CN103309118A - Device and method for generating extreme ultraviolet tunable monochromatic coherent light source - Google Patents
Device and method for generating extreme ultraviolet tunable monochromatic coherent light source Download PDFInfo
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- CN103309118A CN103309118A CN2013101888701A CN201310188870A CN103309118A CN 103309118 A CN103309118 A CN 103309118A CN 2013101888701 A CN2013101888701 A CN 2013101888701A CN 201310188870 A CN201310188870 A CN 201310188870A CN 103309118 A CN103309118 A CN 103309118A
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Abstract
The invention provides a device and method for generating an extreme ultraviolet tunable monochromatic coherent light source, the method is characterized by utilizing interacting actions of 800 nm femtosecond laser and gas to generate ultraharmonics, tuning high order harmonic energy from the frequency comb to a specific degree through the macroscopic phase matching and atoms phase matching technology, and enabling the high order harmonic energy to output single high order harmonic (monochrome) in a specific degree. Furthermore, the specific high order harmonic can conduct tuning through the phase-matching technique, that is, the output wave length is adjustable. The extreme ultraviolet tunable monochromatic coherent light source generated by the device can be used in the fields of high precision detection for micro-nano structures, high precision holographic imaging and high precision carving and the like, and can also be used as an injecting source of a free electron laser, and the application range is extremely broad. And the device has the advantages that extreme ultraviolet can be output, monochrome tuning is realized and the coherence is good.
Description
Technical field
The present invention is a kind of generation extreme ultraviolet tunable single chromatic coherent light source (output wavelength tunable range 60nm～20nm, the apparatus and method of output bandwidth～0.4nm), utilizing the interaction of Multi Colour Lasers field and gas to produce single higher hamonic wave realizes, this light source is applicable to the fields such as the detection of high precision micro-nano structure, high precision holographic imaging, high precision engraving, also can be used as the injection source of free electron laser.
Background technology
In the prior art, the production method of monochromatic coherent source generally is to produce by the stimulated radiation of actuating medium or frequency multiplication or the difference frequency of crystal, the wave band of output is more common in visible waveband and infrared band, is difficult to utilize said method to produce at extreme ultraviolet waveband (in the 200nm).But EUV light source has extremely important application in modern production and scientific research.Therefore be necessary to adopt new method and new means to produce the light source of this extreme ultraviolet waveband.
Summary of the invention
In order to realize the output of extreme ultraviolet tunable single chromatic coherent light source, the invention provides a kind of device that produces extreme ultraviolet tunable single chromatic coherent light source, and a kind of method that produces extreme ultraviolet tunable single chromatic coherent light source.The present invention utilizes Multi Colour Lasers field and gas to interact and produces higher hamonic wave, then by macro phase coupling and intratomic phase-matching technique with the higher hamonic wave energy from frequency comb be tuned to certain specific order, make the single higher hamonic wave of its this specific order of output, thereby realize the output of the monochromatic coherent source of extreme ultraviolet.
A kind of device that produces extreme ultraviolet tunable single chromatic coherent light source, it is characterized in that, comprise driving light source, vacuum cavity, vacuum pump, draft tube and visible light filtering membrane, and be installed in vacuum cavity inside condenser lens, frequency-doubling crystal, time-delay crystal and and crystal frequently;
Vacuum pump links to each other with vacuum cavity, is used for making vacuum cavity remain on vacuum state; Draft tube is inserted vacuum cavity, is used for importing in vacuum cavity working gas stream;
Driving light source is the 800nm femtosecond laser, the laser beam of driving light source emission successively through condenser lens, frequency-doubling crystal, time-delay crystal and and frequently crystal focus on the working gas stream, laser beam is through visible light filtering membrane output stage ultraviolet source afterwards.
