CN104638505B - A kind of method and device for producing broad band continuously-tuning coherent extreme ultraviolet light light source - Google Patents
A kind of method and device for producing broad band continuously-tuning coherent extreme ultraviolet light light source Download PDFInfo
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- CN104638505B CN104638505B CN201510069003.5A CN201510069003A CN104638505B CN 104638505 B CN104638505 B CN 104638505B CN 201510069003 A CN201510069003 A CN 201510069003A CN 104638505 B CN104638505 B CN 104638505B
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Abstract
The present invention discloses a kind of method and device for producing broad band continuously-tuning coherent extreme ultraviolet light light source, and methods described is：Femtosecond laser beam is produced, by laser beam focusing at working gas, the laser beam produces higher hamonic wave with working gas interaction under vacuum conditions；The projectile energy of the laser beam or the air pressure of the working gas are adjusted, to change the phase-matching condition of higher hamonic wave so that red shift or blue shift occur for order harmonic frequencies, so as to realize the continuous tuning of each order harmonic radiation wavelength of EUV light source.Present invention also offers the device for realizing the above method.Implement the continuous tuning of each order harmonic radiation wavelength of the achievable EUV light source of the present invention.
Description
Technical field
The present invention relates to high field laser physics and attosecond science technical field, broad band is produced more particularly, to one kind
The method and device of continuously-tuning coherent extreme ultraviolet light light source.
Background technology
The wavelength of extreme ultraviolet is located at 10~121nm spectral regions, is a kind of high energy electron irradiation, it can cause its other party
Species energy transition and chemical reaction that method is difficult to.Tunable EUV light source has very in laser spectroscopy research
Important meaning, it is the main method for realizing high-resolution imaging, in addition in VHD optical disc, material process technology
And also have very big application prospect in biomedicine.
In existing method, the generation of coherent source is generally by the stimulated radiation of working media or the frequency multiplication of crystal or difference
Frequency realizes that output waveband is more common in visible waveband and infrared band, be difficult with extreme ultraviolet waveband (10~121nm) above-mentioned
Method is produced.Therefore realize that EUV light source is necessary using new ways and means.Application No. 201310188870.1
Patent description generation extreme ultraviolet tunable single chromatic coherent light source method, it is related to the phase interaction of Multi Colour Lasers and gas
With the matching of, macro phase and intratomic phase-matching technique, but it can only tune the wavelength of particular harmonic order, and can not be same
The continuous tuning of each order harmonic radiation wavelength of Shi Shixian EUV light sources.Therefore, the deficiencies in the prior art, are constrained tunable
The application of EUV light source in practice.
The content of the invention
For the disadvantages described above or Improvement requirement of prior art, broad band continuously-tuning is produced the invention provides one kind
The method and device of coherent extreme ultraviolet light light source, is interacted using femtosecond laser and gas, on the basis of higher hamonic wave is produced,
Pulsed laser energy or air pressure are adjusted, the phase-matching condition of higher hamonic wave is changed, generation makes the red shift that spectrum broadens
Or blue shift, so as to realize the continuous tuning of each order harmonic radiation wavelength of EUV light source.
To achieve the above object, it is proposed, according to the invention, produce broad band continuously-tuning coherent extreme ultraviolet light light there is provided one kind
The method in source, methods described is：Femtosecond laser beam is produced, the femtosecond laser beam is focused at working gas, true
The laser beam produces higher hamonic wave with working gas interaction under Altitude；Adjust the incidence of the laser beam
The air pressure of energy or the working gas, to change the phase-matching condition of higher hamonic wave so that order harmonic frequencies occur red
Move or blue shift, so as to realize the continuous tuning of each order harmonic radiation wavelength of EUV light source.
As it is further preferred that keep working gas air pressure it is constant, increase pulsed laser energy so that higher hamonic wave is frequently
Red shift occurs for rate.
As it is further preferred that keep pulsed laser energy it is constant, increase working gas air pressure so that higher hamonic wave is frequently
Blue shift occurs for rate.
As it is further preferred that the working gas is one kind in inert gas or molecular gas.
