CN107123926A - The production method of super-narrow line width, tunable high power laser system and laser - Google Patents
The production method of super-narrow line width, tunable high power laser system and laser Download PDFInfo
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- CN107123926A CN107123926A CN201710311945.9A CN201710311945A CN107123926A CN 107123926 A CN107123926 A CN 107123926A CN 201710311945 A CN201710311945 A CN 201710311945A CN 107123926 A CN107123926 A CN 107123926A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
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Abstract
Super-narrow line width, tunable, high power laser light technical scheme and its specific implementation when producing 532nm laser are produced the invention provides a kind of.System includes laser pumping unit, fiber amplifier and multiplier unit.Laser pumping unit is used for outgoing narrow linewidth, frequency stabilization and tunable seed laser；Fiber amplifier is used for the seed laser for amplifying incidence, and by the Laser Transmission after amplification to multiplier unit；Multiplier unit carries out frequency multiplication, output high-power second harmonic laser to the laser after amplification.The technical scheme does not have pattern crosstalk due to using narrow linewidth pump light source, during frequency multiplication, is not in " green problem " easily occurred in traditional 532nm laser；Secondly pumping laser with stable and tunable frequency reference by locking in this programme, while the output of super-narrow line width laser is realized, exports the frequency stabilization of laser and tunable；The system can export high laser power on the premise of above-mentioned technical characterstic is met simultaneously.
Description
Technical field
The present invention relates to field of laser device technology, swash more specifically to a kind of super-narrow line width, tunable high power
The production method of photosystem and laser.
Background technology
Laser is the important tool of modern society's production, life and scientific research, and the application of laser is from industrial production
The various aspects of people's daily life are covered.Had good stability because wavelength has for 532nm laser, power it is high and single
The features such as frequency is exported, has obtained widely in fields such as clinical medicine, industrial cutting, accurate measurement, imaging and spectroscopy
Using.Development with technology and laser application are goed deep into, and people are to the frequency line width of laser, whether tunable and tunable
Scope etc. is proposed higher requirement.
In the prior art, the generation of high power single-frequency 532nm laser is mainly accomplished by the following way：It is with wavelength first
808nm high-power semiconductor laser pumped solid state laser crystal, produces broadband laser；Then by exocoel to broadband
Laser carry out frequency-selecting and amplification so that wavelength resonates for 1064nm laser in intracavitary；Finally, the resonance mode to chamber is carried out
Frequency multiplication, realizes the output of single frequency high-power 532nm laser.But, because the 1064nm laser that 808nm laser pump (ing)s are produced is many
Longitudinal mode laser, therefore in the crosstalk for carrying out easily occurring between pattern when frequency multiplication produces 532nm laser to it, cause light intensity to shake
(namely so-called " green problem ") is, it is necessary to which complicated technological means could alleviate this phenomenon as far as possible.Simultaneously because pump
Pu laser frequency is wide, therefore the 532nm laser of output can not realize the super-narrow line width less than 10kHz.In addition, existing 532nm
Laser frequency tunable range is also very narrow, it is impossible to for needing a wide range of tunable occasion of frequency, such as spectrum analysis.
Therefore, super-narrow line width, high power and adjustable can be produced on the basis of " green problem " is avoided by needing one kind badly
The system of humorous 532nm laser.
The content of the invention
In view of this, the invention provides the generation of a kind of super-narrow line width, tunable high power laser system and laser
Method, is being solved on the basis of output laser intensity shakes this problem with realizing, produces super-narrow line width, high power and adjustable
The purpose of humorous laser.
To achieve the above object, the mode of the invention based on laser amplifier and frequency multiplication provides following technical scheme：
A kind of super-narrow line width, tunable high power laser system, including laser pumping unit, fiber amplifier and frequency multiplication
Unit；
The laser pumping unit includes pumping source and Frequency Locking module, and the pumping source is used for outgoing seed laser,
The Frequency Locking module is used for the Frequency Locking of the seed laser in default centre frequency；, will simultaneously by locking
Output laser linewidth is narrowed；
Fiber amplifier, is amplified for the laser to the pumping source outgoing, and by the Laser Transmission after amplification extremely
The multiplier unit；
The multiplier unit is used to carry out frequency multiplication to the laser after the amplification, so that the frequency of the laser of output is described
Two times of predeterminated frequency.
It is preferred that, the Frequency Locking module include the first polarization beam splitter, electrooptic modulator, the second polarization beam splitter,
Super steady chamber, photodetector and frequency control module；
First polarization beam splitter is located in light path between the pumping source and the fiber amplifier, for by institute
The fraction of laser light for stating pumping source outgoing reflexes to described electrooptic modulator, and allows remaining laser to be transmitted through described fiber amplifier
Device；
The electrooptic modulator is under the control for the modulated signal that the frequency control module is exported, to described by first
The laser of polarization beam splitter reflection carries out phase-modulation, and the laser after modulation is transmitted through into second polarization beam splitter；
Second polarization beam splitter goes out the laser reflection after the modulation to the super steady chamber, and by the super steady chamber
The laser penetrated is transmitted through the photodetector；
The optical signal of the laser of the super steady chamber outgoing is converted to electric signal by the photodetector, and by the telecommunications
Number output is to the frequency control module；
Electric signal and modulated signal mixing generation that the frequency control module is exported according to the photodetector
Feedback signal, and adjust according to the feedback signal frequency of the pumping source shoot laser, with lock it in it is default in
Frequency of heart.
