CN105549295B - It is a kind of to have both noncritical phase matching frequency multiplication, the ultraviolet laser frequency conversion device of frequency tripling performance and its working method - Google Patents
It is a kind of to have both noncritical phase matching frequency multiplication, the ultraviolet laser frequency conversion device of frequency tripling performance and its working method Download PDFInfo
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Abstract
Noncritical phase matching frequency multiplication, the ultraviolet laser frequency conversion device of frequency tripling performance and its working method are had both the present invention relates to a kind of, including fundamental frequency light source, shrink beam system, the first reflecting mirror, nonlinear optical crystal, quarter-wave plate, the second reflecting mirror and filter plate, the angular bisector of nonlinear optical crystal X-axis and Z axis, angle with the polarization direction of fundamental frequency light is 0-5 °, and the angle of the polarization direction of the optical axis direction and fundamental frequency light of quarter-wave plate is 0-5 °；The angle of first reflecting mirror and the central axis of optical path is 35-55 °；Nonlinear optical crystal is GdxY1‑xCOB crystal, as a length of 1064nm of fundamental light wave, the value range of x is 0.18-0.22, and as a length of 1053nm of fundamental light wave, the value range of x is 0.11-0.15.The invention enables one piece of GdxY1‑xCOB is used as frequency multiplication and frequency tripling crystal, low manufacture cost simultaneously.
Description
Technical field
Noncritical phase matching frequency multiplication, the ultraviolet laser frequency conversion device of frequency tripling performance and its work are had both the present invention relates to a kind of
Make method, belongs to laser and nonlinear optical technology field.
Background technique
In modern technologies, laser is played an increasingly important role.Wherein, all-solid-state ultraviolet laser is micro- in laser
The fields such as processing (drilling, cutting and corrosion), laser chemistry, optics engraving, rapid shaping, laser printing and spectroscopy suffer from
Very important application.Since the wavelength of practical solid state laser is all located at greatly infrared spectral region, in order to obtain ultraviolet light, need
Frequency transformation carried out to infrared laser with nonlinear optical crystal, this method have high-efficient, good beam quality, it is small in size,
The advantages that stability height and long service life.Currently, most common technology path is to neodymium-doped yttrium-aluminum garnet or nd glass laser
(1064nm/1053nm) carries out frequency tripling, to obtain the ultraviolet output of 355nm/351nm, this process includes two steps: first
The frequency multiplication of infrared fundamental frequency light, generated frequency doubling green light (532nm/526nm) and residue are carried out with one block of nonlinear optical crystal
Fundamental frequency light is final to realize the ultraviolet light output of 355nm/351nm again in another block of nonlinear optical crystal and frequency.Such as Fig. 1 (a) institute
Show, two pieces of crystal are used separately as frequency multiplication and frequency tripling crystal.Currently, common frequency-doubling crystal is KH2PO4(KDP)、KTiOPO4
(KTP) and LiB3O5(LBO), frequency tripling crystal is KDP, LBO and β-BaB2O4(BBO).Even if frequency multiplication and frequency tripling use
Same crystal, so space corner cut is different, therefore, inevitably uses two pieces of crystalline substances due to phase matched direction difference
Body, so that raw material and processing cost be made to greatly improve.
To realize that one block of nonlinear crystal directly exports frequency tripling light, it is necessary to solve two critical issues.(1) it is suitable to find
GdxY1-xCOB crystal determines component parameter x.(2) meet requirement of the phase matched mode to polarization state.From principle
From the point of view of, so that frequency multiplication, frequency tripling phase matched direction is all adjusted to Gd even if finding suitable crystal compositionxY1-xThe Y of COB crystal
On axis, if be not adjusted to the polarization state of frequency doubled light, frequency tripling light can not be also exported.The reason is that II class noncritical phase
Polarization direction with produced frequency doubled light along crystal X-axis (fast axis direction), and I class noncritical phase matching frequency tripling require times
Z axis (slow-axis direction) of the frequency light polarization direction along crystal.
GdxY1-xCa4O(BO3)3(GdxY1-xCOB) serial borate crystal is that a kind of refractive index can be with the displacement of consecutive variations
Type solid solution, and then the continuously adjustable of noncritical phase matching wavelength may be implemented.This crystalloid has effective nonlinear optics
Coefficient is moderate, transmission region is wide, threshold for resisting laser damage is high, phase matching ranges are big, do not deliquesce and physico-chemical property stablize etc. it is excellent
Point is the nonlinear optical crystal of a kind of function admirable, has broad prospect of application.Research shows that: along GdxY1-xCOB series is brilliant
Body Y-axis, i.e. (90 °, 90 °) phase matched direction, it is the non-critical of 1064nm/1053nm that wavelength, which may be implemented, by composition regulation
Phase matched II class frequency multiplication and I class frequency tripling, and it is non-with the crystal composition of realization noncritical phase matching frequency multiplication and frequency tripling
Very close to.
Summary of the invention
In view of the deficiencies of the prior art, the present invention provides one kind to have both noncritical phase matching frequency multiplication, frequency tripling performance
Ultraviolet laser frequency conversion device.