Correspondingly, the present invention also provides a kind of device of implementation method, and described device includes：Femtosecond laser driving light source,
Half-wave plate and polarizer combination, diaphragm, condenser lens, the first vacuum chamber, gas box, the gas box are located at the first vacuum
Condenser lens focal point inside chamber；
The femtosecond laser driving light source is used to produce femtosecond laser, and half-wave plate and polarizer group are shared in the femtosecond
Laser beam carries out energy adjustment, and diaphragm is used to adjust beam diameter and the laser beam after regulation is impinged perpendicularly on into focusing thoroughly
On mirror, then focused on by condenser lens, laser beam interacts with the working gas in gas box in condenser lens focal point
Produce higher hamonic wave.
As it is further preferred that described device also includes the pressure regulating valve being arranged on gas box breather line, use
The pressure for the working gas being passed through in regulation gas box.
As it is further preferred that described device also include the second vacuum chamber, slit, flat focal field grating, MCP fluorescent plates,
CCD camera, the slit, flat focal field grating are located at the second vacuum chamber；
The higher hamonic wave focuses on same plane, the MCP fluorescent plates, CCD photograph through slit by flat focal field grating
Machine is used to focus on conplane higher hamonic wave signal to described and detect.
As it is further preferred that the working gas in the gas box is one in inert gas or molecular gas
Kind.
As it is further preferred that the condenser lens is planoconvex spotlight, spherical lens or parabolic lens.
In general, possess following compared with prior art, mainly by the contemplated above technical scheme of the present invention
Technological merit：The inventive method is interacted using strong femtosecond pulse one-wavelength laser with gas, produces higher hamonic wave, then pass through
Pulsed laser energy and air pressure are adjusted, its phase-matching condition is changed, causes higher hamonic wave to occur frequency displacement (red shift or indigo plant
Move), that is, realize output wavelength tunable.Using the inventive method and device, precise control pulsed laser energy can be passed through
And the variable quantity of air pressure, the precision tuning of EUV light source output wavelength is realized, also can be by phase-matching technique to specific
The harmonic wave of order is tuned.
Brief description of the drawings
Fig. 1 produces the apparatus structure schematic diagram of broad band continuously-tuning coherent extreme ultraviolet light light for the present invention；
Fig. 2 illustrates for the apparatus structure of the generation broad band continuously-tuning coherent extreme ultraviolet light light of one embodiment of the invention
Figure；
Fig. 3 is the timing of apparatus of the present invention air pressure one, when laser pulse energy measures different value, each order harmonic intensity and ripple
Long change schematic diagram；
Fig. 4 is the timing of apparatus of the present invention air pressure one, and the centre wavelength of each order (13~27 times) harmonic wave is with laser pulse energy
The change schematic diagram of amount；
Fig. 5 is the timing of apparatus of the present invention pulsed laser energy one, when air pressure takes different value, each order harmonic intensity and wavelength
Change schematic diagram；
Fig. 6 is the timing of apparatus of the present invention pulsed laser energy one, and the centre wavelength of each order (13~27 times) harmonic wave is with gas
The change schematic diagram of pressure.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in each embodiment of invention described below
Not constituting conflict each other can just be mutually combined.
The present invention provides a kind of method for producing broad band continuously-tuning coherent extreme ultraviolet light light source, and methods described is：Production
Raw femtosecond laser beam, by laser beam focusing at working gas, the laser beam and the work under vacuum conditions
Gas interaction produces higher hamonic wave；The projectile energy of the laser beam or the air pressure of the working gas are adjusted, to change
Become the phase-matching condition of higher hamonic wave so that red shift or blue shift occur for order harmonic frequencies, so as to realize that EUV light source is each
The continuous tuning of order harmonic radiation wavelength.
As shown in figure 1, based on the above method, the present invention also provides a kind of device for realizing the above method.Device includes：Fly
Second laser driven light source 1, half-wave plate and polarizer combination 2, diaphragm 3, condenser lens 4, the first vacuum chamber 5 and gas box 9.Its
In, gas box 9 is located inside the first vacuum chamber 5.
Above-mentioned femtosecond laser driving light source 1 is used to produce femtosecond laser, and half-wave plate and polarizer combination 2 are used to carry out femtosecond
Laser beam energy is adjusted；Beam diameter (i.e. spot size) is adjusted by diaphragm 3 again, the laser beam after regulation is through diaphragm 3
Impinge perpendicularly on condenser lens 4, line focus lens 4 are focused on.It is located at after the gas box 9 is adjusted at lens focus, on
State femtosecond laser and produce higher hamonic wave with the working gas interaction in gas box 9.
