CN105811232B - A kind of adjusting method generating mode excitation optical path for passive optical resonant cavity - Google Patents

A kind of adjusting method generating mode excitation optical path for passive optical resonant cavity Download PDF

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CN105811232B
CN105811232B CN201610300542.XA CN201610300542A CN105811232B CN 105811232 B CN105811232 B CN 105811232B CN 201610300542 A CN201610300542 A CN 201610300542A CN 105811232 B CN105811232 B CN 105811232B
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resonant cavity
laser
adjustable diaphragm
total reflective
reflective mirror
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CN105811232A (en
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张志荣
夏滑
董凤忠
吴边
崔小娟
韩荦
李哲
孙鹏帅
庞涛
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Hefei Institutes of Physical Science of CAS
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/081Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/0813Configuration of resonator

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The present invention provides a kind of adjusting method that mode excitation optical path is generated for passive optical resonant cavity, including builds beam path alignment model step;Beam path alignment step;Optical path coarse steps;Optical path fine tuning step.The more optical elements and adjust view mode that the present invention establishes, have the advantages that adjustment structure and adjustment process are clear, step is clear, judgement is effective, optical resonator can be made to reach best regulating effect.

Description

A kind of adjusting method generating mode excitation optical path for passive optical resonant cavity
Technical field
It is specifically a kind of to generate mode for passive optical resonant cavity the present invention relates to the regulation technology field of laser optical path The adjusting method of excitation light path.
Background technique
With the development of laser technology, also there are numerous applications in the design of optical resonator, such as:Integral chamber cavity, Chamber enhances numerous types such as cavity, cavity-type BPM cavity.But generally speaking these cavitys belong to a kind of passive optical resonance Chamber, the research of optical property can be traced to the sixties in last century, and Herriott et al. realized light by means of which at that time Delay or long light path absorption spectrum measurement, in the tunable diode laser absorption spectroscopy technology of early period(TDLAS)In research Such multiple reflections cavity is generallyd use.
In principle, resonant cavity can be regarded as to the Fabry-Perot cavity of a long spacing.However, resonant cavity Adjusting be the most critical in above-mentioned absorption spectroscopy techniques work, resonant cavity adjust fineness have to the sensitivity of measurement Great influence not only needs to spend a large amount of energy, and to have enough patient and experiences abundant.
Summary of the invention
The purpose of the present invention is to provide it is a kind of for passive optical resonant cavity generate mode excitation optical path adjusting method, Passive optical resonant cavity is set to reach optimal regulating effect.
The technical scheme is that:
A kind of adjusting method generating mode excitation optical path for passive optical resonant cavity, includes the following steps:
(1)Beam path alignment model step is built, including:
(11)Using He-Ne visible laser as collimated light source;
(12)Semi-transparent semi-reflecting lens, the first total reflective mirror and are set gradually between He-Ne visible laser and resonant cavity Two total reflective mirrors, passing through the He-Ne visible light of He-Ne visible laser output successively, semi-transparent semi-reflecting lens reflect, first is all-trans It can be irradiated in the incidence end hysteroscope of resonant cavity after mirror reflection and the reflection of the second total reflective mirror;
(2)Beam path alignment step, including:
(21)First adjustable diaphragm and the second adjustable diaphragm be set between semi-transparent semi-reflecting lens and the first total reflective mirror, and with Three adjustable diaphragms and the 4th adjustable diaphragm replace the incidence end hysteroscope and transmission end hysteroscope of resonant cavity respectively;
(22)The position for adjusting He-Ne visible laser, semi-transparent semi-reflecting lens, the first total reflective mirror and the second total reflective mirror, makes The He-Ne visible light of He-Ne visible laser output passes through that the first adjustable diaphragm, the second adjustable diaphragm, third is adjustable simultaneously The aperture of diaphragm and the 4th adjustable diaphragm;
(3)Optical path coarse steps, including:
(31)Third adjustable diaphragm and the 4th adjustable diaphragm are removed, by the incidence end hysteroscope and transmission end hysteroscope of resonant cavity It is reinstalled, the position of other each elements remains unchanged;
