CN104589194B - A kind of finishing method of potassium dideuterium-hydrogen phosphate crystal - Google Patents
A kind of finishing method of potassium dideuterium-hydrogen phosphate crystal Download PDFInfo
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- CN104589194B CN104589194B CN201510043754.XA CN201510043754A CN104589194B CN 104589194 B CN104589194 B CN 104589194B CN 201510043754 A CN201510043754 A CN 201510043754A CN 104589194 B CN104589194 B CN 104589194B
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- hydrogen phosphate
- phosphate crystal
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2220/00—Type of materials or objects being removed
- B08B2220/01—Adhesive materials
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The present invention relates to a kind of finishing method of potassium dideuterium-hydrogen phosphate crystal, including：(1) polishing disk is made, wherein, by the mixture heating of pure optics pitch and beeswax or paraffin, the purity range of pure optics pitch is 95% 100%, and pure optics pitch is 1 than scope with the weight of beeswax：1‑1：3, pure optics pitch is 1 than scope with the weight of paraffin：3‑1：5；(2) polishing fluid is prepared, diamond dust is well mixed with organic solvent, diamond dust is 1 than scope with the quality of organic solvent:200—1:300, obtain final product polishing fluid；(3) polish.Potassium dideuterium-hydrogen phosphate crystal after polishing, the depth of parallelism are better than 10 seconds, and flatness is better than λ/10@633nm, wavefront distortion is better than λ/8@633nm, surface quality is better than 20/10, the use of temperature range is 40～+50 DEG C, has reached the use requirement of High-performance lasers system.
Description
Technical field
The present invention relates to the finishing method of crystal, in more detail, it is related to that matter is soft, matter is crisp, extremely deliquescent polishing crystal
Method.
Background technology
Potassium dideuterium-hydrogen phosphate crystal (KD2PO4) abbreviation DKDP crystal or KD*P crystal, it is a kind of electrooptical material of function admirable
With non-linear laser material, its electro-optic coefficient is 2 times of potassium dihydrogen phosphate crystal.In recent years, it is widely used in electric light tune
System, electro-optical Q-switch, high-speed photography, electro-optical deflection, laser ranging, high power laser light frequency conversion and laser inertial confinement core gather
Become in igniting field, and its range of application further expands.At present, the growing technology of potassium dideuterium-hydrogen phosphate crystal compared with into
It is ripe, but, due to polishing difficulty, in the side such as High-performance lasers equipment, laser weapons distance-measuring equipment, laser fusion igniter
The application in face is restricted.Potassium dideuterium-hydrogen phosphate crystal quality is crisp soft, easily deliquescence, cracking.Traditional finishing method is：(1)
By frosted qualified potassium dideuterium-hydrogen phosphate crystal on silk disk, the alumina polishing solution polishing diluted with absolute ethyl alcohol, silk disk
It is static not rotate, only move to complete polishing by potassium dideuterium-hydrogen phosphate crystal.(2) the anhydrous second of potassium dideuterium-hydrogen phosphate crystal of light has been thrown
Alcohol, ether cleaning or not.(3) potassium dideuterium-hydrogen phosphate crystal device plated film.Potassium dideuterium-hydrogen phosphate crystal device not directly should by plated film
With, or porous sio2 anti-reflection film is plated using chemical method.The potassium dideuterium-hydrogen phosphate crystal polished using conventional method, because of polishing disk carrier
It is silk, and polishing disk is not rotated, the plane for not reaching high optical grade is required.Nothing is used after potassium dideuterium-hydrogen phosphate crystal polishing completion
Water-ethanol, ether cleaning, polished surface are easy to haze, it is impossible to apply in high power laser system.Potassium dideuterium-hydrogen phosphate crystal
Device not plated film, can cause that laser system output energy is low and potassium dideuterium-hydrogen phosphate crystal device service life shortens.Chemical method
Plating porous sio2 anti-reflection film, plating conditions are difficult to control to, and between batch, film quality is unstable, is only located at conceptual phase.21
Beginning of the century has research to claim to polish KDP using ultraprecise diamond tool, and only KDP is polished, but polished surface does not reach λ/10
Requirement, polishing cost is also high.