A kind of method that produces extreme ultraviolet tunable single chromatic coherent light source is characterized in that, may further comprise the steps:
(1) build test unit, described test unit comprises driving light source, vacuum cavity, vacuum pump, draft tube and visible light filtering membrane, and be arranged on vacuum cavity inside condenser lens, frequency-doubling crystal, time-delay crystal and and crystal frequently;
Vacuum pump links to each other with vacuum cavity, is used for making vacuum cavity remain on vacuum state; Draft tube is inserted vacuum cavity, is used for importing in vacuum cavity working gas stream;
Driving light source is the 800nm femtosecond laser, the laser beam of driving light source emission successively through condenser lens, frequency-doubling crystal, time-delay crystal and and frequently crystal focus on the working gas stream, laser beam is through visible light filtering membrane output stage ultraviolet source afterwards;
(2) sealed vacuum cavity starts vacuum pump, and vacuum cavity is evacuated and maintains air pressure is lower than 1 * 10
-3The high vacuum state of handkerchief;
(3) start driving light source, 800nm laser is imported vacuum cavity;
(4) open draft tube, import working gas stream and interact, produce EUV light source;
(5) regulate the energy of driving light source, the air pressure of draft tube and the phase place of time-delay crystal, realize the output of the monochromatic coherent source of extreme ultraviolet of required wave band.
The present invention has found the new method of the monochromatic coherent source of a kind of tunable extreme ultraviolet, utilize visible Multi Colour Lasers field and gas to interact and produce higher hamonic wave, then by macro phase coupling and intratomic phase-matching technique with the higher hamonic wave energy from frequency comb be tuned to certain specific order, make the single higher hamonic wave (monochrome) of its this specific order of output, this specific higher hamonic wave can also be undertaken by phase-matching technique tuning, and namely output wavelength is tunable.This method is referred first in China and even the world.
Many decades in the past, femtosecond laser and gas interaction generation higher hamonic wave are the study hotspots in the high field laser field always.The radiation of higher hamonic wave has similar intensity usually with the mode producing of frequency comb, and in platform area, and this is attributable to the non-perturbation attribute of higher hamonic wave process.On the one hand, drive the higher hamonic wave that produces by Few-cycle pulse laser or polychromatic field synthetic laser and isolate chirped pulse with the form realization of broadband super continuous spectrums; On the other hand, the higher hamonic wave of the present invention's certain specific order of selective enhancement from the higher hamonic wave frequency comb (suppressing simultaneously the generation of all the other harmonic waves) has very important researching value and using value equally as the monochromatic coherent source of extreme ultraviolet.The present invention has realized the single higher hamonic wave output of specific order by the inferior cycle shaping in Multi Colour Lasers field, can be applicable to the generation of the monochromatic coherent source of extreme ultraviolet.The present invention not only provides the extreme ultraviolet new tool that monochromatic coherent source produces, and has promoted the development in related discipline field.
The present invention has following outstanding feature:
(1) extreme ultraviolet output: be more common in visible waveband and infrared band by the wave band that medium excites, frequency multiplication or difference frequency produce, the present invention employs new technology in the past---the macro phase coupling of gas higher hamonic wave and the output that the intratomic phase-matching technique has realized extreme ultraviolet waveband (in the 200nm);
(2) monochromatic tunable: the output wavelength tunable range is 60nm～20nm, and output bandwidth is～0.4nm;
(3) light source coherence is good: the present invention produces by Laser Driven, and the laser that produces with stimulated radiation is the same, has preferably coherence.
(4) the extreme ultraviolet tunable single chromatic coherent light source of device generation of the present invention can be used for the fields such as the detection of high precision micro-nano structure, high precision holographic imaging, high precision engraving, also can be used as the injection source of free electron laser, and range of application is extremely extensive.
Description of drawings
Fig. 1 is device schematic diagram of the present invention.
Fig. 2 is production process of the present invention and produces principle schematic.
Fig. 3 is the Experimental equipment of an implementation example of the present invention.
