CN103309118B - A kind of apparatus and method producing extreme ultraviolet tunable single chromatic coherent light source - Google Patents
A kind of apparatus and method producing extreme ultraviolet tunable single chromatic coherent light source Download PDFInfo
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- CN103309118B CN103309118B CN201310188870.1A CN201310188870A CN103309118B CN 103309118 B CN103309118 B CN 103309118B CN 201310188870 A CN201310188870 A CN 201310188870A CN 103309118 B CN103309118 B CN 103309118B
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Abstract
The invention provides a kind of apparatus and method producing extreme ultraviolet tunable single chromatic coherent light source, utilize 800nm femtosecond laser and gas to interact and produce higher hamonic wave, then by macro phase coupling and intratomic phase-matching technique by higher hamonic wave energy from frequency comb be tuned to certain specific order, make its output certain specific order single higher hamonic wave (monochrome).In addition, this specific higher hamonic wave can also be undertaken tuning by phase-matching technique, and namely output wavelength is tunable.The extreme ultraviolet tunable single chromatic coherent light source that device of the present invention produces can be used for the fields such as the detection of high precision micro-nano structure, high precision holographic imaging, high precision engraving, also can be used as the injection source of free electron laser, range of application is extremely extensive, and its advantage is that extreme ultraviolet exports, monochrome is tunable, coherence good.
Description
Technical field
The present invention is a kind of generation extreme ultraviolet tunable single chromatic coherent light source (output wavelength tunable range 60nm ~ 20nm, output bandwidth ~ 0.4nm) apparatus and method, utilize Multi Colour Lasers field and gas to interact to produce single higher hamonic wave to realize, this light source is applicable to the fields such as the detection of high precision micro-nano structure, high precision holographic imaging, high precision engraving, also can be used as the injection source of free electron laser.
Background technology
In the prior art, the production method in monochromatic coherent light source is generally produced by the stimulated radiation of actuating medium or the frequency multiplication of crystal or difference frequency, the wave band exported is more common in visible waveband and infrared band, is difficult to utilize said method to produce at extreme ultraviolet waveband (within 200nm).But EUV light source has extremely important application in modern production and scientific research.Therefore be necessary to adopt new method and new means to produce the light source of this extreme ultraviolet waveband.
Summary of the invention
In order to realize the output of extreme ultraviolet tunable single chromatic coherent light source, the invention provides a kind of device producing extreme ultraviolet tunable single chromatic coherent light source, and a kind of method producing extreme ultraviolet tunable single chromatic coherent light source.The present invention utilizes Multi Colour Lasers field and gas to interact and produces higher hamonic wave, then by macro phase coupling and intratomic phase-matching technique by higher hamonic wave energy from frequency comb be tuned to certain specific order, make it export the single higher hamonic wave of this specific order, thus realize the output in extreme ultraviolet monochromatic coherent light source.
A kind of device producing extreme ultraviolet tunable single chromatic coherent light source, it is characterized in that, comprise driving light source, vacuum cavity, vacuum pump, draft tube and visible ray filtering membrane, and be arranged on the condenser lens of vacuum cavity inside, frequency-doubling crystal, time delay crystal and and crystal frequently;
Vacuum pump is connected with vacuum cavity, remains on vacuum state for making vacuum cavity; Draft tube inserts vacuum cavity, for importing working gas stream in vacuum cavity;
Driving light source is 800nm femtosecond laser, the laser beam launched of driving light source successively through condenser lens, frequency-doubling crystal, time delay crystal and and frequently crystal focus on the working gas stream, laser beam is through visible ray filtering membrane output stage ultraviolet source afterwards.
