CN104589194A - Method for polishing potassium dideuterium phosphate crystals - Google Patents
Method for polishing potassium dideuterium phosphate crystals Download PDFInfo
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- CN104589194A CN104589194A CN201510043754.XA CN201510043754A CN104589194A CN 104589194 A CN104589194 A CN 104589194A CN 201510043754 A CN201510043754 A CN 201510043754A CN 104589194 A CN104589194 A CN 104589194A
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- hydrogen phosphate
- phosphate crystal
- potassium dideuterium
- polishing
- paraffin
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2220/00—Type of materials or objects being removed
- B08B2220/01—Adhesive materials
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention relates to a method for polishing potassium dideuterium phosphate crystals, comprising the steps of (1) manufacturing a polishing plate, including heating a mixture of pure optical bitumen and beewax or paraffin, wherein the purity of the pure optical bitumen is 95-100%, the proportion by weight of the pure optical bitumen to the beewax is 1:1 to 1:3 and that of the pure optical bitumen to the paraffin is 1:3 to 1: 5; (2) preparing a polishing solution, i.e., mixing diamond powder and organic solvent uniformly to obtain the polishing solution, wherein the proportion by weight of the diamond powder to the organic solvent is 1: 200 to 1: 300; (3) polishing, wherein the parallelism of the polished potassium dideuterium phosphate crystals is superior to 10s, the flatness is better than lambda/10 at 633nm, the wavefront distortion is better than lambda/8 at 633nm, the surface quality is better than 20/10, and the service temperature is minus 40 DEG C to +50 DEG C, so that the use requirement of a high-performance laser system is met.
Description
Technical field
The present invention relates to a kind of finishing method of potassium dideuterium-hydrogen phosphate crystal, in more detail, relate to that matter is soft, matter is crisp, extremely deliquescent polishing crystal method.
Background technology
Potassium dideuterium-hydrogen phosphate crystal (KD
2pO
4) be called for short DKDP crystal or KD*P crystal, be a kind of electrooptical material and non-linear laser material of function admirable, its electro-optic coefficient is 2 times of potassium dihydrogen phosphate crystal.In recent years, be widely used in Electro-optical Modulation, electro-optical Q-switch, high-speed photography, electro-optical deflection, laser ranging, high power laser light frequency inverted and inertial confinement fusion igniting field, and its range of application expanded further.At present, the growing technology of potassium dideuterium-hydrogen phosphate crystal is more ripe, but due to polishing difficulty, the application in High-performance lasers equipment, laser weapons distance-measuring equipment, laser fusion igniter etc. is restricted.Potassium dideuterium-hydrogen phosphate crystal quality is crisp soft, very easily deliquescence, cracking.Traditional finishing method is: (1), by potassium dideuterium-hydrogen phosphate crystal qualified for frosted on silk dish, with the alumina polishing solution polishing of absolute ethyl alcohol dilution, silk dish is static not to rotate, and has only carried out polishing by potassium dideuterium-hydrogen phosphate crystal motion.(2) thrown the potassium dideuterium-hydrogen phosphate crystal absolute ethyl alcohol of light, ether cleaning or do not cleaned.(3) potassium dideuterium-hydrogen phosphate crystal device plated film.Potassium dideuterium-hydrogen phosphate crystal device not plated film is directly applied, or adopts chemical method plating porous sio2 anti-reflection film.Adopt the potassium dideuterium-hydrogen phosphate crystal of conventional method polishing, because polishing disk carrier is silk, and polishing disk does not rotate, and does not reach the plane requirement of high optical grade.The rear absolute ethyl alcohol of potassium dideuterium-hydrogen phosphate crystal polishing completion, ether cleaning, polished surface is easy to haze, and can not be applied in high power laser system.Potassium dideuterium-hydrogen phosphate crystal device not plated film, can cause laser system to export energy on the low side and potassium dideuterium-hydrogen phosphate crystal device and to shorten service life.Chemical method plating porous sio2 anti-reflection film, plating conditions is difficult to control, and between batch, film quality is unstable, is only in conceptual phase.Earlier 2000s has research to claim to adopt ultraprecise diamond tool to KDP polishing, and only to KDP polishing, but polished surface does not reach the requirement of λ/10, and polishing cost is also high.