The content of the invention
For the deficiencies in the prior art, the invention discloses a kind of finishing method of potassium dideuterium-hydrogen phosphate crystal；
Finishing method of the present invention is a kind of potassium dideuterium-hydrogen phosphate crystal of high, the reproducible high optical quality of reliability
Finishing method.
Technical scheme is as follows：
A kind of finishing method of potassium dideuterium-hydrogen phosphate crystal, concrete steps include：
(1) make polishing disk
A, the mixture of pure optics pitch and beeswax or paraffin is heated, pure optics pitch and beeswax or the mixture of paraffin
Stir when dissolving completely, during the mixture surface boiling of pure optics pitch and beeswax or paraffin, stop heating；Wherein, pure light
The purity range for learning pitch is 95%-100%, and pure optics pitch is 1 than scope with the weight of beeswax：1-1：3, pure optics pitch
Weight with paraffin is 1 than scope：3-1：5；
The mixture of b, the pure optics pitch that step (a) is obtained and beeswax or paraffin is poured in square position, is naturally cooled to
Room temperature；
C, the square position of the mixture for being loaded with pure optics pitch and beeswax or paraffin for obtaining step (b) are in 60-80 DEG C of bar
10-30min is preheated under part；
D, the mixture of the pure optics pitch that obtains and beeswax after step (c) preheating is flattened on square position using flat board,
Room temperature is cooled to, flat board is removed, is obtained final product polishing disk；
(2) prepare polishing fluid
Diamond dust is well mixed with organic solvent, diamond dust is 1 than scope with the quality of organic solvent:200—1:
300；Obtain final product polishing fluid；
(3) polish
Take the polishing fluid 2-5 drops that step (2) is obtained, drop on the polishing disk that step (1) is obtained, temperature be 25-28 DEG C,
Under the conditions of humidity≤40%, rotating speed is that the polishing disk of 1-40 turn/min is polished to potassium dideuterium-hydrogen phosphate crystal, in polishing process
Middle inspection potassium dideuterium-hydrogen phosphate crystal polished surface parallel error, flatness, surface quality, put down potassium dideuterium-hydrogen phosphate crystal polished surface
Row is poor<10 ", potassium dideuterium-hydrogen phosphate crystal polished surface flatness is better than λ/10, potassium dideuterium-hydrogen phosphate crystal polished surface surface quality
Better than 20/10.
According to currently preferred, the finishing method of the potassium dideuterium-hydrogen phosphate crystal, concrete steps also include：
(4) potassium dideuterium-hydrogen phosphate crystal surface contaminants, plated film are removed
The potassium dideuterium-hydrogen phosphate crystal surface contaminants obtained after removal step (3) polishing, plated film are obtained final product.
Before potassium dideuterium-hydrogen phosphate crystal plated film, the transmitance scope of potassium dideuterium-hydrogen phosphate crystal is 90%-91%, to phosphoric acid
After two deuterium potassium crystal coatings, the transmitance scope of potassium dideuterium-hydrogen phosphate crystal is 98%-99.5%, increased potassium dideuterium phosphate brilliant
Body transmitance, makes potassium dideuterium-hydrogen phosphate crystal not by deliquescence.
According to currently preferred, in step a, mixture of the pure optics pitch with beeswax or paraffin is put into into aluminum pot, profit
It is 1000W heating by electric cooker with power；In step b, pure optics pitch will be loaded with beeswax or the square position level of the mixture of paraffin
Place in super dead room, naturally cool to room temperature；It is in step c, flat with the mixture of beeswax or paraffin by pure optics pitch is loaded with
Disk is preheating 10-30min in water under the conditions of 60-80 DEG C.
According to currently preferred, in step (1), the square position be around have newspaper to surround the cast iron square position of cylinder；Step
In rapid d, the flat board is smooth Circular glass plate.
