CN109916841B - The interconnect device and method of higher hamonic wave vacuum ultraviolet light source and ultrahigh vacuum instrument - Google Patents
The interconnect device and method of higher hamonic wave vacuum ultraviolet light source and ultrahigh vacuum instrument Download PDFInfo
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- CN109916841B CN109916841B CN201910197270.9A CN201910197270A CN109916841B CN 109916841 B CN109916841 B CN 109916841B CN 201910197270 A CN201910197270 A CN 201910197270A CN 109916841 B CN109916841 B CN 109916841B
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Abstract
The invention discloses the interconnect devices and method of a kind of higher hamonic wave vacuum ultraviolet light source and ultrahigh vacuum instrument.Present invention raster unit in light-splitting chamber uses non-planar installation, has very high diffraction efficiency in extreme ultraviolet XUV wave band, can reduce the broadening of XUV pulse；Using the higher hamonic wave scintillator with through-hole, the higher hamonic wave of different orders can be intuitively selected；Optical filter drives light collimated light path convenient for users to going to utilize in atmospheric conditions；Higher hamonic wave ratemeter is mounted on one dimension displacement bar, convenient for measuring the intensity of higher hamonic wave, influence of the intensity for being conducive to analyze higher hamonic wave to sample；The scanning focused of third higher hamonic wave reflecting mirror is controlled by Three dimensions control platform, facilitates the searching and optimization of signal.
Description
Technical field
The present invention relates to ultrafast laser techniques, and in particular to a kind of higher hamonic wave vacuum ultraviolet light source and ultrahigh vacuum instrument
Interconnect device and its control method.
Background technique
Ultrahigh vacuum instrument (such as photoemitted electron microscope, angle resolved photoelectron spectroscope, the imaging of cold target recoil ion momentum
Spectrometer, velocity imaging spectrometer etc.) by detecting photoelectronic space, momentum and Energy distribution, disclose light-matter interaction
Mechanism.Femtosecond laser and gas phase atom and molecule interact, and generate the equally spaced High-order Harmonic Generation of photon energy, spectral region
Extreme ultraviolet can be covered to Soft X-Ray Region, be the main production method of the tunable vacuum ultraviolet light source of lab benchization.Base
In higher hamonic wave vacuum ultraviolet light source in conjunction with above-mentioned ultrahigh vacuum instrument, will greatly widen light-matter interaction
Research field explores light-matter interaction process for the mankind and provides new sharp weapon.
But interconnect higher hamonic wave vacuum ultraviolet light source and ultrahigh vacuum instrument, it needs to overcome following difficulty in experiment:
1) High-order Harmonic Generation is broadband spectral, needs to filter out single grade subharmonic in experiment, while realizing wavelength tuning, is kept
The pulse width of harmonic wave is not broadened；2) vacuum of higher hamonic wave chamber is usually 10-4(air pressure at generation is tens millis to millibar
Bar), and the vacuum of ultrahigh vacuum instrument is better than 10-10Millibar, needs to solve huge between higher hamonic wave chamber and ultrahigh vacuum instrument
Vacuum gradient；3) vacuum ultraviolet light source must transmit in a vacuum, deflect and carried out with focusing using glancing incidence mode, optical element
It needs to customize, needs to overcome the difficulty of optical path adjusting；4) the big multipair vibration of ultrahigh vacuum instrument is very sensitive, higher hamonic wave it is true
Empty ultraviolet source needs to overcome vibration problem brought by the pump group for maintaining interconnect device vacuum in conjunction with ultrahigh vacuum instrument.
Summary of the invention
For the above problems of the prior art, the invention proposes a kind of higher hamonic wave vacuum ultraviolet light source and surpass
The interconnect device and its control method of high vacuum instrument effectively solve the monochromatization and and ultrahigh vacuum of higher hamonic wave light source
Instrument connects the problem of vacuum gradient being related to, optical path adjusting, instrument vibration aspect.
An object of the present invention is to provide the interconnections of a kind of higher hamonic wave vacuum ultraviolet light source and ultrahigh vacuum instrument
Device.