Fig. 4 is the high order harmonic spectrum comparison diagram of monochromatic field, double-colored field, polychromatic field generation;
Fig. 5 is the high order harmonic spectrum comparison diagram under the different delayed time in polychromatic field;
Fig. 6 is the specific higher hamonic wave figure under the different delayed time in polychromatic field;
Among the figure: the 1st, driving light source; The 2nd, vacuum cavity; The 3rd, vacuum pump; The 4th, draft tube; The 5th, the visible light filtering membrane; The 6th, condenser lens; The 7th, frequency-doubling crystal; The 8th, the time-delay crystal; The 9th, and the frequency crystal; The 10th, 800nm laser field; The 11st, 400nm laser field; The 12nd, 267nm laser field; The 13rd, working gas; The 14th, EUV light source; The 15th, the extreme ultraviolet spectrometer; The 16th, the special-purpose CCD of EUV light source; The 17th, computing machine.
Embodiment
As shown in Figure 1, the generation device of extreme ultraviolet tunable single chromatic coherent light source of the present invention comprises: driving light source 1, vacuum cavity 2, vacuum pump 3, draft tube 4, visible light filtering membrane 5; Condenser lens 6, frequency-doubling crystal 7, time-delay crystal 8 and frequency crystal 9,800nm laser field 10,400nm laser field 11,267nm laser field 12, working gas stream 13 and EUV light source 14.Driving light source 1 is the 800nm femtosecond laser, produce 400nm laser field 11 by driving frequency-doubling crystal 7, and drive and frequency crystal 9 generation 267nm laser fields 12, synthetic polychromatic field (comprising 800nm, 400nm and 267nm) is regulated phase delay between them by the rotation of time-delay crystal 8, the effect of condenser lens 6 is that the Multi Colour Lasers field is focused on the working gas stream 13, thereby produce EUV light source 14, the extreme ultraviolet tunable single chromatic coherent light source of level output.
The effect of vacuum pump 3 is vacuum cavity 2 to be maintained high vacuum state (air pressure is lower than 1 * 10
-3Handkerchief), this is because EUV light source easily by Atmospheric Absorption, is only kept the dissipation that high vacuum state just can be avoided EUV light source.Draft tube 4 is used for importing working gas stream, and visible light filtering membrane 5 is the Multi Colour Lasers fields (comprising 800nm, 400nm, 267nm) of filtering visible light wave range, only has EUV light source 14 to see through.
Frequency-doubling crystal 7 with and frequently the conversion efficiency of crystal 9 can be undertaken by the rotating crystal angle tuningly, time-delay crystal 8 also is to realize phase delay control between the polychromatic field by the angle rotation.EUV light source 14 is monochromatic tunable, can realize tuning by the energy of control driving light source 1 and the air pressure of draft tube 4.In addition, the air pressure of draft tube 4 determines the macro phase matching condition, and the time-delay of time-delay crystal 8 determines the intratomic phase-matching condition, and both have determined contrast and the monochromaticity of EUV light source 14 jointly.
The production process of extreme ultraviolet tunable single chromatic coherent light source and generation principle are as shown in Figure 2, driving light source at first produces Multi Colour Lasers field (800nm, 400nm and 267nm) by frequency-doubling crystal and with the frequency crystal, the output of single higher hamonic wave is realized by the phase adjusted of time-delay crystal and the air pressure adjustment of working gas again in the Multi Colour Lasers field, thereby has realized the output of extreme ultraviolet tunable single chromatic coherent light source.
Adopt above-mentioned extreme ultraviolet tunable single chromatic coherent light-source generation device to produce the method for light source, specifically comprise the steps:
(1) opens vacuum cavity, regulate the optical element in the vacuum cavity.
(2) sealed vacuum cavity starts vacuum pump, vacuum cavity is evacuated and maintains high vacuum state (air pressure is lower than 1 * 10
-3Handkerchief).
(3) start driving light source, 800nm laser is accurately imported the predeterminated position of vacuum cavity.
(4) open draft tube, importing working gas stream interacts and produces EUV light source.
(5) according to demand, regulate driving light source energy, manifold air pressure and time-delay crystalline phase, realize the monochromatic coherent source of extreme ultraviolet of required wave band, and derive and use.
(6) after use finishes, close working gas stream, close driving light source, close vacuum pump.
(7) vacuum chamber preferably keeps sealing at ordinary times, keeps vacuum state, is conducive to the life-span of device.