According to currently preferred, in step (2), during the organic solvent is absolute ethyl alcohol, anhydrous propyl alcohol or ethylene glycol
Any one；The specification of the diamond dust is W1～W0.125, more preferably W0.25.
According to currently preferred, in step (2), small-scale ultrasonic cleaning after diamond dust is mixed with organic solvent, is put into
Ultrasonic vibration 10-20 minutes in machine.
According to currently preferred, in step (3), polishing mode is to rotate backward or reciprocating sliding campaign；Using optics
Comparison goniometer tests potassium dideuterium-hydrogen phosphate crystal polished surface parallel error, brilliant using laser plane interferometer test potassium dideuterium phosphate
Body polished surface flatness, estimates potassium dideuterium-hydrogen phosphate crystal polished surface quality using 10 times of magnifying glasses.
According to currently preferred, frosted carried out to potassium dideuterium-hydrogen phosphate crystal before step (1) the making polishing disk, is had
Body step includes：Potassium dideuterium-hydrogen phosphate crystal is bonded in the center of KDP lassos using paraffin or paraffin, rosin epoxy glue,
Frosted is carried out on sand paper.
According to currently preferred, in step (4), potassium dideuterium-hydrogen phosphate crystal surface contaminants are removed, concrete steps include：
E, the infrared lamp using power for 250W are heated to the potassium dideuterium-hydrogen phosphate crystal obtained through step (3), until stone
Wax or paraffin, rosin mix peptized, and potassium dideuterium-hydrogen phosphate crystal is cooled to room temperature；
F, potassium dideuterium-hydrogen phosphate crystal is put into into culture dish, adds AR brilliant to potassium dideuterium phosphate is flooded to culture dish
Body, potassium dideuterium-hydrogen phosphate crystal is soaked 1 hour, with senior absorbent cotton or dustless soft cloth by the dirt on potassium dideuterium-hydrogen phosphate crystal surface
Wipe；
G, second immersion is carried out using AR to potassium dideuterium-hydrogen phosphate crystal, soak time is 30 minutes, with height
Level absorbent cotton or dustless soft cloth dip analysis pure ethyl acetate reagent and repeatedly wipe potassium dideuterium-hydrogen phosphate crystal surface, until di(2-ethylhexyl)phosphate
Two burnishing surface of deuterium potassium crystal is without any dirt；The AR is analysis pure ethyl acetate reagent, analyzes pure propyl acetate
Any one of reagent, the pure butyl acetate reagent of analysis.
According to currently preferred, in step (4), to potassium dideuterium-hydrogen phosphate crystal plated film, concrete steps include：
The potassium dideuterium-hydrogen phosphate crystal for removing surface contaminants is put into into coating machine, starts coating machine, plating run, adjustment are set
Temperature carries out vacuum evaporation to 80-100 DEG C, and plated membrane system is：AR/AR 1064 ± 10nm of@, it is desirable to R ＜ 0.5%, wherein, AR
For anti-reflection film, R is reflectivity.
Beneficial effects of the present invention are：
Potassium dideuterium-hydrogen phosphate crystal after polishing, the depth of parallelism are better than 10 seconds, and flatness is better than λ/10@633nm, and wavefront distortion is excellent
In λ/8@633nm, surface quality is better than 20/10 (MIL-PRF-13830B), the use of temperature range is -40～+50 DEG C, reaches completely
The use requirement of High-performance lasers system is arrived.
Specific embodiment
The present invention is further qualified with reference to specific embodiment, but not limited to this.