Summary of the invention
For the deficiencies in the prior art, the invention discloses a kind of finishing method of potassium dideuterium-hydrogen phosphate crystal;
Finishing method of the present invention is the potassium dideuterium-hydrogen phosphate crystal finishing method of high, the reproducible high optical quality of a kind of reliability.
Technical scheme of the present invention is as follows:
A finishing method for potassium dideuterium-hydrogen phosphate crystal, concrete steps comprise:
(1) polishing disk is made
A, the mixture of pure optics pitch and beeswax or paraffin to be heated, stir when the mixture of pure optics pitch and beeswax or paraffin dissolves completely, stop heating during the mixture surface boiling of pure optics pitch and beeswax or paraffin; Wherein, the purity range of pure optics pitch is 95%-100%, and the weight ratio of pure optics pitch and beeswax is 1:1-1:3, and the weight ratio of pure optics pitch and paraffin is 1:3-1:5;
The mixture of b, pure optics pitch step (a) obtained and beeswax or paraffin is poured in square position, naturally cools to room temperature;
C, the square position being loaded with the mixture of pure optics pitch and beeswax or paraffin preheating 10-30min under 60-80 DEG C of condition that step (b) is obtained;
The square position being loaded with the mixture of pure optics pitch and beeswax obtained after step (c) preheating flattens by d, utilization flat board, is cooled to room temperature, removes dull and stereotyped, obtains polishing disk;
(2) polishing fluid is prepared
Mixed with organic solvent by diamond dust, the quality of diamond dust and organic solvent is 1:200-1:300 than scope; Obtain polishing fluid;
(3) polishing
Get the polishing fluid 2-5 that step (2) obtains to drip, drop on polishing disk that step (1) obtains, temperature be 25-28 DEG C, under humidity≤40% condition, rotating speed be 1-40 turn/polishing disk of min carries out polishing to potassium dideuterium-hydrogen phosphate crystal, potassium dideuterium-hydrogen phosphate crystal polished surface parallel error, flatness, surface quality is checked in polishing process, make potassium dideuterium-hydrogen phosphate crystal polished surface parallel error <10 "; potassium dideuterium-hydrogen phosphate crystal polished surface flatness is better than λ/10, and potassium dideuterium-hydrogen phosphate crystal polished surface surface quality is better than 20/10.
Preferred according to the present invention, the finishing method of described potassium dideuterium-hydrogen phosphate crystal, concrete steps also comprise:
(4) potassium dideuterium-hydrogen phosphate crystal surface contaminants, plated film is removed
The potassium dideuterium-hydrogen phosphate crystal surface contaminants obtained after removal step (3) polishing, plated film, to obtain final product.
Before potassium dideuterium-hydrogen phosphate crystal plated film, the transmitance scope of potassium dideuterium-hydrogen phosphate crystal is 90%-91%, after potassium dideuterium-hydrogen phosphate crystal plated film, the transmitance scope of potassium dideuterium-hydrogen phosphate crystal is 98%-99.5%, add potassium dideuterium-hydrogen phosphate crystal transmitance, also make potassium dideuterium-hydrogen phosphate crystal surface not by deliquescence.
Preferred according to the present invention, in step a, the mixture of pure optics pitch and beeswax or paraffin is put into aluminum pot, utilize power for 1000W heating by electric cooker; In step b, the square position horizontal positioned of the mixture being loaded with pure optics pitch and beeswax or paraffin is surpassed in dead room, naturally cools to room temperature; In step c, square position preheating 10-30min in 60-80 DEG C of Water Under of the mixture of pure optics pitch and beeswax or paraffin will be loaded with.
Preferred according to the present invention, in step (1), described square position is have newspaper to surround the cast iron square position of cylinder around; In steps d, described flat board is smooth Circular glass plate.