It is preferred that, the frequency control module includes signal source, phase discriminator, wave filter and the first controller；
The signal source is used to export the modulated signal to the electrooptic modulator and the phase discriminator；
The electric signal and the modulated signal that the phase discriminator exports the photodetector carry out phase demodulation, according to phase demodulation
As a result feedback signal is generated, and by the feedback signal transmission to the wave filter；
After the wave filter is filtered to the feedback signal, by filtered feedback signal transmission to the described first control
Device processed；
First controller adjusts the frequency of the pumping source shoot laser according to the feedback signal, to be locked
In default centre frequency.
It is preferred that, the Frequency Locking module also includes the first half-wave plate, the second half-wave plate and first quarter wave plate；
First half-wave plate is located between the pumping source and first polarization beam splitter；
Second half-wave plate is located between first polarization beam splitter and the electrooptic modulator；
First quarter wave plate is located between the super steady chamber and second polarization beam splitter.
It is preferred that, the super steady chamber includes the first level crossing and the first concave mirror；
First level crossing has piezo ceramic element away from the side of the super steady chamber, and first controller passes through
The piezo ceramic element sets the chamber of the super steady chamber long.
It is preferred that, the multiplier unit includes frequency doubling cavity and frequency multiplication control module；
The frequency doubling cavity includes the second level crossing, the 3rd level crossing, the second concave mirror, the 3rd concave mirror and frequency-doubling crystal,
The frequency-doubling crystal is located on the focus point between second concave mirror and the 3rd concave mirror, and the frequency doubling cavity is used for described
Laser carries out frequency multiplication；
The frequency multiplication control module is used to the chamber length of the frequency doubling cavity is adjusted, by the resonance frequency of the frequency doubling cavity
Rate is locked in seed laser frequency；
Wherein, the 3rd level crossing and second concave mirror have piezoelectric ceramics away from the side of the frequency doubling cavity
Part, the frequency multiplication control module is by controlling the chamber of the piezo ceramic element regulation frequency doubling cavity long.
It is preferred that, the frequency multiplication control module includes the 3rd polarization beam splitter, the second photodetector, the 3rd photodetection
Device and frequency multiplication control module；
3rd polarization beam splitter is used to the laser part of the frequency doubling cavity outgoing being transmitted through the second photoelectricity spy
Survey device, partly reflex to the 3rd photodetector；
The optical signal that second photodetector and the 3rd photodetector are used for the fraction of laser light that will be detected is changed
For electric signal, and respectively by the electric signal transmission to the frequency multiplication control module；
The electric signal and the 3rd photoelectricity that the frequency multiplication control module is used to export second photodetector are visited
The electric signal for surveying device output makes the difference, and generates error feedback signal according to the result made the difference, and adjust according to the error feedback signal
The chamber for saving the frequency doubling cavity is long.
It is preferred that, the frequency multiplication control module includes subtracter and second controller；
The electric signal and the 3rd photodetector that the subtracter is used to export second photodetector are defeated
The electric signal gone out makes the difference, and generates error feedback signal according to the result made the difference, and the error feedback signal is transmitted to described
Second controller；
The second controller is long for the chamber that the frequency doubling cavity is adjusted according to the error feedback signal.
It is preferred that, the frequency multiplication control module also includes speculum and second quarter wave plate, and the speculum is used for will not
The laser reflection transmitted into the fraction of laser light and intracavitary of frequency doubling cavity from the second concave mirror is described to the 3rd polarization beam splitter
Second quarter wave plate is located between the speculum and the 3rd polarization beam splitter.
A kind of production method of super-narrow line width, tunable high power laser light, including：
Using pumping source produce seed laser, and by Frequency Locking module by the Frequency Locking of the seed laser pre-
If centre frequency；
The laser of the pumping source outgoing is amplified using fiber amplifier；
Frequency multiplication is carried out to the laser after the amplification using multiplier unit, so that the frequency of the laser of output is described default
Two times of frequency.
Compared with prior art, technical scheme provided by the present invention has advantages below：
The production method of super-narrow line width provided by the present invention, tunable high power laser system and laser, using pump
Pu source laser device directly produces preset wavelength such as 1064nm laser, and it is preset wavelength half then to produce wavelength by frequency multiplication
The laser of laser, such as 532nm, rather than many longitudinal mode 1064nm of solid-state laser crystal progress pumping generation are swashed using laser
Light, therefore, the present invention do not have the crosstalk between pattern when the wavelength of generation is 532nm laser, do not result in output light yet
The problem of strong shake, that is, do not have " green problem ".Pumping laser with stable and tunable frequency by joining in next this programme
Locking is examined, it is possible to achieve the super-narrow line width of output laser, while frequency stabilization；The laser system can meet above-mentioned skill simultaneously
On the premise of art feature, high laser power (typically greater than 20W) is exported.
Further, the laser system can by adjust the Frequency Locking module super steady chamber central resonance frequency
Rate adjusts the centre frequency of pumping laser, so as to realize the regulation of the centre frequency to exporting laser.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
The embodiment of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can also basis
The accompanying drawing of offer obtains other accompanying drawings.