The present invention also provides the working methods of above-mentioned ultraviolet laser frequency conversion device.
The present invention first realizes that non-critical frequency multiplication realizes non-critical frequency tripling again with one piece of crystal, and it is purple to obtain 355nm/351nm
Outer light output, at low cost, small in size, processing convenience, is convenient for large-scale promotion.
Term is explained
1, phase matched: during nonlinear optical frequency conversion, incident light wave generates harmonics pole in the place that it passes through
Change wave, these harmonics polarized waves are propagated and interfered in crystal, and result is exactly the harmonic wave overall strength measured.This
Intensity is related with harmonic phase difference caused by each position, if phase difference is zero, i.e. phase is consistent, then harmonic wave obtains effectively adding
By force；If phase difference is inconsistent, harmonic wave will cancel out each other；Harmonic wave is not observed completely even.Obviously, only work as incidence
When the spread speed of light wave and the equal spread speed of harmonic wave, the harmonic wave that each position generates in crystal is just because phase is consistent and mutual
Reinforce, such case is known as phase matched.It is said in principle in nonlinear optical crystal there are two types of the phase matcheds of three wave interactions
Type: frequency ω1Light wave and frequency be ω2Light wave linear polarization having the same, then phase matched be I class；Conversely, light
Wave ω1With light wave ω2With orthogonal linear polarization, then phase matched is II class.
2, noncritical phase matching (NCPM): referring to the phase matched along principal-axes coordinate direction for biaxal crystal,
Phase matched in the case of him is known as critical phase matched (CPM).Compared with CPM, NCPM has that tolerance angle is big, deviation angle be zero with
And the advantage that utilization rate of crystal is high, therefore also referred to as optimum angle matches.
3, frequency multiplication (SHG): optical frequency-doubling is also known as optical second harmonic, refers to since light and nonlinear dielectric are (usually brilliant
Body) interaction, the phenomenon that making the fundamental frequency light of frequency ω be changed into the frequency doubled light of 2 ω.
4, frequency tripling (THG): frequency tripling is also known as optics triple-frequency harmonics, refers to that fundamental frequency light that frequency is ω and frequency are 2 ω
Frequency doubled light interact in crystal, become frequency be 3 ω light phenomenon.
5, the optical device of generation additional light path (or phase difference) between mutually perpendicular two light vibration wave plate: can be made.It is logical
It is often made by birefringent chips such as quartz, calcite or micas with precise thickness, optical axis is parallel with wafer surface.
6, quarter-wave plate: certain thickness birefringent monocrystalline thin slice.When the light of normal incidence penetrates, ordinary light (o
Light) and non-ordinary light (e light) between phase difference be equal to pi/2 or its odd-multiple, such chip is known as quarter-wave plate or 1/4
Wave plate.When the angle theta of the incident vibration plane of polarised light and wave plate optical axis is 45 °, pass through the linearly polarized light of quarter-wave plate
Become circularly polarized light, conversely, then becoming linearly polarized light when circularly polarized light is after quarter-wave plate.When light passes twice through four
When/mono- wave plate, a half wave plate is functioned as.
7, half-wave plate: certain thickness birefringece crystal thin slice.When normal incidence light penetrate when, ordinary light (o light) and
Phase difference between non-ordinary light (e light) is equal to π or its odd-multiple, and such chip is known as half wave plate or 1/2 wave plate, letter
Claim half-wave plate.Linearly polarized light pass through half wave plate after, be still linearly polarized light, still, the vibration plane of outgoing polarization light with
The vibration plane of incident polarized light turns over 2 θ.If θ=45 °, the vibration plane of emergent light is vertical with the former vibration plane of incident light, that is, works as
Half wave plate can be such that polarization state is rotated by 90 ° when θ=45 °.
The technical solution of the present invention is as follows:
A kind of ultraviolet laser frequency conversion device having both noncritical phase matching frequency multiplication, frequency tripling performance, including fundamental frequency light source, contracting
Beam system, the first reflecting mirror, nonlinear optical crystal, quarter-wave plate, the second reflecting mirror and filter plate, the shrink beam system
System, the first reflecting mirror, nonlinear optical crystal, quarter-wave plate, the second reflecting mirror are from left to right successively placed along optical path, institute
State the underface that first reflecting mirror is arranged in filter plate；The angular bisector of the nonlinear optical crystal X-axis and Z axis, with
The angle of the polarization direction for the fundamental frequency light that fundamental frequency light source generates is 0-5 °, the optical axis direction and fundamental frequency light of the quarter-wave plate
The angle of the polarization direction for the fundamental frequency light that source generates is 0-5 °；The angle of first reflecting mirror and the central axis of optical path is 35-
55°；The nonlinear optical crystal is GdxY1-xCOB crystal, as a length of 1064nm of the fundamental light wave that fundamental frequency light source issues, x
Value range be 0.18-0.22, as a length of 1053nm of fundamental light wave that fundamental frequency light source issues, the value range of x is 0.11-
0.15。
The fundamental frequency light source generates fundamental frequency light, and fundamental frequency light is by shrink beam system, to improve the power density of incident fundamental frequency light,
Incident fundamental frequency light penetrates the first reflecting mirror, into nonlinear optical crystal, II class frequency multiplication occurs in nonlinear optical crystal and makees
With the frequency doubled light of generation and remaining fundamental frequency light pass through quarter-wave plate, the second reflecting mirror are incident on, by original after being totally reflected
Optical path returns, and passes through quarter-wave plate for the second time, is again introduced into nonlinear crystal, and the polarization for passing through quarter-wave plate rotates
The z-component of effect, frequency doubled light and remaining fundamental frequency light interacts, and occurs I class frequency tripling, and the frequency tripling ultraviolet light of generation is by the
The reflection of one reflecting mirror, then remaining fundamental frequency light and frequency doubled light are filtered through filter plate, export pure ultraviolet laser.In this way, passing through four
The introducing of/mono- wave plate has adjusted the polarization direction of frequency doubled light, and the polarization direction of fundamental frequency light is constant, realizes that ultraviolet laser is defeated
Out.