(32)The opposite depth of parallelism between the incidence end hysteroscope and transmission end hysteroscope of resonant cavity is adjusted, is observed on receiving screen The interference ring generated after He-Ne visible light-transmissive resonant cavity, until the vibration frequency of interference ring and the control of scanning piezoelectric ceramics The frequency of voltage is consistent;The piezoelectric ceramics be close on the outside of the incidence end hysteroscope of resonant cavity setting and with incidence end hysteroscope size phase Together;
(4)Optical path fine tuning step, including:
(41)Using tunable middle infrared semiconductor laser as excitation light source, make tunable middle infrared semiconductor laser The mid-infrared laser of device output successively can after semi-transparent semi-reflecting lens transmission, the reflection of the first total reflective mirror and the reflection of the second total reflective mirror It is irradiated in the incidence end hysteroscope of resonant cavity;
(42)He-Ne visible laser is closed, tunable middle infrared semiconductor laser is opened, is adjusted red in tunable The position of outer semiconductor laser, infrared photographic plate is observed infrared sharp in tunable middle infrared semiconductor laser output in The direction of light makes mid-infrared laser while passing through the aperture of the first adjustable diaphragm and the second adjustable diaphragm;
(43)The transmission peaks of the resonant cavity shown on observation oscilloscope continue to adjust tunable middle infrared semiconductor laser Position, gradually increase the intensity of transmission peaks;
(44)When the position for continuing to adjust tunable middle infrared semiconductor laser cannot make the intensity of transmission peaks continue to increase Matching lens are arranged between the first adjustable diaphragm and the second adjustable diaphragm, adjust the position of matching lens, make to transmit by the added-time The intensity at peak gradually increases.
The adjusting method that mode excitation optical path is generated for passive optical resonant cavity, the optical path fine tuning step is also Including:
To the position, the position of matching lens and the incidence end hysteroscope of resonant cavity of tunable middle infrared semiconductor laser Joint adjusting is carried out with the position of transmission end hysteroscope, the Strength Changes of transmission peaks and mid-infrared laser are to cavity mold on observation oscilloscope The number of number of excitations, while calculating the fineness of resonant cavity, and by the fineness for the resonant cavity being calculated and resonant cavity Theoretical fineness compares, until the difference of the two is in certain threshold range.
The described adjusting method that mode excitation optical path is generated for passive optical resonant cavity, first total reflective mirror and the Two total reflective mirrors are 45 degree of total reflective mirrors.
Beneficial effects of the present invention are:
As shown from the above technical solution, the more optical elements and adjust view mode that the present invention establishes, have adjustment structure With adjustment process is clear, step is clear, judgement is effective, optical resonator can be made to reach best regulating effect the advantages of.
Detailed description of the invention
Fig. 1 is flow chart of the method for the present invention;
Fig. 2 is collimated light path schematic diagram of the invention;
Fig. 3 is coarse adjustment light path schematic diagram of the invention;
Fig. 4 is fine tuning light path schematic diagram of the invention.
Specific embodiment
As shown in Figure 1, a kind of adjusting method that mode excitation optical path is generated for passive optical resonant cavity, including following step Suddenly:
S1, beam path alignment model step is built, including:
S11, using He-Ne visible laser as collimated light source;
S12, semi-transparent semi-reflecting lens, the first total reflective mirror and are set gradually between He-Ne visible laser and resonant cavity Two total reflective mirrors, passing through the He-Ne visible light of He-Ne visible laser output successively, semi-transparent semi-reflecting lens reflect, first is all-trans It can be irradiated in the incidence end hysteroscope of resonant cavity after mirror reflection and the reflection of the second total reflective mirror;
Wherein, the reflection wavelength of semi-transparent semi-reflecting lens is 632nm, and the first total reflective mirror and the second total reflective mirror are 45 degree and are all-trans Mirror.
S2, beam path alignment step, including:
S21, the first adjustable diaphragm and the second adjustable diaphragm be set between semi-transparent semi-reflecting lens and the first total reflective mirror, and with Three adjustable diaphragms and the 4th adjustable diaphragm replace the incidence end hysteroscope and transmission end hysteroscope of resonant cavity respectively;
S22, the position for adjusting He-Ne visible laser, semi-transparent semi-reflecting lens, the first total reflective mirror and the second total reflective mirror, make The He-Ne visible light of He-Ne visible laser output passes through that the first adjustable diaphragm, the second adjustable diaphragm, third is adjustable simultaneously The aperture of diaphragm and the 4th adjustable diaphragm.