Wherein, half-wave plate combines 2 regulations for being used to carry out beam energy with polarizer, by the angle of rotation for controlling half-wave plate
Spend to adjust the outgoing light energy that femtosecond laser drives light source.Also other devices for having and adjusting beam energy can be used in the present invention
Instead of.
Condenser lens 4 can select planoconvex spotlight, spherical lens or parabolic lens.
First vacuum chamber 5 is also connected with the first molecular pump 7, and the first molecular pump 7 is used to the first vacuum chamber 5 is carried out to take out true
Sky, keeps it in vacuum state.Laser can interact with air, and vacuum state ensure that light beam and specified list
One gas is acted on.
Gas box 9 of the present invention is connected with air inlet pipe 10, and its working gas inputted is the inert gases such as Ne, Ar, Kr, Xe
Or N2, O2, H2, D2 equimolecular gas.Also set up between gas box 9 and air inlet pipe 10 by a pressure regulating valve, pass through pressure regulation
The flow for the working gas that valve regulated is passed through, so as to realize the regulation to air pressure in gas box.Meanwhile, may be used also
The position of gas box is controlled by controlling the displacement platform in the first vacuum chamber so that condenser lens 4 focuses on obtained focus
Positioned at the centre of gas box 9.Gas box 9 can select copper pipe or nickel tube etc..
As shown in Fig. 2 as a preferred mode, apparatus of the present invention also include the second vacuum chamber 6, slit 11, flat Jiao
Field grating 12, MCP fluorescent plates 13, CCD camera 14.Slit 11, flat focal field grating 12 are located inside the second vacuum chamber 6, high order
Harmonic wave focuses on same plane through slit 11 by flat focal field grating 12, then is carried out by MCP fluorescent plates 13, CCD camera 14
Detection to the higher hamonic wave signal, observes red shift or the blue-shifted phenomenon of order harmonic frequencies.
Wherein, the second vacuum chamber 6 is also connected with the second molecular pump 8, and the second molecular pump 8 is used to carry out the second vacuum chamber 6
Vacuumize, keep it in vacuum state.Vacuum state is conducive to avoiding laser beam and other gas phase interactions in air
With so that it can more clearly observe red shift or the blue-shifted phenomenon of order harmonic frequencies.
The course of work of apparatus of the present invention is：
S1, startup femtosecond laser driving light source, regulation diaphragm, condenser lens make it that laser beam is located at slit center；
S2, gas box are under vacuum state, and working gas is filled with to gas box, and regulation half-wave plate angle to swash
Light light beam reaches into energy needed for silk, and regulation gas cassette positions are located in condenser lens focal position, gas box
Working gas produces higher hamonic wave with laser beam interaction；
S3, rotation half-wave plate angle, the incident laser pulse energy or regulation gas box of regulation femtosecond laser driving light source
The air pressure of working gas is passed through in son so that red shift or blue shift occur for the frequency of the higher hamonic wave, so as to realize extreme ultraviolet
The continuous tuning of source output wavelength.
In above-mentioned steps S2, specific implementation is：First check for gas box whether gas leakage, it is air tight in gas box
In the state of, the displacement platform where regulation gas box makes laser beam in gas box center.Adjust laser energy regulation
Device (if half-wave plate is combined with polarizer, then adjusts half-wave plate rotational angle) so that laser energy is reached into needed for silk
Energy.Find lens focus position (silk position) so that gas box is at lens focus.Then with protection screen (gear
Tabula rasa) laser beam is blocked, two vacuum chambers are sealed, starts two molecular pumps and vacuum chamber is evacuated, and maintain high vacuum
State.Light barrier is taken down, starts femtosecond laser driving light source, wavelength is squeezed into for 800nm femtosecond laser after lens focus
Vacuum chamber；Working gas now is filled with to gas box, femtosecond laser interacts with working gas in gas box, and
Focus (in the gas box) place of lens produces higher hamonic wave, that is, produces EUV light source into silk.