Produce a method for extreme ultraviolet tunable single chromatic coherent light source, it is characterized in that, comprise the following steps:
(1) build test unit, described test unit comprises driving light source, vacuum cavity, vacuum pump, draft tube and visible ray filtering membrane, and be arranged on the condenser lens of vacuum cavity inside, frequency-doubling crystal, time delay crystal and and crystal frequently;
Vacuum pump is connected with vacuum cavity, remains on vacuum state for making vacuum cavity; Draft tube inserts vacuum cavity, for importing working gas stream in vacuum cavity;
Driving light source is 800nm femtosecond laser, the laser beam launched of driving light source successively through condenser lens, frequency-doubling crystal, time delay crystal and and frequently crystal focus on the working gas stream, laser beam is through visible ray filtering membrane output stage ultraviolet source afterwards;
(2) sealed vacuum cavity, starts vacuum pump, is evacuated by vacuum cavity and maintains air pressure lower than 1 × 10
-3the high vacuum state of handkerchief;
(3) start driving light source, 800nm laser is imported vacuum cavity;
(4) open draft tube, import working gas stream and interact, produce EUV light source;
(5) regulate the phase place of the energy of driving light source, the air pressure of draft tube and time delay crystal, realize the output in the extreme ultraviolet monochromatic coherent light source of required wave band.
The present invention have found a kind of new method of tunable extreme ultraviolet monochromatic coherent light source, utilize visible Multi Colour Lasers field and gas to interact and produce higher hamonic wave, then by macro phase coupling and intratomic phase-matching technique by higher hamonic wave energy from frequency comb be tuned to certain specific order, it is made to export the single higher hamonic wave (monochrome) of this specific order, this specific higher hamonic wave can also be undertaken tuning by phase-matching technique, and namely output wavelength is tunable.This method is referred first in China and even the world.
Many decades in the past, femtosecond laser and gas interact and produces higher hamonic wave is study hotspot in high field laser field always.The radiation of higher hamonic wave, produces with the pattern of frequency comb usually, and has similar intensity in platform area, and this is attributable to the non-integrate pile attribute of higher hamonic wave process.On the one hand, the higher hamonic wave produced is driven to realize isolated chirped pulse with the form of broadband super continuous spectrums by Few-cycle pulse laser or polychromatic field synthetic laser; On the other hand, the higher hamonic wave (simultaneously suppressing all the other generation ofharmonic) of the present invention's certain specific order of selective enhancement from order harmonic frequencies comb, as extreme ultraviolet monochromatic coherent light source, has very important researching value and using value equally.The single higher hamonic wave that the present invention achieves specific order by the sub-cycle shaping in Multi Colour Lasers field exports, and can be applicable to the generation in extreme ultraviolet monochromatic coherent light source.The present invention provide not only the new tool that extreme ultraviolet monochromatic coherent light source produces, and facilitates the development in related discipline field.
The present invention has following outstanding feature:
(1) extreme ultraviolet exports: excited by medium in the past, wave band that frequency multiplication or difference frequency produce is more common in visible waveband and infrared band, the present invention employs new technology---and the macro phase coupling of gas higher hamonic wave and intratomic phase-matching technique achieve the output of extreme ultraviolet waveband (within 200nm);
(2) monochromatic tunable: output wavelength tunable range is 60nm ~ 20nm, and output bandwidth is ~ 0.4nm;
(3) light source coherence is good: the present invention is produced by Laser Driven, the same with the laser that stimulated radiation produces, and has good coherence.
(4) the extreme ultraviolet tunable single chromatic coherent light source that device of the present invention produces can be used for the fields such as the detection of high precision micro-nano structure, high precision holographic imaging, high precision engraving, and also can be used as the injection source of free electron laser, range of application is extremely extensive.
Accompanying drawing explanation
Fig. 1 is device schematic diagram of the present invention.
Fig. 2 is production process of the present invention and produces principle schematic.
Fig. 3 is a concrete Experimental equipment implementing example of the present invention.
The high order harmonic spectrum comparison diagram that Fig. 4 is monochromatic field, two-color fields, polychromatic field produce;
Fig. 5 is the high order harmonic spectrum comparison diagram in polychromatic field under different delayed time;
Fig. 6 is the specific higher hamonic wave figure in polychromatic field under different delayed time;
In figure: 1 is driving light source; 2 is vacuum cavities; 3 is vacuum pumps; 4 is draft tube; 5 is visible ray filtering membranes; 6 is condenser lenses; 7 is frequency-doubling crystals; 8 is time delay crystal; 9 are and frequency crystal; 10 is 800nm laser fields; 11 is 400nm laser fields; 12 is 267nm laser fields; 13 is working gass; 14 is EUV light sources; 15 is extreme ultraviolet spectrometers; 16 is the special CCD of EUV light source; 17 is computing machines.