S3, optical path coarse steps, including:
S31, third adjustable diaphragm and the 4th adjustable diaphragm are removed, by the incidence end hysteroscope and transmission end hysteroscope of resonant cavity It is reinstalled, the position of other each elements remains unchanged;
S32, adjust resonant cavity incidence end hysteroscope and transmission end hysteroscope between the opposite depth of parallelism, observation receiving screen on The interference ring generated after He-Ne visible light-transmissive resonant cavity, until the vibration frequency of interference ring and the control of scanning piezoelectric ceramics The frequency of voltage is consistent;The piezoelectric ceramics be close on the outside of the incidence end hysteroscope of resonant cavity setting and with incidence end hysteroscope size phase Together.
S4, optical path fine tuning step, including:
S41, using tunable middle infrared semiconductor laser as excitation light source, make tunable middle infrared semiconductor laser The mid-infrared laser of device output successively can after semi-transparent semi-reflecting lens transmission, the reflection of the first total reflective mirror and the reflection of the second total reflective mirror It is irradiated in the incidence end hysteroscope of resonant cavity;
S42, He-Ne visible laser is closed, opens tunable middle infrared semiconductor laser, adjusted red in tunable The position of outer semiconductor laser, infrared photographic plate is observed infrared sharp in tunable middle infrared semiconductor laser output in The direction of light makes mid-infrared laser while passing through the aperture of the first adjustable diaphragm and the second adjustable diaphragm;
The transmission peaks of the resonant cavity shown on S43, observation oscilloscope continue to adjust tunable middle infrared semiconductor laser Position, gradually increase the intensity of transmission peaks;
S44, when the position for continuing to adjust tunable middle infrared semiconductor laser cannot make the intensity of transmission peaks continue to increase Matching lens are arranged between the first adjustable diaphragm and the second adjustable diaphragm, adjust the position of matching lens, make to transmit by the added-time The intensity at peak gradually increases;
S45, position, the position of matching lens and the incidence end of resonant cavity to tunable middle infrared semiconductor laser The position of hysteroscope and transmission end hysteroscope carries out joint adjusting, the Strength Changes and mid-infrared laser pair of transmission peaks on observation oscilloscope The number of cavity mold number of excitations, while calculating the fineness of resonant cavity, and by the fineness and resonance of the resonant cavity being calculated The theoretical fineness of chamber compares, until the difference of the two is in certain threshold range.
The working principle of the invention:
The correct adjusting of resonant cavity includes following meanings:Incident laser only excites the basic mode of resonant cavity, any without exciting One high-order mode, in other words, the beam waist position and size of incident laser and the beam waist position and size of resonant cavity want completely the same (I.e. the beam waist position coincidence of the two, radius are equal).Therefore, the adjustment process of resonant cavity is actually to select of certain focal length It with lens, and determines the position of matching lens in the optical path, coordinates the position between light source, matching lens resonant cavity hysteroscope three Set the process of relationship.In the adjusting of resonant cavity, to meet above-mentioned requirements, need to do the following:Firstly, incident laser Optical axis wants coaxial with resonant cavity axis;Secondly, the position and size with a tight waist of the resonant cavity with a tight waist of incident laser wants completely the same. Otherwise, it inevitably will appear the excitation to resonant cavity high-order mode in experimental implementation, reduce the signal-to-noise ratio of monitoring.
Most of incident laser due to mid-infrared laser light source output can not be observed directly with eyes, optical path Adjusting is carried out firstly the need of by visible light, and regulating step can substantially be divided into coarse adjustment and fine-tuning process, due to real process Encountered in the case where be unable to prophet, therefore, it is also desirable to according to the actual situation in due course adjustment.
