CN205405031U - Have ultraviolet laser converter of non -critical phase matching doubling of frequency, frequency tripling performance concurrently - Google Patents

Have ultraviolet laser converter of non -critical phase matching doubling of frequency, frequency tripling performance concurrently Download PDF

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CN205405031U
CN205405031U CN201620195012.9U CN201620195012U CN205405031U CN 205405031 U CN205405031 U CN 205405031U CN 201620195012 U CN201620195012 U CN 201620195012U CN 205405031 U CN205405031 U CN 205405031U
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王正平
亓宏伟
于法鹏
刘彦庆
张少军
赵显�
许心光
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Shandong University
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Abstract

本实用新型涉及一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器,包括基频光源、缩束系统、第一反射镜、非线性光学晶体、四分之一波片、第二反射镜及滤波片,非线性光学晶体X轴和Z轴的角平分线,与基频光的偏振方向的夹角为0‑5°,四分之一波片的光轴方向与基频光的偏振方向的夹角为0‑5°;第一反射镜与光路的中心轴的夹角为35‑55°;非线性光学晶体为GdxY1‑xCOB晶体,当基频光波长为1064nm时,x的取值范围为0.18‑0.22,当基频光波长为1053nm时,x的取值范围为0.11‑0.15。本实用新型使得一块GdxY1‑xCOB同时作为倍频和三倍频晶体,制作成本低。

The utility model relates to an ultraviolet laser frequency converter with non-critical phase matching frequency doubling and frequency tripling performance, comprising a fundamental frequency light source, a beam shrinking system, a first reflector, a nonlinear optical crystal, and a quarter wave plate , the second reflector and the filter plate, the angle bisector of the X-axis and the Z-axis of the nonlinear optical crystal, and the included angle of the polarization direction of the fundamental frequency light is 0-5°, and the direction of the optical axis of the quarter-wave plate and The included angle of the polarization direction of the fundamental frequency light is 0-5°; the included angle between the first reflector and the central axis of the optical path is 35-55°; the nonlinear optical crystal is Gd x Y 1-x COB crystal, when the fundamental frequency When the light wavelength is 1064nm, the value range of x is 0.18-0.22, and when the fundamental frequency light wavelength is 1053nm, the value range of x is 0.11-0.15. The utility model enables a piece of Gd x Y 1-x COB to be used as a frequency doubling and triple frequency crystal at the same time, and the production cost is low.

Description

一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器An Ultraviolet Laser Frequency Converter with Non-Critical Phase Matching Frequency Doubling and Tripling Performance

技术领域technical field

本实用新型涉及一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器,属于激光和非线性光学技术领域。The utility model relates to an ultraviolet laser frequency converter with non-critical phase matching frequency doubling and frequency tripling performances, which belongs to the technical field of laser and nonlinear optics.

背景技术Background technique

现代技术中,激光器扮演着越来越重要的角色。其中,全固态紫外激光器在激光微加工(钻孔、切割和腐蚀)、激光化学、光学雕刻、快速成型、激光印刷和光谱学等领域都有着非常重要的应用。由于实用固体激光器的波长大都位于红外光谱区,为了获得紫外光,需要用非线性光学晶体对红外激光进行频率变换,这种方法具有效率高、光束质量好、体积小、稳定性高和寿命长等优点。目前,最常用的技术路线是对掺钕钇铝石榴石或钕玻璃激光(1064nm/1053nm)进行三倍频,从而获得355nm/351nm的紫外输出,这个过程包含两步:首先用一块非线性光学晶体进行红外基频光的倍频,所产生的倍频绿光(532nm/526nm)与剩余基频光再在另一块非线性光学晶体中和频,最终实现355nm/351nm紫外光输出。如图1(a)所示,两块晶体分别用作倍频和三倍频晶体。目前,常用的倍频晶体是KH2PO4(KDP)、KTiOPO4(KTP)和LiB3O5(LBO),三倍频晶体是KDP、LBO和β-BaB2O4(BBO)。即使倍频和三倍频使用的是同一种晶体,由于相位匹配方向不同,所以空间切角不同,因此,不可避免地要用到两块晶体,从而使原料和加工成本大为提高。Lasers play an increasingly important role in modern technology. Among them, all-solid-state ultraviolet lasers have very important applications in the fields of laser micromachining (drilling, cutting and corrosion), laser chemistry, optical engraving, rapid prototyping, laser printing and spectroscopy. Since the wavelengths of practical solid-state lasers are mostly in the infrared spectral region, in order to obtain ultraviolet light, it is necessary to use nonlinear optical crystals to convert the frequency of infrared lasers. This method has high efficiency, good beam quality, small volume, high stability and long life. Etc. At present, the most commonly used technical route is to triple the frequency of Nd-doped YAG or Nd glass laser (1064nm/1053nm) to obtain 355nm/351nm UV output. This process consists of two steps: first, use a nonlinear optical The crystal doubles the frequency of the infrared fundamental frequency light, and the generated frequency doubled green light (532nm/526nm) and the remaining fundamental frequency light are then neutralized in another nonlinear optical crystal to finally achieve 355nm/351nm ultraviolet light output. As shown in Fig. 1(a), two crystals are used as frequency-doubling and frequency-tripling crystals respectively. At present, commonly used frequency-doubling crystals are KH 2 PO4 (KDP), KTiOPO 4 (KTP) and LiB 3 O 5 (LBO), and frequency-tripling crystals are KDP, LBO and β-BaB 2 O 4 (BBO). Even if the same crystal is used for frequency doubling and frequency tripling, since the phase matching directions are different, the space cutting angles are different. Therefore, it is inevitable to use two crystals, which greatly increases the cost of raw materials and processing.

为实现一块非线性晶体直接输出三倍频光,必须解决两个关键问题。(1)找到合适的GdxY1-xCOB晶体,即确定出组分参数x。(2)满足相位匹配方式对偏振态的要求。从原理上来看,即使找到合适的晶体组分使倍频、三倍频相位匹配方向都调整到GdxY1-xCOB晶体的Y轴上,如果不对倍频光的偏振态进行调整,也无法输出三倍频光。原因是II类非临界相位匹配所产生倍频光的偏振方向沿晶体的X轴(快轴方向),而I类非临界相位匹配三倍频要求倍频光偏振方向沿晶体的Z轴(慢轴方向)。In order to realize a nonlinear crystal directly output tripled frequency light, two key problems must be solved. (1) Find a suitable Gd x Y 1-x COB crystal, that is, determine the composition parameter x. (2) Satisfy the requirements of the phase matching method on the polarization state. From a theoretical point of view, even if a suitable crystal composition is found to adjust the phase matching direction of frequency doubling and triple frequency to the Y axis of the Gd x Y 1-x COB crystal, if the polarization state of the frequency doubling light is not adjusted, the Triple frequency light cannot be output. The reason is that the polarization direction of the frequency-doubled light generated by type II non-critical phase matching is along the X-axis (fast axis direction) of the crystal, while the triple frequency of type I non-critical phase matching requires the polarization direction of the frequency-doubled light to be along the Z-axis (slow axis) of the crystal. axis direction).