Embodiment 1
A kind of finishing method of potassium dideuterium-hydrogen phosphate crystal, concrete steps include：
Frosted is carried out to potassium dideuterium-hydrogen phosphate crystal, concrete steps include：Potassium dideuterium-hydrogen phosphate crystal is bonded in using paraffin
The center of KDP lassos, carries out frosted on sand paper；
(1) make polishing disk
A, by the mixture of pure optics pitch and beeswax, (weight ratio is 1：1) aluminum pot is put into, is 1000W electric furnaces using power
Heating, the mixture of pure optics pitch and beeswax stir when dissolving completely, the mixture surface of pure optics pitch and beeswax
Stop heating during boiling, wherein, the purity of pure optics pitch is 95%；
The mixture of b, the pure optics pitch that step (a) is obtained and beeswax has newspaper to surround the cast iron of cylinder around pouring into
In square position, in the super dead room of horizontal positioned, room temperature is naturally cooled to；
C, the square position of the mixture for being loaded with pure optics pitch and beeswax for obtaining step (b) are preheated under the conditions of 60 DEG C
30min；
D, the mixture of the pure optics pitch that obtains and beeswax after step (c) preheating is flattened on square position using flat board,
Room temperature is cooled to, smooth Circular glass plate is removed, is obtained final product polishing disk；
(2) prepare polishing fluid
It is that (mass ratio is 1 to W0.25 diamond dusts with organic solvent by specification:200) it is well mixed, the organic solvent is nothing
Water-ethanol, is put into ultrasonic vibration 10 minutes in small-scale ultrasonic cleaning machine, obtains final product polishing after diamond dust is mixed with organic solvent
Liquid；
(3) polish
Take the polishing fluid 2 that step (2) obtains and drip (0.1ml), drop on the polishing disk that step (1) is obtained, be 25 in temperature
DEG C, under the conditions of humidity 40%, rotating speed is polished to potassium dideuterium-hydrogen phosphate crystal for the polishing disk of 20 turns/min, and polishing mode is anti-
To rotation, potassium dideuterium-hydrogen phosphate crystal polished surface parallel error, flatness, surface quality are checked in polishing process, using optics
Comparison goniometer tests potassium dideuterium-hydrogen phosphate crystal polished surface parallel error, brilliant using laser plane interferometer test potassium dideuterium phosphate
Body polished surface flatness, estimates potassium dideuterium-hydrogen phosphate crystal polished surface quality using 10 times of magnifying glasses, makes potassium dideuterium phosphate brilliant
Body polished surface parallel error<10 ", potassium dideuterium-hydrogen phosphate crystal polished surface flatness is better than λ/10, potassium dideuterium-hydrogen phosphate crystal polishing
Surface quality is better than 20/10；
(4) potassium dideuterium-hydrogen phosphate crystal surface contaminants, plated film are removed
The potassium dideuterium-hydrogen phosphate crystal surface contaminants obtained after removal step (3) polishing, concrete steps include：
E, the infrared lamp using power for 250W are heated to the potassium dideuterium-hydrogen phosphate crystal obtained through step (3), until stone
Wax dissolves, and potassium dideuterium-hydrogen phosphate crystal is cooled to room temperature；
F, potassium dideuterium-hydrogen phosphate crystal is put into into culture dish, adds AR brilliant to potassium dideuterium phosphate is flooded to culture dish
Body, potassium dideuterium-hydrogen phosphate crystal is soaked 1 hour, is wiped the dirt on potassium dideuterium-hydrogen phosphate crystal surface with senior absorbent cotton；
G, second immersion is carried out using AR to potassium dideuterium-hydrogen phosphate crystal, soak time is 30 minutes, with height
Level absorbent cotton dips analysis pure ethyl acetate reagent and repeatedly wipes potassium dideuterium-hydrogen phosphate crystal surface, until potassium dideuterium-hydrogen phosphate crystal two
Burnishing surface is without any dirt；The AR is analysis pure ethyl acetate reagent；
To potassium dideuterium-hydrogen phosphate crystal plated film, concrete steps include：
The potassium dideuterium-hydrogen phosphate crystal for removing surface contaminants is put into into coating machine, starts coating machine, plating run, adjustment are set
Temperature carries out vacuum evaporation to 80 DEG C, and plated membrane system is：AR/AR 1064 ± 10nm of@, it is desirable to R ＜ 0.5%, wherein, AR is increasing
Permeable membrane, R are reflectivity.
