CN104615304A - 一种高导电率低反射率金属网格的制作方法及其制品 - Google Patents
一种高导电率低反射率金属网格的制作方法及其制品 Download PDFInfo
- Publication number
- CN104615304A CN104615304A CN201510062665.XA CN201510062665A CN104615304A CN 104615304 A CN104615304 A CN 104615304A CN 201510062665 A CN201510062665 A CN 201510062665A CN 104615304 A CN104615304 A CN 104615304A
- Authority
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- China
- Prior art keywords
- photoresist layer
- metal grill
- photoresist
- metal
- reflectivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 80
- 239000002184 metal Substances 0.000 title claims abstract description 80
- 238000002310 reflectometry Methods 0.000 title claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 title abstract description 8
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 79
- 238000000034 method Methods 0.000 claims abstract description 30
- 238000005530 etching Methods 0.000 claims abstract description 23
- 239000000463 material Substances 0.000 claims abstract description 14
- 238000001020 plasma etching Methods 0.000 claims abstract description 9
- 239000011248 coating agent Substances 0.000 claims abstract description 7
- 238000000576 coating method Methods 0.000 claims abstract description 7
- 238000007747 plating Methods 0.000 claims abstract description 4
- 230000005611 electricity Effects 0.000 claims description 7
- 239000002002 slurry Substances 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 4
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 4
- 239000004417 polycarbonate Substances 0.000 claims description 4
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 4
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000009826 distribution Methods 0.000 claims description 3
- 239000012994 photoredox catalyst Substances 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 13
- 238000005516 engineering process Methods 0.000 abstract description 9
- 239000004332 silver Substances 0.000 abstract description 7
- 229910052709 silver Inorganic materials 0.000 abstract description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 4
- 239000010949 copper Substances 0.000 abstract description 4
- 229910052802 copper Inorganic materials 0.000 abstract description 4
- 239000007769 metal material Substances 0.000 abstract description 4
- 239000004411 aluminium Substances 0.000 abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 abstract description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 3
- 238000004140 cleaning Methods 0.000 abstract description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 3
- 239000010931 gold Substances 0.000 abstract description 3
- 229910052737 gold Inorganic materials 0.000 abstract description 3
- 238000004049 embossing Methods 0.000 abstract 1
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 6
- 239000002245 particle Substances 0.000 description 5
- 239000002985 plastic film Substances 0.000 description 5
- 229920006255 plastic film Polymers 0.000 description 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- ADZWSOLPGZMUMY-UHFFFAOYSA-M silver bromide Chemical compound [Ag]Br ADZWSOLPGZMUMY-UHFFFAOYSA-M 0.000 description 3
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- 230000000994 depressogenic effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 239000003574 free electron Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- -1 meanwhile Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- BPYKTIZUTYGOLE-IFADSCNNSA-N Bilirubin Chemical compound N1C(=O)C(C)=C(C=C)\C1=C\C1=C(C)C(CCC(O)=O)=C(CC2=C(C(C)=C(\C=C/3C(=C(C=C)C(=O)N\3)C)N2)CCC(O)=O)N1 BPYKTIZUTYGOLE-IFADSCNNSA-N 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- AEMOLEFTQBMNLQ-AQKNRBDQSA-N D-glucopyranuronic acid Chemical compound OC1O[C@H](C(O)=O)[C@@H](O)[C@H](O)[C@H]1O AEMOLEFTQBMNLQ-AQKNRBDQSA-N 0.000 description 1