Embodiment
As shown in Figure 1, the generation device of extreme ultraviolet tunable single chromatic coherent light source of the present invention comprises: driving light source 1, vacuum cavity 2, vacuum pump 3, draft tube 4, visible ray filtering membrane 5; Condenser lens 6, frequency-doubling crystal 7, time delay crystal 8 and frequency crystal 9,800nm laser field 10,400nm laser field 11,267nm laser field 12, working gas stream 13 and EUV light source 14.Driving light source 1 is 800nm femtosecond laser, 400nm laser field 11 is produced by driving frequency-doubling crystal 7, and driving and frequently crystal 9 produce 267nm laser field 12, the polychromatic field (comprising 800nm, 400nm and 267nm) synthesized regulates the phase delay between them by the rotation of time delay crystal 8, the effect of condenser lens 6 focuses on working gas stream 13 by Multi Colour Lasers field, thus produce EUV light source 14, the extreme ultraviolet tunable single chromatic coherent light source that level exports.
The effect of vacuum pump 3 vacuum cavity 2 is maintained high vacuum state (air pressure is lower than 1 × 10
-3handkerchief), this is because EUV light source is easily by Atmospheric Absorption, only has and maintain the dissipation that high vacuum state just can avoid EUV light source.Draft tube 4 is used for importing working gas stream, and visible ray filtering membrane 5 is used to the Multi Colour Lasers field (comprising 800nm, 400nm, 267nm) of visible light wave band, only has EUV light source 14 could be through.
Frequency-doubling crystal 7 is undertaken tuning with the conversion efficiency with frequency crystal 9 by rotating crystal angle, and time delay crystal 8 is also rotate by angle the phase delay realized between polychromatic field to control.EUV light source 14 is monochromatic tunable, realizes tuning by the control energy of driving light source 1 and the air pressure of draft tube 4.In addition, the air pressure of draft tube 4 determines macro phase matching condition, and the time delay of time delay crystal 8 determines intratomic phase-matching condition, and both determine contrast and the monochromaticity of EUV light source 14 jointly.
The production process of extreme ultraviolet tunable single chromatic coherent light source and generation principle are as shown in Figure 2, first driving light source produces Multi Colour Lasers field (800nm, 400nm and 267nm) by frequency-doubling crystal with frequency crystal, Multi Colour Lasers field realizes the output of single higher hamonic wave again by the phase adjusted of time delay crystal and the air pressure adjustment of working gas, thus achieves the output of extreme ultraviolet tunable single chromatic coherent light source.
Adopt above-mentioned extreme ultraviolet tunable single chromatic coherent light-source generation device to produce the method for light source, specifically comprise the steps:
(1) open vacuum cavity, regulate the optical element in vacuum cavity.
(2) sealed vacuum cavity, starts vacuum pump, is evacuated by vacuum cavity and maintains high vacuum state (air pressure is lower than 1 × 10
-3handkerchief).
(3) start driving light source, 800nm laser is accurately imported the predeterminated position of vacuum cavity.
(4) open draft tube, import working gas stream and carry out interacting and producing EUV light source.
(5) according to demand, regulate driving light source energy, manifold air pressure and time delay crystalline phase, realize the extreme ultraviolet monochromatic coherent light source of required wave band, and derive use.
(6) after use terminates, close working gas stream, close driving light source, close vacuum pump.
(7) vacuum chamber preferably keeps sealing at ordinary times, maintains vacuum state, is conducive to the life-span of device.