The interconnect device of higher hamonic wave vacuum ultraviolet light source and ultrahigh vacuum instrument of the invention includes: mechanical pump, vibration damping
Platform, the first and second molecular pumps, ionic pump, higher hamonic wave generating chamber, light-splitting chamber, selection room, luminous intensity measurement room, focus cell,
Optical filter, first to third higher hamonic wave reflecting mirror, raster unit, Two-dimensional Position moving stage, higher hamonic wave scintillator, camera, three-dimensional
Console, higher hamonic wave ratemeter, high vacuum difference engine and computer；Wherein, higher hamonic wave generating chamber, light-splitting chamber, choosing
Select room, luminous intensity measurement room, focus cell pass sequentially through vacuum sealing pipeline with ultrahigh vacuum instrument and connect；In light-splitting chamber and selection room
Between vacuum sealing pipeline on and the vacuum sealing pipeline between luminous intensity measurement room and focus cell on be separately connected first and
The entrance of second molecular pump, the gas outlet of the first and second molecular pumps are connected to vibration reduction platform, and vibration reduction platform connects mechanical pump
Entrance；Ionic pump is connected on vacuum sealing pipeline between focus cell and ultrahigh vacuum instrument；Higher hamonic wave generating chamber with
Optical filter is set between light-splitting chamber；It is anti-that first higher hamonic wave reflecting mirror, raster unit, the second higher hamonic wave are set in light-splitting chamber
Mirror and Two-dimensional Position moving stage are penetrated, raster unit is arranged in Two-dimensional Position moving stage, and Two-dimensional Position moving stage is connected to computer, raster unit packet
The different grating of multiple blaze angles is included, the groove of grating is parallel with plane where incident ray and emergent ray, Two-dimensional Position moving stage
It is able to drive raster unit rotation, rotary shaft is able to drive raster unit along rotary shaft perpendicular to the plane where grating
Direction translation；Higher hamonic wave scintillator is set in selection room, selection room is divided into two relatively independent spaces, high order
There is through-hole, higher hamonic wave is incident to higher hamonic wave scintillator surface and generates visible light, passes through Lens Coupling in harmonic wave scintillator
It is received by camera, camera is connected to computer；Higher hamonic wave ratemeter is set in luminous intensity measurement room；It is arranged in focus cell
Third higher hamonic wave reflecting mirror, third higher hamonic wave reflecting mirror are connected to Three dimensions control platform, and Three dimensions control platform is connected to computer；
High vacuum difference engine is set on the vacuum sealing pipeline between focus cell and ionic pump；Driving light enters higher hamonic wave generating chamber
Higher hamonic wave is generated, the driving light and higher hamonic wave being emitted from higher hamonic wave generating chamber are after optical filter, into light-splitting chamber；?
In light-splitting chamber, the driving light and higher hamonic wave of diverging are converted directional light, order as needed by the first higher hamonic wave reflecting mirror
Higher hamonic wave wavelength selection grating, raster unit is controlled by Two-dimensional Position moving stage and is moved along rotary axis direction, grating is adjusted
Position so that driving light and higher hamonic wave are by the grating chosen, the higher hamonic wave of different orders is along different shooting angles
Outgoing, by the second higher hamonic wave reflecting mirror, the higher hamonic wave of different orders focuses to selection room；In selection room, high order is humorous
Wave is incident on higher hamonic wave scintillator surface and generates visible light, is received by Lens Coupling by camera, the figure that observation camera is formed
Picture, the higher hamonic wave to disappear in image be by the higher hamonic wave of through-hole in higher hamonic wave scintillator, it is flat by control two dimension
Moving stage drives grating rotating, adjusts the angle of light and grating, thus change the exit direction of the higher hamonic wave of different orders, and
In conjunction with the second higher hamonic wave reflecting mirror of adjustment, the higher hamonic wave of different orders is focused on into space different location, so that needing rank
Secondary higher hamonic wave pass through in through-hole, the through-hole in higher hamonic wave scintillator realizes the true of higher hamonic wave scintillator both ends simultaneously
The vacuum difference of empty sealing pipeline, so that the vacuum degree of focus cell is better than the vacuum degree of light-splitting chamber；It, will be high in luminous intensity measurement room
Subharmonic ratemeter is arranged in the optical path, measures the intensity of higher hamonic wave, by adjusting the intensity and/or high order of driving light
The gas pressure intensity of harmonic wave generating chamber adjusts the intensity of higher hamonic wave to the intensity needed, then by higher hamonic wave ratemeter
Optical path is removed, higher hamonic wave enters focus cell；In focus cell, the reflection of third higher hamonic wave is accurately adjusted by Three dimensions control platform
The position of mirror, higher hamonic wave is by third higher hamonic wave focusing mirror to the sample of ultrahigh vacuum instrument.