A specific embodiment of the present invention is: as shown in Figure 3, driving light source 1 is 800nm femtosecond laser driving light source (the titanium jewel femto-second laser that the relevant company of the U.S. produces); Vacuum cavity 2 is vacuum cavities of designed, designed; Vacuum pump 3 is the instruments that vacuumize of mechanical pump and molecular pump combination; Draft tube 4 is air inlet copper pipes, and nozzle place gas vent internal diameter is 0.2mm; Visible light filtering membrane 5 is the thick aluminium films of 500nm; Condenser lens 6 is that focal length is the plano-convex lens of 500mm; Frequency-doubling crystal 7 is β-bbocrystals, cutting angle θ=29.2 °,
Thickness 0.3mm, phase matching type type I, for generation of the 400nm laser field, its polarization direction is perpendicular to the direction of fundamental frequency light 800nm; Time-delay crystal 8 is CaCO3 crystal, cutting angle θ=22.6 °,
Thickness 0.4mm mainly regulates the time-delay of 400nm and 800nm laser field by the anglec of rotation; With frequency crystal 9 are β-bbocrystals, cutting angle θ=55.5 °,
Thickness 0.1mm, phase matching type type II, for generation of the 267nm laser field, its polarization direction is parallel to the direction of fundamental frequency light 800nm; Working gas stream 13 is argon Ars; Extreme ultraviolet spectrometer 15 is used for observation and differentiates the monochromatic coherent source of extreme ultraviolet that this device produces; The model of the special-purpose CCD16 of EUV light source is Princeton Instruments, and SX 400; Computing machine 17 is used for gathering and showing the signal of CCD.
Concrete experimental procedure is as described below: (1) opens vacuum cavity, installs and regulate the optical element in the chamber.(2) sealed vacuum chamber starts mechanical pump and molecular pump, begins to vacuumize.(3) open simultaneously and preheating 800nm femtosecond laser driving light source.(4) after about half an hour, (air pressure is lower than 1 * 10 when vacuum chamber maintains high vacuum state
-3Handkerchief), opens draft tube, simultaneously driving laser is accurately imported predeterminated position, interact with the working gas stream that imports and produce ultimate attainment outer light source---single higher hamonic wave.(5) regulate the driving light source energy (1～2mJ), manifold air pressure (0.1～1atm) and the time-delay crystalline phase, and the spectrum by the monochromatic coherent source of CCD observation extreme ultraviolet, shown in figure (4).(6) experiment finishes, and closes working gas stream, closes driving light source, and vacuum pump is closed in the sealed vacuum chamber.
Experimental results shown in Fig. 4-6, the high order harmonic spectrum contrast that Fig. 4 is monochromatic field, double-colored, polychromatic field produces, 18 higher hamonic waves (corresponding output wavelength is 800nm/18=44nm) of can having found the polychromatic field selective enhancement.Than monochromatic field, the higher hamonic wave that this device adopts polychromatic field to drive generation has not only strengthened 2～3 orders of magnitude in intensity, and has realized the output of single higher hamonic wave (monochrome)---and contrast reaches 1～2 order of magnitude.Fig. 5 is the contrast of the high order harmonic spectrum under the different delayed time in polychromatic field, and under the particular phases time-delay, 18 times higher hamonic wave is further strengthened 43.7%, and near all the other higher hamonic waves have been pressed 65.4% at least.Can find out, under this specific time-delay, 18 high order harmonic spectrums of selective enhancement and the contrast of adjacent higher hamonic wave are increased to 15.9 from 3.8.Fig. 6 is the adjusting by driving light source energy and operating air pressure, and the selected specific higher hamonic wave that strengthens is tunable, from 18 times be tuned to 14 times, namely corresponding output wavelength from 44nm be tuned to 57nm.