Preferred according to the present invention, in step (2), described organic solvent is any one in absolute ethyl alcohol, anhydrous propyl alcohol or ethylene glycol; The specification of described diamond dust is W1 ~ W0.125, more preferably W0.25.
Preferred according to the present invention, in step (2), after being mixed with organic solvent by diamond dust, put into small-scale ultrasonic cleaning machine ultrasonic vibration 10-20 minute.
Preferred according to the present invention, in step (3), polishing mode is for rotating backward or reciprocating sliding campaign; Utilize optical comparison goniometer to test potassium dideuterium-hydrogen phosphate crystal polished surface parallel error, utilize laser plane interferometer to test potassium dideuterium-hydrogen phosphate crystal polished surface flatness, utilize 10 times of magnifying glass range estimation potassium dideuterium-hydrogen phosphate crystal polished surface quality.
Preferred according to the present invention, before the described making polishing disk of step (1), frosted is carried out to potassium dideuterium-hydrogen phosphate crystal, concrete steps comprise: utilize paraffin or paraffin, center that potassium dideuterium-hydrogen phosphate crystal is bonded in KDP lasso by rosin epoxy glue, and sand paper carries out frosted.
Preferred according to the present invention, in step (4), remove potassium dideuterium-hydrogen phosphate crystal surface contaminants, concrete steps comprise:
E, utilize power to be 250W infrared lamp to the potassium dideuterium-hydrogen phosphate crystal heating obtained through step (3), until paraffin or paraffin, rosin epoxy glue dissolve, potassium dideuterium-hydrogen phosphate crystal is taken out, is cooled to room temperature;
F, potassium dideuterium-hydrogen phosphate crystal is put into culture dish, adding AR to flooding potassium dideuterium-hydrogen phosphate crystal to culture dish, potassium dideuterium-hydrogen phosphate crystal being soaked 1 hour, with senior absorbent cotton or dustless soft cloth, the dirt on potassium dideuterium-hydrogen phosphate crystal surface is wiped;
G, utilize AR to potassium dideuterium-hydrogen phosphate crystal carry out second time soak, soak time is 30 minutes, dip with senior absorbent cotton or dustless soft cloth and analyze pure ethyl acetate reagent repeatedly wiping potassium dideuterium-hydrogen phosphate crystal surface, until potassium dideuterium-hydrogen phosphate crystal two burnishing surface is without any dirt; Described AR, for analyzing pure ethyl acetate reagent, analyzing pure ethyl acetate reagent, analyze pure propyl acetate reagent, analyzing pure butyl acetate reagent, is analyzed pure propyl acetate reagent, is analyzed any one of pure butyl acetate reagent.
Preferred according to the present invention, in step (4), to potassium dideuterium-hydrogen phosphate crystal plated film, concrete steps comprise:
The potassium dideuterium-hydrogen phosphate crystal removing surface contaminants is put into coating machine, start coating machine, plating run is set, adjustment temperature is to 80-100 DEG C, and carry out vacuum evaporation, institute's plated film is: AR/AR@1064 ± 10nm, require R<0.5%, wherein, AR is anti-reflection film, and R is reflectivity.
Beneficial effect of the present invention is:
Potassium dideuterium-hydrogen phosphate crystal after polishing, the depth of parallelism is better than 10 seconds, flatness is better than λ/10@633nm, wavefront distortion is better than λ/8@633nm, surface quality is better than 20/10 (MIL-PRF-13830B), serviceability temperature scope is-40 ~+50 DEG C, fullys meet the instructions for use of High-performance lasers system.
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention is further qualified, but is not limited thereto.