The vibration reduction platform metal or marble big using density.Since subsequent ultrahigh vacuum instrument is for resolution ratio
It is required that it is very high, so the vibrated senior general of coupling part will lead to resolution ratio decline, the especially vibration of mechanical pump.The present invention will
The gas outlet for the molecular pump that light-splitting chamber, selection room and focus cell vacuumize all is connected on a vibration reduction platform, is then connected again
It is connected to subsequent mechanical pump.Since the weight of vibration reduction platform is very heavy, so that the vibration of subsequent mechanical pump will not affect that experiment dress
It sets, to reduce influence of the vibration problem for experiment.The big metal of density refers to that density is greater than 2.5 × 103kg/m3。
Drive gloss visible light to infrared band, the higher hamonic wave of generation for vacuum-ultraviolet light wavelength 10~
120nm。
Optical filter is used for driving light and/or the higher hamonic wave for selecting to pass through；Including light passing window valve and filter coating valve；
Light passing window valve is closed, then only driving light passes through；Filter coating valve is closed, then only higher hamonic wave passes through；Light passing window
Valve and filter coating valve open simultaneously, and light and higher hamonic wave is driven to pass through simultaneously.
First to third higher hamonic wave reflecting mirror use toroidal mirror.
Raster unit includes the different grating of multiple blaze angles: the wave-length coverage that the grating of different blaze angles uses is different
Sample, it is contemplated that go the higher hamonic wave using different orders, the higher hamonic wave wavelength difference of different orders is big, sometimes
The wavelength of the higher hamonic wave according to required order is needed, to select specific grating.Raster unit of the invention is adopted
With non-planar installation, there is very high diffraction efficiency in extreme ultraviolet XUV wave band, the broadening of XUV pulse can be reduced.
Higher hamonic wave scintillator uses cerium-doped yttrium aluminum garnet YAG crystal, has through-hole, and the diameter of through-hole is 100~500
μm；Higher hamonic wave itself is invisible, but higher hamonic wave is incident on and mixes the surface of cerium YAG crystal and just generate visible light, by saturating
Mirror is coupled to the photosensitive unit of camera, then is transmitted to computer disposal and storage.
Higher hamonic wave ratemeter uses vacuum ultraviolet diode and pico-ampere table；Vacuum ultraviolet diode is arranged in light intensity
In measuring chamber, be connected to the pico-ampere table outside luminous intensity measurement room, vacuum ultraviolet diode moved by one dimension displacement bar or
Person removes optical path, and higher hamonic wave is incident to vacuum ultraviolet diode, and photoelectric effect occurs and generates electric current, electric current is read by pico-ampere table
Out, and it is connected to computer disposal and storage, records the intensity of higher hamonic wave.
High vacuum difference engine is the valve with metal film, higher hamonic wave can be allowed to pass through, not allow gas to pass through, to realize
The difference of vacuum degree.
It is another object of the present invention to provide the mutual of a kind of higher hamonic wave vacuum ultraviolet light source and ultrahigh vacuum instrument
The control method of coupling device.
The control method of vacuum interconnect device between higher hamonic wave and ultrahigh vacuum instrument of the invention, including following step
It is rapid:
1) driving light enters higher hamonic wave generating chamber generation higher hamonic wave；
2) under conditions of atmospheric pressure, high vacuum difference engine is opened, by optical filter, driving light is only allowed to reach light-splitting chamber；
3) position of the first and second higher hamonic wave reflecting mirrors in light-splitting chamber is adjusted, and the higher hamonic wave of order as needed
Wavelength selection grating, raster unit is controlled by Two-dimensional Position moving stage and is moved along rotary axis direction and the position of grating, is adjusted
The position of grating, so that driving light is arrived later by the center of the first and second higher hamonic wave reflecting mirrors and the grating of selection
Up to selection room；
4) from camera looks into fee, the rotation of grating is controlled by Two-dimensional Position moving stage, and adjusts the second higher hamonic wave reflecting mirror
Angle, so that driving light passes through the through-hole in higher hamonic wave scintillator, into focus cell；
5) in focus cell, the position of third higher hamonic wave reflecting mirror is accurately adjusted by Three dimensions control platform, so that driving light