GdxY1-xCOB crystal has congruent melting characteristic, large scale growth can be carried out with czochralski method, and have high light
Learn quality.After stoichiometric ratio ingredient, mixing imitation frosted glass is carried out, the polycrystal material of sintering is then put into Iridium Crucible, used
High temperature single crystal pulling furnace is grown, and Gd is grown up toxY1-xCOB monocrystalline.Crystal is oriented according to optical main axis, and along the y axis
Cutting, polishing, plated film.Therefore crystalloid Y-direction seeded growth, so utilization rate of crystal is high.
Preferred according to the present invention, the angular bisector of the nonlinear optical crystal X-axis and Z axis is parallel to the production of fundamental frequency light source
The polarization direction of raw fundamental frequency light, the optical axis direction of the quarter-wave plate are parallel to the inclined of the fundamental frequency light of fundamental frequency light source generation
Shake direction.
Preferred according to the present invention, the angle of the central axis of first reflecting mirror and optical path is 45 °.
It is preferred according to the present invention, as a length of 1064nm of the fundamental light wave that fundamental frequency light source issues, x=0.2；Work as fundamental frequency light
When a length of 1053nm of fundamental light wave that source issues, x=0.13.
Preferred according to the present invention, the ultraviolet laser frequency conversion device further includes temperature-controlling system and electric rotating platform, described
Temperature-controlling system includes temperature control box, and the nonlinear optical crystal is arranged in the temperature control box, the electric rotating platform setting
Below the temperature control box.
The advantage designed herein is, the setting of temperature-controlling system and electric rotating platform, to find optimum temperature and most
Excellent phase matched direction obtains bigger ultraviolet light output.
Preferred according to the present invention, the temperature-controlled precision of the temperature-controlling system is ± 0.1 DEG C, the two light passing end face of temperature control box
It is provided with to the high saturating quartz glass of ultraviolet-infrared broad spectrum；The rotation precision of the electric rotating platform is 0.00125 °.Stone
English glass prevents thermal diffusion, plays insulation effect.
Preferred according to the present invention, the shrink beam system includes that the first different plano-convex lens of focal length and the second plano-convex are saturating
Mirror；
The fundamental frequency light source is Nd:YAG mode-locked laser；
First reflecting mirror is coated with deielectric-coating thoroughly, anti-to 355nm ultraviolet light height high to 1064nm and 532nm laser；
Second reflecting mirror is coated with the deielectric-coating being all-trans to 1064nm and 532nm laser；
The nonlinear optical crystal is that Y cuts Gd0.2Y0.8COB, the nonlinear optical crystal according to principal-axes coordinate X,
Y, Z axis orients, and having a size of 10mm × 10mm × 5mm, two Y-direction light pass surfaces polish and are coated with tri- times of 1064nm, 532nm, 355nm
Frequency anti-reflection film；Y cuts Gd0.2Y0.8COB refers to: optical direction is Y-axis, is polished along vertical crystal Y-axis plane cutting；
The quarter-wave plate is 532nm mica quarter-wave plate；
The filter plate is made of quartz, is coated with anti-, saturating to 355nm laser height Jie high to 1064nm and 532nm laser
Plasma membrane.
It is preferred according to the present invention, Faraday polarization apparatus is provided between the fundamental frequency light source and the shrink beam system；
The shrink beam system includes different the first plano-convex lens and the second plano-convex lens of focal length；
The fundamental frequency light source is neodymium glass mode-locked laser；
First reflecting mirror is coated with deielectric-coating thoroughly, anti-to 351nm ultraviolet light height high to 1053nm and 526nm laser；
Second reflecting mirror is coated with the deielectric-coating being all-trans to 1053nm and 526nm laser；
The nonlinear optical crystal is that Y cuts Gd0.13Y0.87COB, the nonlinear optical crystal according to principal-axes coordinate X,
Y, Z axis orient, having a size of 12nm × 16mm × 29mm, two Y-direction light pass surfaces polish and be coated with 1053nm fundamental frequency, 526nm frequency multiplication,
351nm frequency tripling anti-reflection film；Y cuts Gd0.13Y0.87COB refers to: optical direction is Y-axis, is polished along vertical crystal Y-axis plane cutting；
The quarter-wave plate is 526nm mica quarter-wave plate；
The filter plate is made of quartz, is coated with anti-, saturating to 351nm laser height Jie high to 1053nm and 526nm laser
Plasma membrane.