GdxY1-xCa4O(BO3)3(GdxY1-xCOB)系列硼酸盐晶体是一种折射率可以连续变化的置换型固溶体,进而可以实现非临界相位匹配波长的连续可调。此类晶体具有有效非线性光学系数适中、透光波段宽、抗激光损伤阈值高、相位匹配范围大、不潮解和物化性质稳定等优点,是一类性能优良的非线性光学晶体,具有广阔应用前景。研究表明:沿GdxY1-xCOB系列晶体Y轴,即(90°,90°)相位匹配方向,通过组分调节可以实现波长为1064nm/1053nm的非临界相位匹配II类倍频和I类三倍频,并且与实现非临界相位匹配倍频和三倍频的晶体组分非常接近。Gd x Y 1-x Ca 4 O(BO 3 ) 3 (Gd x Y 1-x COB) series borate crystals are a substitutional solid solution whose refractive index can change continuously, and thus can realize non-critical phase matching wavelength Continuously adjustable. This type of crystal has the advantages of moderate effective nonlinear optical coefficient, wide light transmission band, high laser damage threshold, large phase matching range, no deliquescence and stable physical and chemical properties. It is a kind of nonlinear optical crystal with excellent performance and has wide applications. prospect. The research shows that along the Y axis of Gd x Y 1-x COB series crystals, that is, the (90°, 90°) phase matching direction, non-critical phase matching type II frequency doubling and I Tripling-like and very close to crystal compositions that achieve non-critical phase-matched frequency doubling and tripling.

发明内容Contents of the invention

针对现有技术的不足,本实用新型提供了一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器。Aiming at the deficiencies of the prior art, the utility model provides an ultraviolet laser frequency converter with non-critical phase-matching frequency doubling and frequency tripling performances.

本实用新型用一块晶体先实现非临界倍频再实现非临界三倍频,获得355nm/351nm紫外光输出,成本低、体积小、加工便利,便于大规模推广。The utility model uses a crystal to first realize non-critical frequency multiplication and then non-critical triple frequency to obtain 355nm/351nm ultraviolet light output. The utility model has low cost, small volume, convenient processing, and is convenient for large-scale popularization.

术语解释Terminology Explanation

1、相位匹配:非线性光学频率变换过程中,入射光波在它经过的地方产生谐频极化波,这些谐频极化波在晶体中传播并且相互干涉,其结果就是测量到的谐波总强度。这个强度与各位置所产生的谐波相位差有关,如果相位差为零,即相位一致,则谐波得到有效加强;如果相位差不一致,则谐波将相互抵消;甚至完全观察不到谐波输出。显然,只有当入射光波的传播速度与谐波的传播速度相等时,晶体中各位置产生的谐波才因相位一致而相互加强,这种情况称为相位匹配。原理上说非线性光学晶体中三波互作用的相位匹配有两种类型:频率为ω1的光波与频率为ω2的光波具有相同的线偏振,则相位匹配为I类;反之,光波ω1与光波ω2具有正交的线偏振,则相位匹配为II类。1. Phase matching: In the process of nonlinear optical frequency conversion, the incident light wave generates harmonic polarized waves where it passes. These harmonic polarized waves propagate in the crystal and interfere with each other. The result is the measured harmonic total strength. This intensity is related to the harmonic phase difference generated by each position. If the phase difference is zero, that is, the phase is consistent, the harmonics will be effectively strengthened; if the phase difference is inconsistent, the harmonics will cancel each other out; even no harmonics can be observed at all. output. Obviously, only when the propagation speed of the incident light wave is equal to the propagation speed of the harmonic, the harmonics generated at each position in the crystal can strengthen each other because of the phase coincidence, which is called phase matching. In principle, there are two types of phase matching for the three-wave interaction in nonlinear optical crystals: the light wave with frequency ω 1 and the light wave with frequency ω 2 have the same linear polarization, and the phase matching is type I; otherwise, the light wave ω 1 With an orthogonal linear polarization to the light wave ω, the phase match is type II .

2、非临界相位匹配(NCPM):对双轴晶而言是指沿折射率主轴方向的相位匹配,其他情况下的相位匹配称为临界相位匹配(CPM)。与CPM相比,NCPM有容限角大,走离角为零以及晶体利用率高的优势,因此也称为最优相位匹配。2. Non-critical phase matching (NCPM): For biaxial crystals, it refers to the phase matching along the main axis of the refractive index, and the phase matching in other cases is called critical phase matching (CPM). Compared with CPM, NCPM has the advantages of large tolerance angle, zero walk-off angle and high crystal utilization, so it is also called optimal phase matching.

3、倍频(SHG):光学倍频又称光学二次谐波,是指由于光与非线性介质(一般是晶体)相互作用,使频率为ω的基频光转变为2ω的倍频光的现象。3. Frequency doubling (SHG): Optical frequency doubling, also known as optical second harmonic, refers to the transformation of the fundamental frequency light with a frequency of ω into a frequency doubled light of 2ω due to the interaction between light and a nonlinear medium (usually a crystal). The phenomenon.

4、三倍频(THG):三倍频又称光学三次谐波,是指频率为ω的基频光与频率为2ω的倍频光在晶体中相互作用,变为频率为3ω的光的现象。4. Triple frequency (THG): Triple frequency is also called optical third harmonic, which refers to the interaction between the fundamental frequency light with a frequency of ω and the frequency doubled light with a frequency of 2ω in the crystal to become light with a frequency of 3ω. Phenomenon.

5、波片:能使互相垂直的两光振动间产生附加光程差(或相位差)的光学器件。通常由具有精确厚度的石英、方解石或云母等双折射晶片做成,其光轴与晶片表面平行。5. Wave plate: An optical device that can generate an additional optical path difference (or phase difference) between two mutually perpendicular optical vibrations. Usually made of a birefringent wafer of precise thickness, such as quartz, calcite, or mica, with the optical axis parallel to the wafer surface.

6、四分之一波片:一定厚度的双折射单晶薄片。当法向入射的光透过时,寻常光(o光)和非常光(e光)之间的位相差等于π/2或其奇数倍,这样的晶片称为四分之一波片或1/4波片。当偏振光的入射振动面与波片光轴的夹角θ为45°时,通过四分之一波片的线偏振光变为圆偏振光,反之,当圆偏振光经过四分之一波片后,则变为线偏振光。当光两次通过四分之一波片时,作用相当于一个二分之一波片。6. Quarter wave plate: a birefringent single crystal sheet with a certain thickness. When the normal incident light passes through, the phase difference between ordinary light (o light) and extraordinary light (e light) is equal to π/2 or its odd multiple, such a wafer is called a quarter wave plate or 1/ 4 wave plates. When the angle θ between the incident vibration plane of the polarized light and the optical axis of the wave plate is 45°, the linearly polarized light passing through the quarter wave plate becomes circularly polarized light, otherwise, when the circularly polarized light passes through the quarter wave plate After the film, it becomes linearly polarized light. When light passes through the quarter-wave plate twice, it acts like a half-wave plate.

7、半波片:一定厚度的双折射晶体薄片。当法向入射的光透过时,寻常光(o光)和非常光(e光)之间的位相差等于π或其奇数倍,这样的晶片称为二分之一波片或1/2波片,简称半波片。线偏振光通过二分之一波片后,仍为线偏振光,但是,其出射偏振光的振动面与入射偏振光的振动面转过2θ。若θ=45°,则出射光的振动面与原入射光的振动面垂直,即当θ=45°时二分之一波片可以使偏振态旋转90°。7. Half-wave plate: a birefringent crystal sheet with a certain thickness. When the normal incident light passes through, the phase difference between ordinary light (o light) and extraordinary light (e light) is equal to π or its odd multiple, such a wafer is called a half wave plate or 1/2 wave film, referred to as half-wave film. After the linearly polarized light passes through the half-wave plate, it is still linearly polarized light, but the vibration plane of the outgoing polarized light and the vibration plane of the incident polarized light are rotated by 2θ. If θ=45°, the vibration plane of the outgoing light is perpendicular to the vibration plane of the original incident light, that is, when θ=45°, the half-wave plate can rotate the polarization state by 90°.