Pass through the center of third higher hamonic wave reflecting mirror；
6) high vacuum state is remained in ultrahigh vacuum instrument, by the control third higher hamonic wave reflection of Three dimensions control platform
The three-dimensional regulation of mirror, so that driving light is incident on the sample of ultrahigh vacuum instrument；
7) mechanical pump is first turned on, light-splitting chamber, luminous intensity measurement room, selection room and focus cell are tentatively vacuumized；So
After open the first and second molecular pumps to light-splitting chamber, luminous intensity measurement room, selection room and focus cell vacuumize, selection room in, by
Two separate spaces that higher hamonic wave scintillator separates, both ends take out by the first molecular pump and the second molecular pump true respectively
Sky realizes the vacuum difference of the vacuum sealing pipeline at higher hamonic wave scintillator both ends by the through-hole in higher hamonic wave scintillator,
To which the vacuum degree of focus cell is better than the vacuum degree of light-splitting chamber；It is then turned on ionic pump, vacuum degree is maintained to reach ultrahigh vacuum instrument
Level required for device；High vacuum difference engine is closed, by optical filter, higher hamonic wave light is only allowed to reach light-splitting chamber；
8) in light-splitting chamber, the higher hamonic wave of diverging is converted directional light, higher hamonic wave by the first higher hamonic wave reflecting mirror
By the grating chosen, the higher hamonic waves of different orders is emitted along different shooting angles, by the second higher hamonic wave reflecting mirror,
The higher hamonic wave of different orders focuses to selection room；
9) in focus cell, higher hamonic wave is incident on higher hamonic wave scintillator surface and generates visible light, passes through Lens Coupling
It is received by camera, the image that observation camera is formed, the higher hamonic wave to disappear in image is by leading in higher hamonic wave scintillator
The higher hamonic wave in hole drives grating rotating by control two-dimension translational platform, the angle of light and grating is adjusted, to change difference
The exit direction of the higher hamonic wave of order, and the second higher hamonic wave reflecting mirror of adjustment is combined, the high order of different orders is adjusted jointly
Harmonic wave focuses on space different location so that need the higher hamonic wave of order pass through in through-hole, into luminous intensity measurement room；
10) in luminous intensity measurement room, in the optical path by the setting of higher hamonic wave ratemeter, the strong of higher hamonic wave is measured
Degree adjusts the intensity of higher hamonic wave to needs by adjusting the intensity of driving light and/or the gas pressure intensity of higher hamonic wave generating chamber
Intensity, higher hamonic wave ratemeter is then removed into optical path, higher hamonic wave enters focus cell；
11) in focus cell, the position of third higher hamonic wave reflecting mirror is accurately adjusted by Three dimensions control platform, so that high order
Harmonic wave is by third higher hamonic wave focusing mirror to the sample of ultrahigh vacuum instrument.
Wherein, in step 7), the vacuum degree that mechanical pump tentatively vacuumizes reaches 10-2Mbar opens first and second points
Son pump；The vacuum degree of light-splitting chamber reaches 10-6Mbar, and the vacuum degree of focus cell reaches 10-8Mbar opens ionic pump.This hair
Bright advantage:
Present invention raster unit in light-splitting chamber uses non-planar installation, has in extreme ultraviolet XUV wave band very high
Diffraction efficiency can reduce the broadening of XUV pulse；Using the higher hamonic wave scintillator with through-hole, can intuitively select not
With the higher hamonic wave of order；Optical filter drives light collimated light path convenient for users to going to utilize in atmospheric conditions；Higher hamonic wave is strong
Degree measuring instrument is mounted on one dimension displacement bar, convenient for measuring the intensity of higher hamonic wave, is conducive to the intensity pair for analyzing higher hamonic wave
The influence of sample；The scanning focused of third higher hamonic wave reflecting mirror is controlled by Three dimensions control platform, facilitates the searching of signal and excellent
Change.
Detailed description of the invention
Fig. 1 is one embodiment of the interconnect device of higher hamonic wave vacuum ultraviolet light source and ultrahigh vacuum instrument of the invention
Index path.
Specific embodiment
With reference to the accompanying drawing, by specific embodiment, the present invention is further explained.