Before potassium dideuterium-hydrogen phosphate crystal plated film, the transmitance scope of potassium dideuterium-hydrogen phosphate crystal is 90%-91%, to phosphoric acid
After two deuterium potassium crystal coatings, the transmitance scope of potassium dideuterium-hydrogen phosphate crystal is 98%-99.5%, increased potassium dideuterium phosphate brilliant
Body transmitance, makes potassium dideuterium-hydrogen phosphate crystal not by deliquescence.
Embodiment 2
A kind of finishing method of potassium dideuterium-hydrogen phosphate crystal, concrete steps include：
Frosted is carried out to potassium dideuterium-hydrogen phosphate crystal, concrete steps include：Using paraffin, rosin epoxy glue by potassium dideuterium phosphate
Crystal is bonded in the center of KDP lassos, and frosted is carried out on sand paper；
(1) make polishing disk
A, by the mixture of pure optics pitch and paraffin, (weight ratio is 1：3) aluminum pot is put into, is 1000W electric furnaces using power
Heating, the mixture of pure optics pitch and paraffin stir when dissolving completely, the mixture surface of pure optics pitch and paraffin
Stop heating during boiling, wherein, the purity of pure optics pitch is 100%；
The mixture of b, the pure optics pitch that step (a) is obtained and paraffin has newspaper to surround the cast iron of cylinder around pouring into
In square position, in the super dead room of horizontal positioned, room temperature is naturally cooled to；
C, the square position of the mixture for being loaded with pure optics pitch and paraffin for obtaining step (b) are preheated under the conditions of 60 DEG C
30min；
D, the mixture of the pure optics pitch that obtains and beeswax after step (c) preheating is flattened on square position using flat board,
Room temperature is cooled to, smooth Circular glass plate is removed, is obtained final product polishing disk；
(2) prepare polishing fluid
It is that (mass ratio is 1 to W0.25 diamond dusts with organic solvent by specification:200) it is well mixed, the organic solvent is nothing
Water-ethanol, is put into ultrasonic vibration 10 minutes in small-scale ultrasonic cleaning machine, obtains final product polishing after diamond dust is mixed with organic solvent
Liquid；
(3) polish
Take the polishing fluid 2 that step (2) obtains and drip (0.1ml), drop on the polishing disk that step (1) is obtained, be 25 in temperature
DEG C, under the conditions of humidity 40%, rotating speed is polished to potassium dideuterium-hydrogen phosphate crystal for the polishing disk of 20 turns/min, and polishing mode is anti-
To rotation, potassium dideuterium-hydrogen phosphate crystal polished surface parallel error, flatness, surface quality are checked in polishing process, using optics
Comparison goniometer tests potassium dideuterium-hydrogen phosphate crystal polished surface parallel error, brilliant using laser plane interferometer test potassium dideuterium phosphate
Body polished surface flatness, estimates potassium dideuterium-hydrogen phosphate crystal polished surface quality using 10 times of magnifying glasses, makes potassium dideuterium phosphate brilliant
Body polished surface parallel error<10 ", potassium dideuterium-hydrogen phosphate crystal polished surface flatness is better than λ/10, potassium dideuterium-hydrogen phosphate crystal polishing
Surface quality is better than 20/10；
(4) potassium dideuterium-hydrogen phosphate crystal surface contaminants, plated film are removed
The potassium dideuterium-hydrogen phosphate crystal surface contaminants obtained after removal step (3) polishing, concrete steps include：
E, the infrared lamp using power for 250W are heated to the potassium dideuterium-hydrogen phosphate crystal obtained through step (3), until stone
Wax, rosin mixing are peptized, and potassium dideuterium-hydrogen phosphate crystal is cooled to room temperature；
F, potassium dideuterium-hydrogen phosphate crystal is put into into culture dish, adds AR brilliant to potassium dideuterium phosphate is flooded to culture dish
Body, potassium dideuterium-hydrogen phosphate crystal is soaked 1 hour, is wiped the dirt on potassium dideuterium-hydrogen phosphate crystal surface with senior absorbent cotton；
G, second immersion is carried out using AR to potassium dideuterium-hydrogen phosphate crystal, soak time is 30 minutes, with height
Level absorbent cotton dips analysis pure ethyl acetate reagent and repeatedly wipes potassium dideuterium-hydrogen phosphate crystal surface, until potassium dideuterium-hydrogen phosphate crystal two
Burnishing surface is without any dirt；The AR is analysis pure ethyl acetate reagent；
To potassium dideuterium-hydrogen phosphate crystal plated film, concrete steps include：
The potassium dideuterium-hydrogen phosphate crystal for removing surface contaminants is put into into coating machine, starts coating machine, plating run, adjustment are set
Temperature carries out vacuum evaporation to 80 DEG C, and plated membrane system is：AR/AR 1064 ± 10nm of@, it is desirable to R ＜ 0.5%, wherein, AR is increasing
Permeable membrane, R are reflectivity.