Coarse tuning process:In adjustment process, light source using He-Ne visible laser 2 as collimated light path, collimated light path As shown in Figure 2.When carrying out beam path alignment, two pieces of hysteroscopes of resonant cavity 5 are substituted with two adjustable diaphragms 63,64, pass through tune The position for saving He-Ne visible laser 2, semi-transparent semi-reflecting lens 3 and two pieces of total reflective mirrors 41,42, makes He-Ne visible light while passing through The aperture of four adjustable diaphragms 61,62,63,64.After beam path alignment, coarse adjustment first is carried out to resonant cavity 5 with He-Ne visible light:It will Two pieces of hysteroscopes 51,52 of resonant cavity 5 are reattached to the both ends of resonant cavity 5, and other each section positions remain unchanged, such as Fig. 3 institute Show.The opposite depth of parallelism between two pieces of hysteroscopes 51,52 is adjusted, He-Ne visible light-transmissive resonant cavity 5 on receiving screen 8 is observed and warp is poly- Generated interference ring after focus lens 7 are assembled, until the He-Ne visible light through resonant cavity 5 generates apparent interference ring, At this moment if giving piezoelectric ceramics(Piezoelectric ceramics be close to resonant cavity incidence end hysteroscope 51 on the outside of be arranged and with 51 ruler of incidence end hysteroscope It is very little identical)Apply the control voltage of a cycle variation, so that it may observe the vibration frequency and scanning piezoelectricity pottery of interference ring The frequency of the control voltage of porcelain is consistent, arrives this, it is believed that works the coarse adjustment of resonant cavity 5 and completes.
Fine-tuning process:Since He-Ne visible light can directly be observed with eyes, to the coarse adjustment work phase of resonant cavity 5 To more intuitive.The result of fine tuning can only be judged by the transmission peaks being shown on oscillograph 10, due to the transmission of resonant cavity 5 Peak intensity is weaker, needs the data of oscillograph 10 being averaged by more number, therefore response is lagged, to next thin Work is adjusted to increase very big difficulty.Fine-tuning process is as follows:
(1)He-Ne visible laser 2 is closed, opens tunable middle infrared semiconductor laser 1, it is red in fine adjustments The incident direction of outer laser and position, the direction of infrared photographic plate observation mid-infrared laser, makes light beam while passing through optical path in In two adjustable diaphragms 61,62 aperture, observation mid-infrared laser through resonant cavity 5 and line focus lens 7 assemble, detector The transmission peak-to-peak signal of the resonant cavity 5 shown on oscillograph 10 after 9 detections, as shown in Figure 4.
(2)After the transmission peak-to-peak signal for observing resonant cavity 5 on oscillograph 10, continue to fine-tune entering for mid-infrared laser Penetrate direction and position, it can be seen that the transmission peaks of resonant cavity 5 become have regularity, and mode configuration gradually shows, because incident Laser regularly excites a few cavity mold since original dispersion excitation multimode, and the energy of exciting light gradually focuses on minority In several cavity molds being excited, therefore, the intensity of the transmission peaks of resonant cavity 5 is gradually reinforced.
(3)If the position for continuing to adjust incident laser cannot be such that the intensity of transmission peaks continues growing, should will just match Lens 11 are added in optical path, carefully adjust the position of matching lens 11, make preferably to meet mould between incident laser and resonant cavity 5 Formula matching relationship makes the energy quantity set of the overwhelming majority so that incident laser be made further to be suppressed the excitation of resonant cavity high-order mode In in individual several cavity molds.At this moment, the transmission peaks of resonant cavity 5 are not only more regular, and intensity is stronger.
(4)It is adjusted if necessary to further, then it must be by the position of tunable middle infrared semiconductor laser 1, matching The position of lens 11 and two pieces of joints of hysteroscope 51,52 are adjusted, and the final single-mode launching for realizing incident laser to resonant cavity 5 makes humorous The transmission peak intensity of vibration chamber 5 reaches maximum.This adjustment process will not only observe variation and the incident laser pair of transmission peak intensity Cavity mold number of excitations number, it is often more important that constantly with relational expression F=FSR/FWHM calculate resonant cavity 5 fineness, In, FSR indicates free spectral range, and FWHM indicates peak half breadtgh, and compared with the theoretical fineness of resonant cavity 5, until the two Until being worth relatively.
Embodiment described above is only that preferred embodiments of the present invention will be described, not to model of the invention It encloses and is defined, without departing from the spirit of the design of the present invention, those of ordinary skill in the art are to technical side of the invention The various changes and improvements that case is made, should fall within the scope of protection determined by the claims of the present invention.