As shown in Figure 1, the higher hamonic wave vacuum ultraviolet light source and the interconnect device of ultrahigh vacuum instrument of the present embodiment include:
Mechanical pump J, vibration reduction platform I, first and second points of air pumps F1 and F2, ionic pump L, higher hamonic wave generating chamber D, light-splitting chamber K, selection
Room W, luminous intensity measurement room O, focus cell Q, light passing window valve V, filter coating valve A, first to third higher hamonic wave reflecting mirror M1
~M3, raster unit, Two-dimensional Position moving stage, higher hamonic wave scintillator Y, camera B, Three dimensions control platform C, vacuum ultraviolet diode, skin
Pacify table P, high vacuum difference engine X and computer E, is arranged on horizontal platform；Wherein, higher hamonic wave generating chamber D, light-splitting chamber K,
Selection room W, luminous intensity measurement room O, focus cell Q pass sequentially through vacuum sealing pipeline with ultrahigh vacuum instrument U and connect；In light-splitting chamber K
On vacuum sealing pipeline on vacuum sealing pipeline between selection room W and between luminous intensity measurement room O and focus cell Q respectively
The entrance of the first and second molecular pump F1 and F2 is connected, the gas outlet of the first and second molecular pump F1 and F2 is connected to vibration reduction platform
I, the entrance of vibration reduction platform I connection mechanical pump J；It is connected on vacuum sealing pipeline between focus cell Q and ultrahigh vacuum instrument U
Ionic pump L；Light passing window valve V and optical filtering are set on the vacuum sealing pipeline between higher hamonic wave generating chamber D and light-splitting chamber K
Film valve A；First higher hamonic wave reflecting mirror M1, raster unit, the second higher hamonic wave reflecting mirror M2 and two are set in light-splitting chamber K
Displacement platform is tieed up, raster unit is arranged in Two-dimensional Position moving stage, and Two-dimensional Position moving stage is connected to computer E, and raster unit includes three
The groove of the different grating G1~G3 of blaze angle, grating are parallel with plane where incident ray and emergent ray, are parallel to platform,
Two-dimensional Position moving stage is able to drive raster unit rotation, and rotary shaft is able to drive grating list perpendicular to the plane where grating
Member is translated along the direction of rotary shaft；Higher hamonic wave scintillator Y is set in selection room W, selection room W is divided into two relatively solely
Vertical space has through-hole H in higher hamonic wave scintillator Y, needs the higher hamonic wave of order through through-hole H, while realizing two
The vacuum difference in independent space, higher hamonic wave are incident to the generation visible light on the surface higher hamonic wave scintillator Y, pass through lens coupling
Conjunction is received by camera B, and camera B is connected to computer E；Vacuum ultraviolet diode is set in the O of luminous intensity measurement room, and is connected to light intensity
Pico-ampere table P outside measuring chamber；Third higher hamonic wave reflecting mirror M3 is set in focus cell Q, and third higher hamonic wave reflecting mirror M3 connects
It is connected to Three dimensions control platform C, Three dimensions control platform C is connected to computer E；Vacuum sealing pipeline between focus cell Q and ionic pump L
Upper setting high vacuum difference engine X.
In the present embodiment, driving light is 800nm；Vibration reduction platform I uses iron block；First to third higher hamonic wave reflecting mirror
M1~M3 uses tire mirror；Higher hamonic wave scintillator Y is using cerium YAG crystal is mixed, with 400 μm of through-hole H；Camera B uses face
Array camera；The light passing window of light passing window valve V uses quartz glass.
The control method of vacuum interconnect device between the higher hamonic wave and ultrahigh vacuum instrument of the present embodiment, including following step
It is rapid:
1) 800nm drives light to enter higher hamonic wave generating chamber and generates higher hamonic wave；
2) under conditions of atmospheric pressure, filter coating valve and high vacuum difference engine are opened, closes light passing window valve, only allows drive
Dynamic light reaches light-splitting chamber；
3) position of the first and second higher hamonic wave reflecting mirrors in light-splitting chamber is adjusted, and grating is controlled by Two-dimensional Position moving stage
Unit is moved along rotary axis direction and the position of grating, adjusts the position of grating, so that driving light is high by first and second
The center of subharmonic reflecting mirror and the grating of selection reaches selection room later；
4) from camera looks into fee, the rotation of grating is controlled by Two-dimensional Position moving stage, and adjusts the second higher hamonic wave reflecting mirror
Angle, so that driving light passes through the through-hole in higher hamonic wave scintillator, into focus cell；
5) in focus cell, the position of third higher hamonic wave reflecting mirror is accurately adjusted by Three dimensions control platform, so that driving light
Pass through the center of third higher hamonic wave reflecting mirror；
6) high vacuum state is remained in ultrahigh vacuum instrument, by the control third higher hamonic wave reflection of Three dimensions control platform
The three-dimensional regulation of mirror, so that driving light is incident on the sample of ultrahigh vacuum instrument；
7) mechanical pump is first turned on, light-splitting chamber, luminous intensity measurement room, selection room and focus cell are tentatively vacuumized, very