A specific embodiment of the present invention is: as shown in Figure 3, driving light source 1 be 800nm femtosecond laser driving light source (U.S. be concerned with company produce Ti∶Sapphire laser femto-second laser); Vacuum cavity 2 is vacuum cavities of designed, designed; Vacuum pump 3 be mechanical pump and molecular pump combination vacuumize instrument; Draft tube 4 is air inlet copper pipes, and nozzle place gas vent internal diameter is 0.2mm; Visible ray filtering membrane 5 is aluminium films that 500nm is thick; The plano-convex lens of condenser lens 6 to be focal lengths be 500mm; Frequency-doubling crystal 7 is β-bbocrystals, cutting angle θ=29.2 °,
thickness 0.3mm, phase matching type type I, for generation of 400nm laser field, its polarization direction is perpendicular to the direction of fundamental frequency light 800nm; Time delay crystal 8 is CaCO3 crystal, cutting angle θ=22.6 °,
thickness 0.4mm, regulates the time delay of 400nm and 800nm laser field mainly through the anglec of rotation; β-bbocrystals with frequency crystal 9, cutting angle θ=55.5 °,
thickness 0.1mm, phase matching type type II, for generation of 267nm laser field, its polarization direction is parallel to the direction of fundamental frequency light 800nm; Working gas stream 13 is argon Ars; The extreme ultraviolet monochromatic coherent light source that extreme ultraviolet spectrometer 15 produces for observing and differentiate this device; The model of the special CCD16 of EUV light source is Princeton Instruments, SX 400; Computing machine 17 is for gathering and show the signal of CCD.
Specific experiment step is as described below: (1) opens vacuum cavity, installs and regulate the optical element in chamber.(2) sealed vacuum chamber, starts mechanical pump and molecular pump, starts to vacuumize.(3) simultaneously open and preheating 800nm femtosecond laser driving light source.(4), about after half an hour, when vacuum chamber maintains high vacuum state, (air pressure is lower than 1 × 10
-3handkerchief), open draft tube, driving laser is accurately imported predeterminated position simultaneously, carry out interacting with the working gas stream imported and produce ultimate attainment outer light source---single higher hamonic wave.(5) regulate driving light source energy (1 ~ 2mJ), manifold air pressure (0.1 ~ 1atm) and time delay crystalline phase, and observe the spectrum in extreme ultraviolet monochromatic coherent light source by CCD, as shown in figure (4).(6) experiment terminates, and closes working gas stream, closes driving light source, sealed vacuum chamber, closes vacuum pump.
As Figure 4-Figure 6, the high order harmonic spectrum contrast that Fig. 4 is monochromatic field, two-color fields, polychromatic field produce, can find polychromatic field selective enhancement 18 higher hamonic waves (corresponding output wavelength is 800nm/18=44nm) to experimental results.Compared to monochromatic field, this device adopts polychromatic field to drive the higher hamonic wave produced in intensity, not only enhance 2 ~ 3 orders of magnitude, and achieves the output of single higher hamonic wave (monochrome)---and contrast reaches 1 ~ 2 order of magnitude.Fig. 5 is the high order harmonic spectrum contrast in polychromatic field under different delayed time, and under particular phases time delay, 18 times higher hamonic wave is strengthened 43.7% further, and all the other neighbouring higher hamonic waves have at least been pressed 65.4%.Can find out, under this specific time delay, 18 high order harmonic spectrums of selective enhancement and the contrast of adjacent higher hamonic wave are increased to 15.9 from 3.8.Fig. 6 is the adjustment by driving light source energy and operating air pressure, be tunable by the specific higher hamonic wave of selective enhancement, from 18 times be tuned to 14 times, namely corresponding output wavelength from 44nm be tuned to 57nm.
Claims (2)
1. one kind produces the device of extreme ultraviolet tunable single chromatic coherent light source, it is characterized in that, comprise driving light source (1), vacuum cavity (2), vacuum pump (3), draft tube (4) and visible ray filtering membrane (5), and be arranged on the inner condenser lens (6) of vacuum cavity (2), frequency-doubling crystal (7), time delay crystal (8) and and crystal (9) frequently;
Vacuum pump (3) is connected with vacuum cavity (2), remains on vacuum state for making vacuum cavity (2); Draft tube (4) inserts vacuum cavity (2), for importing working gas stream (13) in vacuum cavity (2);
Driving light source (1) is 800nm femtosecond laser, the laser beam launched of driving light source (1) successively through condenser lens (6), frequency-doubling crystal (7), time delay crystal (8) and and frequently crystal (9) focus on working gas stream (13), laser beam is through visible ray filtering membrane (5) output stage ultraviolet source (14) afterwards;
By macro phase coupling and intratomic phase-matching technique by higher hamonic wave energy from order harmonic frequencies comb be tuned to certain specific order, the higher hamonic wave of certain specific order of selective enhancement from order harmonic frequencies comb, as extreme ultraviolet monochromatic coherent light source, suppress all the other generation ofharmonic simultaneously, make it export the single higher hamonic wave of this specific order, the single higher hamonic wave being achieved specific order by the sub-cycle shaping in Multi Colour Lasers field is exported; The single higher hamonic wave of this specific order can also be undertaken tuning by phase-matching technique, realizes tuning by the control energy of driving light source and the air pressure of draft tube; The air pressure of draft tube determines macro phase matching condition, and the time delay of time delay crystal determines intratomic phase-matching condition, and Multi Colour Lasers field realizes the output of single higher hamonic wave again by the phase adjusted of time delay crystal and the air pressure adjustment of working gas stream.