本实用新型的技术方案为:The technical scheme of the utility model is:

一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器,包括基频光源、缩束系统、第一反射镜、非线性光学晶体、四分之一波片、第二反射镜及滤波片,所述缩束系统、第一反射镜、非线性光学晶体、四分之一波片、第二反射镜从左到右依次沿光路安放,所述滤波片设置在所述第一反射镜的正下方;所述非线性光学晶体X轴和Z轴的角平分线,与基频光源产生的基频光的偏振方向的夹角为0-5°,所述四分之一波片的光轴方向与基频光源产生的基频光的偏振方向的夹角为0-5°;所述第一反射镜与光路的中心轴的夹角为35-55°;所述非线性光学晶体为GdxY1-xCOB晶体,当基频光源发出的基频光波长为1064nm时,x的取值范围为0.18-0.22,当基频光源发出的基频光波长为1053nm时,x的取值范围为0.11-0.15。An ultraviolet laser frequency converter with non-critical phase matching frequency doubling and frequency tripling performance, including fundamental frequency light source, beam shrinking system, first reflector, nonlinear optical crystal, quarter wave plate, second reflector mirror and filter, the beam shrinking system, the first reflector, the nonlinear optical crystal, the quarter-wave plate, and the second reflector are arranged along the optical path from left to right, and the filter is arranged on the first Directly below a reflecting mirror; the angle bisector of the X-axis and Z-axis of the nonlinear optical crystal and the polarization direction of the fundamental-frequency light produced by the fundamental-frequency light source are at an angle of 0-5°, and the quarter The angle between the optical axis direction of the wave plate and the polarization direction of the fundamental frequency light produced by the fundamental frequency light source is 0-5 °; the angle between the first reflector and the central axis of the optical path is 35-55 °; The linear optical crystal is Gd x Y 1-x COB crystal. When the wavelength of the fundamental frequency light emitted by the fundamental frequency light source is 1064nm, the value range of x is 0.18-0.22. When the fundamental frequency light wavelength emitted by the fundamental frequency light source is 1053nm , the value range of x is 0.11-0.15.

所述基频光源产生基频光,基频光通过缩束系统,以提高入射基频光的功率密度,入射基频光透过第一反射镜,进入非线性光学晶体,在非线性光学晶体中发生II类倍频作用,产生的倍频光和剩余基频光经过四分之一波片,入射到第二反射镜,发生全反射后按原光路返回,第二次经过四分之一波片,再次进入非线性晶体,通过四分之一波片的偏振旋转作用,倍频光与剩余基频光的Z轴分量相互作用,发生I类三倍频,产生的三倍频紫外光被第一反射镜反射,再经滤波片滤掉剩余基频光和倍频光,输出纯净的紫外激光。这样,通过四分之一波片的引入调节了倍频光的偏振方向,而基频光的偏振方向不变,实现紫外激光输出。The fundamental frequency light source generates fundamental frequency light, and the fundamental frequency light passes through the beam shrinkage system to increase the power density of the incident fundamental frequency light, and the incident fundamental frequency light passes through the first reflector and enters the nonlinear optical crystal, where Type II frequency doubling effect occurs in the middle, the generated frequency doubling light and the remaining fundamental frequency light pass through the quarter wave plate, enter the second reflector, return according to the original optical path after total reflection, and pass through the quarter wave plate for the second time The wave plate enters the nonlinear crystal again, through the polarization rotation of the quarter wave plate, the frequency doubled light interacts with the Z-axis component of the remaining fundamental frequency light, and a type I triple frequency occurs, resulting in triple frequency ultraviolet light It is reflected by the first reflector, and then the remaining fundamental frequency light and frequency doubled light are filtered out by a filter, and a pure ultraviolet laser is output. In this way, the polarization direction of the frequency-doubled light is adjusted by the introduction of the quarter-wave plate, while the polarization direction of the fundamental frequency light remains unchanged, thereby realizing ultraviolet laser output.

GdxY1-xCOB晶体具有一致熔融特性,可用提拉法进行大尺寸生长,并且具有高的光学质量。按照化学计量比配料后,进行混料烧料,然后将烧结的多晶料放入铱金坩埚,采用高温单晶提拉炉进行生长,长成GdxY1-xCOB单晶。晶体按照光学主轴进行定向,并沿Y轴方向切割,抛光,镀膜。因此类晶体用Y向籽晶生长,所以晶体利用率高。Gd x Y 1-x COB crystals have consistent melting properties, can be grown in large size by pulling method, and have high optical quality. After batching according to the stoichiometric ratio, the materials are mixed and fired, and then the sintered polycrystalline material is put into an iridium crucible, and a high-temperature single crystal pulling furnace is used for growth to grow into a Gd x Y 1-x COB single crystal. Crystals are oriented along the optical axis, cut, polished, and coated along the Y axis. Therefore, the quasi-crystal grows with the seed crystal in the Y direction, so the utilization rate of the crystal is high.

根据本实用新型优选的,所述非线性光学晶体X轴和Z轴的角平分线平行于基频光源产生的基频光的偏振方向,所述四分之一波片的光轴方向平行于基频光源产生的基频光的偏振方向。Preferably according to the present invention, the angle bisector of the X-axis and the Z-axis of the nonlinear optical crystal is parallel to the polarization direction of the fundamental-frequency light generated by the fundamental-frequency light source, and the direction of the optical axis of the quarter-wave plate is parallel to The polarization direction of the fundamental frequency light generated by the fundamental frequency light source.

根据本实用新型优选的,所述第一反射镜与光路的中心轴的夹角为45°。Preferably according to the present invention, the included angle between the first reflecting mirror and the central axis of the optical path is 45°.

根据本实用新型优选的,当基频光源发出的基频光波长为1064nm时,x=0.2;当基频光源发出的基频光波长为1053nm时,x=0.13。Preferably according to the present invention, when the wavelength of the fundamental frequency light emitted by the fundamental frequency light source is 1064nm, x=0.2; when the wavelength of the fundamental frequency light emitted by the fundamental frequency light source is 1053nm, x=0.13.

根据本实用新型优选的,所述紫外激光变频器还包括控温系统和电动旋转平台,所述控温系统包括控温盒,所述非线性光学晶体设置在所述控温盒内,所述电动旋转平台设置在所述控温盒下方。Preferably according to the present invention, the ultraviolet laser frequency converter also includes a temperature control system and an electric rotating platform, the temperature control system includes a temperature control box, the nonlinear optical crystal is arranged in the temperature control box, and the The electric rotating platform is arranged under the temperature control box.

此处设计的优势在于,控温系统和电动旋转平台的设置,以期找到最佳温度和最优相位匹配方向,获得更大紫外光输出。The advantage of the design here lies in the setting of the temperature control system and the electric rotating platform in order to find the best temperature and the best phase matching direction to obtain greater UV light output.

根据本实用新型优选的,所述控温系统的控温精度为±0.1℃,所述控温盒两通光端面设置有对紫外-红外宽光谱高透的石英玻璃;所述电动旋转平台的转动精度为0.00125°。石英玻璃防止热扩散,起到保温作用。Preferably according to the utility model, the temperature control accuracy of the temperature control system is ±0.1°C, and the two optical end faces of the temperature control box are provided with quartz glass with high transparency to the ultraviolet-infrared wide spectrum; the electric rotating platform The rotation accuracy is 0.00125°. Quartz glass prevents heat from spreading and acts as an insulator.