Reciprocal of duty cycle reaches 10-2After mbar, the first and second molecular pumps are opened, are taken out to light-splitting chamber, luminous intensity measurement room, selection room and focus cell
Vacuum, in selection room, two separate spaces separated by higher hamonic wave scintillator, both ends are respectively by the first molecular pump and the
Two molecular pumps are vacuumized, and the vacuum sealing at higher hamonic wave scintillator both ends is realized by the through-hole in higher hamonic wave scintillator
The vacuum difference of pipeline, so that the vacuum degree of focus cell is better than the vacuum degree of light-splitting chamber, the vacuum of focus cell is better than 10-8Mbar with
Afterwards, ionic pump is opened, ionic pump and the vacuum sealing pipeline for being connected to ultrahigh vacuum instrument are toasted, so that closing Gao Zhen
It enters 10 with ultrahigh vacuum instrument one end vacuum after empty difference engine-10Mbar can be docked, in the process with ultrahigh vacuum instrument
Filter coating valve is closed, light passing window valve is opened, higher hamonic wave light is only allowed to reach light-splitting chamber；
8) in light-splitting chamber, the higher hamonic wave of diverging is converted directional light, higher hamonic wave by the first higher hamonic wave reflecting mirror
By the grating chosen, the higher hamonic wave of different orders is emitted along different shooting angles, is reflected by the second higher hamonic wave
Mirror, the higher hamonic wave of different orders focus to selection room；
9) in focus cell, higher hamonic wave is incident on higher hamonic wave scintillator surface and generates visible light, passes through Lens Coupling
It is received by camera, the image that observation camera is formed, the higher hamonic wave to disappear in image is by leading in higher hamonic wave scintillator
The higher hamonic wave in hole drives grating rotating by control two-dimension translational platform, the angle of light and grating is adjusted, to change difference
The exit direction of the higher hamonic wave of order, and the second higher hamonic wave reflecting mirror of adjustment is combined, the high order of different orders is adjusted jointly
Harmonic wave focuses on space different location so that need the higher hamonic wave of order pass through in through-hole, as detection light enter light intensity
Measuring chamber；
10) in luminous intensity measurement room, vacuum ultraviolet diode is moved into optical path by one dimension displacement bar, higher hamonic wave enters
It is incident upon vacuum ultraviolet diode, photoelectric effect occurs and generates electric current, is measured by the pico-ampere table being located at outside luminous intensity measurement room, obtains height
The intensity of subharmonic adjusts higher hamonic wave by adjusting the intensity of driving light and/or the gas pressure intensity of higher hamonic wave generating chamber
Then pico-ampere table is removed optical path, higher hamonic wave enters focus cell to the intensity needed by intensity；
11) in focus cell, the position of third higher hamonic wave reflecting mirror is accurately adjusted by Three dimensions control platform, so that high order
Harmonic wave is by third higher hamonic wave focusing mirror to the sample of ultrahigh vacuum instrument.
It is finally noted that the purpose for publicizing and implementing example is to help to further understand the present invention, but this field
Technical staff be understood that without departing from the spirit and scope of the invention and the appended claims, it is various replacement and repair
It is all possible for changing.Therefore, the present invention should not be limited to embodiment disclosure of that, and the scope of protection of present invention is to weigh
Subject to the range that sharp claim defines.
Claims (10)
1. a kind of interconnect device of higher hamonic wave vacuum ultraviolet light source and ultrahigh vacuum instrument, which is characterized in that the mutual multi pack
Set include: mechanical pump, vibration reduction platform, the first and second molecular pumps, ionic pump, higher hamonic wave generating chamber, light-splitting chamber, selection room,
It is luminous intensity measurement room, focus cell, optical filter, first humorous to third higher hamonic wave reflecting mirror, raster unit, Two-dimensional Position moving stage, high order
Wave scintillator, camera, Three dimensions control platform, higher hamonic wave ratemeter, high vacuum difference engine and computer；Wherein, high order is humorous
Wave generating chamber, light-splitting chamber, selection room, luminous intensity measurement room, focus cell and ultrahigh vacuum instrument pass sequentially through vacuum sealing pipeline company
It connects；On vacuum sealing pipeline between light-splitting chamber and selection room and vacuum sealing tube between luminous intensity measurement room and focus cell
The entrance of the first and second molecular pumps is separately connected on road, the gas outlet of the first and second molecular pumps is connected to vibration reduction platform, subtracts
The platform that shakes connects the entrance of mechanical pump；Ionic pump is connected on vacuum sealing pipeline between focus cell and ultrahigh vacuum instrument；
Optical filter is set between higher hamonic wave generating chamber and light-splitting chamber；First higher hamonic wave reflecting mirror, grating are set in light-splitting chamber
Unit, the second higher hamonic wave reflecting mirror and Two-dimensional Position moving stage, raster unit are arranged in Two-dimensional Position moving stage, the connection of Two-dimensional Position moving stage