The inventive method is interacted using strong femtosecond pulse one-wavelength laser with gas, produces higher hamonic wave, then pass through
Pulsed laser energy and air pressure are adjusted, its phase-matching condition is changed, causes higher hamonic wave to occur frequency displacement (red shift or indigo plant
Move), that is, realize output wavelength tunable.Wavelength and pulsed laser energy, air pressure that the present invention is radiated according to each order harmonic
Value there is certain functional relation, by precise control pulsed laser energy and the variable quantity of air pressure, can be achieved extreme ultraviolet
The precision tuning of light source output wavelength, can be also tuned by phase-matching technique to the harmonic wave of specific order.
The present invention program is described further below in conjunction with specific embodiment.
In an embodiment of the invention, femtosecond laser driving light source uses energy emission center wavelength for 800nm, pulsewidth
35fs, energy 10mJ, the strong femtosecond laser driving light source of repetition rate 1KHz pulse；Gas box is using a diameter of 3mm's
Copper pipe, the working gas being passed through uses N2；Flat focal field swept grating angle takes 87 °, average grating constant d=1/1200mm；MCP
(microchannel plate) is respectively 1.3KV, 3.5KV with institute's making alive on fluorescent plate.
Fig. 3 takes 29.4torr for air pressure, when incident laser power takes 1mJ, 2mJ, 3mJ respectively, each order harmonic intensity with
And the change of centre wavelength.From the figure 3, it may be seen that for same pulsed laser energy, harmonic order is higher, its harmonic wave intensity is smaller；
To the harmonic wave of specific a certain order, with the increase of pulsed laser energy, the direction movement that harmonic wave increases to wavelength is (i.e. red
Move phenomenon).
Fig. 4 be when air pressure takes 29.4torr, with the change of pulsed laser energy, the 13rd~27 subharmonic centre wavelength
Change.It is seen that with the increase of pulsed laser energy, harmonic wave increase (i.e. Red Shift Phenomena).Each order harmonic
There is certain linear relationship (and after fitting, slope size very close to) in the wavelength of radiation and pulsed laser energy, therefore accurate control
The size of pulsed laser energy processed, can be achieved the precision tuning of EUV light source output wavelength.
Fig. 5 is can measure 3mJ when incident laser pulse, when air pressure takes 7.9torr, 30.5torr, 49.0torr, each order
The change of harmonic wave intensity and centre wavelength.It is seen that to same atmospheric pressure value, harmonic order is higher, its harmonic wave intensity is got over
It is small；To the harmonic wave of specific a certain order, with the increase of air pressure, (i.e. blue shift is existing to the direction movement that wavelength reduces for harmonic wave
As).
Fig. 6 be when incident laser pulse can measure 3mJ, with the change of air pressure, the 13rd~27 subharmonic centre wavelength
Change.It is seen that with the increase of air pressure, harmonic wave reduces (i.e. blue-shifted phenomenon).The ripple of each order harmonic radiation
Long have certain linear relationship (and after fitting, slope size very close to) with air pressure, therefore the size of precise control air pressure, can be real
The precision tuning of existing EUV light source output wavelength.
Table 1 be the 13rd~27 subharmonic different pulsed laser energies (1mJ~3.35mJ) or air pressure (2.6torr~
Wavelength tuning range and energy broadness of tuning under 62.9torr).As can be seen from the table, to the harmonic wave of specific a certain order, change
Become pulsed laser energy or air pressure, wavelength tuning range caused by Einstein shift, blue shift has certain intersection, wavelength tuning
0.4~1.0nm of width or so；The total wavelength tuning region of harmonic wave is 27~62nm；Pulsed laser energy is adjusted, specific order
Harmonic energy broadness of tuning is up to 0.9ev.
Table 1
Table 2 is the 13rd~27 subharmonic wavelength and incident laser pulse energy, the linear relationship of air pressure.Can from table
Go out, the size of precise control incident laser pulse energy and air pressure, the precision tuning of EUV light source output wavelength can be achieved.The
3 row, the 6th column data are represented at air pressure 22.9torr (pulsed laser energy is 0), in pulsed laser energy 3mJ (air pressure respectively
For 0) when, the wavelength value of the 13rd~27 subharmonic.