根据本实用新型优选的,所述缩束系统包括焦距不同的第一平凸透镜及第二平凸透镜;Preferably according to the present invention, the beam reduction system includes a first plano-convex lens and a second plano-convex lens with different focal lengths;

所述基频光源为Nd:YAG锁模激光器;The fundamental frequency light source is a Nd:YAG mode-locked laser;

所述第一反射镜镀有对1064nm和532nm激光高透、对355nm紫外光高反的介质膜;The first reflector is coated with a dielectric film that is highly transparent to 1064nm and 532nm lasers and highly reflective to 355nm ultraviolet light;

所述第二反射镜镀有对1064nm和532nm激光全反的介质膜;The second mirror is coated with a dielectric film that fully reflects the 1064nm and 532nm lasers;

所述非线性光学晶体为Y切Gd0.2Y0.8COB,所述非线性光学晶体按照折射率主轴X、Y、Z轴定向,尺寸为10mm×10mm×5mm,两个Y向通光面抛光并镀有1064nm、532nm、355nm三倍频增透膜;Y切Gd0.2Y0.8COB是指:通光方向为Y轴,沿垂直晶体Y轴平面切割抛光;The nonlinear optical crystal is a Y-cut Gd 0.2 Y 0.8 COB. The nonlinear optical crystal is oriented according to the axis X, Y, and Z of the refractive index, and the size is 10mm×10mm×5mm. The two Y-direction light-transmitting surfaces are polished and Coated with 1064nm, 532nm, 355nm triple frequency anti-reflection coating; Y-cut Gd 0.2 Y 0.8 COB means: the direction of light transmission is the Y-axis, cutting and polishing along the plane perpendicular to the Y-axis of the crystal;

所述四分之一波片为532nm云母四分之一波片;The quarter-wave plate is a 532nm mica quarter-wave plate;

所述滤波片由石英制成,镀有对1064nm和532nm激光高反、对355nm激光高透的介质膜。The filter is made of quartz, coated with a dielectric film with high reflection to 1064nm and 532nm lasers and high transparency to 355nm lasers.

根据本实用新型优选的,所述基频光源与所述缩束系统之间设置有法拉第旋光器;Preferably, according to the present invention, a Faraday rotator is arranged between the fundamental frequency light source and the beam reduction system;

所述缩束系统包括焦距不同的第一平凸透镜及第二平凸透镜;The beam reduction system includes a first plano-convex lens and a second plano-convex lens with different focal lengths;

所述基频光源为钕玻璃锁模激光器;The fundamental frequency light source is a neodymium glass mode-locked laser;

所述第一反射镜镀有对1053nm和526nm激光高透、对351nm紫外光高反的介质膜;The first mirror is coated with a dielectric film with high transparency to 1053nm and 526nm lasers and high reflection to 351nm ultraviolet light;

所述第二反射镜镀有对1053nm和526nm激光全反的介质膜;The second mirror is coated with a dielectric film that fully reflects the 1053nm and 526nm lasers;

所述非线性光学晶体为Y切Gd0.13Y0.87COB,所述非线性光学晶体按照折射率主轴X、Y、Z轴定向,尺寸为12nm×16mm×29mm,两个Y向通光面抛光并镀有1053nm基频、526nm倍频、351nm三倍频增透膜;Y切Gd0.13Y0.87COB是指:通光方向为Y轴,沿垂直晶体Y轴平面切割抛光;The nonlinear optical crystal is a Y-cut Gd 0.13 Y 0.87 COB. The nonlinear optical crystal is oriented according to the X, Y, and Z axes of the main axes of refractive index, and the size is 12nm×16mm×29mm. The two Y-direction light-transmitting surfaces are polished and Coated with 1053nm fundamental frequency, 526nm frequency doubling, 351nm triple frequency anti-reflection coating; Y-cut Gd 0.13 Y 0.87 COB means: the direction of light transmission is the Y-axis, cutting and polishing along the plane perpendicular to the Y-axis of the crystal;

所述四分之一波片为526nm云母四分之一波片;The quarter-wave plate is a 526nm mica quarter-wave plate;

所述滤波片由石英制成,镀有对1053nm和526nm激光高反、对351nm激光高透的介质膜。The filter is made of quartz, coated with a dielectric film with high reflection to 1053nm and 526nm lasers and high transparency to 351nm lasers.

上述紫外激光变频器的工作方法,具体步骤包括:The working method of the above-mentioned ultraviolet laser frequency converter, the specific steps include:

(1)所述基频光源产生基频光;保证其偏振方向与晶体X轴和Z轴的角平分线以及四分之一波片的光轴方向平行。(1) The fundamental-frequency light source generates fundamental-frequency light; ensure that its polarization direction is parallel to the angle bisector of the X-axis and Z-axis of the crystal and the direction of the optical axis of the quarter-wave plate.

(2)基频光通过所述缩束系统,透过所述第一反射镜,进入所述非线性光学晶体,在所述非线性光学晶体中发生II类倍频作用,产生偏振方向位于X轴的倍频光和剩余基频光经过所述四分之一波片,因基频光偏振方向与波片光轴平行,所以基频光偏振方向不变,而倍频光由于其偏振方向与波片光轴夹角为45°,由线偏振光变为圆偏振光,入射到第二反射镜,发生全反射后按原光路返回;(2) The fundamental frequency light passes through the beam shrinkage system, passes through the first reflector, enters the nonlinear optical crystal, and class II frequency doubling occurs in the nonlinear optical crystal, resulting in a polarization direction located at X The frequency doubled light of the axis and the remaining fundamental frequency light pass through the quarter wave plate, because the polarization direction of the fundamental frequency light is parallel to the optical axis of the wave plate, so the polarization direction of the fundamental frequency light remains unchanged, and the frequency doubled light is due to its polarization direction The included angle with the optical axis of the wave plate is 45°, from linearly polarized light to circularly polarized light, incident to the second reflector, and returning according to the original optical path after total reflection;

(3)第二次经过四分之一波片,基频光偏振方向仍然不变,但倍频光两次经过四分之一波片,此时四分之一波片起到半波片作用,倍频光偏振方向旋转90°于晶体Z轴,倍频光与基频光再次进入非线性晶体,通过四分之一波片的偏振旋转作用,倍频光与剩余基频光的Z轴分量相互作用,发生I类三倍频,产生的三倍频紫外光被第一反射镜反射,再经滤波片滤掉剩余基频光和倍频光,输出纯净的紫外激光。(3) After passing through the quarter-wave plate for the second time, the polarization direction of the fundamental frequency light remains unchanged, but the frequency-doubled light passes through the quarter-wave plate twice, and the quarter-wave plate acts as a half-wave plate at this time function, the polarization direction of the frequency-doubled light rotates 90° on the Z axis of the crystal, the frequency-doubled light and the fundamental frequency light enter the nonlinear crystal again, and through the polarization rotation of the quarter-wave plate, the Z of the frequency-doubled light and the remaining fundamental frequency light The axial components interact to generate a class I triple frequency, and the generated triple frequency ultraviolet light is reflected by the first mirror, and then the remaining fundamental frequency light and frequency double light are filtered out by a filter, and a pure ultraviolet laser is output.

本实用新型的有益效果为:The beneficial effects of the utility model are:

本实用新型通过四分之一波片解决三倍频的偏振匹配问题,使得一块GdxY1-xCOB可以同时作为倍频和三倍频晶体。所用四分之一波片等光学元件都已经发展成熟,目前市场上很容易购买,且价格远远低于非线性晶体,因此,制作成本远远低于目前使用两块非线性晶体的三倍频器件,且加工和组装更加便利。同时,非临界相位匹配的特性也使该器件晶体原料利用率高,较大的容限角降低了对基频光光束质量的要求,提高了输出稳定性,有利于大规模生产和应用。The utility model solves the polarization matching problem of triple frequency through a quarter wave plate, so that a piece of Gd x Y 1-x COB can be used as a frequency double and triple frequency crystal at the same time. The optical components such as the quarter-wave plate used have been developed and mature, and are easy to purchase in the market, and the price is far lower than that of nonlinear crystals. Therefore, the production cost is far lower than three times that of using two nonlinear crystals at present. Frequency devices, and more convenient processing and assembly. At the same time, the characteristics of non-critical phase matching also make the crystal material utilization rate of the device high, and the large tolerance angle reduces the requirements on the quality of the fundamental frequency light beam, improves the output stability, and is conducive to large-scale production and application.