Embodiment 1
A finishing method for potassium dideuterium-hydrogen phosphate crystal, concrete steps comprise:
Carry out frosted to potassium dideuterium-hydrogen phosphate crystal, concrete steps comprise: utilize paraffin potassium dideuterium-hydrogen phosphate crystal to be bonded in the center of KDP lasso, sand paper carries out frosted;
(1) polishing disk is made
A, the mixture (weight ratio is 1:1) of pure optics pitch and beeswax is put into aluminum pot, utilize power for 1000W heating by electric cooker, the mixture of pure optics pitch and beeswax stirs when dissolving completely, stop heating during the mixture surface boiling of pure optics pitch and beeswax, wherein, the purity of pure optics pitch is 95%;
The mixture of b, pure optics pitch step (a) obtained and beeswax is poured into has newspaper to surround in the cast iron square position of cylinder around, and horizontal positioned surpasses in dead room, naturally cools to room temperature;
C, the square position being loaded with the mixture of pure optics pitch and beeswax preheating 30min under 60 DEG C of conditions that step (b) is obtained;
D, utilize smooth Circular glass plate to be flattened the square position being loaded with the mixture of pure optics pitch and beeswax or paraffin obtained after step (c) preheating, be cooled to room temperature, remove smooth Circular glass plate, obtain polishing disk;
(2) polishing fluid is prepared
Be that W0.25 diamond dust mixes with organic solvent (mass ratio is 1:200) by specification, described organic solvent is absolute ethyl alcohol, puts into small-scale ultrasonic cleaning machine ultrasonic vibration 10 minutes, obtain polishing fluid with organic solvent after being mixed by diamond dust;
(3) polishing
Get the polishing fluid 2 (0.1ml) that step (2) obtains, drop on polishing disk that step (1) obtains, it is 25 DEG C in temperature, under humidity 40% condition, rotating speed is that the polishing disk of 20 turns/min carries out polishing to potassium dideuterium-hydrogen phosphate crystal, polishing mode is for rotating backward, potassium dideuterium-hydrogen phosphate crystal polished surface parallel error is checked in polishing process, flatness, surface quality, optical comparison goniometer is utilized to test potassium dideuterium-hydrogen phosphate crystal polished surface parallel error, laser plane interferometer is utilized to test potassium dideuterium-hydrogen phosphate crystal polished surface flatness, utilize 10 times of magnifying glass range estimation potassium dideuterium-hydrogen phosphate crystal polished surface quality, make potassium dideuterium-hydrogen phosphate crystal polished surface parallel error <10 ", potassium dideuterium-hydrogen phosphate crystal polished surface flatness is better than λ/10, potassium dideuterium-hydrogen phosphate crystal polished surface surface quality is better than 20/10,
(4) potassium dideuterium-hydrogen phosphate crystal surface contaminants, plated film is removed
The potassium dideuterium-hydrogen phosphate crystal surface contaminants obtained after removal step (3) polishing, plated film, to obtain final product.
The potassium dideuterium-hydrogen phosphate crystal surface contaminants obtained after removal step (3) polishing, concrete steps comprise:
E, the infrared lamp utilizing power to be 250W heat the potassium dideuterium-hydrogen phosphate crystal obtained through step (3), until paraffin dissolves, are taken out by potassium dideuterium-hydrogen phosphate crystal, are cooled to room temperature;
F, potassium dideuterium-hydrogen phosphate crystal is put into culture dish, adding AR to flooding potassium dideuterium-hydrogen phosphate crystal to culture dish, potassium dideuterium-hydrogen phosphate crystal being soaked 1 hour, wipe with the dirt of senior absorbent cotton by potassium dideuterium-hydrogen phosphate crystal surface;
G, utilize AR to potassium dideuterium-hydrogen phosphate crystal carry out second time soak, soak time is 30 minutes, dip with senior absorbent cotton and analyze pure ethyl acetate reagent repeatedly wiping potassium dideuterium-hydrogen phosphate crystal surface, until potassium dideuterium-hydrogen phosphate crystal two burnishing surface is without any dirt; Described AR is for analyzing pure ethyl acetate reagent;
To potassium dideuterium-hydrogen phosphate crystal plated film, concrete steps comprise:
The potassium dideuterium-hydrogen phosphate crystal removing surface contaminants is put into coating machine, starts coating machine, plating run is set, adjustment temperature to 80 DEG C, carry out vacuum evaporation, institute's plated film is: AR/AR@1064 ± 10nm, requires R<0.5%, wherein, AR is anti-reflection film, and R is reflectivity.