The working method of above-mentioned ultraviolet laser frequency conversion device, specific steps include:
(1) the fundamental frequency light source generates fundamental frequency light；Guarantee its polarization direction and crystal X-axis and Z axis angular bisector and
The optical axis direction of quarter-wave plate is parallel.
(2) fundamental frequency light is by the shrink beam system, through first reflecting mirror, into the nonlinear optical crystal,
The effect of II class frequency multiplication occurs in the nonlinear optical crystal, generates frequency doubled light and remaining fundamental frequency that polarization direction is located at X-axis
Light passes through the quarter-wave plate, because fundamental frequency light polarization direction is parallel with wave plate optical axis, so fundamental frequency light polarization direction is constant,
And frequency doubled light becomes circularly polarized light from linearly polarized light since its polarization direction and wave plate optical axis included angle are 45 °, and it is anti-to be incident on second
Mirror is penetrated, is returned after being totally reflected by original optical path；
(3) pass through quarter-wave plate second, fundamental frequency light polarization direction is still constant, but frequency doubled light passes through four points twice
One of wave plate, quarter-wave plate plays the role of half-wave plate at this time, and frequency multiplication light polarization direction is rotated by 90 ° in crystal Z axis, frequency doubled light
It is again introduced into nonlinear crystal with fundamental frequency light, by the polarization turning effort of quarter-wave plate, frequency doubled light and remaining fundamental frequency light
Z-component interaction, I class frequency tripling occurs, the frequency tripling ultraviolet light of generation reflected by the first reflecting mirror, then through filter plate
Remaining fundamental frequency light and frequency doubled light are filtered, pure ultraviolet laser is exported.
The invention has the benefit that
The present invention solves the problems, such as the polarized matching of frequency tripling by quarter-wave plate, so that one piece of GdxY1-xCOB can be with
It is used as frequency multiplication and frequency tripling crystal simultaneously.The optical elements such as quarter-wave plate used all have developed into it is ripe, currently on the market
It is easy to buy, and price, well below nonlinear crystal, therefore, cost of manufacture uses two pieces of non-linear crystalline substances well below current
The frequency tripling device of body, and process and assemble and more facilitate.Meanwhile the characteristic of noncritical phase matching also makes the device wafer former
Expect that utilization rate is high, biggish tolerance angle reduces the requirement to fundamental frequency light beam quality, improves output stability, is conducive to big
Large-scale production and application.
Detailed description of the invention
Fig. 1 (a) is the schematic diagram of existing frequency tripling implementation；
In Fig. 1 (a), the frequency multiplication of infrared fundamental frequency light ω, generated frequency doubled light 2 are first carried out with one block of nonlinear optical crystal
ω and remaining fundamental frequency light ω is exported in another block of nonlinear optical crystal with frequency, final realization 3 ω of ultraviolet light again.
Fig. 1 (b) is the schematic diagram of frequency tripling implementation of the present invention；
In Fig. 1 (b), after frequency multiplication occurs, by quarter-wave plate, change the polarization state of frequency doubled light, passes through the second reflection
Again by quarter-wave plate and crystal after the total reflection of mirror, so that the frequency doubled light (2 ω) of required polarization state and remaining fundamental frequency
Light (ω) component finally realizes ultraviolet light (3 ω) output in crystal and frequently, and through the first reflecting mirror reflex.
Fig. 2 (a) is fundamental frequency light and frequency multiplication light polarization schematic diagram when II class frequency multiplication occurs；
In Fig. 2 (a), after fundamental frequency light enters crystal, Orthogonal Decomposition occurs, realizes II class frequency multiplication, the frequency multiplication light polarization of generation
Direction is located at crystal X-axis.
Fig. 2 (b) is fundamental frequency light, frequency doubled light and frequency tripling ultraviolet light polarization schematic diagram when I class frequency tripling occurs.
In Fig. 2 (b), reflected by quarter-wave plate effect and the second reflecting mirror, fundamental frequency light and polarization direction are rotated by 90 °
It being again introduced into crystal to the frequency doubled light of Z axis afterwards, frequency doubled light and fundamental frequency light z-component act on, realize I class frequency tripling, generation
The ultraviolet light polarization direction of frequency tripling is located at X-axis.
Fig. 3 is the structural schematic diagram of ultraviolet laser frequency conversion device described in the embodiment of the present invention 1；
Fig. 4 is the structural schematic diagram of ultraviolet laser frequency conversion device described in the embodiment of the present invention 2；
Fig. 5 is the structural schematic diagram of ultraviolet laser frequency conversion device described in the embodiment of the present invention 3；
Fig. 6 is the actual measurement output light spectrogram of ultraviolet laser frequency conversion device described in the embodiment of the present invention 3.