2. produce a method for extreme ultraviolet tunable single chromatic coherent light source, it is characterized in that, comprise the following steps:
(1) test unit is built, described test unit comprises driving light source (1), vacuum cavity (2), vacuum pump (3), draft tube (4) and visible ray filtering membrane (5), and be arranged on the inner condenser lens (6) of vacuum cavity (2), frequency-doubling crystal (7), time delay crystal (8) and and crystal (9) frequently;
Vacuum pump (3) is connected with vacuum cavity (2), remains on vacuum state for making vacuum cavity (2); Draft tube (4) inserts vacuum cavity (2), for importing working gas stream (13) in vacuum cavity (2);
Driving light source (1) is 800nm femtosecond laser, the laser beam launched of driving light source (1) successively through condenser lens (6), frequency-doubling crystal (7), time delay crystal (8) and and frequently crystal (9) focus on working gas stream (13), laser beam is through visible ray filtering membrane (5) output stage ultraviolet source (14) afterwards;
(2) sealed vacuum cavity (2), starts vacuum pump (3), is evacuated by vacuum cavity (2) and maintains air pressure lower than 1 × 10
-3the high vacuum state of handkerchief;
(3) start driving light source (1), 800nm laser is imported vacuum cavity (2);
(4) open draft tube (4), import working gas stream (13) and interact, produce EUV light source (14);
(5) regulate the energy of driving light source (1), the air pressure of draft tube (4) and the phase place of time delay crystal (8), realize the output in the extreme ultraviolet monochromatic coherent light source of required wave band; Specifically comprise: by macro phase coupling and intratomic phase-matching technique by higher hamonic wave energy from order harmonic frequencies comb be tuned to certain specific order, the higher hamonic wave of certain specific order of selective enhancement from order harmonic frequencies comb, as extreme ultraviolet monochromatic coherent light source, suppress all the other generation ofharmonic simultaneously, make it export the single higher hamonic wave of this specific order, the single higher hamonic wave being achieved specific order by the sub-cycle shaping in Multi Colour Lasers field is exported; The single higher hamonic wave of this specific order can also be undertaken tuning by phase-matching technique, realizes tuning by the control energy of driving light source and the air pressure of draft tube; The air pressure of draft tube determines macro phase matching condition, and the time delay of time delay crystal determines intratomic phase-matching condition, and Multi Colour Lasers field realizes the output of single higher hamonic wave again by the phase adjusted of time delay crystal and the air pressure adjustment of working gas stream.
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| CN104577702B (en) * | 2014-12-24 | 2018-04-06 | 河南理工大学 | A kind of method for producing water window wave band chirped pulse |
| CN107044885B (en) * | 2017-03-06 | 2018-09-11 | 温州大学 | A kind of device and application method measuring laser focus strength |
| CN106908950B (en) * | 2017-03-16 | 2023-02-14 | 中国科学院西安光学精密机械研究所 | Electromagnetic radiation generating device and using method thereof |
| CN109445227A (en) * | 2018-11-28 | 2019-03-08 | 安徽理工大学 | A kind of nonlinear optics imaging system of multiple phase matched |
| CN109916841B (en) * | 2019-03-15 | 2019-09-13 | 北京大学 | The interconnect device and method of higher hamonic wave vacuum ultraviolet light source and ultrahigh vacuum instrument |
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| CN102231935A (en) * | 2011-05-31 | 2011-11-02 | 长春理工大学 | Method and apparatus for generating coherent extreme ultraviolet radiation |
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