Claims (3)

1. a kind of adjusting method for generating mode excitation optical path for passive optical resonant cavity, which is characterized in that including following step Suddenly:
(1)Beam path alignment model step is built, including:
(11)Using He-Ne visible laser as collimated light source;
(12)It is complete that semi-transparent semi-reflecting lens, the first total reflective mirror and second are set gradually between He-Ne visible laser and resonant cavity Anti- mirror, make He-Ne visible laser export He-Ne visible light successively pass through semi-transparent semi-reflecting lens reflection, the first total reflective mirror it is anti- Penetrating can be irradiated in the incidence end hysteroscope of resonant cavity with after the reflection of the second total reflective mirror;
(2)Beam path alignment step, including:
(21)First adjustable diaphragm and the second adjustable diaphragm are set between semi-transparent semi-reflecting lens and the first total reflective mirror, and can with third Light modulation door screen and the 4th adjustable diaphragm replace the incidence end hysteroscope and transmission end hysteroscope of resonant cavity respectively;
(22)The position for adjusting He-Ne visible laser, semi-transparent semi-reflecting lens, the first total reflective mirror and the second total reflective mirror, makes He-Ne Visible laser output He-Ne visible light simultaneously pass through the first adjustable diaphragm, the second adjustable diaphragm, third adjustable diaphragm and The aperture of 4th adjustable diaphragm;
(3)Optical path coarse steps, including:
(31)Third adjustable diaphragm and the 4th adjustable diaphragm are removed, again by the incidence end hysteroscope of resonant cavity and transmission end hysteroscope It loads onto, the position of other each elements remains unchanged;
(32)The opposite depth of parallelism between the incidence end hysteroscope and transmission end hysteroscope of resonant cavity is adjusted, He-Ne on receiving screen is observed The interference ring generated after visible light-transmissive resonant cavity, until the scan-control voltage of the vibration frequency and piezoelectric ceramics of interference ring Frequency is consistent;It is arranged on the outside of the incidence end hysteroscope of the piezoelectric ceramics abutting resonant cavity and identical as incidence end hysteroscope size;
(4)Optical path fine tuning step, including:
(41)Using tunable middle infrared semiconductor laser as excitation light source, keep tunable middle infrared semiconductor laser defeated Mid-infrared laser out can successively irradiate after semi-transparent semi-reflecting lens transmission, the reflection of the first total reflective mirror and the reflection of the second total reflective mirror Onto the incidence end hysteroscope of resonant cavity;
(42)He-Ne visible laser is closed, tunable middle infrared semiconductor laser is opened, is adjusted infrared by half in tunable The position of conductor laser, infrared photographic plate observes the mid-infrared laser of tunable middle infrared semiconductor laser output in Direction makes mid-infrared laser while passing through the aperture of the first adjustable diaphragm and the second adjustable diaphragm;
(43)The transmission peaks of the resonant cavity shown on observation oscilloscope continue the position for adjusting tunable middle infrared semiconductor laser It sets, gradually increases the intensity of transmission peaks;
(44)When the position for continuing to adjust tunable middle infrared semiconductor laser cannot be such that the intensity of transmission peaks continues growing, Matching lens are arranged between the first adjustable diaphragm and the second adjustable diaphragm, adjusts the position of matching lens, makes transmission peaks Intensity gradually increases.
2. the adjusting method according to claim 1 for generating mode excitation optical path for passive optical resonant cavity, feature It is, the optical path fine tuning step further includes:
To the position of tunable middle infrared semiconductor laser, the position of matching lens and the incidence end hysteroscope of resonant cavity and thoroughly The position for penetrating end hysteroscope carries out joint adjusting, and the Strength Changes of transmission peaks and mid-infrared laser excite cavity mold on observation oscilloscope The number of quantity, while calculating the fineness of resonant cavity, and by the theory of the fineness for the resonant cavity being calculated and resonant cavity Fineness compares, until the difference of the two is in certain threshold range.
3. the adjusting method according to claim 1 for generating mode excitation optical path for passive optical resonant cavity, feature It is, first total reflective mirror and the second total reflective mirror are 45 degree of total reflective mirrors.
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