Fig. 1 is the structural representation of tunable laser system provided in an embodiment of the present invention；
Fig. 2 is the structural representation of frequency doubling cavity provided in an embodiment of the present invention；
Fig. 3 is spatial model matching principle figure provided in an embodiment of the present invention；
Fig. 4 is the change curve graph of a relation of frequency multiplication intracavity power provided in an embodiment of the present invention and reflectance of reflector；
Fig. 5 produces the flow chart of the method for laser for tunable laser system provided in an embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
The embodiments of the invention provide a kind of super-narrow line width, tunable high power laser system, as shown in figure 1, this swashs
Photosystem includes laser pumping unit 10, fiber amplifier 11 and multiplier unit 12.
Wherein, laser pumping unit 10 includes pumping source 101 and Frequency Locking module.Wherein, pumping source 101 is used for outgoing
The a length of 1064nm of seed laser, such as outgoing wave laser, Frequency Locking module is used for the frequency of the laser of the outgoing of pumping source 101
Default centre frequency is locked in, the default centre frequency can be with accurate adjustment, to realize the tunable of laser frequency.Together
When by locking, by export laser line width narrowed.
It should be noted that under normal circumstances, the power of laser system can be referred to as high-power laser system more than 2W
System, laser linewidth, which is less than 10KHz, can just be referred to as super-narrow line width laser.
Optionally, pumping source 101 is the pump laser of narrow line width regulatable, that is to say, that the pumping source 101 needs to meet
Line width and tunable requirement.Specifically, the line width of the laser of the outgoing of pumping source 101 should be less than 100kHz, the pumping source 101
Regulation feedback bandwidth should be greater than 1kHz.Optionally, pumping source 101 can use the OEM lasers of single frequency tunable, the laser
Device uses distributed Feedback technology so that the line width of output laser is less than 10kHz, and power output is more than 10mW, and feedback bandwidth is big
In 10kHz.It wherein can quickly change the output laser of the laser using temperature adjustment and piezoelectric ceramics regulation two ways
Frequency.
Fiber amplifier 11, is amplified for the laser to the outgoing of pumping source 101, and by the Laser Transmission after amplification extremely
Multiplier unit 12.Wherein, fiber amplifier 11 is the device that can be amplified to incident optical signal.Multiplier unit 12 be used for pair
Laser after amplification carries out frequency multiplication, so that the frequency of the laser of output is two times of predeterminated frequency.Such as when seed laser is
During 1064nm, the laser that multiplier unit 12 is exported is 532nm laser.
Because the wavelength in the present embodiment is directly produced for 1064nm laser by pumping source laser, rather than adopt
Produced, therefore, do not had when final generation wavelength is 532nm laser in the present embodiment with light laser pumped solid state laser crystal
Crosstalk between pattern, does not result in the strong shake of output light yet, that is, does not have " green problem ".
Specifically, as shown in figure 1, Frequency Locking module includes the first half-wave plate 102, the first polarization beam splitter 103, second
Half-wave plate 104, electrooptic modulator 105, the second polarization beam splitter 106, first quarter wave plate 107, super steady chamber 108, photodetection
Device 109 and frequency control module 110.
Wherein, the first half-wave plate 102 is located between the polarization beam splitter 103 of pumping source 101 and first.First polarization beam splitter
103 are located in light path between pumping source 101 and fiber amplifier 11, specifically, and the first polarization beam splitter 103 is located at the first half
Between wave plate 102 and fiber amplifier 11, for by a part of laser reflection of the outgoing of pumping source 101 to electrooptic modulator 105,
And remaining laser is transmitted through fiber amplifier 11.Optionally, the first polarization beam splitter 103 is polarization beam apparatus, and it transmits one
Shunt excitation light, reflection another part laser, also, the exit direction of the laser of transmission and the exit direction of the laser reflected are in 90 °
Angle.
Second half-wave plate 104 is located between the first polarization beam splitter 103 and electrooptic modulator 105, equally, the second half-wave plate
104 effect is to carry out Polarization Modulation to the laser that the first polarization beam splitter 103 reflects.Through the laser of the second half-wave plate 104
Incide in electrooptic modulator 105, the electrooptic modulator 105 under the control for the modulated signal that frequency control module 110 is inputted,
Phase-modulation is carried out to incident laser, and the laser after modulation is transmitted through the second polarization beam splitter 106.
Second polarization beam splitter 106 electrooptic modulator 105 is modulated after laser reflection to super steady chamber 108, and will be super steady
The laser of the outgoing of chamber 108 is transmitted through photodetector 109.Wherein, first quarter wave plate 107 is located at the super steady pole of chamber 108 and second
Change between beam splitter 106, laser or the laser of the super outgoing of steady chamber 108 for reflecting the second polarization beam splitter 106 carry out inclined
Shake modulation.Wherein, super steady chamber 108 includes the first level crossing L1 and the first concave mirror M1.If the frequency of laser and super steady chamber 108
Resonant frequency is identical, then it enters the steady chamber 108 of the excess of imports, and round vibration, fraction in super steady chamber 108 by the first concave mirror M1
Leaked by M1；If the frequency of the laser is different from the resonant frequency of super steady chamber 108, the laser can be by the first concave mirror
M1 reflects.The laser for laser and the M1 reflection revealed from intracavitary can be interfered with each other, and photodetector 109 is detected.Photoelectricity is visited
Survey device 109 and the optical signal of the laser received is converted into electric signal, and by electric signal output to frequency control module 110.Frequently
The electric signal that rate control module 110 is exported according to photodetector 109 and the modulated signal mixing for inputing to electrooptic modulator 105
Feedback signal, and the frequency of the laser according to the feedback signal regulation outgoing of pumping source 101 are generated, by the frequency of pumping source 101
It is locked in default centre frequency.