Wherein, 1, fundamental frequency light source；2, the first plano-convex lens；3, the second plano-convex lens；4, the first reflecting mirror；5, nonlinear optical
Learn crystal；6, quarter-wave plate；7, the second reflecting mirror；8, filter plate；9, temperature control box；10, electric rotating platform；11, farad
Polarization apparatus.
Specific embodiment
The present invention is further qualified with embodiment with reference to the accompanying drawings of the specification, but not limited to this.
Embodiment 1
A kind of ultraviolet laser frequency conversion device having both noncritical phase matching frequency multiplication, frequency tripling performance, including fundamental frequency light source 1,
Shrink beam system, the first reflecting mirror 4, nonlinear optical crystal 5, quarter-wave plate 6, the second reflecting mirror 7 and filter plate 8, it is described
Shrink beam system, the first reflecting mirror 4, nonlinear optical crystal 5, quarter-wave plate 6, the second reflecting mirror 7 from left to right successively edge
Optical path is placed, and the underface of first reflecting mirror 4 is arranged in the filter plate 8；The nonlinear optical crystal 5X axis and Z axis
Angular bisector be parallel to the generation of fundamental frequency light source 1 fundamental frequency light polarization direction, the optical axis direction of the quarter-wave plate 6 is flat
The polarization direction for the fundamental frequency light that row is generated in fundamental frequency light source 1.The angle of first reflecting mirror 4 and the central axis of optical path is 45 °.
The fundamental frequency light source 1 generates fundamental frequency light, and fundamental frequency light is close with the power for improving incident fundamental frequency light by shrink beam system
Degree, incident fundamental frequency light penetrate the first reflecting mirror 4, and into nonlinear optical crystal 5, II class occurs in nonlinear optical crystal 5
Frequency multiplication effect, the frequency doubled light of generation and remaining fundamental frequency light pass through quarter-wave plate 6, are incident on the second reflecting mirror 7, are all-trans
It is returned after penetrating by original optical path, passes through quarter-wave plate 6 for the second time, be again introduced into nonlinear crystal 5, pass through quarter-wave plate
The z-component of 6 polarization turning effort, frequency doubled light and remaining fundamental frequency light interacts, generation I class frequency tripling, and three times of generation
Frequency ultraviolet light is reflected by the first reflecting mirror 4, then filters remaining fundamental frequency light and frequency doubled light through filter plate 8, is exported and pure ultraviolet is swashed
Light.In this way, the polarization direction of frequency doubled light is had adjusted by the introducing of quarter-wave plate 6, and the polarization direction of fundamental frequency light is constant,
Realize ultraviolet laser output.Shown in schematic diagram such as Fig. 1 (b) of frequency tripling implementation of the present invention.Fundamental frequency when II class frequency multiplication occurs
Light and frequency multiplication light polarization schematic diagram such as Fig. 2 (a) are shown；Fundamental frequency light, frequency doubled light and frequency tripling ultraviolet light are inclined when I class frequency tripling occurs
It shakes shown in schematic diagram such as Fig. 2 (b)；
GdxY1-xCOB crystal has congruent melting characteristic, large scale growth can be carried out with czochralski method, and have high light
Learn quality.After stoichiometric ratio ingredient, mixing imitation frosted glass is carried out, the polycrystal material of sintering is then put into Iridium Crucible, used
High temperature single crystal pulling furnace is grown, and Gd is grown up toxY1-xCOB monocrystalline.Crystal is oriented according to optical main axis, and along the y axis
Cutting, polishing, plated film.Therefore crystalloid Y-direction seeded growth, so utilization rate of crystal is high.
The shrink beam system includes different the first plano-convex lens 2 and the second plano-convex lens 3 of focal length；
The fundamental frequency light source 1 is Nd:YAG mode-locked laser, and the fundamental light wave that Nd:YAG mode-locked laser issues is a length of
1064nm, x=0.2.
First reflecting mirror 4 is coated with deielectric-coating thoroughly, anti-to 355nm ultraviolet light height high to 1064nm and 532nm laser；
Second reflecting mirror 7 is coated with the deielectric-coating being all-trans to 1064nm and 532nm laser；
The nonlinear optical crystal 5 is that Y cuts Gd0.2Y0.8COB, the nonlinear optical crystal 5 is according to principal-axes coordinate
X, Y, Z axis orientation, having a size of 10mm × 10mm × 5mm, two Y-direction light pass surfaces polish and are coated with 1064nm, 532nm, 355nm tri-
Frequency Doubling Antireflection Coating；Y cuts Gd0.2Y0.8COB refers to: optical direction is Y-axis, is polished along vertical crystal Y-axis plane cutting；
The quarter-wave plate 6 is 532nm mica quarter-wave plate；
The filter plate 8 is made of quartz, is coated with anti-, saturating to 355nm laser height Jie high to 1064nm and 532nm laser
Plasma membrane.
The structural schematic diagram of ultraviolet laser frequency conversion device described in the present embodiment is as shown in Figure 3.
