 6 is the experiment test device figure of a specific embodiment of the present invention.1 is 800nm high field fs-laser system (U.S. be concerned with the Ti∶Sapphire laser femto-second laser of company, 8mJ/45fs, 1Kz); 2 is beam shaping (lasing beam diameter is 10mm, and beam shaping clear aperature is 8mm); The 3 light energy modulators be made up of half-wave plate and the analyzer of 800nm wavelength; 4 is focal lengths is the plano-convex plus lens of 1200mm; 5 is optical phase modulators, by frequency-doubling crystal (bbo crystal, cutting angle is θ=29.2 °,
thickness is 0.3mm, and match-type is typeI, can produce 400nm laser field, export polarization orthogonal in the polarised light of fundamental frequency light 800nm), time delay crystal (CaCO
3crystal, cutting angle is θ=22.6 °,
thickness is 0.4mm, for regulating the phase delay of 400nm and 800nm laser field) and frequency crystal (bbo crystal, cutting angle is θ=55.5 °,
thickness is 0.1mm, and match-type is typeII, can produce 267nm laser field, exports polarization parallel in the polarised light of fundamental frequency light 800nm) composition, light phase adjustable extent 0 ~ 2 π, its value determines microcosmic phase-matching condition, and optimum phase time delay is π; 6 is long range interaction gas boxes, structure as shown in Figure 5, plunger distance adjustable extent 0 ~ 50mm, optimized gas box length is 20mm, and working gas is argon Ar, air pressure adjustable extent 0 ~ 1bar, controlled by the air intake valve of gas cylinder, best atmospheric pressure value is 0.2bar; 7 is aluminium films that 500nm is thick, for stopping visible driving laser field, but can pass through ultraviolet source; 22 is ultraviolet-x-ray spectrometers, for diffraction and the ultraviolet monochromatic light source differentiating the generation of this device; 23 is ultraviolet-X ray CCD(model PrincetonInstruments, SX400); 10 is vacuum cavities, for maintaining the vacuum state of equipment, needs vacuum pump.
Concrete testing procedure is as follows:
(1) as shown in Figure 6, install and regulate optical element.
(2) airtight vacuum chamber 10, starts vacuum pump evacuation.
(3) open 800nm fs-laser system, regulate light path.
(4) when vacuum chamber reaches high vacuum state, (pressure is lower than 1 × 10
-3handkerchief), start experiment test, driving laser is accurately imported long range interaction gas box 6, carries out interaction with the Ar gas in gas box and produce ultraviolet source.
(5) driving laser shape and energy is optimized by beam shaping 2 and light energy controller 3, optimize the position of plus lens 4 and the operating air pressure of long range interaction gas box 6 simultaneously, then by spectrometer 22 and CCD23, the ultraviolet monochromatic light source exported is observed, Fig. 7 is the spectrogram of the high order harmonic component light source not yet optimized, and can see the output of multistage the high order harmonic component that intensity is similar; Test result after optimization as shown in Figure 8.
(6), after test terminates, close laser system, airtight vacuum chamber, closes all the other all devices.
Experimental results: Fig. 8 optimizes beam shape (insertion beam shaping), improve beam energy (be tuned to 2.5mJ), the spectrum of the single higher-harmonic ultraviolet monochromatic light source obtained after optimizing the length (being stretched to 20mm) of beam phase (be tuned to π) and gas box and air pressure (maintaining 0.2bar), as can be seen from the figure, almost only remaining single high order harmonic component (is 14 high order harmonic components in figure, corresponding centre wavelength is 57nm), all the other high order harmonic component orders are almost completely suppressed, the monochromaticjty of the ultraviolet source obtained, contrast and degree of coherence are all very outstanding.
Claims (1)
1. a single higher-harmonic ultraviolet monochromatic light source, be characterised in that its formation is: comprise 800nm high field polarization laser (1), outbound course along this 800nm high field polarization laser (1) is the beam shaping (2) of same optical axis, light energy modulator (3), plus lens (4), optical phase modulator (5), long range interaction gas box (6) and aluminium film (7) successively, described beam shaping (2) is the through hole diaphragm of the circular burr of band, and its through-hole diameter is slightly less than the diameter of laser beam; Described light energy modulator (3) is made up of half-wave plate (11) and analyzer (12), described half-wave plate (11) has automatically controlled rotating mechanism, described optical phase modulator (5) is made up of with frequency crystal (15) frequency-doubling crystal (13) successively, time delay crystal (14), and described time delay crystal (14) has electric controlled rotating mechanism; Described long range interaction gas box (6) is made up of PVC plastic cylinder (16) and the packed-piston (17) that is placed in this plastic cylinder (16) two ends, the packed-piston (17) at two ends has the laser channeling sealed by stalloy (18), gas box cavity is formed between the packed-piston (17) at two ends and plastic cylinder (16), this cavity communicates with gas cylinder (20) through air inlet pipe (19) and air intake valve (21), gas box length by two ends packed-piston (17) between distance regulate, air pressure is controlled by air intake valve (21); Described optical phase modulator (5), long range interaction gas box (6) are placed in the second vacuum cavity (10), and described aluminium film (7) is the output window of the second vacuum cavity (10).
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| CN105762054B (en) * | 2016-04-07 | 2017-11-28 | 绍兴文理学院 | Controllable gas at rest target assembly and its application method outside a kind of vacuum chamber |
| CN106908950B (en) * | 2017-03-16 | 2023-02-14 | 中国科学院西安光学精密机械研究所 | Electromagnetic radiation generating device and using method thereof |
| CN108654959B (en) * | 2018-07-31 | 2023-09-12 | 苏州易锐光电科技有限公司 | Ultraviolet curing device |
| CN109119875B (en) * | 2018-09-21 | 2019-09-06 | 深圳市杰普特光电股份有限公司 | Bicrystal infrared laser |
| CN113399823B (en) * | 2021-05-28 | 2023-05-16 | 西北工业大学 | Preparation device and preparation method of lens array mirror surface |
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