To computer, raster unit includes the different grating of multiple blaze angles, groove and incident ray and the emergent ray place of grating
Plane is parallel, and Two-dimensional Position moving stage is able to drive raster unit rotation, and rotary shaft, and being capable of band perpendicular to the plane where grating
Dynamic raster unit is translated along the direction of rotary shaft；Higher hamonic wave scintillator is set in selection room, selection room is divided into two
Relatively independent space, has through-hole in higher hamonic wave scintillator, and higher hamonic wave is incident to the generation of higher hamonic wave scintillator surface
Visible light is received by Lens Coupling by camera, and camera is connected to computer；Higher hamonic wave intensity is arranged in luminous intensity measurement room to survey
Measure instrument；Third higher hamonic wave reflecting mirror is set in focus cell, and third higher hamonic wave reflecting mirror is connected to Three dimensions control platform, three-dimensional
Console is connected to computer；High vacuum difference engine is set on the vacuum sealing pipeline between focus cell and ionic pump；Driving
Light enters higher hamonic wave generating chamber and generates higher hamonic wave, and the driving light and higher hamonic wave being emitted from higher hamonic wave generating chamber are through filtering
After light device, into light-splitting chamber；In light-splitting chamber, the first higher hamonic wave reflecting mirror converts the driving light and higher hamonic wave of diverging to
Directional light, the wavelength selection grating of the higher hamonic wave of order as needed control raster unit along rotation by Two-dimensional Position moving stage
Axis direction is mobile, adjusts the position of grating, so that driving light and higher hamonic wave pass through the grating chosen, the high order of different orders is humorous
Wave is emitted along different shooting angles, and by the second higher hamonic wave reflecting mirror, the higher hamonic wave of different orders focuses to selection room；
In selection room, higher hamonic wave is incident on higher hamonic wave scintillator surface and generates visible light, is received by Lens Coupling by camera,
The image that camera is formed is observed, the higher hamonic wave to disappear in image is humorous by the high order of through-hole in higher hamonic wave scintillator
Wave drives grating rotating by control two-dimension translational platform, the angle of light and grating is adjusted, to change the high order of different orders
The exit direction of harmonic wave, and the second higher hamonic wave reflecting mirror of adjustment is combined, the higher hamonic wave of different orders is focused on into space not
Same position, so that the higher hamonic wave of order is needed to pass through the through-hole in higher hamonic wave scintillator, it is logical in higher hamonic wave scintillator
The vacuum difference of the vacuum sealing pipeline at higher hamonic wave scintillator both ends is realized in hole simultaneously, so that the vacuum degree of focus cell is better than point
The vacuum degree of light room；In luminous intensity measurement room, in the optical path by the setting of higher hamonic wave ratemeter, the strong of higher hamonic wave is measured
Degree adjusts the intensity of higher hamonic wave to needs by adjusting the intensity of driving light and/or the gas pressure intensity of higher hamonic wave generating chamber
Intensity, higher hamonic wave ratemeter is then removed into optical path, higher hamonic wave enters focus cell；In focus cell, pass through three
Dimension console accurately adjusts the position of third higher hamonic wave reflecting mirror, and higher hamonic wave is arrived by third higher hamonic wave focusing mirror
On the sample of ultrahigh vacuum instrument.
2. interconnect device as described in claim 1, which is characterized in that the vibration reduction platform is using the big metal of density or greatly
Fibrous gypsum；The big metal of density refers to that density is greater than 2.5 × 103kg/m3。
3. interconnect device as described in claim 1, which is characterized in that the optical filter includes light passing window valve and filter coating
Valve；Light passing window valve is closed, then only driving light passes through；Filter coating valve is closed, then only higher hamonic wave passes through；Light passing
Window valve and filter coating valve open simultaneously, and light and higher hamonic wave is driven to pass through simultaneously.
4. interconnect device as described in claim 1, which is characterized in that described first to third higher hamonic wave reflecting mirror using super
Anchor ring mirror.
5. interconnect device as described in claim 1, which is characterized in that the higher hamonic wave scintillator uses cerium-doped yttrium aluminum pomegranate
Stone YAG crystal.
6. interconnect device as described in claim 1, which is characterized in that the diameter of the through-hole in the higher hamonic wave scintillator is
100~500 μm.
7. interconnect device as described in claim 1, which is characterized in that the higher hamonic wave ratemeter uses vacuum ultraviolet
Diode and pico-ampere table；Vacuum ultraviolet diode is arranged in luminous intensity measurement room, the pico-ampere being connected to outside luminous intensity measurement room
Vacuum ultraviolet diode is moved in and out optical path by one dimension displacement bar by table, and higher hamonic wave is incident to two pole of vacuum ultraviolet
Pipe occurs photoelectric effect and generates electric current, and electric current is read by pico-ampere table.