Claims (2)
1. device that produces extreme ultraviolet tunable single chromatic coherent light source, it is characterized in that, comprise driving light source (1), vacuum cavity (2), vacuum pump (3), draft tube (4) and visible light filtering membrane (5), and be installed in the inner condenser lens (6) of vacuum cavity (2), frequency-doubling crystal (7), time-delay crystal (8) and and crystal (9) frequently;
Vacuum pump (3) links to each other with vacuum cavity (2), is used for making vacuum cavity (2) remain on vacuum state; Draft tube (4) is inserted vacuum cavity (2), is used for importing working gas stream (13) in vacuum cavity (2);
Driving light source (1) is the 800nm femtosecond laser, the laser beam of driving light source (1) emission passes through successively condenser lens (6), frequency-doubling crystal (7), time-delay crystal (8) and focuses on working gas with frequency crystal (9) and flows on (13), and laser beam is through visible light filtering membrane (5) output stage ultraviolet source (14) afterwards.
2. a method that produces extreme ultraviolet tunable single chromatic coherent light source is characterized in that, may further comprise the steps:
(1) builds test unit, described test unit comprises driving light source (1), vacuum cavity (2), vacuum pump (3), draft tube (4) and visible light filtering membrane (5), and be arranged on the inner condenser lens (6) of vacuum cavity (2), frequency-doubling crystal (7), time-delay crystal (8) and and crystal (9) frequently;
Vacuum pump (3) links to each other with vacuum cavity (2), is used for making vacuum cavity (2) remain on vacuum state; Draft tube (4) is inserted vacuum cavity (2), is used for importing working gas stream (13) in vacuum cavity (2);
Driving light source (1) is the 800nm femtosecond laser, the laser beam of driving light source (1) emission passes through successively condenser lens (6), frequency-doubling crystal (7), time-delay crystal (8) and focuses on working gas with frequency crystal (9) and flows on (13), and laser beam is through visible light filtering membrane (5) output stage ultraviolet source (14) afterwards;
(2) sealed vacuum cavity (2) starts vacuum pump (3), and vacuum cavity (2) is evacuated and maintains air pressure is lower than 1 * 10
-3The high vacuum state of handkerchief;
(3) start driving light source (1), 800nm laser is imported vacuum cavity (2);
(4) open draft tube (4), import working gas stream (13) and interact, produce EUV light source (14);
(5) regulate the energy of driving light source (1), the air pressure of draft tube (4) and the phase place of time-delay crystal (8), realize the output of the monochromatic coherent source of extreme ultraviolet of required wave band.
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Cited By (5)
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| CN107044885A (en) * | 2017-03-06 | 2017-08-15 | 温州大学 | A kind of device and application method for measuring Laser Focusing intensity |
| CN109445227A (en) * | 2018-11-28 | 2019-03-08 | 安徽理工大学 | A kind of nonlinear optics imaging system of multiple phase matched |
| CN109916841A (en) * | 2019-03-15 | 2019-06-21 | 北京大学 | The interconnect device and method of higher hamonic wave vacuum ultraviolet light source and ultrahigh vacuum instrument |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104577702A (en) * | 2014-12-24 | 2015-04-29 | 河南理工大学 | Method for producing water window wave band atto-second pulse |
| CN104577702B (en) * | 2014-12-24 | 2018-04-06 | 河南理工大学 | A kind of method for producing water window wave band chirped pulse |
| CN107044885A (en) * | 2017-03-06 | 2017-08-15 | 温州大学 | A kind of device and application method for measuring Laser Focusing intensity |
| CN107044885B (en) * | 2017-03-06 | 2018-09-11 | 温州大学 | A kind of device and application method measuring laser focus strength |
| CN106908950A (en) * | 2017-03-16 | 2017-06-30 | 中国科学院西安光学精密机械研究所 | Electromagnetic radiation generating device and using method thereof |
| CN106908950B (en) * | 2017-03-16 | 2023-02-14 | 中国科学院西安光学精密机械研究所 | Electromagnetic radiation generating device and using method thereof |
| CN109445227A (en) * | 2018-11-28 | 2019-03-08 | 安徽理工大学 | A kind of nonlinear optics imaging system of multiple phase matched |
| CN109916841A (en) * | 2019-03-15 | 2019-06-21 | 北京大学 | The interconnect device and method of higher hamonic wave vacuum ultraviolet light source and ultrahigh vacuum instrument |
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