Before potassium dideuterium-hydrogen phosphate crystal plated film, the transmitance scope of potassium dideuterium-hydrogen phosphate crystal is 90%-91%, after potassium dideuterium-hydrogen phosphate crystal plated film, the transmitance scope of potassium dideuterium-hydrogen phosphate crystal is 98%-99.5%, add potassium dideuterium-hydrogen phosphate crystal transmitance, also make potassium dideuterium-hydrogen phosphate crystal surface not by deliquescence.
Embodiment 2
A finishing method for potassium dideuterium-hydrogen phosphate crystal, concrete steps comprise:
Carry out frosted to potassium dideuterium-hydrogen phosphate crystal, concrete steps comprise: utilize paraffin, rosin epoxy glue potassium dideuterium-hydrogen phosphate crystal to be bonded in the center of KDP lasso, sand paper carries out frosted;
(1) polishing disk is made
A, the mixture (weight ratio is 1:3) of pure optics pitch and paraffin is put into aluminum pot, utilize power for 1000W heating by electric cooker, the mixture of pure optics pitch and paraffin stirs when dissolving completely, stop heating during the mixture surface boiling of pure optics pitch and paraffin, wherein, the purity of pure optics pitch is 100%;
The mixture of b, pure optics pitch step (a) obtained and paraffin is poured into has newspaper to surround in the cast iron square position of cylinder around, and horizontal positioned surpasses in dead room, naturally cools to room temperature;
C, the square position being loaded with the mixture of pure optics pitch and paraffin preheating 30min under 60 DEG C of conditions that step (b) is obtained;
D, utilize smooth Circular glass plate to be flattened the square position being loaded with the mixture of pure optics pitch and paraffin obtained after step (c) preheating, be cooled to room temperature, remove smooth Circular glass plate, obtain polishing disk;
(2) polishing fluid is prepared
Be that W0.25 diamond dust mixes with organic solvent (mass ratio is 1:200) by specification, described organic solvent is absolute ethyl alcohol, puts into small-scale ultrasonic cleaning machine ultrasonic vibration 10 minutes, obtain polishing fluid with organic solvent after being mixed by diamond dust;
(3) polishing
Get the polishing fluid 2 (0.1ml) that step (2) obtains, drop on polishing disk that step (1) obtains, it is 25 DEG C in temperature, under humidity 40% condition, rotating speed is that the polishing disk of 20 turns/min carries out polishing to potassium dideuterium-hydrogen phosphate crystal, polishing mode is for rotating backward, potassium dideuterium-hydrogen phosphate crystal polished surface parallel error is checked in polishing process, flatness, surface quality, optical comparison goniometer is utilized to test potassium dideuterium-hydrogen phosphate crystal polished surface parallel error, laser plane interferometer is utilized to test potassium dideuterium-hydrogen phosphate crystal polished surface flatness, utilize 10 times of magnifying glass range estimation potassium dideuterium-hydrogen phosphate crystal polished surface quality, make potassium dideuterium-hydrogen phosphate crystal polished surface parallel error <10 ", potassium dideuterium-hydrogen phosphate crystal polished surface flatness is better than λ/10, potassium dideuterium-hydrogen phosphate crystal polished surface surface quality is better than 20/10,
(4) potassium dideuterium-hydrogen phosphate crystal surface contaminants, plated film is removed
The potassium dideuterium-hydrogen phosphate crystal surface contaminants obtained after removal step (3) polishing, concrete steps comprise:
E, the infrared lamp utilizing power to be 250W heat the potassium dideuterium-hydrogen phosphate crystal obtained through step (3), until paraffin dissolves, are taken out by potassium dideuterium-hydrogen phosphate crystal, are cooled to room temperature;
F, potassium dideuterium-hydrogen phosphate crystal is put into culture dish, adding AR to flooding potassium dideuterium-hydrogen phosphate crystal to culture dish, potassium dideuterium-hydrogen phosphate crystal being soaked 1 hour, wipe with the dirt of senior absorbent cotton by potassium dideuterium-hydrogen phosphate crystal surface;
G, utilize AR to potassium dideuterium-hydrogen phosphate crystal carry out second time soak, soak time is 30 minutes, dip with senior absorbent cotton and analyze pure ethyl acetate reagent repeatedly wiping potassium dideuterium-hydrogen phosphate crystal surface, until potassium dideuterium-hydrogen phosphate crystal two burnishing surface is without any dirt; Described AR is for analyzing pure ethyl acetate reagent;
To potassium dideuterium-hydrogen phosphate crystal plated film, concrete steps comprise:
The potassium dideuterium-hydrogen phosphate crystal removing surface contaminants is put into coating machine, starts coating machine, plating run is set, adjustment temperature to 80 DEG C, carry out vacuum evaporation, institute's plated film is: AR/AR@1064 ± 10nm, requires R<0.5%, wherein, AR is anti-reflection film, and R is reflectivity.