Further, frequency control module 110 includes signal source 110a, phase discriminator 110b, the controls of wave filter 110c and first
Device 110d processed.Wherein, signal source 110a is used to export modulated signal to electrooptic modulator 105, also, signal source 110a also can be by
The modulated signal inputs phase discriminator 110b, so as to the phase discriminator 110b electric signals for exporting photodetector 109 and modulation letter
Number phase demodulation is carried out, feedback signal is generated according to identified result, and by feedback signal transmission to wave filter 110c；110c pairs of wave filter
After feedback signal is filtered, by filtered feedback signal transmission to the first controller 110d；First controller 110d according to
The frequency of the laser of the feedback signal regulation outgoing of pumping source 101, by the Frequency Locking of pumping source 101 in default center frequency
Rate, by the wavelength locking of the laser of the outgoing of pumping source 101 in 1064nm.
In the present embodiment, by locking, default centre frequency is identical with the resonant frequency of super steady chamber 108.It is due to 108
Super steady chamber, its variation of resonant frequency is very small, therefore the frequency of the laser of the outgoing of pumping source 101 will stabilise at a fixed value.
Also, in the present embodiment, the first level crossing L1 has piezo ceramic element P1, the first controller away from the side of super steady chamber 108
110d makes piezo ceramic element P1 produce small deformation by applying voltage to piezo ceramic element P1, and then can adjust
The chamber length and resonant frequency of super steady chamber 108.Now, for according to the laser beam resonated before regulation with chamber, the reflectivity meeting of chamber
Increase, the optical signal that detector 109 is received can be changed.According to 109 electric signals detected and modulated signal generate it is anti-
Feedback signal can realize the regulation to the frequency of pumping source 101, it is resonated with chamber.Output can be realized by this mode
Wavelength for 532nm laser frequency tuning.
Most of laser that pumping source 101 is exported can be incided in fiber amplifier 11 through the first polarization beam splitter 103,
After fiber amplifier 11 is amplified to laser, by the Laser Transmission after amplification to multiplier unit 12.Optical fiber in the present embodiment
Amplifier 11 needs to meet that power output is high, frequency dispersion is small and multiplication factor is big etc. requires.In a specific embodiment, light
Fiber amplifier 11 can be single frequency fiber laser amplifier.The laser amplifier is when the power of the laser of input is 5mW, output
The power maximum of laser can reach 50W.And the laser of laser amplifier output is space single mode, is follow-up frequency multiplication part
Optical design provide excellent basis.
In the present embodiment, as shown in figure 1, multiplier unit 12 includes frequency doubling cavity 120 and frequency multiplication control module.The frequency doubling cavity
120 include the second level crossing L2, the 3rd level crossing L3, the second concave mirror M2, the 3rd concave mirror M3 and frequency-doubling crystal 13, for pair
Laser carries out frequency multiplication.In the present embodiment, in order to lift the utilization rate and equivalent shg efficiency of fundamental frequency light, by the traveling wave that resonates
Chamber realizes the power enhancing of basic frequency laser as frequency doubling cavity 120.As shown in figure 3, the second level crossing L2, the 3rd level crossing L3,
Second concave mirror M2 and the 3rd concave mirror M3 constitute a four mirror small slide shape chambers, frequency-doubling crystal 13 be located at the second concave mirror M2 and
On focus point between 3rd concave mirror M3.
Frequency multiplication control module is used to the chamber length of frequency doubling cavity 120 is adjusted, so that the resonant frequency of frequency doubling cavity 120 is with entering
The centre frequency for penetrating laser is identical.Further, since the influence of machinery, thermal change etc., chamber length can be continually changing, it is impossible to meet always
Above-mentioned condition, therefore, it is necessary to be compensated by the way of feedback the chamber progress Mobile state of frequency doubling cavity 120, to cause the local oscillator of chamber
Frequency follows the centre frequency of incident laser all the time.In the present embodiment, the 3rd level crossing L3 and the second concave mirror M2 deviate from frequency multiplication
The side of chamber 120 has piezo ceramic element P2 and P3, and the frequency multiplication control module to piezo ceramic element P2 and P3 by applying
Voltage makes piezo ceramic element P2 and P3 occur miniature deformation, long come the chamber that adjusts frequency doubling cavity 120.
