CN107394575A - The frequency doubling device of laser - Google Patents
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- 239000000203 mixture Substances 0.000 claims description 3
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- RIUWBIIVUYSTCN-UHFFFAOYSA-N trilithium borate Chemical compound [Li+].[Li+].[Li+].[O-]B([O-])[O-] RIUWBIIVUYSTCN-UHFFFAOYSA-N 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 abstract description 25
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- VCZFPTGOQQOZGI-UHFFFAOYSA-N lithium bis(oxoboranyloxy)borinate Chemical compound [Li+].[O-]B(OB=O)OB=O VCZFPTGOQQOZGI-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
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- H—ELECTRICITY
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
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Abstract
公开了一种激光器的倍频装置,属于光学技术领域。其中,入射光经过第一倍频晶体入射至第一分光镜,被第一分光镜分束为第一透射光和第一反射光。第一透射光依次经过缩束镜组、第二倍频晶体、扩束镜组和第一半波片后入射至第三分光镜,被第三分光镜分束为第二透射光和第二反射光,第二反射光入射至偏振光分光棱镜并被偏振光分光棱镜反射形成第三反射光。第一反射光入射至第二分光镜,被第二分光镜反射后得到第四反射光,第四反射光经过第二半波片后入射至偏振光分光棱镜并被偏振光分光棱镜透射形成第三透射光。第三反射光与第三透射光共同形成光束。其能够提高激光器倍频过程中的转化率。
Disclosed is a laser frequency doubling device, which belongs to the field of optical technology. Wherein, the incident light enters the first beam splitter through the first frequency doubling crystal, and is split into first transmitted light and first reflected light by the first beam splitter. The first transmitted light sequentially passes through the beam reducer group, the second frequency doubling crystal, the beam expander group and the first half-wave plate, and then enters the third beam splitter, and is split by the third beam splitter into the second transmitted light and the second beam splitter. For the reflected light, the second reflected light is incident to the polarizing beam splitting prism and is reflected by the polarizing beam splitting prism to form the third reflected light. The first reflected light is incident on the second beam splitter, and is reflected by the second beam splitter to obtain the fourth reflected light. Three transmitted light. The third reflected light and the third transmitted light jointly form a light beam. It can improve the conversion rate in the laser frequency doubling process.
Description
技术领域technical field
本发明涉及光学技术领域,特别是涉及一种激光器的倍频装置。The invention relates to the field of optical technology, in particular to a laser frequency doubling device.
背景技术Background technique
频率转换是一种扩大高功率激光器的应用范围的有效技术,它利用光学介质在强辐射场下的非线性光学效应产生新的频率。倍频是非线性光学中应用最广泛的技术,一般来说我们希望获得更高的从基频光到倍频光的转化效率。Frequency conversion is an effective technique to expand the application range of high-power lasers, which utilizes the nonlinear optical effects of optical media under strong radiation fields to generate new frequencies. Frequency doubling is the most widely used technology in nonlinear optics. Generally speaking, we hope to obtain higher conversion efficiency from fundamental frequency light to frequency doubled light.
通常提高倍频过程的转化效率主要有两种途径:(1)增加基频光的峰值功率密度。在给定激光脉冲能量和脉冲宽度的情况下,提高峰值功率密度的方法为缩小光斑的尺寸,这种方法的缺点是当光斑缩小到一定程度时激光的峰值功率密度超过了激光晶体端面镀膜的损伤阈值,导致器件损坏;(2)增加倍频晶体长度。随着基频光在倍频晶体内的转化基频光的峰值功率密度逐渐降低,转化效率下降。所以当倍频晶体长度增加到一定长度时再增加晶体长度倍频效率不会有显著提升。Generally, there are two main ways to improve the conversion efficiency of the frequency doubling process: (1) Increase the peak power density of the fundamental frequency light. In the case of a given laser pulse energy and pulse width, the method to increase the peak power density is to reduce the size of the spot. The disadvantage of this method is that when the spot is reduced to a certain extent, the peak power density of the laser exceeds the coating on the end face of the laser crystal. Damage threshold, resulting in device damage; (2) Increase the length of the frequency doubling crystal. As the fundamental frequency light is converted in the frequency doubling crystal, the peak power density of the fundamental frequency light gradually decreases, and the conversion efficiency decreases. Therefore, when the length of the frequency doubling crystal increases to a certain length, increasing the crystal length will not significantly improve the frequency doubling efficiency.
发明内容Contents of the invention
有鉴于此,本发明提供了一种激光器的倍频装置,其能够提高激光器倍频过程中的转化率,从而更加适于实用。In view of this, the present invention provides a laser frequency doubling device, which can increase the conversion rate during the laser frequency doubling process, and thus is more suitable for practical use.