Before potassium dideuterium-hydrogen phosphate crystal plated film, the transmitance scope of potassium dideuterium-hydrogen phosphate crystal is 90%-91%, to phosphoric acid
After two deuterium potassium crystal coatings, the transmitance scope of potassium dideuterium-hydrogen phosphate crystal is 98%-99.5%, increased potassium dideuterium phosphate brilliant
Body transmitance, makes potassium dideuterium-hydrogen phosphate crystal not by deliquescence.
Embodiment 3
The finishing method according to embodiment 1 or 2, its difference are that the purity of pure optics pitch is 97%.
Embodiment 4
The finishing method according to embodiment 1, its difference are that pure optics pitch is 1 than scope with the weight of beeswax：3.
Embodiment 5
The finishing method according to embodiment 1, its difference are that pure optics pitch is 1 than scope with the weight of beeswax：2.
Embodiment 6
The finishing method according to embodiment 2, its difference are that pure optics pitch is 1 than scope with the weight of paraffin：5.
Embodiment 7
The finishing method according to embodiment 2, its difference are that pure optics pitch is 1 than scope with the weight of paraffin：4.
Embodiment 8
The finishing method according to embodiment 1 or 2, its difference is, in step c, is loaded with pure light by what step (b) was obtained
The square position that pitch is learned with the mixture of beeswax preheats 10min under the conditions of 80 DEG C；
Embodiment 9
The finishing method according to embodiment 1 or 2, its difference is, in step c, is loaded with pure light by what step (b) was obtained
The square position that pitch is learned with the mixture of beeswax preheats 20min under the conditions of 70 DEG C；
Embodiment 10
The finishing method according to embodiment 1 or 2, its difference is, in step (2), specification be W0.25 diamond dusts with have
The mass ratio of machine solvent is 1:300, the organic solvent is anhydrous propyl alcohol, is put into small-sized after diamond dust is mixed with organic solvent
In supersonic wave cleaning machine, ultrasonic vibration 20 minutes, obtain final product polishing fluid；.
Embodiment 11
The finishing method according to embodiment 1 or 2, its difference is, in step (2), specification be W0.25 diamond dusts with have
The mass ratio of machine solvent is 1:250, the organic solvent is ethylene glycol, is put into small-sized super after diamond dust is mixed with organic solvent
In sound wave cleaning machine, ultrasonic vibration 15 minutes, obtain final product polishing fluid；.