Embodiment 2
According to a kind of ultraviolet laser frequency conversion for having both noncritical phase matching frequency multiplication, frequency tripling performance described in embodiment 1
Device, difference are that the ultraviolet laser frequency conversion device further includes temperature-controlling system and electric rotating platform 10, the temperature-controlling system packet
Temperature control box 9 is included, the nonlinear optical crystal 5 is arranged in the temperature control box 9, and the electric rotating platform 10 is arranged described
9 lower section of temperature control box.
The advantage designed herein is, the setting of temperature-controlling system and electric rotating platform 10, to find optimum temperature and
Optimum angle matching direction obtains bigger ultraviolet light output.
The temperature-controlled precision of the temperature-controlling system is ± 0.1 DEG C, and 9 liang of light passing end faces of the temperature control box are provided with to ultraviolet-red
The high saturating quartz glass of outer wide spectrum；The rotation precision of the electric rotating platform 10 is 0.00125 °.Quartz glass prevents heat
Diffusion, plays insulation effect.
The structural schematic diagram of ultraviolet laser frequency conversion device described in the present embodiment is as shown in Figure 4.
Embodiment 3
A kind of ultraviolet laser frequency conversion device having both noncritical phase matching frequency multiplication, frequency tripling performance, including fundamental frequency light source 1,
Shrink beam system, the first reflecting mirror 4, nonlinear optical crystal 5, quarter-wave plate 6, the second reflecting mirror 7 and filter plate 8, it is described
Shrink beam system, the first reflecting mirror 4, nonlinear optical crystal 5, quarter-wave plate 6, the second reflecting mirror 7 from left to right successively edge
Optical path is placed, and the underface of first reflecting mirror 4 is arranged in the filter plate 8；The nonlinear optical crystal 5X axis and Z axis
Angular bisector be parallel to the generation of fundamental frequency light source 1 fundamental frequency light polarization direction, the optical axis direction of the quarter-wave plate 6 is flat
The polarization direction for the fundamental frequency light that row is generated in fundamental frequency light source 1.The angle of first reflecting mirror 4 and the central axis of optical path is 45 °.
The fundamental frequency light source 1 generates fundamental frequency light, and fundamental frequency light is close with the power for improving incident fundamental frequency light by shrink beam system
Degree, incident fundamental frequency light penetrate the first reflecting mirror 4, and into nonlinear optical crystal 5, II class occurs in nonlinear optical crystal 5
Frequency multiplication effect, the frequency doubled light of generation and remaining fundamental frequency light pass through quarter-wave plate 6, are incident on the second reflecting mirror 7, are all-trans
It is returned after penetrating by original optical path, passes through quarter-wave plate 6 for the second time, be again introduced into nonlinear crystal 5, pass through quarter-wave plate
The z-component of 6 polarization turning effort, frequency doubled light and remaining fundamental frequency light interacts, generation I class frequency tripling, and three times of generation
Frequency ultraviolet light is reflected by the first reflecting mirror 4, then filters remaining fundamental frequency light and frequency doubled light through filter plate 8, is exported and pure ultraviolet is swashed
Light.In this way, the polarization direction of frequency doubled light is had adjusted by the introducing of quarter-wave plate 6, and the polarization direction of fundamental frequency light is constant,
Realize ultraviolet laser output.
GdxY1-xCOB crystal has congruent melting characteristic, large scale growth can be carried out with czochralski method, and have high light
Learn quality.After stoichiometric ratio ingredient, mixing imitation frosted glass is carried out, the polycrystal material of sintering is then put into Iridium Crucible, used
High temperature single crystal pulling furnace is grown, and Gd is grown up toxY1-xCOB monocrystalline.Crystal is oriented according to optical main axis, and along the y axis
Cutting, polishing, plated film.Therefore crystalloid Y-direction seeded growth, so utilization rate of crystal is high.
Faraday polarization apparatus 11 is provided between the fundamental frequency light source 1 and the shrink beam system；
The shrink beam system includes different the first plano-convex lens 2 and the second plano-convex lens 3 of focal length；
The fundamental frequency light source 1 is neodymium glass mode-locked laser, and the fundamental light wave that neodymium glass mode-locked laser issues is a length of
1053nm；
First reflecting mirror 4 is coated with deielectric-coating thoroughly, anti-to 351nm ultraviolet light height high to 1053nm and 526nm laser；
Second reflecting mirror 7 is coated with the deielectric-coating being all-trans to 1053nm and 526nm laser；
The nonlinear optical crystal 5 is that Y cuts Gd0.13Y0.87COB, the nonlinear optical crystal 5 is according to principal-axes coordinate
X, Y, Z axis orientation, having a size of 12nm × 16mm × 29mm, two Y-direction light pass surfaces polish and are coated with 1053nm fundamental frequency, 526nm times
Frequently, 351nm frequency tripling anti-reflection film；Y cuts Gd0.13Y0.87COB refers to: optical direction is Y-axis, is thrown along vertical crystal Y-axis plane cutting
Light；
The quarter-wave plate 6 is 526nm mica quarter-wave plate；
The structural schematic diagram of ultraviolet laser frequency conversion device described in the present embodiment is as shown in Figure 5.