为了达到上述第一个目的,本发明提供的激光器的倍频装置的技术方案如下:In order to achieve the above-mentioned first object, the technical scheme of the frequency doubling device of the laser provided by the present invention is as follows:
本发明提供的激光器的倍频装置包括第一倍频晶体(1)、第一分光镜(2a)、第二分光镜(2b)、第三分光镜(2c)、缩束镜组(3)、第二倍频晶体(4)、扩束镜组(5)、第一半波片(6a)、第二半波片(6b)和偏振分光棱镜(7),The laser frequency doubling device provided by the present invention includes a first frequency doubling crystal (1), a first beam splitter (2a), a second beam splitter (2b), a third beam splitter (2c), and a beam reducer group (3) , the second frequency doubling crystal (4), the beam expander group (5), the first half-wave plate (6a), the second half-wave plate (6b) and the polarization beam splitter prism (7),
入射光(X1)经过所述第一倍频晶体(1)入射至所述第一分光镜(2a),被所述第一分光镜(2a)分束为第一透射光(X2)和第一反射光(X3),The incident light (X1) enters the first beam splitter (2a) through the first frequency doubling crystal (1), and is split into the first transmitted light (X2) and the second beam by the first beam splitter (2a). a reflected light (x3),
所述第一透射光(X2)依次经过所述缩束镜组(3)、第二倍频晶体(4)、扩束镜组(5)和第一半波片(6a)后入射至所述第三分光镜(2c),被所述第三分光镜(2c)分束为第二透射光(X6)和第二反射光(X4),所述第二反射光(X4)入射至所述偏振光分光棱镜(7)并被所述偏振光分光棱镜(7)反射形成第三反射光;The first transmitted light (X2) sequentially passes through the beam reducer group (3), the second frequency doubling crystal (4), the beam expander group (5) and the first half-wave plate (6a) and then enters the The third beam splitter (2c) is split into second transmitted light (X6) and second reflected light (X4) by the third beam splitter (2c), and the second reflected light (X4) is incident to the the polarizing beam splitting prism (7) and is reflected by the polarizing beam splitting prism (7) to form the third reflected light;
所述第一反射光(X3)入射至所述第二分光镜(2b),被所述第二分光镜(2b)反射后得到第四反射光(X5),所述第四反射光(X5)经过所述第二半波片(6b)后入射至所述偏振光分光棱镜(7)并被所述偏振光分光棱镜(7)透射形成第三透射光;The first reflected light (X3) enters the second beam splitter (2b), and is reflected by the second beam splitter (2b) to obtain a fourth reflected light (X5), and the fourth reflected light (X5 ) enters the polarizing beam splitting prism (7) after passing through the second half-wave plate (6b), and is transmitted by the polarizing beam splitting prism (7) to form third transmitted light;
所述第三反射光与所述第三透射光共同形成光束(X7)。The third reflected light and the third transmitted light jointly form a light beam (X7).
本发明提供的激光器的倍频装置还可采用以下技术措施进一步实现。The laser frequency doubling device provided by the present invention can be further realized by adopting the following technical measures.
作为优选,所述缩束镜组(3)包括第一凸透镜(3a)和第一凹透镜(3b),Preferably, the beam reducer group (3) includes a first convex lens (3a) and a first concave lens (3b),
所述第一透射光(X2)先经过所述第一凸透镜(2a)后再经过所述第一凹透镜(3b);The first transmitted light (X2) first passes through the first convex lens (2a) and then passes through the first concave lens (3b);
所述第一凸透镜(3a)的主光轴、所述第一凹透镜(3b)的主光轴分别处于所述第一透射光(X2)的光心延长线上。The main optical axis of the first convex lens (3a) and the main optical axis of the first concave lens (3b) are respectively on the extension line of the optical center of the first transmitted light (X2).
作为优选,所述扩束镜组(5)包括第二凹透镜(5a)和第二凸透镜(5b),Preferably, the beam expander lens group (5) includes a second concave lens (5a) and a second convex lens (5b),
所述第一透射光(X2)先经过所述第二凹透镜(5a)后再经过所述第二凸透镜(5b);The first transmitted light (X2) first passes through the second concave lens (5a) and then passes through the second convex lens (5b);
所述第二凹透镜(5a)的主光轴、所述第二凸透镜(5b)的主光轴分别处于所述第一透射光(X2)的光心延长线上。The main optical axis of the second concave lens (5a) and the main optical axis of the second convex lens (5b) are respectively on the extension line of the optical center of the first transmitted light (X2).
作为优选,所述第一倍频晶体(1)和/或所述第二倍频晶体(4)上由磷酸钛氧钾或者三硼酸锂中的一种物质构成的晶体或者两种物质构成的混合物的晶体制成。Preferably, the first frequency-doubling crystal (1) and/or the second frequency-doubling crystal (4) is composed of a crystal composed of potassium titanyl phosphate or lithium triborate, or a crystal composed of two substances Mixture of crystals made.
作为优选,所述第一倍频晶体(1)和所述第二倍频晶体(4)均镀有基频光和倍频光的增投膜。Preferably, both the first frequency doubling crystal (1) and the second frequency doubling crystal (4) are coated with enhanced projection films for the fundamental frequency light and the frequency doubling light.
作为优选,所述第一倍频晶体(1)和所述第二倍频晶体(4)的材质相同。Preferably, the first frequency doubling crystal (1) and the second frequency doubling crystal (4) are made of the same material.