附图说明Description of drawings

图1(a)为现有的三倍频实现方式的示意图;Figure 1(a) is a schematic diagram of an existing triple frequency implementation;

图1(a)中,先用一块非线性光学晶体进行红外基频光ω的倍频,所产生的倍频光2ω与剩余基频光ω再在另一块非线性光学晶体中和频,最终实现紫外光3ω输出。In Figure 1(a), a nonlinear optical crystal is used to double the frequency of the infrared fundamental frequency light ω first, and the frequency doubled light 2ω generated and the remaining fundamental frequency light ω are neutralized in another nonlinear optical crystal, and finally Achieve UV 3ω output.

图1(b)为本实用新型三倍频实现方式的示意图;Fig. 1 (b) is the schematic diagram of the triple frequency realization mode of the present invention;

图1(b)中,倍频发生后,通过四分之一波片,改变倍频光的偏振态,通过第二反射镜的全反射后再次通过四分之一波片和晶体,使得所需偏振态的倍频光(2ω)与剩余基频光(ω)分量在晶体中和频,并通过第一反射镜反射作用,最终实现紫外光(3ω)输出。In Figure 1(b), after the frequency doubling occurs, the polarization state of the frequency-doubled light is changed through the quarter-wave plate, and then passes through the quarter-wave plate and the crystal again after total reflection by the second mirror, so that all The doubled frequency light (2ω) and the remaining fundamental frequency light (ω) components in the required polarization state are summed in the crystal, and reflected by the first mirror to finally realize the output of ultraviolet light (3ω).

图2(a)为II类倍频发生时基频光和倍频光偏振示意图;Figure 2(a) is a schematic diagram of the polarization of fundamental frequency light and frequency doubled light when type II frequency doubling occurs;

图2(a)中,基频光进入晶体后,发生正交分解,实现II类倍频,产生的倍频光偏振方向位于晶体X轴。In Figure 2(a), after the fundamental frequency light enters the crystal, it undergoes orthogonal decomposition to realize Type II frequency doubling, and the polarization direction of the generated frequency doubling light is located on the X-axis of the crystal.

图2(b)为I类三倍频发生时基频光、倍频光和三倍频紫外光偏振示意图。Fig. 2(b) is a schematic diagram of polarization of fundamental frequency light, frequency doubled light and tripled frequency ultraviolet light when type I triple frequency occurs.

图2(b)中,经过四分之一波片作用和第二反射镜反射,基频光和偏振方向旋转90°后到Z轴的倍频光再次进入晶体中,倍频光与基频光Z轴分量作用,实现I类三倍频,产生的三倍频紫外光偏振方向位于X轴。In Figure 2(b), after the action of the quarter-wave plate and the reflection of the second mirror, the fundamental frequency light and the polarization direction are rotated by 90° to the frequency-doubled light on the Z axis to enter the crystal again, and the frequency-doubled light and the fundamental frequency The Z-axis component of the light acts to realize Class I triple frequency, and the polarization direction of the generated triple-frequency ultraviolet light is located on the X axis.

图3为本实用新型实施例1所述的紫外激光变频器的结构示意图;FIG. 3 is a schematic structural view of the ultraviolet laser frequency converter described in Embodiment 1 of the present invention;

图4为本实用新型实施例2所述的紫外激光变频器的结构示意图;Fig. 4 is a schematic structural diagram of the ultraviolet laser frequency converter described in Embodiment 2 of the present invention;

图5为本实用新型实施例3所述的紫外激光变频器的结构示意图;Fig. 5 is a schematic structural diagram of the ultraviolet laser frequency converter described in Embodiment 3 of the present invention;

图6为本实用新型实施例3所述的紫外激光变频器的实测输出光谱图。FIG. 6 is a measured output spectrum diagram of the ultraviolet laser converter described in Embodiment 3 of the present invention.

其中,1、基频光源;2、第一平凸透镜;3、第二平凸透镜;4、第一反射镜;5、非线性光学晶体;6、四分之一波片;7、第二反射镜;8、滤波片;9、控温盒;10、电动旋转平台;11、法拉第旋光器。Among them, 1. fundamental frequency light source; 2. first plano-convex lens; 3. second plano-convex lens; 4. first reflector; 5. nonlinear optical crystal; 6. quarter-wave plate; 7. second reflector Mirror; 8. Filter; 9. Temperature control box; 10. Electric rotating platform; 11. Faraday rotator.

具体实施方式detailed description

下面结合说明书附图和实施例对本实用新型作进一步限定,但不限于此。The utility model will be further limited below in conjunction with the accompanying drawings and embodiments, but not limited thereto.

实施例1Example 1

一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器,包括基频光源1、缩束系统、第一反射镜4、非线性光学晶体5、四分之一波片6、第二反射镜7及滤波片8,所述缩束系统、第一反射镜4、非线性光学晶体5、四分之一波片6、第二反射镜7从左到右依次沿光路安放,所述滤波片8设置在所述第一反射镜4的正下方;所述非线性光学晶体5X轴和Z轴的角平分线平行于基频光源1产生的基频光的偏振方向,所述四分之一波片6的光轴方向平行于基频光源1产生的基频光的偏振方向。所述第一反射镜4与光路的中心轴的夹角为45°。An ultraviolet laser frequency converter with non-critical phase matching frequency doubling and frequency tripling performance, including a fundamental frequency light source 1, a beam shrinking system, a first mirror 4, a nonlinear optical crystal 5, and a quarter-wave plate 6 , the second reflector 7 and the filter plate 8, the beam shrinking system, the first reflector 4, the nonlinear optical crystal 5, the quarter wave plate 6, and the second reflector 7 are placed along the optical path in sequence from left to right , the filter 8 is arranged directly below the first reflector 4; the bisector of the angle of the X axis and the Z axis of the nonlinear optical crystal 5 is parallel to the polarization direction of the fundamental frequency light generated by the fundamental frequency light source 1, so The direction of the optical axis of the quarter wave plate 6 is parallel to the polarization direction of the fundamental frequency light generated by the fundamental frequency light source 1 . The included angle between the first reflecting mirror 4 and the central axis of the optical path is 45°.

所述基频光源1产生基频光,基频光通过缩束系统,以提高入射基频光的功率密度,入射基频光透过第一反射镜4,进入非线性光学晶体5,在非线性光学晶体5中发生II类倍频作用,产生的倍频光和剩余基频光经过四分之一波片6,入射到第二反射镜7,发生全反射后按原光路返回,第二次经过四分之一波片6,再次进入非线性晶体5,通过四分之一波片6的偏振旋转作用,倍频光与剩余基频光的Z轴分量相互作用,发生I类三倍频,产生的三倍频紫外光被第一反射镜4反射,再经滤波片8滤掉剩余基频光和倍频光,输出纯净的紫外激光。这样,通过四分之一波片6的引入调节了倍频光的偏振方向,而基频光的偏振方向不变,实现紫外激光输出。本发明三倍频实现方式的示意图如图1(b)所示。II类倍频发生时基频光和倍频光偏振示意图如图2(a)所示;I类三倍频发生时基频光、倍频光和三倍频紫外光偏振示意图如图2(b)所示;The fundamental frequency light source 1 generates fundamental frequency light, and the fundamental frequency light passes through the beam shrinkage system to increase the power density of the incident fundamental frequency light, and the incident fundamental frequency light passes through the first reflector 4 and enters the nonlinear optical crystal 5, where The type II frequency doubling effect occurs in the linear optical crystal 5, and the generated frequency doubling light and the remaining fundamental frequency light pass through the quarter-wave plate 6 and are incident on the second reflector 7. After total reflection, they return according to the original optical path. After passing through the quarter-wave plate 6 for the first time, it enters the nonlinear crystal 5 again, and through the polarization rotation of the quarter-wave plate 6, the frequency doubled light interacts with the Z-axis component of the remaining fundamental frequency light, and a type I triple frequency, the generated triple frequency ultraviolet light is reflected by the first reflector 4, and then the remaining fundamental frequency light and frequency doubled light are filtered out by the filter plate 8, and a pure ultraviolet laser is output. In this way, the introduction of the quarter-wave plate 6 adjusts the polarization direction of the frequency-doubled light, while the polarization direction of the fundamental-frequency light remains unchanged, thereby realizing ultraviolet laser output. A schematic diagram of an implementation manner of triple frequency in the present invention is shown in FIG. 1( b ). The schematic diagram of polarization of fundamental frequency light and doubled frequency light when type II frequency doubling occurs is shown in Figure 2(a); the schematic diagram of polarization of fundamental frequency light, frequency doubled light and tripled frequency ultraviolet light when type I triple frequency occurs is shown in Figure 2 ( b) shown;