Before potassium dideuterium-hydrogen phosphate crystal plated film, the transmitance scope of potassium dideuterium-hydrogen phosphate crystal is 90%-91%, after potassium dideuterium-hydrogen phosphate crystal plated film, the transmitance scope of potassium dideuterium-hydrogen phosphate crystal is 98%-99.5%, add potassium dideuterium-hydrogen phosphate crystal transmitance, also make potassium dideuterium-hydrogen phosphate crystal surface not by deliquescence.
Embodiment 3
Finishing method according to embodiment 1 or 2, its difference is, the purity of pure optics pitch is 97%.
Embodiment 4
Finishing method according to embodiment 1, its difference is, the weight ratio of pure optics pitch and beeswax is 1:3.
Embodiment 5
Finishing method according to embodiment 1, its difference is, the weight ratio of pure optics pitch and beeswax is 1:2.
Embodiment 6
Finishing method according to embodiment 2, its difference is, the weight ratio of pure optics pitch and paraffin is 1:5.
Embodiment 7
Finishing method according to embodiment 2, its difference is, the weight ratio of pure optics pitch and paraffin is 1:4.
Embodiment 8
Finishing method according to embodiment 1 or 2, its difference is, in step c, the square position being loaded with the mixture of pure optics pitch and beeswax preheating 10min under 80 DEG C of conditions that step (b) is obtained.
Embodiment 9
Finishing method according to embodiment 1 or 2, its difference is, in step c, the square position being loaded with the mixture of pure optics pitch and beeswax preheating 20min under 70 DEG C of conditions that step (b) is obtained.
Embodiment 10
Finishing method according to embodiment 1 or 2, its difference is, in step (2), specification is the mass ratio of W0.25 diamond dust and organic solvent is 1:300, described organic solvent is anhydrous propyl alcohol, put into small-scale ultrasonic cleaning machine ultrasonic vibration after being mixed with organic solvent by diamond dust 20 minutes, obtain polishing fluid.
Embodiment 11
Finishing method according to embodiment 1 or 2, its difference is, in step (2), specification is the mass ratio of W0.25 diamond dust and organic solvent is 1:250, described organic solvent is ethylene glycol, put into small-scale ultrasonic cleaning machine ultrasonic vibration after being mixed with organic solvent by diamond dust 15 minutes, obtain polishing fluid.
Embodiment 12
Finishing method according to embodiment 1 or 2, its difference is, in step (3), get the polishing fluid 5 (0.25ml) that step (2) obtains, drop on polishing disk that step (1) obtains, temperature be 28 DEG C, under humidity 40% condition, rotating speed is that the polishing disk of 40 turns/min carries out polishing to potassium dideuterium-hydrogen phosphate crystal, and polishing mode is reciprocating sliding campaign.
Embodiment 13
Finishing method according to embodiment 1 or 2, its difference is, in step (3), get the polishing fluid 3 (0.15ml) that step (2) obtains, drop on polishing disk that step (1) obtains, temperature be 26 DEG C, under humidity 40% condition, rotating speed is that the polishing disk of 30 turns/min carries out polishing to potassium dideuterium-hydrogen phosphate crystal, and polishing mode is for rotating backward.