Table 2
As it will be easily appreciated by one skilled in the art that the foregoing is only presently preferred embodiments of the present invention, it is not used to
The limitation present invention, any modification, equivalent and the improvement made within the spirit and principles of the invention etc., it all should include
Within protection scope of the present invention.
Claims (7)
1. a kind of method for producing broad band continuously-tuning coherent extreme ultraviolet light light source, it is characterised in that methods described is：Produce
Femtosecond laser beam, by laser beam focusing at working gas, the laser beam and the work gas under vacuum conditions
Body phase interaction produces higher hamonic wave；The projectile energy of the laser beam or the air pressure of the working gas are adjusted, to change
The phase-matching condition of higher hamonic wave so that red shift or blue shift occur for order harmonic frequencies, so as to realize each rank of EUV light source
The continuous tuning of subharmonic radiation wavelength；Specifically：
Keep working gas air pressure constant, increase pulsed laser energy so that red shift occurs for order harmonic frequencies；
Keep pulsed laser energy constant, increase working gas air pressure so that blue shift occurs for order harmonic frequencies.
2. the method for broad band continuously-tuning coherent extreme ultraviolet light light source is produced as claimed in claim 1, it is characterised in that institute
It is one kind in inert gas or molecular gas to state working gas.
3. a kind of realize such as the device of any one of claim 1-2 methods described, it is characterised in that described device includes：Femtosecond
Laser driven light source, half-wave plate and polarizer combination, diaphragm, condenser lens, the first vacuum chamber, gas box, the gas box
Son is located at the condenser lens focal point of the first vacuum chamber；
The femtosecond laser driving light source is used to produce femtosecond laser, and half-wave plate and polarizer group are shared in the femtosecond laser
Light beam carries out energy adjustment, and diaphragm is used to adjust beam diameter and the laser beam after regulation is impinged perpendicularly on into condenser lens
On, then focused on by condenser lens, laser beam interacts in condenser lens focal point with the working gas in gas box and produced
Raw higher hamonic wave.
4. the device of broad band continuously-tuning coherent extreme ultraviolet light light source is produced as claimed in claim 3, it is characterised in that institute
The pressure regulating valve that device also includes being arranged on gas box breather line is stated, for adjusting the work gas being passed through in gas box
The pressure of body.
5. the device of broad band continuously-tuning coherent extreme ultraviolet light light source is produced as claimed in claim 3, it is characterised in that institute
Stating device also includes the second vacuum chamber, slit, flat focal field grating, MCP fluorescent plates, CCD camera, the slit, flat focal field light
Grid are located at the second vacuum chamber；
The higher hamonic wave focuses on same plane through slit by flat focal field grating, and the MCP fluorescent plates, CCD camera are used
Focus on conplane higher hamonic wave signal in described and detect.
6. the device of broad band continuously-tuning coherent extreme ultraviolet light light source is produced as claimed in claim 3, it is characterised in that institute
It is one kind in inert gas or molecular gas to state the working gas in gas box.
7. the device of broad band continuously-tuning coherent extreme ultraviolet light light source is produced as claimed in claim 3, it is characterised in that institute
Condenser lens is stated for planoconvex spotlight, spherical lens or parabolic lens.
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| CN109632727A (en) * | 2018-12-26 | 2019-04-16 | 厦门大学 | One kind being based on the adjustable VUV single-photon ionization device of gas phase laser plasma |
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| CN106908950B (en) * | 2017-03-16 | 2023-02-14 | 中国科学院西安光学精密机械研究所 | Electromagnetic radiation generating device and using method thereof |
| CN108512604A (en) * | 2018-03-21 | 2018-09-07 | 华中科技大学 | A kind of frequency regulation and control method and device of optical signal |
| CN109659798A (en) * | 2019-01-08 | 2019-04-19 | 南京大学 | A kind of device generating femtosecond high throughput and Superhigh repetition rate extreme ultraviolet ray |
| CN114221203B (en) * | 2021-09-30 | 2023-11-03 | 南京大学 | Extreme ultraviolet pulse light source device capable of outputting long-time stability |
| CN114545704B (en) * | 2022-02-23 | 2023-05-26 | 吉林大学 | High-pressure differential beam source air chamber and method for generating high-energy extreme ultraviolet photons by utilizing same |
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