GdxY1-xCOB晶体具有一致熔融特性,可用提拉法进行大尺寸生长,并且具有高的光学质量。按照化学计量比配料后,进行混料烧料,然后将烧结的多晶料放入铱金坩埚,采用高温单晶提拉炉进行生长,长成GdxY1-xCOB单晶。晶体按照光学主轴进行定向,并沿Y轴方向切割,抛光,镀膜。因此类晶体用Y向籽晶生长,所以晶体利用率高。Gd x Y 1-x COB crystals have consistent melting properties, can be grown in large size by pulling method, and have high optical quality. After batching according to the stoichiometric ratio, the materials are mixed and fired, and then the sintered polycrystalline material is put into an iridium crucible, and a high-temperature single crystal pulling furnace is used for growth to grow into a Gd x Y 1-x COB single crystal. Crystals are oriented along the optical axis, cut, polished, and coated along the Y axis. Therefore, the quasi-crystal grows with the seed crystal in the Y direction, so the utilization rate of the crystal is high.

所述缩束系统包括焦距不同的第一平凸透镜2及第二平凸透镜3;The beam reduction system includes a first plano-convex lens 2 and a second plano-convex lens 3 with different focal lengths;

所述基频光源1为Nd:YAG锁模激光器,Nd:YAG锁模激光器发出的基频光波长为1064nm,x=0.2。The fundamental-frequency light source 1 is a Nd:YAG mode-locked laser, and the wavelength of the fundamental-frequency light emitted by the Nd:YAG mode-locked laser is 1064 nm, and x=0.2.

所述第一反射镜4镀有对1064nm和532nm激光高透、对355nm紫外光高反的介质膜;The first reflector 4 is coated with a dielectric film that is highly transparent to 1064nm and 532nm lasers and highly reflective to 355nm ultraviolet light;

所述第二反射镜7镀有对1064nm和532nm激光全反的介质膜;The second mirror 7 is coated with a dielectric film that fully reflects the 1064nm and 532nm lasers;

所述非线性光学晶体5为Y切Gd0.2Y0.8COB,所述非线性光学晶体5按照折射率主轴X、Y、Z轴定向,尺寸为10mm×10mm×5mm,两个Y向通光面抛光并镀有1064nm、532nm、355nm三倍频增透膜;Y切Gd0.2Y0.8COB是指:通光方向为Y轴,沿垂直晶体Y轴平面切割抛光;The nonlinear optical crystal 5 is a Y-cut Gd 0.2 Y 0.8 COB, and the nonlinear optical crystal 5 is oriented according to the axis X, Y, and Z of the main axis of the refractive index, with a size of 10mm×10mm×5mm, and two Y-directed light-passing surfaces Polished and coated with 1064nm, 532nm, 355nm triple-frequency anti-reflection coating; Y-cut Gd 0.2 Y 0.8 COB means: the direction of light transmission is the Y-axis, and the crystal is cut and polished along the plane perpendicular to the Y-axis of the crystal;

所述四分之一波片6为532nm云母四分之一波片;The quarter-wave plate 6 is a 532nm mica quarter-wave plate;

所述滤波片8由石英制成,镀有对1064nm和532nm激光高反、对355nm激光高透的介质膜。The filter 8 is made of quartz, coated with a dielectric film that is highly reflective to 1064nm and 532nm lasers and highly transparent to 355nm lasers.

本实施例所述紫外激光变频器的结构示意图如图3所示。The structural schematic diagram of the ultraviolet laser frequency converter described in this embodiment is shown in FIG. 3 .

实施例2Example 2

根据实施例1所述的一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器,其区别在于,所述紫外激光变频器还包括控温系统和电动旋转平台10,所述控温系统包括控温盒9,所述非线性光学晶体5设置在所述控温盒9内,所述电动旋转平台10设置在所述控温盒9下方。According to embodiment 1, an ultraviolet laser frequency converter with non-critical phase matching frequency doubling and triple frequency performance, the difference is that the ultraviolet laser frequency converter also includes a temperature control system and an electric rotating platform 10, so The temperature control system includes a temperature control box 9 , the nonlinear optical crystal 5 is set inside the temperature control box 9 , and the electric rotating platform 10 is set under the temperature control box 9 .

此处设计的优势在于,控温系统和电动旋转平台10的设置,以期找到最佳温度和最优相位匹配方向,获得更大紫外光输出。The advantage of the design here is that the temperature control system and the setting of the electric rotating platform 10 are expected to find the best temperature and the best phase matching direction to obtain greater output of ultraviolet light.

所述控温系统的控温精度为±0.1℃,所述控温盒9两通光端面设置有对紫外-红外宽光谱高透的石英玻璃;所述电动旋转平台10的转动精度为0.00125°。石英玻璃防止热扩散,起到保温作用。The temperature control accuracy of the temperature control system is ±0.1°C, and the two optical end faces of the temperature control box 9 are provided with quartz glass that is highly transparent to the ultraviolet-infrared wide spectrum; the rotation accuracy of the electric rotating platform 10 is 0.00125° . Quartz glass prevents heat from spreading and acts as an insulator.

本实施例所述紫外激光变频器的结构示意图如图4所示。A schematic structural diagram of the ultraviolet laser frequency converter described in this embodiment is shown in FIG. 4 .

实施例3Example 3

一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器,包括基频光源1、缩束系统、第一反射镜4、非线性光学晶体5、四分之一波片6、第二反射镜7及滤波片8,所述缩束系统、第一反射镜4、非线性光学晶体5、四分之一波片6、第二反射镜7从左到右依次沿光路安放,所述滤波片8设置在所述第一反射镜4的正下方;所述非线性光学晶体5X轴和Z轴的角平分线平行于基频光源1产生的基频光的偏振方向,所述四分之一波片6的光轴方向平行于基频光源1产生的基频光的偏振方向。所述第一反射镜4与光路的中心轴的夹角为45°。An ultraviolet laser frequency converter with non-critical phase matching frequency doubling and frequency tripling performance, including a fundamental frequency light source 1, a beam shrinking system, a first mirror 4, a nonlinear optical crystal 5, and a quarter-wave plate 6 , the second reflector 7 and the filter plate 8, the beam shrinking system, the first reflector 4, the nonlinear optical crystal 5, the quarter wave plate 6, and the second reflector 7 are placed along the optical path in sequence from left to right , the filter 8 is arranged directly below the first reflector 4; the bisector of the angle of the X axis and the Z axis of the nonlinear optical crystal 5 is parallel to the polarization direction of the fundamental frequency light generated by the fundamental frequency light source 1, so The direction of the optical axis of the quarter wave plate 6 is parallel to the polarization direction of the fundamental frequency light generated by the fundamental frequency light source 1 . The included angle between the first reflecting mirror 4 and the central axis of the optical path is 45°.