Further, frequency multiplication control module includes the 3rd polarization beam splitter 121a, the second photodetector 121b, the 3rd light
Electric explorer 121c and frequency multiplication control module.Wherein, the 3rd polarization beam splitter 121a is used for the laser portion of the outgoing of frequency doubling cavity 120
Divide and be transmitted through the second photodetector 121b, partly reflex to the 3rd photodetector 121c；Second photodetector 121b and
3rd photodetector 121c is used to the optical signal detected being converted to electric signal, and respectively by electric signal transmission to frequency multiplication control
Molding block；The frequency multiplication control module is used for the electric signal and the 3rd photodetector 121c for exporting the second photodetector 121b
The electric signal of output is made the difference, and error signal is generated according to the result made the difference, and according to the chamber of error signal regulation frequency doubling cavity 120
It is long.
Optionally, frequency multiplication control module includes subtracter 121d and second controller 121e.Subtracter 121d is used for will
The electric signal of second photodetector 121b outputs and the electric signal of the 3rd photodetector 121c outputs make the difference, according to what is made the difference
As a result error signal is generated, and error signal is transmitted to second controller 121e.Second controller 121e is used for according to error
The chamber of Signal Regulation frequency doubling cavity 120 is long.Optionally, the first controller 110d and second controller 121e in the present embodiment are
Proportional-integral derivative controller.
In the present embodiment, the principle for producing error signal is to utilize the delay of o light and e light in frequency-doubling crystal 13 different,
When the laser e light that frequency multiplication needs resonates with frequency doubling cavity 120, o light will not resonate with frequency doubling cavity 120, and o light compositions are substantially complete by chamber
Reflection, and the reflectivity of e light being as whether chamber resonates and changes, and when e light resonates with chamber or when partial resonance, from the
The e light of two concave mirror M2 outgoing can bring the phase information of light field in frequency doubling cavity 120.By to the second concave mirror M2 emergent lights
Polarization analysis, i.e., by the analysis of the polarised light to the second photodetector 121b and the 3rd photodetector 121c detections, I
Can obtain incident laser frequency whether and the local frequency of frequency doubling cavity 120 have a deviation, and deviation size and Orientation, so
The chamber length of frequency doubling cavity 120 is adjusted the error signal generated afterwards according to deviation, with the frequency for the 532nm laser for locking outgoing
And wavelength.
Optionally, frequency multiplication control module also includes speculum 121f, second quarter wave plate 121g, the 3rd quarter wave plate
121h and lens 121i, speculum 121f are used to be introduced into the fraction of laser light and intracavitary of frequency doubling cavity 120 from the second concave mirror
The laser reflection of M2 transmissions is to the 3rd polarization beam splitter 121a, and second quarter wave plate 121g is positioned at speculum 121f and the 3rd pole
Change between beam splitter 121a, enter the modulation of line phase.3rd quarter wave plate 121h is located at the concave mirror of fiber amplifier 11 and second
Between M2, lens 121i is located between the 3rd quarter wave plate 121h and the second concave mirror M2.
In the present embodiment, as shown in Fig. 2 when designing frequency doubling cavity 120, it is assumed that the second level crossing L2 and the 3rd level crossing L3
Reflectivity and transmissivity be respectively R1、T1, R2、T2, the second concave mirror M2 and the 3rd concave mirror M3 radius of curvature are respectively r1
And r2, reflectivity and transmissivity is respectively R3、T3, R4、T4, frequency-doubling crystal is lithium triborate crystal crystal, also, laser is from second
Concave mirror M2 is reflected into cavity, then light field was around chamber one week, and all optical elements of intracavitary are to the equivalent transformation of light：
Wherein, frequency doubling cavity 120 to be made can be stablized, then need to meet：(1/2)*|A+D|≤1.
Meeting that frequency doubling cavity 120 is stable and resonance on the premise of, the resonance mode of intracavitary is by the chamber length of frequency doubling cavity 120 and recessed
The curvature of face mirror determines generally have multiple patterns to meet the requirement of resonance, specifically relevant with the selection of each parameter.
In the actual design of frequency doubling cavity 120, generally for optimal shg efficiency is considered, first it is to determine with a tight waist at intracavity frequency doubling crystal
Size ω0, and beam waist position is set as the center position of frequency-doubling crystal 13；Then according to the geometric configuration in space, selection
Suitable length d1And d2；Select the concave mirror matching chamber of suitable curvature long, finally realize the resonance of chamber.Final total long L of chamber
For：L=d1+d2+l+d3。
Wherein, l is the length of frequency-doubling crystal 13, d1For frequency-doubling crystal 13 to the 3rd concave mirror M3 distance, d2It is brilliant for frequency multiplication
The concave mirror of body 13 to the second M2 distance.d3=d31+d32+d33, d31Refer between the second level crossing L2 and the 3rd concave mirror M3
Distance, d32Refer to the distance between second concave mirror M2 and the 3rd level crossing L3, d33Refer to the second level crossing L2 and the 3rd plane
The distance between mirror L3.In a specific embodiment, as intracavitary size ω with a tight waist0During for 27.5um, the length of frequency-doubling crystal 13
Spend l=20mm, d1=82.7mm, d2=61.7mm, d3=481.6mm, r1=132mm, r2=100mm.
In addition, when designing frequency doubling cavity 120, it is necessary to consider the matching of pattern.Wherein, pattern match includes two aspects：
One is spatial model matching, i.e. matching between the Beam parameters of incident laser and the Beam parameters of intracavitary resonance light, two be into
Penetrate matching for cavity mirrors reflectivity and intracavity power density.