Embodiment 14
Finishing method according to embodiment 1 or 2, its difference is, described AR is for analyzing pure ethyl acetate reagent.
Embodiment 15
Finishing method according to embodiment 14, its difference is, described AR is for analyzing pure propyl acetate reagent.
Embodiment 16
Finishing method according to embodiment 14, its difference is, described AR is for analyzing pure butyl acetate reagent.
Embodiment 17
Finishing method according to embodiment 14, its difference is, described AR is for analyzing pure propyl acetate reagent.
Embodiment 18
Finishing method according to embodiment 14, its difference is, described AR is for analyzing pure butyl acetate reagent.
Embodiment 19
Finishing method according to embodiment 1 or 2, its difference is, to potassium dideuterium-hydrogen phosphate crystal plated film, concrete steps comprise:
The potassium dideuterium-hydrogen phosphate crystal removing surface contaminants is put into coating machine, starts coating machine, plating run is set, adjustment temperature to 100 DEG C, carry out vacuum evaporation, institute's plated film is: AR/AR@1064 ± 10nm, requires R<0.5%, wherein, AR is anti-reflection film, and R is reflectivity.
Embodiment 20
Finishing method according to embodiment 1 or 2, its difference is, to potassium dideuterium-hydrogen phosphate crystal plated film, concrete steps comprise:
The potassium dideuterium-hydrogen phosphate crystal removing surface contaminants is put into coating machine, starts coating machine, plating run is set, adjustment temperature to 90 DEG C, carry out vacuum evaporation, institute's plated film is: AR/AR@1064 ± 10nm, requires R<0.5%, wherein, AR is anti-reflection film, and R is reflectivity.
Claims (10)
1. a finishing method for potassium dideuterium-hydrogen phosphate crystal, is characterized in that, concrete steps comprise:
(1) polishing disk is made
A, the mixture of pure optics pitch and beeswax or paraffin to be heated, stir when the mixture of pure optics pitch and beeswax or paraffin dissolves completely, stop heating during the mixture surface boiling of pure optics pitch and beeswax or paraffin; Wherein, the purity range of pure optics pitch is 95%-100%, and the weight ratio of pure optics pitch and beeswax is 1:1-1:3, and the weight ratio of pure optics pitch and paraffin is 1:3-1:5;
The mixture of b, pure optics pitch step (a) obtained and beeswax or paraffin is poured in square position, naturally cools to room temperature;
C, the square position being loaded with the mixture of pure optics pitch and beeswax or paraffin preheating 10-30min under 60-80 DEG C of condition that step (b) is obtained;
The square position being loaded with the mixture of pure optics pitch and beeswax obtained after step (c) preheating flattens by d, utilization flat board, is cooled to room temperature, removes dull and stereotyped, obtains polishing disk;
(2) polishing fluid is prepared
Mixed with organic solvent by diamond dust, the quality of diamond dust and organic solvent is 1:200-1:300 than scope; Obtain polishing fluid;
(3) polishing
The polishing fluid 2-5 got step (2) obtains drips, drop on polishing disk that step (1) obtains, temperature be 25-28 DEG C, under humidity≤40% condition, rotating speed be 1-40 turn/polishing disk of min carries out polishing to potassium dideuterium-hydrogen phosphate crystal, potassium dideuterium-hydrogen phosphate crystal polished surface parallel error, flatness, surface quality is checked in polishing process, make potassium dideuterium-hydrogen phosphate crystal polished surface parallel error <10 "; potassium dideuterium-hydrogen phosphate crystal polished surface flatness is better than λ/10, and potassium dideuterium-hydrogen phosphate crystal polished surface surface quality is better than 20/10.
2. finishing method according to claim 1, it is characterized in that, the finishing method of described potassium dideuterium-hydrogen phosphate crystal, concrete steps also comprise:
(4) potassium dideuterium-hydrogen phosphate crystal surface contaminants, plated film is removed
The potassium dideuterium-hydrogen phosphate crystal surface contaminants obtained after removal step (3) polishing, plated film, to obtain final product.