The actual measurement output light spectrogram of ultraviolet laser frequency conversion device described in the present embodiment is as shown in Figure 6；In Fig. 6, work as 1053nm
When frequency tripling is realized, the spectrogram of exported ultraviolet light is measured by spectrometer, central wavelength is located at 351 nanometers, it was demonstrated that frequency tripling
It is achieved.
Embodiment 4
The working method of any ultraviolet laser frequency conversion device of embodiment 1-3, specific steps include:
(1) the fundamental frequency light source 1 generates fundamental frequency light；Guarantee its polarization direction and crystal X-axis and Z axis angular bisector and
The optical axis direction of quarter-wave plate is parallel.
(2) fundamental frequency light is by the shrink beam system, through first reflecting mirror 4, into the nonlinear optical crystal
5, the effect of I I class frequency multiplication occurs in the nonlinear optical crystal 5, generates frequency doubled light and residue that polarization direction is located at X-axis
Fundamental frequency light passes through the quarter-wave plate 6, because fundamental frequency light polarization direction is parallel with wave plate optical axis, so fundamental frequency light polarization direction
It is constant, and frequency doubled light becomes circularly polarized light from linearly polarized light, is incident on since its polarization direction and wave plate optical axis included angle are 45 °
Second reflecting mirror 7, is returned after being totally reflected by original optical path；
(3) pass through quarter-wave plate 6 second, fundamental frequency light polarization direction is still constant, but frequency doubled light passes through four twice
/ mono- wave plate 6, quarter-wave plate 6 plays the role of half-wave plate at this time, and frequency multiplication light polarization direction is rotated by 90 ° in crystal Z axis, times
Frequency light and fundamental frequency light are again introduced into nonlinear crystal 5, by the polarization turning effort of quarter-wave plate 6, frequency doubled light and residue
The z-component of fundamental frequency light interacts, and I class frequency tripling occurs, and the frequency tripling ultraviolet light of generation is reflected by the first reflecting mirror 4, then
Remaining fundamental frequency light and frequency doubled light are filtered through filter plate 8, exports pure ultraviolet laser.
Claims (7)
1. one kind has both noncritical phase matching frequency multiplication, frequency tripling performance ultraviolet laser frequency conversion device, which is characterized in that including fundamental frequency
Light source, shrink beam system, the first reflecting mirror, nonlinear optical crystal, quarter-wave plate, the second reflecting mirror and filter plate, it is described
Shrink beam system, the first reflecting mirror, nonlinear optical crystal, quarter-wave plate, the second reflecting mirror are from left to right successively along optical path
It places, the underface of first reflecting mirror is arranged in the filter plate；The angle of the nonlinear optical crystal X-axis and Z axis is flat
The angle of separated time, the polarization direction of the fundamental frequency light generated with fundamental frequency light source is 0-5 °, the optical axis direction of the quarter-wave plate
The angle of the polarization direction of the fundamental frequency light generated with fundamental frequency light source is 0-5 °；The folder of first reflecting mirror and the central axis of optical path
Angle is 35-55 °；
The shrink beam system includes different the first plano-convex lens and the second plano-convex lens of focal length；
The fundamental frequency light source is Nd:YAG mode-locked laser；
First reflecting mirror is coated with deielectric-coating thoroughly, anti-to 355nm ultraviolet light height high to 1064nm and 532nm laser；
Second reflecting mirror is coated with the deielectric-coating being all-trans to 1064nm and 532nm laser；
The nonlinear optical crystal is that Y cuts Gd0.2Y0.8COB, the nonlinear optical crystal is according to principal-axes coordinate X, Y, Z axis
Orientation, having a size of 10mm × 10mm × 5mm, two Y-direction light pass surfaces polish and are coated with the increasing of 1064nm, 532nm, 355nm frequency tripling
Permeable membrane；
The quarter-wave plate is 532nm mica quarter-wave plate；
The filter plate is made of quartz, is coated with anti-, saturating to 355nm laser height deielectric-coating high to 1064nm and 532nm laser.
2. a kind of ultraviolet laser frequency conversion for having both noncritical phase matching frequency multiplication, frequency tripling performance according to claim 1
Device, which is characterized in that the angular bisector of the nonlinear optical crystal X-axis and Z axis is parallel to the fundamental frequency light of fundamental frequency light source generation
Polarization direction, the optical axis direction of the quarter-wave plate be parallel to fundamental frequency light source generation fundamental frequency light polarization direction.
3. a kind of ultraviolet laser frequency conversion for having both noncritical phase matching frequency multiplication, frequency tripling performance according to claim 1
Device, which is characterized in that the angle of first reflecting mirror and the central axis of optical path is 45 °.
4. a kind of ultraviolet laser frequency conversion for having both noncritical phase matching frequency multiplication, frequency tripling performance according to claim 1
Device, which is characterized in that the ultraviolet laser frequency conversion device further includes temperature-controlling system and electric rotating platform, and the temperature-controlling system includes
Temperature control box, the nonlinear optical crystal are arranged in the temperature control box, and the electric rotating platform is arranged in the temperature control box
Lower section.