8. interconnect device as described in claim 1, which is characterized in that the high vacuum difference engine is the valve with metal film,
Higher hamonic wave can be allowed to pass through, not allow gas to pass through.
9. a kind of control method of the vacuum interconnect device between higher hamonic wave and ultrahigh vacuum instrument, which is characterized in that the control
Method processed the following steps are included:
1) driving light enters higher hamonic wave generating chamber generation higher hamonic wave；
2) under conditions of atmospheric pressure, high vacuum difference engine is opened, by optical filter, driving light is only allowed to reach light-splitting chamber；
3) position of the first and second higher hamonic wave reflecting mirrors in light-splitting chamber is adjusted, and the wave of the higher hamonic wave of order as needed
Long selection grating controls raster unit along the position of rotary axis direction moving grating by Two-dimensional Position moving stage, adjusts the position of grating
It sets, so that center of the driving light by the first and second higher hamonic wave reflecting mirrors and the grating of selection, reaches selection room later；
4) from camera looks into fee, the rotation of grating is controlled by Two-dimensional Position moving stage, and adjusts the angle of the second higher hamonic wave reflecting mirror,
So that driving light passes through the through-hole in higher hamonic wave scintillator, into focus cell；
5) in focus cell, the position of third higher hamonic wave reflecting mirror is accurately adjusted by Three dimensions control platform, so that driving light passes through
The center of third higher hamonic wave reflecting mirror；
6) high vacuum state is remained in ultrahigh vacuum instrument, by Three dimensions control platform control third higher hamonic wave reflecting mirror
Three-dimensional regulation, so that driving light is incident on the sample of ultrahigh vacuum instrument；
7) mechanical pump is first turned on, light-splitting chamber, luminous intensity measurement room, selection room and focus cell are tentatively vacuumized；Then it opens
It opens the first and second molecular pumps to vacuumize to light-splitting chamber, luminous intensity measurement room, selection room and focus cell, in selection room, by high order
Two separate spaces that harmonic wave scintillator separates, both ends are vacuumized by the first molecular pump and the second molecular pump respectively, are led to
The through-hole in higher hamonic wave scintillator is crossed, realizes the vacuum difference of the vacuum sealing pipeline at higher hamonic wave scintillator both ends, thus
The vacuum degree of focus cell is better than the vacuum degree of light-splitting chamber；It is then turned on ionic pump, vacuum degree is maintained to reach ultrahigh vacuum instrument institute
The level needed；High vacuum difference engine is closed, by optical filter, higher hamonic wave light is only allowed to reach light-splitting chamber；
8) in light-splitting chamber, the higher hamonic wave of diverging is converted directional light by the first higher hamonic wave reflecting mirror, and higher hamonic wave is passed through
The higher hamonic wave of the grating chosen, different orders is emitted along different shooting angles, different by the second higher hamonic wave reflecting mirror
The higher hamonic wave of order focuses to selection room；
9) in focus cell, higher hamonic wave is incident on higher hamonic wave scintillator surface and generates visible light, by Lens Coupling by phase
Machine receives, the image that observation camera is formed, and the higher hamonic wave to disappear in image is by through-hole in higher hamonic wave scintillator
Higher hamonic wave drives grating rotating by control two-dimension translational platform, the angle of light and grating is adjusted, to change different orders
Higher hamonic wave exit direction, and combine adjustment the second higher hamonic wave reflecting mirror, adjust the higher hamonic wave of different orders jointly
Space different location is focused on, so that needing the higher hamonic wave of order by the through-hole in higher hamonic wave scintillator, into light intensity
Measuring chamber；
10) in luminous intensity measurement room, in the optical path by the setting of higher hamonic wave ratemeter, the intensity of higher hamonic wave is measured, led to
The intensity of adjustment driving light and/or the gas pressure intensity of higher hamonic wave generating chamber are crossed, the intensity for adjusting higher hamonic wave is strong to what is needed
Degree, then removes optical path for higher hamonic wave ratemeter, and higher hamonic wave enters focus cell；
11) in focus cell, the position of third higher hamonic wave reflecting mirror is accurately adjusted by Three dimensions control platform, so that higher hamonic wave
On sample by third higher hamonic wave focusing mirror to ultrahigh vacuum instrument.
10. control method as claimed in claim 9, which is characterized in that in step 7), vacuum that mechanical pump tentatively vacuumizes
Degree reaches 10-2Mbar opens the first and second molecular pumps；The vacuum degree of light-splitting chamber reaches 10-6Mbar, and focus cell is true
Reciprocal of duty cycle reaches 10-8Mbar opens ionic pump.
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