Embodiment 12
The finishing method according to embodiment 1 or 2, its difference is, in step (3), takes the polishing fluid that step (2) is obtained
5 drops (0.25ml), drop on the polishing disk that step (1) is obtained, temperature be 28 DEG C, under the conditions of humidity 40%, rotating speed is 40 turns/
The polishing disk of min is polished to potassium dideuterium-hydrogen phosphate crystal, and polishing mode is reciprocating sliding campaign；
Embodiment 13
The finishing method according to embodiment 1 or 2, its difference is, in step (3), takes the polishing fluid that step (2) is obtained
3 drops (0.15ml), drop on the polishing disk that step (1) is obtained, temperature be 26 DEG C, under the conditions of humidity 40%, rotating speed is 30 turns/
The polishing disk of min is polished to potassium dideuterium-hydrogen phosphate crystal, and polishing mode is to rotate backward；
Embodiment 14
The finishing method according to embodiment 1 or 2, its difference are that the AR is the pure propyl acetate of analysis
Reagent；
Embodiment 15
The finishing method according to embodiment 1 or 2, its difference are that the AR is the pure butyl acetate of analysis
Reagent；
Embodiment 16
The finishing method according to embodiment 1 or 2, its difference is, to potassium dideuterium-hydrogen phosphate crystal plated film, concrete steps bag
Include：
The potassium dideuterium-hydrogen phosphate crystal for removing surface contaminants is put into into coating machine, starts coating machine, plating run, adjustment are set
Temperature carries out vacuum evaporation to 100 DEG C, and plated membrane system is：AR/AR 1064 ± 10nm of@, it is desirable to R ＜ 0.5%, wherein, AR is increasing
Permeable membrane, R are reflectivity.
Embodiment 17
The finishing method according to embodiment 1 or 2, its difference is, to potassium dideuterium-hydrogen phosphate crystal plated film, concrete steps bag
Include：
The potassium dideuterium-hydrogen phosphate crystal for removing surface contaminants is put into into coating machine, starts coating machine, plating run, adjustment are set
Temperature carries out vacuum evaporation to 90 DEG C, and plated membrane system is：AR/AR 1064 ± 10nm of@, it is desirable to R ＜ 0.5%, wherein, AR is increasing
Permeable membrane, R are reflectivity.
Claims (7)
1. a kind of finishing method of potassium dideuterium-hydrogen phosphate crystal, it is characterised in that concrete steps include：Potassium dideuterium-hydrogen phosphate crystal is entered
Row frosted：Potassium dideuterium-hydrogen phosphate crystal is bonded in the center of KDP lassos using paraffin or paraffin, rosin epoxy glue, in sand paper
On carry out frosted；
(1) make polishing disk
A, the mixture of pure optics pitch and beeswax or paraffin is heated, pure optics pitch is complete with the mixture of beeswax or paraffin
Stir when dissolving, during the mixture surface boiling of pure optics pitch and beeswax or paraffin, stop heating；Wherein, pure optics drip
Blue or green purity range is 95%-100%, and pure optics pitch is 1 than scope with the weight of beeswax：1-1：3, pure optics pitch and stone
The weight of wax is 1 than scope：3-1：5；
The mixture of b, the pure optics pitch that step (a) is obtained and beeswax or paraffin is poured in square position, naturally cools to room temperature；
C, the mixture for being loaded with pure optics pitch and beeswax or paraffin that step (b) is obtained square position under the conditions of 60-80 DEG C
Preheating 10-30min；
D, the pure optics pitch that obtains after step (c) preheating is flattened on square position with the mixture of beeswax using flat board, cooling
To room temperature, flat board is removed, polishing disk is obtained final product；
(2) prepare polishing fluid
Diamond dust is well mixed with organic solvent, diamond dust is 1 than scope with the quality of organic solvent:200—1:300；I.e.