- IAJILQKETJEXLJ-UHFFFAOYSA-N Galacturonsaeure Natural products O=CC(O)C(O)C(O)C(O)C(O)=O IAJILQKETJEXLJ-UHFFFAOYSA-N 0.000 description 1
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 1
- 238000003854 Surface Print Methods 0.000 description 1
- 229940006460 bromide ion Drugs 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 229940097043 glucuronic acid Drugs 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Human Computer Interaction (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Laminated Bodies (AREA)
- Manufacturing Of Electric Cables (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510062665.XA CN104615304B (zh) | 2015-02-06 | 2015-02-06 | 一种高导电率低反射率金属网格的制作方法及其制品 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510062665.XA CN104615304B (zh) | 2015-02-06 | 2015-02-06 | 一种高导电率低反射率金属网格的制作方法及其制品 |
Publications (2)
Publication Number | Publication Date |
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CN104615304A true CN104615304A (zh) | 2015-05-13 |
CN104615304B CN104615304B (zh) | 2018-01-26 |
Family
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CN201510062665.XA Expired - Fee Related CN104615304B (zh) | 2015-02-06 | 2015-02-06 | 一种高导电率低反射率金属网格的制作方法及其制品 |
Country Status (1)
Country | Link |
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CN (1) | CN104615304B (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104951136A (zh) * | 2015-07-06 | 2015-09-30 | 京东方科技集团股份有限公司 | 触控基板及其制作方法以及显示装置 |
CN107422908A (zh) * | 2017-06-07 | 2017-12-01 | 江苏日久光电股份有限公司 | 金属网格片及其制作方法 |
CN110502148A (zh) * | 2019-08-16 | 2019-11-26 | 芜湖伦丰电子触摸屏产业技术研究院有限公司 | 一种触摸屏制备方法 |
CN111370854A (zh) * | 2020-03-03 | 2020-07-03 | 安徽精卓光显技术有限责任公司 | 天线及其制作方法、电子设备 |
CN111949153A (zh) * | 2019-11-29 | 2020-11-17 | 合肥微晶材料科技有限公司 | 一种可解决蚀刻痕的纳米银线触控电极及其制作方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103456390A (zh) * | 2013-02-05 | 2013-12-18 | 南昌欧菲光科技有限公司 | 导电膜及其制造方法 |
CN103913947A (zh) * | 2014-04-24 | 2014-07-09 | 上海和辉光电有限公司 | 可简化数组制程工序的微影成形方法 |
JP2014150118A (ja) * | 2013-01-31 | 2014-08-21 | Dainippon Printing Co Ltd | 電極フィルム、その製造方法および画像表示装置 |
TW201501920A (zh) * | 2013-03-26 | 2015-01-16 | Kaneka Corp | 導電性薄膜基板、透明導電性薄膜及其製造方法以及觸控面板 |
-
2015
- 2015-02-06 CN CN201510062665.XA patent/CN104615304B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014150118A (ja) * | 2013-01-31 | 2014-08-21 | Dainippon Printing Co Ltd | 電極フィルム、その製造方法および画像表示装置 |
CN103456390A (zh) * | 2013-02-05 | 2013-12-18 | 南昌欧菲光科技有限公司 | 导电膜及其制造方法 |
TW201501920A (zh) * | 2013-03-26 | 2015-01-16 | Kaneka Corp | 導電性薄膜基板、透明導電性薄膜及其製造方法以及觸控面板 |
CN103913947A (zh) * | 2014-04-24 | 2014-07-09 | 上海和辉光电有限公司 | 可简化数组制程工序的微影成形方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104951136A (zh) * | 2015-07-06 | 2015-09-30 | 京东方科技集团股份有限公司 | 触控基板及其制作方法以及显示装置 |
CN104951136B (zh) * | 2015-07-06 | 2018-01-19 | 京东方科技集团股份有限公司 | 触控基板及其制作方法以及显示装置 |
CN107422908A (zh) * | 2017-06-07 | 2017-12-01 | 江苏日久光电股份有限公司 | 金属网格片及其制作方法 |
CN110502148A (zh) * | 2019-08-16 | 2019-11-26 | 芜湖伦丰电子触摸屏产业技术研究院有限公司 | 一种触摸屏制备方法 |
CN111949153A (zh) * | 2019-11-29 | 2020-11-17 | 合肥微晶材料科技有限公司 | 一种可解决蚀刻痕的纳米银线触控电极及其制作方法 |
CN111370854A (zh) * | 2020-03-03 | 2020-07-03 | 安徽精卓光显技术有限责任公司 | 天线及其制作方法、电子设备 |
CN111370854B (zh) * | 2020-03-03 | 2023-10-20 | 安徽精卓光显技术有限责任公司 | 天线及其制作方法、电子设备 |
Also Published As
Publication number | Publication date |
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CN104615304B (zh) | 2018-01-26 |
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Application publication date: 20150513 Assignee: FUJIAN NORCY NEW MATERIAL TECHNOLOGY Co.,Ltd. Assignor: FUJIAN NORCY SCIENCE PARK DEVELOPMENT CO.,LTD. Contract record no.: X2019980000595 Denomination of invention: Manufacturing method and product of high-conductivity and low-reflectivity metal mesh Granted publication date: 20180126 License type: Common License Record date: 20191113 |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180126 |
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