On spatial model matching, the fundamental frequency light of incident laser to be made can enter in cavity, it is necessary to incident as much as possible
Pattern of the laser after incident hysteroscope is the second concave mirror M2 conversion is consistent with the resonance mode of intracavitary.Spatial model matching
Principle is as shown in Figure 3, it is assumed that the center z=0 of frequency-doubling crystal 13, while being also the beam waist position of light beam, size of girdling the waist is ω0,
Now, the q parameters of Gaussian beam are q0=iz0, by q0The Gaussian beam of description is propagated along-z directions, brilliant by half of frequency multiplication
After the length of body 13, in face F1Right side, q parameters areBy interface F2Afterwards, in F2The q parameters in left side become
Into：Pass through again apart from d1Afterwards, in F2The q parameters on right side become：By
Second concave mirror M2 inner surface F2Afterwards, in F2The left side in face, q parameter changes are
Wherein, z4And z40It is n0, n1, n2, l, d1, z0Real function, n0For the refractive index of fundamental frequency light in air, n1For frequency-doubling crystal 13
The refractive index of middle fundamental frequency light, n2For the refractive index of fundamental frequency light in the second concave mirror M2, l is the length of frequency-doubling crystal 13, and d1For again
The right side F of frequency crystal 131To the second concave mirror M2 reflectings surface F2The distance between.
Because the second concave mirror M2 has certain thickness dM, therefore, light is equivalent to having passed by apart from dM, so, in face F3
Right side, q parameters are：q5=q5+dM=z4+dM+iz40, by the second concave mirror M2 incident interface F3Afterwards, in face F3A left side
Side, the q parameters of light beam are：Because above-mentioned all calculating are all reversible, therefore, calculating process is inverted
It can obtain：One in face F3Left side is by q5The Gaussian beam of parameter description, to the right along the concave mirror of process second of z positive directions
After M2 and frequency-doubling crystal 13, beam waist position can be formed in the middle of frequency-doubling crystal 13 and size is ω0Gaussian beam, and just
It is the resonance mode of chamber.
In addition, the reflectivity that incident hysteroscope is the second concave mirror M2 needs to be matched with intracavity power density.Due to chamber
Presence be, in order to lift the power density of fundamental frequency light, therefore, to select suitable incident cavity mirrors reflectivity so that whole cavity
Middle energy density is maximum.
By the analysis to intracavitary field strength, we can obtain the equivalent power of intracavitary field strength and are：
Wherein, PcavFor intracavitary field strength equivalent power, PinFor the power of input cavity.Frequency-doubling crystal 13 when η is once-through
Shg efficiency.It follows that working as TR2R3R4When bigger,It is bigger, still, for the reflectivity of incident hysteroscope, be not then
It is the bigger the better, because R1It is bigger, T1It is then smaller.For specific input power Pin, suitable R can be found1So that intracavitary
Power is maximum.
In an embodiment of the invention, the second concave mirror M2 reflectivity value is R2=R3=R4=0.999, and T=
0.98, η=0.01%, incident power is Pin=40W, and consider that the second concave mirror M2 is lossless, that is, there is T1=1-R1, it is based on
This, we can obtain intracavity power PcavWith incident cavity mirrors reflectivity R1Variation relation curve, as shown in figure 4, intracavitary work(
The reflectivity of corresponding incident hysteroscope is about 0.955 when rate is maximum.
By the above-mentioned analysis to cavity, what each polarized component (o light and e light) reflected from the second concave mirror M2
Field strength is：And quarter-wave plate 121g is to the polarization of light
Conversion can be described with Jones matrix：Rotation transformation is：
So, anglec of rotation θ is transformed to the polarization of light：
HC (θ)=R (- θ) MQWPR (θ), the distribution of light intensity that two detectors 121b and 121c are separately detected is：
EPDA(ΔLcav)=HC0,0(θ)ER0(ΔLcav)-HC0,1(ΔLcav)；
EPDB(ΔLcav)=HC1,0(θ)ER0(ΔLcav)-HC1,1(ΔLcav),
Corresponding luminous power is：
PPDA(ΔLcav)=[q0HC0,0(θ)ER0(ΔLcav)-qeHC0,1(ΔLcav)]2Pin；
PPDB(ΔLcav)=[q0HC1,0(θ)ER0(ΔLcav)-qeHC1,1(ΔLcav)]2Pin,
The error signal finally given is：ΔUHC(ΔLcav)=G [PPDA(ΔLcav)-PPDB(ΔLcav)]。
The chamber length of frequency doubling cavity 120 is adjusted according to the error signal, the frequency of the 532nm laser of generation can be locked
And wavelength.
Super-narrow line width provided by the present invention, tunable high power laser system, are directly produced using pumping source laser
The laser that raw wavelength is 1064nm, rather than produced by the way of laser carries out pumping to solid-state laser crystal, therefore,
Technical scheme does not have the crosstalk between pattern when producing the laser that wavelength is 532nm, do not result in output light yet
The problem of strong shake, that is, do not have " green problem ".Also, the wavelength that the laser system of the offer of the present invention is produced is 532nm's
The line width of laser is narrower, power is higher.