5. a kind of ultraviolet laser frequency conversion for having both noncritical phase matching frequency multiplication, frequency tripling performance according to claim 4
Device, which is characterized in that the temperature-controlled precision of the temperature-controlling system is ± 0.1 DEG C, and the two light passing end face of temperature control box is provided with to purple
The high saturating quartz glass of outside-infrared broad spectrum；The rotation precision of the electric rotating platform is 0.00125 °.
6. a kind of ultraviolet laser frequency conversion device for having both noncritical phase matching frequency multiplication, frequency tripling performance, which is characterized in that including base
Frequency light source, shrink beam system, the first reflecting mirror, nonlinear optical crystal, quarter-wave plate, the second reflecting mirror and filter plate, institute
Shrink beam system, the first reflecting mirror, nonlinear optical crystal, quarter-wave plate, the second reflecting mirror are stated from left to right successively along light
Road is placed, and the underface of first reflecting mirror is arranged in the filter plate；The angle of the nonlinear optical crystal X-axis and Z axis
The angle of bisector, the polarization direction of the fundamental frequency light generated with fundamental frequency light source is 0-5 °, the optical axis side of the quarter-wave plate
Angle to the polarization direction of the fundamental frequency light generated with fundamental frequency light source is 0-5 °；First reflecting mirror and the central axis of optical path
Angle is 35-55 °；
Faraday polarization apparatus is provided between the fundamental frequency light source and the shrink beam system；
The shrink beam system includes different the first plano-convex lens and the second plano-convex lens of focal length；
The fundamental frequency light source is neodymium glass mode-locked laser；
First reflecting mirror is coated with deielectric-coating thoroughly, anti-to 351nm ultraviolet light height high to 1053nm and 526nm laser；
Second reflecting mirror is coated with the deielectric-coating being all-trans to 1053nm and 526nm laser；
The nonlinear optical crystal is that Y cuts Gd0.13Y0.87COB, the nonlinear optical crystal is according to principal-axes coordinate X, Y, Z
Axis orientation, having a size of 12nm × 16mm × 29mm, two Y-direction light pass surfaces polish and be coated with 1053nm fundamental frequency, 526nm frequency multiplication,
351nm frequency tripling anti-reflection film；
The quarter-wave plate is 526nm mica quarter-wave plate；
The filter plate is made of quartz, is coated with anti-, saturating to 351nm laser height deielectric-coating high to 1053nm and 526nm laser.
7. according to claim 1-6 it is any it is described it is a kind of have both noncritical phase matching frequency multiplication, the ultraviolet of frequency tripling performance swashs
The working method of light modulator, it is characterised in that specific steps include:
(1) the fundamental frequency light source generates fundamental frequency light；
(2) fundamental frequency light is by the shrink beam system, through first reflecting mirror, into the nonlinear optical crystal, in institute
It states and the effect of II class frequency multiplication occurs in nonlinear optical crystal, generate frequency doubled light and remaining fundamental frequency light warp that polarization direction is located at X-axis
The quarter-wave plate is crossed, circularly polarized light is become from linearly polarized light, is incident on the second reflecting mirror, by former light after being totally reflected
Road returns；
(3) second passes through quarter-wave plate, and fundamental frequency light polarization direction is still constant, frequency multiplication light polarization direction be rotated by 90 ° in
Crystal Z axis, frequency doubled light and fundamental frequency light are again introduced into nonlinear crystal, pass through the polarization turning effort of quarter-wave plate, frequency multiplication
Light and the z-component of remaining fundamental frequency light interact, and I class frequency tripling occur, the frequency tripling ultraviolet light of generation is by the first reflecting mirror
Reflection, then remaining fundamental frequency light and frequency doubled light are filtered through filter plate, export pure ultraviolet laser.
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| CN105911793B (en) * | 2016-06-28 | 2019-05-10 | 山东大学 | It is a kind of based on the cascade optical frequency converter of monolithic phosphate crystal and its application |
| CN106058630A (en) * | 2016-07-04 | 2016-10-26 | 深圳市杰普特光电股份有限公司 | End-pumped green laser |
| CN108363258B (en) * | 2018-01-08 | 2021-05-04 | 东南大学 | Device and method for generating ultraviolet band vector light beam |
| CN108761622B (en) * | 2018-08-17 | 2024-01-23 | 山东大学 | Large-size true zero-order optical wave plate with low wavelength sensitivity and preparation method and application thereof |
| CN108775966B (en) * | 2018-09-05 | 2023-06-09 | 中国工程物理研究院激光聚变研究中心 | Double-delay third-order correlator |
| CN111906306A (en) * | 2020-06-10 | 2020-11-10 | 上海航天设备制造总厂有限公司 | Multi-wavelength laser processing optical path system of melting additive manufacturing equipment |
| CN111897135A (en) * | 2020-07-16 | 2020-11-06 | 江苏维福特科技发展股份有限公司 | Method for generating 180nm-290nm deep ultraviolet light |
| CN112269260B (en) * | 2020-09-27 | 2023-03-21 | 北京卓镭激光技术有限公司 | Laser switching device and method |
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