所述基频光源1产生基频光,基频光通过缩束系统,以提高入射基频光的功率密度,入射基频光透过第一反射镜4,进入非线性光学晶体5,在非线性光学晶体5中发生II类倍频作用,产生的倍频光和剩余基频光经过四分之一波片6,入射到第二反射镜7,发生全反射后按原光路返回,第二次经过四分之一波片6,再次进入非线性晶体5,通过四分之一波片6的偏振旋转作用,倍频光与剩余基频光的Z轴分量相互作用,发生I类三倍频,产生的三倍频紫外光被第一反射镜4反射,再经滤波片8滤掉剩余基频光和倍频光,输出纯净的紫外激光。这样,通过四分之一波片6的引入调节了倍频光的偏振方向,而基频光的偏振方向不变,实现紫外激光输出。The fundamental frequency light source 1 generates fundamental frequency light, and the fundamental frequency light passes through the beam shrinkage system to increase the power density of the incident fundamental frequency light, and the incident fundamental frequency light passes through the first reflector 4 and enters the nonlinear optical crystal 5, where The type II frequency doubling effect occurs in the linear optical crystal 5, and the generated frequency doubling light and the remaining fundamental frequency light pass through the quarter-wave plate 6 and are incident on the second reflector 7. After total reflection, they return according to the original optical path. After passing through the quarter-wave plate 6 for the first time, it enters the nonlinear crystal 5 again, and through the polarization rotation of the quarter-wave plate 6, the frequency-doubled light interacts with the Z-axis component of the remaining fundamental frequency light, and a type I triple frequency, the generated triple frequency ultraviolet light is reflected by the first reflector 4, and then the remaining fundamental frequency light and frequency doubled light are filtered out by the filter plate 8, and a pure ultraviolet laser is output. In this way, the introduction of the quarter-wave plate 6 adjusts the polarization direction of the frequency-doubled light, while the polarization direction of the fundamental-frequency light remains unchanged, thereby realizing ultraviolet laser output.

GdxY1-xCOB晶体具有一致熔融特性,可用提拉法进行大尺寸生长,并且具有高的光学质量。按照化学计量比配料后,进行混料烧料,然后将烧结的多晶料放入铱金坩埚,采用高温单晶提拉炉进行生长,长成GdxY1-xCOB单晶。晶体按照光学主轴进行定向,并沿Y轴方向切割,抛光,镀膜。因此类晶体用Y向籽晶生长,所以晶体利用率高。Gd x Y 1-x COB crystals have consistent melting properties, can be grown in large size by pulling method, and have high optical quality. After batching according to the stoichiometric ratio, the materials are mixed and fired, and then the sintered polycrystalline material is put into an iridium crucible, and a high-temperature single crystal pulling furnace is used for growth to grow into a Gd x Y 1-x COB single crystal. Crystals are oriented along the optical axis, cut, polished, and coated along the Y axis. Therefore, the quasi-crystal grows with the seed crystal in the Y direction, so the utilization rate of the crystal is high.

所述基频光源1与所述缩束系统之间设置有法拉第旋光器11;A Faraday rotator 11 is arranged between the fundamental frequency light source 1 and the beam reduction system;

所述缩束系统包括焦距不同的第一平凸透镜2及第二平凸透镜3;The beam reduction system includes a first plano-convex lens 2 and a second plano-convex lens 3 with different focal lengths;

所述基频光源1为钕玻璃锁模激光器,钕玻璃锁模激光器发出的基频光波长为1053nm;The fundamental frequency light source 1 is a neodymium glass mode-locked laser, and the wavelength of the fundamental frequency light emitted by the neodymium glass mode-locked laser is 1053nm;

所述第一反射镜4镀有对1053nm和526nm激光高透、对351nm紫外光高反的介质膜;The first mirror 4 is coated with a dielectric film with high transparency to 1053nm and 526nm lasers and high reflection to 351nm ultraviolet light;

所述第二反射镜7镀有对1053nm和526nm激光全反的介质膜;The second mirror 7 is coated with a dielectric film that fully reflects the 1053nm and 526nm lasers;

所述非线性光学晶体5为Y切Gd0.13Y0.87COB,所述非线性光学晶体5按照折射率主轴X、Y、Z轴定向,尺寸为12nm×16mm×29mm,两个Y向通光面抛光并镀有1053nm基频、526nm倍频、351nm三倍频增透膜;Y切Gd0.13Y0.87COB是指:通光方向为Y轴,沿垂直晶体Y轴平面切割抛光;The nonlinear optical crystal 5 is a Y-cut Gd 0.13 Y 0.87 COB, and the nonlinear optical crystal 5 is oriented according to the axis X, Y, and Z of the main axis of the refractive index, with a size of 12nm×16mm×29mm, and two Y-direction light-passing surfaces Polished and coated with 1053nm fundamental frequency, 526nm frequency multiplier, and 351nm triple frequency anti-reflection coating; Y-cut Gd 0.13 Y 0.87 COB means: the direction of light transmission is the Y-axis, and the plane is cut and polished along the vertical crystal Y-axis;

所述四分之一波片6为526nm云母四分之一波片;The quarter-wave plate 6 is a 526nm mica quarter-wave plate;

本实施例所述紫外激光变频器的结构示意图如图5所示。A schematic structural diagram of the ultraviolet laser frequency converter described in this embodiment is shown in FIG. 5 .

本实施例所述的紫外激光变频器的实测输出光谱图如图6所示;图6中,当1053nm三倍频实现时,由光谱仪测得所输出紫外光的光谱图,中心波长位于351纳米,证明三倍频得以实现。The measured output spectrogram of the ultraviolet laser frequency converter described in the present embodiment is as shown in Figure 6; in Fig. 6, when 1053nm triple frequency is realized, the spectrogram of output ultraviolet light is measured by the spectrometer, and the center wavelength is positioned at 351 nanometers , proving that triple frequency can be achieved.

Claims (8)