Obtain polishing fluid；
(3) polish
Take the polishing fluid 2-5 drops that step (2) is obtained, drop on the polishing disk that step (1) is obtained, temperature be 25-28 DEG C, it is wet
Under the conditions of degree≤40%, rotating speed is that the polishing disk of 1-40 turn/min is polished to potassium dideuterium-hydrogen phosphate crystal, in polishing process
Inspection potassium dideuterium-hydrogen phosphate crystal polished surface parallel error, flatness, surface quality, make potassium dideuterium-hydrogen phosphate crystal polished surface parallel
Difference<10 ", potassium dideuterium-hydrogen phosphate crystal polished surface flatness is better than λ/10, and potassium dideuterium-hydrogen phosphate crystal polished surface surface quality is excellent
In 20/10；
(4) potassium dideuterium-hydrogen phosphate crystal surface contaminants, plated film are removed
The potassium dideuterium-hydrogen phosphate crystal surface contaminants obtained after removal step (3) polishing, plated film are obtained final product；Remove potassium dideuterium phosphate brilliant
Body surface contaminants, concrete steps include：
E, using power for 250W infrared lamp to obtain through step (3) potassium dideuterium-hydrogen phosphate crystal heating, until paraffin or
Person's paraffin, rosin mixing are peptized, and potassium dideuterium-hydrogen phosphate crystal is cooled to room temperature；
F, potassium dideuterium-hydrogen phosphate crystal is put into into culture dish, AR is added to flooding potassium dideuterium-hydrogen phosphate crystal to culture dish,
Potassium dideuterium-hydrogen phosphate crystal is soaked 1 hour, the dirt on potassium dideuterium-hydrogen phosphate crystal surface is wiped with senior absorbent cotton or dustless soft cloth
Go；
G, second immersion is carried out using AR to potassium dideuterium-hydrogen phosphate crystal, soak time is 30 minutes, with senior de-
Fat cotton or dustless soft cloth dip analysis pure ethyl acetate reagent and repeatedly wipe potassium dideuterium-hydrogen phosphate crystal surface, until di(2-ethylhexyl)phosphate deuterium
Two burnishing surface of potassium crystal is without any dirt；The AR is analysis pure ethyl acetate reagent, analyzes pure propyl acetate examination
Any one of agent, the pure butyl acetate reagent of analysis.
2. finishing method according to claim 1, it is characterised in that in step a, by pure optics pitch and beeswax or paraffin
Mixture is put into aluminum pot, is 1000W heating by electric cooker using power；In step b, pure optics pitch and beeswax or paraffin will be loaded with
In the super dead room of square position horizontal positioned of mixture, room temperature is naturally cooled to；In step c, will be loaded with pure optics pitch and beeswax or
The square position of the mixture of paraffin is preheating 10-30min in water under the conditions of 60-80 DEG C.
3. finishing method according to claim 1, it is characterised in that in step (1), the square position has newspaper to surround for surrounding
The cast iron square position of cylinder；In step d, the flat board is smooth Circular glass plate.
4. finishing method according to claim 1, it is characterised in that in step (2), the organic solvent be absolute ethyl alcohol,
Any one in anhydrous propyl alcohol or ethylene glycol；The specification of the diamond dust is W1～W0.125.
5. finishing method according to claim 4, it is characterised in that the specification of the diamond dust is W0.25.
6. finishing method according to claim 1, it is characterised in that in step (2), after diamond dust is mixed with organic solvent
It is put into ultrasonic vibration 10-20 minutes in small-scale ultrasonic cleaning machine；In step (3), polishing mode is to rotate backward or back and forth push away
Roping is moved；Potassium dideuterium-hydrogen phosphate crystal polished surface parallel error is tested using optical comparison goniometer, using laser plane interferometer
Test potassium dideuterium-hydrogen phosphate crystal polished surface flatness, estimates potassium dideuterium-hydrogen phosphate crystal polished surface matter using 10 times of magnifying glasses
Amount.
7. finishing method according to claim 1, it is characterised in that in step (4), to potassium dideuterium-hydrogen phosphate crystal plated film, tool
Body step includes：The potassium dideuterium-hydrogen phosphate crystal for removing surface contaminants is put into into coating machine, starts coating machine, plating run is set,
Adjustment temperature carries out vacuum evaporation to 80-100 DEG C, and plated membrane system is：AR/AR 1064 ± 10nm of@, it is desirable to R ＜ 0.5%, its
In, AR is anti-reflection film, and R is reflectivity.
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| CN106289112A (en) * | 2016-09-20 | 2017-01-04 | 福建福晶科技股份有限公司 | A kind of detect the method for angle between prism fine grinding face |
| CN110003668A (en) * | 2019-03-06 | 2019-07-12 | 中国科学院上海光学精密机械研究所 | Pitch lap of multi-cellular structure and preparation method thereof |
| CN113118952A (en) * | 2021-03-19 | 2021-07-16 | 安徽环巢光电科技有限公司 | Polishing device and method for potassium dideuterium phosphate crystal |
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