The embodiment of the present invention additionally provides a kind of super-narrow line width, the production method of tunable high power laser light, such as Fig. 5 institutes
Show, this method includes：
S101：Seed laser is produced using pumping source, and by Frequency Locking module by the frequency locker of the seed laser
It is scheduled on default centre frequency；
S102：The laser of the pumping source outgoing is amplified using fiber amplifier；
S103：Frequency multiplication is carried out to the laser after the amplification using multiplier unit, so that the frequency of the laser of output is institute
State predeterminated frequency two times.
Specifically, with reference to Fig. 1, after a length of 1064nm laser of the outgoing wave of pumping source 101, the first half-wave plate of laser light 102
Incide on the first polarization beam splitter 103, a part of laser of the outgoing of pumping source 101 is transmitted through by the first polarization beam splitter 103
Fiber amplifier 11, electric light is incided by another part laser reflection to the second half-wave plate 104, and through the second half-wave plate 104
Modulator 105.The electrooptic modulator 105 is under the control for the modulated signal that frequency control module 110 is inputted, to incident laser
Phase-modulation is carried out, and the laser after modulation is transmitted through the second polarization beam splitter 106.Second polarization beam splitter 106 is by electric light
Laser reflection after the modulation of modulator 105 is arrived to first quarter wave plate 107 through laser light incident after first quarter wave plate 107
Super steady chamber 108, the second polarization beam splitter 106 is additionally operable to the laser of the super steady outgoing of chamber 108 being transmitted through photodetector 109.Light
The optical signal for the laser that electric explorer 109 escapes super steady chamber 108 is converted to electric signal, and by electric signal output to FREQUENCY CONTROL
Module 110.The electric signal that frequency control module 110 is exported according to photodetector 109 and the tune for inputing to electrooptic modulator 105
Signal mixing generation feedback signal processed, and the frequency of the laser according to the feedback signal regulation outgoing of pumping source 101, by pumping source
101 Frequency Locking is in default centre frequency.
Meanwhile, a part of laser that pumping source 101 is exported can incide fiber amplifier through the first polarization beam splitter 103
In 11, after fiber amplifier 11 is amplified to laser, by frequency doubling cavity of the Laser Transmission after amplification into multiplier unit 12
120, so that the laser after 120 pairs of amplifications of frequency doubling cavity carries out frequency multiplication, obtain the laser that wavelength is 532nm.Wherein, frequency doubling cavity 120
In fraction of laser light after the reflection of speculum 121 and second quarter wave plate 121g, can enter from the second concave mirror M2 outgoing
The laser part of the outgoing of frequency doubling cavity 120 is transmitted through the second light by the 3rd polarization beam splitter 121a, the 3rd polarization beam splitter 121a
Electric explorer 121b, partly reflex to the 3rd photodetector 121c；Second photodetector 121b and the 3rd photodetector
The optical signal of the fraction of laser light detected is converted to electric signal by 121c, and respectively by electric signal transmission to frequency multiplication control module；
The frequency multiplication control module is used for export the second photodetector 121b electric signals exported and the 3rd photodetector 121c
Electric signal is made the difference, and error signal is generated according to the result made the difference, and the chamber for adjusting frequency doubling cavity 120 according to error signal is long.
The production method of super-narrow line width provided by the present invention, tunable high power laser system and laser, using pump
Pu source laser device directly produces the laser that wavelength is 1064nm, rather than carries out pumping to solid-state laser crystal using laser
What mode was produced, there is no pattern crosstalk during frequency multiplication, therefore, the wavelength that technical scheme is produced swashs for 532nm's
Light does not have the crosstalk between pattern, the problem of yet not resulting in the strong shake of output light, that is, does not have " green problem ".Secondly it is our
Pumping laser is defeated while the output of super-narrow line width laser is realized by being locked with stable and tunable frequency reference in case
Go out the frequency stabilization of laser and tunable；The laser system can export Gao Ji on the premise of above-mentioned technical characterstic is met simultaneously
Luminous power.
The embodiment of each in this specification is described by the way of progressive, and what each embodiment was stressed is and other
Between the difference of embodiment, each embodiment identical similar portion mutually referring to.For device disclosed in embodiment
For, because it is corresponded to the method disclosed in Example, so description is fairly simple, related part is said referring to method part
It is bright.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or using the present invention.
A variety of modifications to these embodiments will be apparent for those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, it is of the invention
The embodiments shown herein is not intended to be limited to, and is to fit to and principles disclosed herein and features of novelty phase one
The most wide scope caused.
Claims (10)
1. a kind of super-narrow line width, tunable high power laser system, it is characterised in that put including laser pumping unit, optical fiber
Big device and multiplier unit；
The laser pumping unit includes pumping source and Frequency Locking module, and the pumping source is used for outgoing seed laser, described
Frequency Locking module is used for the Frequency Locking of the seed laser in default centre frequency；Simultaneously by locking, it will export
Laser linewidth is narrowed；
Fiber amplifier, is amplified for the laser to the pumping source outgoing, and by the Laser Transmission after amplification to described
Multiplier unit；
The multiplier unit is used to carry out frequency multiplication to the laser after the amplification, so that the frequency of the laser of output is described default
Two times of frequency.