3. finishing method according to claim 1, is characterized in that, in step a, the mixture of pure optics pitch and beeswax or paraffin is put into aluminum pot, utilize power for 1000W heating by electric cooker; In step b, the square position horizontal positioned of the mixture being loaded with pure optics pitch and beeswax or paraffin is surpassed in dead room, naturally cools to room temperature; In step c, square position preheating 10-30min in 60-80 DEG C of Water Under of the mixture of pure optics pitch and beeswax or paraffin will be loaded with.
4. finishing method according to claim 1, is characterized in that, in step (1), described square position is have newspaper to surround the cast iron square position of cylinder around; In steps d, described flat board is smooth Circular glass plate.
5. finishing method according to claim 1, it is characterized in that, in step (2), described organic solvent is any one in absolute ethyl alcohol, anhydrous propyl alcohol or ethylene glycol; The specification of described diamond dust is W1 ~ W0.125.
6. finishing method according to claim 5, it is characterized in that, the specification of described diamond dust is W0.25.
7. finishing method according to claim 1, is characterized in that, in step (2), put into small-scale ultrasonic cleaning machine ultrasonic vibration 10-20 minute with organic solvent after being mixed by diamond dust; In step (3), polishing mode is for rotating backward or reciprocating sliding campaign; Utilize optical comparison goniometer to test potassium dideuterium-hydrogen phosphate crystal polished surface parallel error, utilize laser plane interferometer to test potassium dideuterium-hydrogen phosphate crystal polished surface flatness, utilize 10 times of magnifying glass range estimation potassium dideuterium-hydrogen phosphate crystal polished surface quality.
8. finishing method according to claim 2, it is characterized in that, before the described making polishing disk of step (1), frosted is carried out to potassium dideuterium-hydrogen phosphate crystal, concrete steps comprise: utilize paraffin or paraffin, center that potassium dideuterium-hydrogen phosphate crystal is bonded in KDP lasso by rosin epoxy glue, and sand paper carries out frosted.
9. finishing method according to claim 8, is characterized in that, in step (4), remove potassium dideuterium-hydrogen phosphate crystal surface contaminants, concrete steps comprise:
E, utilize power to be 250W infrared lamp to the potassium dideuterium-hydrogen phosphate crystal heating obtained through step (3), until paraffin or paraffin, rosin epoxy glue dissolve, potassium dideuterium-hydrogen phosphate crystal is taken out, is cooled to room temperature;
F, potassium dideuterium-hydrogen phosphate crystal is put into culture dish, adding AR to flooding potassium dideuterium-hydrogen phosphate crystal to culture dish, potassium dideuterium-hydrogen phosphate crystal being soaked 1 hour, with senior absorbent cotton or dustless soft cloth, the dirt on potassium dideuterium-hydrogen phosphate crystal surface is wiped;
G, utilize AR to potassium dideuterium-hydrogen phosphate crystal carry out second time soak, soak time is 30 minutes, dip with senior absorbent cotton or dustless soft cloth and analyze pure ethyl acetate reagent repeatedly wiping potassium dideuterium-hydrogen phosphate crystal surface, until potassium dideuterium-hydrogen phosphate crystal two burnishing surface is without any dirt; Described AR, for analyzing pure ethyl acetate reagent, analyzing pure ethyl acetate reagent, analyze pure propyl acetate reagent, analyzing pure butyl acetate reagent, is analyzed pure propyl acetate reagent, is analyzed any one of pure butyl acetate reagent.
10. according to the arbitrary described finishing method of claim 2, it is characterized in that, in step (4), to potassium dideuterium-hydrogen phosphate crystal plated film, concrete steps comprise: the potassium dideuterium-hydrogen phosphate crystal removing surface contaminants is put into coating machine, start coating machine, plating run is set, adjustment temperature is to 80-100 DEG C, and carry out vacuum evaporation, institute's plated film is: AR/AR@1064 ± 10nm, require R<0.5%, wherein, AR is anti-reflection film, and R is reflectivity.
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