1.一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器,其特征在于,包括基频光源、缩束系统、第一反射镜、非线性光学晶体、四分之一波片、第二反射镜及滤波片,所述缩束系统、第一反射镜、非线性光学晶体、四分之一波片、第二反射镜从左到右依次沿光路安放,所述滤波片设置在所述第一反射镜的正下方;所述非线性光学晶体X轴和Z轴的角平分线,与基频光源产生的基频光的偏振方向的夹角为0-5°,所述四分之一波片的光轴方向与基频光源产生的基频光的偏振方向的夹角为0-5°;所述第一反射镜与光路的中心轴的夹角为35-55°;所述非线性光学晶体为GdxY1-xCOB晶体,当基频光源发出的基频光波长为1064nm时,x的取值范围为0.18-0.22,当基频光源发出的基频光波长为1053nm时,x的取值范围为0.11-0.15。1. An ultraviolet laser frequency converter with non-critical phase matching frequency doubling and frequency tripling performance, characterized in that it includes a fundamental frequency light source, a beam reduction system, a first reflector, a nonlinear optical crystal, a quarter A wave plate, a second mirror and a filter, the beam shrinking system, the first mirror, a nonlinear optical crystal, a quarter wave plate, and the second mirror are arranged along the optical path from left to right in sequence, and the filter The sheet is arranged directly below the first reflecting mirror; the angle bisector of the X-axis and the Z-axis of the nonlinear optical crystal and the polarization direction of the fundamental-frequency light generated by the fundamental-frequency light source are at an angle of 0-5°, The included angle between the optical axis direction of the quarter wave plate and the polarization direction of the fundamental frequency light generated by the fundamental frequency light source is 0-5°; the included angle between the first reflector and the central axis of the optical path is 35- 55°; the nonlinear optical crystal is Gd x Y 1-x COB crystal, when the wavelength of the fundamental frequency light emitted by the fundamental frequency light source is 1064nm, the value range of x is 0.18-0.22, when the fundamental frequency light emitted by the fundamental frequency light source When the frequency light wavelength is 1053nm, the value range of x is 0.11-0.15. 2.根据权利要求1所述的一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器,其特征在于,所述非线性光学晶体X轴和Z轴的角平分线平行于基频光源产生的基频光的偏振方向,所述四分之一波片的光轴方向平行于基频光源产生的基频光的偏振方向。2. An ultraviolet laser frequency converter with non-critical phase matching frequency doubling and frequency tripling performance according to claim 1, characterized in that the bisectors of the X-axis and the Z-axis of the nonlinear optical crystal are parallel Based on the polarization direction of the fundamental frequency light generated by the fundamental frequency light source, the direction of the optical axis of the quarter wave plate is parallel to the polarization direction of the fundamental frequency light generated by the fundamental frequency light source. 3.根据权利要求1所述的一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器,其特征在于,所述第一反射镜与光路的中心轴的夹角为45°。3. A UV laser frequency converter with non-critical phase matching frequency doubling and frequency tripling performance according to claim 1, characterized in that the angle between the first reflector and the central axis of the optical path is 45° °. 4.根据权利要求1所述的一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器,其特征在于,当基频光源发出的基频光波长为1064nm时,x=0.2;当基频光源发出的基频光波长为1053nm时,x=0.13。4. A kind of ultraviolet laser converter with non-critical phase matching frequency multiplication and triple frequency performance according to claim 1, characterized in that, when the wavelength of the fundamental frequency light emitted by the fundamental frequency light source is 1064nm, x= 0.2; when the wavelength of the fundamental frequency light emitted by the fundamental frequency light source is 1053nm, x=0.13. 5.根据权利要求1所述的一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器,其特征在于,所述紫外激光变频器还包括控温系统和电动旋转平台,所述控温系统包括控温盒,所述非线性光学晶体设置在所述控温盒内,所述电动旋转平台设置在所述控温盒下方。5. An ultraviolet laser frequency converter with non-critical phase matching frequency doubling and frequency tripling performance according to claim 1, characterized in that, the ultraviolet laser frequency converter also includes a temperature control system and an electric rotating platform, The temperature control system includes a temperature control box, the nonlinear optical crystal is arranged in the temperature control box, and the electric rotating platform is arranged under the temperature control box. 6.根据权利要求5所述的一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器,其特征在于,所述控温系统的控温精度为±0.1℃,所述控温盒两通光端面设置有对紫外-红外宽光谱高透的石英玻璃;所述电动旋转平台的转动精度为0.00125°。6. An ultraviolet laser frequency converter with non-critical phase matching frequency doubling and frequency tripling performance according to claim 5, characterized in that, the temperature control accuracy of the temperature control system is ±0.1°C, and the The two optical ends of the temperature control box are equipped with quartz glass that is highly transparent to the ultraviolet-infrared wide spectrum; the rotation accuracy of the electric rotating platform is 0.00125°. 7.根据权利要求1所述的一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器,其特征在于,所述缩束系统包括焦距不同的第一平凸透镜及第二平凸透镜;7. An ultraviolet laser frequency converter with non-critical phase-matching frequency doubling and frequency tripling performance according to claim 1, characterized in that the beam shrinking system includes a first plano-convex lens and a second plano-convex lens with different focal lengths plano-convex lens; 所述基频光源为Nd:YAG锁模激光器;The fundamental frequency light source is a Nd:YAG mode-locked laser; 所述第一反射镜镀有对1064nm和532nm激光高透、对355nm紫外光高反的介质膜;The first reflector is coated with a dielectric film that is highly transparent to 1064nm and 532nm lasers and highly reflective to 355nm ultraviolet light; 所述第二反射镜镀有对1064nm和532nm激光全反的介质膜;The second mirror is coated with a dielectric film that fully reflects the 1064nm and 532nm lasers; 所述非线性光学晶体为Y切Gd0.2Y0.8COB,所述非线性光学晶体按照折射率主轴X、Y、Z轴定向,尺寸为10mm×10mm×5mm,两个Y向通光面抛光并镀有1064nm、532nm、355nm三倍频增透膜;The nonlinear optical crystal is a Y-cut Gd 0.2 Y 0.8 COB. The nonlinear optical crystal is oriented according to the axis X, Y, and Z of the refractive index, and the size is 10mm×10mm×5mm. The two Y-direction light-transmitting surfaces are polished and Coated with 1064nm, 532nm, 355nm triple frequency anti-reflection coating; 所述四分之一波片为532nm云母四分之一波片;The quarter-wave plate is a 532nm mica quarter-wave plate; 所述滤波片镀有对1064nm和532nm激光高反、对355nm激光高透的介质膜。The filter is coated with a dielectric film that is highly reflective to 1064nm and 532nm lasers and highly transparent to 355nm lasers. 8.根据权利要求1所述的一种兼具非临界相位匹配倍频、三倍频性能的紫外激光变频器,其特征在于,所述基频光源与所述缩束系统之间设置有法拉第旋光器;8. An ultraviolet laser frequency converter with non-critical phase matching frequency doubling and frequency tripling performance according to claim 1, characterized in that a Faraday optical rotator; 所述缩束系统包括焦距不同的第一平凸透镜及第二平凸透镜;The beam reduction system includes a first plano-convex lens and a second plano-convex lens with different focal lengths; 所述基频光源为钕玻璃锁模激光器;The fundamental frequency light source is a neodymium glass mode-locked laser; 所述第一反射镜镀有对1053nm和526nm激光高透、对351nm紫外光高反的介质膜;The first mirror is coated with a dielectric film with high transparency to 1053nm and 526nm lasers and high reflection to 351nm ultraviolet light; 所述第二反射镜镀有对1053nm和526nm激光全反的介质膜;The second mirror is coated with a dielectric film that fully reflects the 1053nm and 526nm lasers; 所述非线性光学晶体为Y切Gd0.13Y0.87COB,所述非线性光学晶体按照折射率主轴X、Y、Z轴定向,尺寸为12nm×16mm×29mm,两个Y向通光面抛光并镀有1053nm基频、526nm倍频、351nm三倍频增透膜;The nonlinear optical crystal is a Y-cut Gd 0.13 Y 0.87 COB. The nonlinear optical crystal is oriented according to the X, Y, and Z axes of the main axes of refractive index, and the size is 12nm×16mm×29mm. The two Y-direction light-transmitting surfaces are polished and Coated with 1053nm fundamental frequency, 526nm frequency doubling, 351nm triple frequency anti-reflection coating; 所述四分之一波片为526nm云母四分之一波片;The quarter-wave plate is a 526nm mica quarter-wave plate; 所述滤波片镀有对1053nm和526nm激光高反、对351nm激光高透的介质膜。The filter is coated with a dielectric film that is highly reflective to 1053nm and 526nm lasers and highly transparent to 351nm lasers.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105549295A (en) * 2016-03-14 2016-05-04 山东大学 Ultraviolet laser frequency converter with noncritical phase matching frequency doubling and three-frequency doubling performance and work method of ultraviolet laser frequency converter
CN114164491A (en) * 2021-11-24 2022-03-11 山东大学 Ion-doped gadolinium gallium garnet crystal and preparation method and application thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105549295A (en) * 2016-03-14 2016-05-04 山东大学 Ultraviolet laser frequency converter with noncritical phase matching frequency doubling and three-frequency doubling performance and work method of ultraviolet laser frequency converter
CN105549295B (en) * 2016-03-14 2019-01-04 山东大学 It is a kind of to have both noncritical phase matching frequency multiplication, the ultraviolet laser frequency conversion device of frequency tripling performance and its working method
CN114164491A (en) * 2021-11-24 2022-03-11 山东大学 Ion-doped gadolinium gallium garnet crystal and preparation method and application thereof

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