2. system according to claim 1, it is characterised in that the Frequency Locking module include the first polarization beam splitter,
Electrooptic modulator, the second polarization beam splitter, super steady chamber, photodetector and frequency control module；
First polarization beam splitter is located in light path between the pumping source and the fiber amplifier, for by the pump
The fraction of laser light of Pu source outgoing reflexes to described electrooptic modulator, and allows remaining laser to be transmitted through described fiber amplifier；
The electrooptic modulator is under the control for the modulated signal that the frequency control module is exported, to described by first polarization
The laser of beam splitter reflection carries out phase-modulation, and the laser after modulation is transmitted through into second polarization beam splitter；
Second polarization beam splitter by the laser reflection after the modulation to the super steady chamber, and by the super steady chamber outgoing
Laser is transmitted through the photodetector；
The optical signal of the laser of the super steady chamber outgoing is converted to electric signal by the photodetector, and the electric signal is defeated
Go out to the frequency control module；
Electric signal and modulated signal mixing generation feedback that the frequency control module is exported according to the photodetector
Signal, and according to the frequency of the feedback signal regulation pumping source shoot laser, to lock it in default center frequency
Rate.
3. system according to claim 2, it is characterised in that the frequency control module includes signal source, phase discriminator, filter
Ripple device and the first controller；
The signal source is used to export the modulated signal to the electrooptic modulator and the phase discriminator；
The electric signal and the modulated signal that the phase discriminator exports the photodetector carry out phase demodulation, according to identified result
Feedback signal is generated, and by the feedback signal transmission to the wave filter；
After the wave filter is filtered to the feedback signal, by filtered feedback signal transmission to the described first control
Device；
First controller adjusts the frequency of the pumping source shoot laser according to the feedback signal, pre- to lock it in
If centre frequency.
4. system according to claim 3, it is characterised in that the Frequency Locking module also includes the first half-wave plate, the
Two half-wave plates and first quarter wave plate；
First half-wave plate is located between the pumping source and first polarization beam splitter；
Second half-wave plate is located between first polarization beam splitter and the electrooptic modulator；
First quarter wave plate is located between the super steady chamber and second polarization beam splitter.
5. system according to claim 4, it is characterised in that the super steady chamber includes the first level crossing and the first concave surface
Mirror；
First level crossing has piezo ceramic element away from the side of the super steady chamber, and first controller passes through described
Piezo ceramic element sets the chamber of the super steady chamber long.
6. system according to claim 1, it is characterised in that the multiplier unit includes frequency doubling cavity and frequency multiplication control mould
Block；
The frequency doubling cavity includes the second level crossing, the 3rd level crossing, the second concave mirror, the 3rd concave mirror and frequency-doubling crystal, described
Frequency-doubling crystal is located on the focus point between second concave mirror and the 3rd concave mirror, and the frequency doubling cavity is used for the laser
Carry out frequency multiplication；
The frequency multiplication control module is used to the chamber length of the frequency doubling cavity is adjusted, and the resonant frequency of the frequency doubling cavity is locked
It is scheduled on seed laser frequency；
Wherein, the 3rd level crossing and second concave mirror have piezo ceramic element away from the side of the frequency doubling cavity,
The chamber that the frequency multiplication control module adjusts the frequency doubling cavity by the piezo ceramic element is long.
7. system according to claim 6, it is characterised in that the frequency multiplication control module include the 3rd polarization beam splitter,
Second photodetector, the 3rd photodetector and frequency multiplication control module；
3rd polarization beam splitter be used for by the laser part of the frequency doubling cavity outgoing be transmitted through second photodetector,
Part reflexes to the 3rd photodetector；
Second photodetector and the 3rd photodetector are used to the optical signal of the fraction of laser light detected being converted to electricity
Signal, and respectively by the electric signal transmission to the frequency multiplication control module；
The frequency multiplication control module is used for the electric signal and the 3rd photodetector for exporting second photodetector
The electric signal of output makes the difference, and generates error feedback signal according to the result made the difference, and adjust institute according to the error feedback signal
The chamber for stating frequency doubling cavity is long.
8. system according to claim 7, it is characterised in that the frequency multiplication control module includes subtracter and the second control
Device；
The subtracter is used for export the electric signal and the 3rd photodetector of second photodetector output
Electric signal makes the difference, and generates error feedback signal according to the result made the difference, and the error feedback signal is transmitted to described second
Controller；
The second controller is long for the chamber that the frequency doubling cavity is adjusted according to the error feedback signal.
9. system according to claim 8, it is characterised in that the frequency multiplication control module also includes speculum and second
Quarter wave plate, the speculum is used for the laser reflection of the frequency doubling cavity outgoing to the 3rd polarization beam splitter, described second
Individual quarter wave plate is located between the speculum and the 3rd polarization beam splitter.
10. the production method of a kind of super-narrow line width, tunable high power laser light, it is characterised in that including：
Using pumping source produce seed laser, and by Frequency Locking module by the Frequency Locking of the seed laser default
Centre frequency；
The laser of the pumping source outgoing is amplified using fiber amplifier；
Frequency multiplication is carried out to the laser after the amplification using multiplier unit, so that the frequency of the laser of output is the predeterminated frequency
Two times.
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