作为优选,所述第二倍频晶体(4)的截面积大于或者等于所述第一倍频晶体(1)的截面积的一半。Preferably, the cross-sectional area of the second frequency-doubling crystal (4) is greater than or equal to half of the cross-sectional area of the first frequency-doubling crystal (1).
作为优选,设所述缩束镜组(3)的缩小倍数为m,所述扩束镜组(5)的扩大倍数为n,则m=n。Preferably, it is assumed that the reduction factor of the beam reducer group (3) is m, and the expansion factor of the beam expander group (5) is n, then m=n.
作为优选,构成所述缩束镜组(3)的光学元件、构成所述扩束镜组(5)的光学元件上均镀有基频光和倍频光的增透膜。Preferably, the optical elements constituting the beam reducer group (3) and the optical elements constituting the beam expander group (5) are coated with anti-reflection coatings for fundamental frequency light and frequency doubled light.
作为优选,所述第一半波片(6a)、第二半波片(6b)的波长为倍频光波长。Preferably, the wavelengths of the first half-wave plate (6a) and the second half-wave plate (6b) are frequency-doubled light wavelengths.
作为优选,所述第一半波片(6a)、第二半波片(6b)上均镀有基频光和倍频光的增透膜。Preferably, the first half-wave plate (6a) and the second half-wave plate (6b) are coated with anti-reflection coatings for the fundamental frequency light and the double frequency light.
作为优选,所述偏振分光棱镜上镀有倍频光增透膜。Preferably, the polarization beam splitter prism is coated with a frequency-doubled light anti-reflection film.
作为优选,所述第一分光镜(2a)、第二分光镜(2b)、第三分光镜(2c)的反射面均镀有反射率>99.5%的倍频光高反膜,所述第一分光镜(2a)、第二分光镜(2b)、第三分光镜(2c)的两面均镀有透过率>99.5%基频光增透膜。As a preference, the reflective surfaces of the first beam splitter (2a), the second beam splitter (2b), and the third beam splitter (2c) are all coated with a high-reflection film for frequency-doubling light with a reflectivity>99.5%, and the first beam splitter Both sides of the first beam splitter (2a), the second beam splitter (2b), and the third beam splitter (2c) are coated with an anti-reflection coating for fundamental frequency light with a transmittance >99.5%.
本发明提供的激光器的倍频装置在应用过程中,基频光通过第一次倍频转化过后程剩余的能量经过缩束后再次进行倍频转化,二次转化得到的倍频光经过扩束后与第一次转化过程得到的倍频光合束后输出以提高倍频效率。此外,采用传统腔外倍频方案受到光学器件损伤阈值的影响一般倍频效率只能到达50%;而采用本发明提供的激光器的倍频装置可以在不损坏光学器件的情况下,举例而言,当缩束镜组的缩小倍数为1.4倍、扩束镜组的扩大倍数也为1.4倍时,其中,第一次倍频转化效率达到50%时,第二次倍频过程中基频光的峰值功率密度达到与第一次倍频过程相同的水平。这样第二次倍频转化过程中可以使剩余基频光的转化效率达到50%,因此,能够使得此时的使倍频效率达到75%。其中,在缩束比例和扩束比例均为1.4倍这个参数下可以实现75%的倍频效率,大于1.4倍频时倍频效率在50~75%之间,小于1.4倍频会导致第二次倍频处的峰值功率密度超过损伤阈值。也就是说,在选择恰当的缩束镜组的缩小倍数、扩束镜组的扩大倍数的情况下,本发明提供的激光器的倍频装置能够显著地提高电光转化效率,同时,还能够降低系统复杂性。In the application process of the frequency doubling device of the laser provided by the present invention, the remaining energy after the first frequency doubling conversion of the fundamental frequency light undergoes frequency doubling conversion again after beam shrinkage, and the frequency doubling light obtained by the second conversion undergoes beam expansion After combining with the frequency-doubled light obtained in the first conversion process, it is output to improve the frequency-doubling efficiency. In addition, the frequency doubling efficiency of the traditional extracavity frequency doubling scheme can only reach 50% due to the influence of the damage threshold of the optical device; however, the frequency doubling device of the laser provided by the present invention can be used without damaging the optical device, for example , when the reduction factor of the beam reducer group is 1.4 times, and the expansion factor of the beam expander group is also 1.4 times, wherein, when the first frequency doubling conversion efficiency reaches 50%, the fundamental frequency light in the second frequency doubling process The peak power density reaches the same level as the first frequency doubling process. In this way, the conversion efficiency of the remaining fundamental frequency light can reach 50% during the second frequency doubling conversion process, and therefore, the frequency doubling efficiency at this time can reach 75%. Among them, the frequency doubling efficiency of 75% can be achieved under the parameter of 1.4 times the beam reduction ratio and the beam expansion ratio. The peak power density at the suboctave exceeds the damage threshold. That is to say, in the case of selecting the appropriate reduction factor of the beam reducer group and the expansion factor of the beam expander group, the frequency doubling device of the laser provided by the present invention can significantly improve the electro-optic conversion efficiency, and at the same time, can also reduce the system Complexity.
附图说明Description of drawings
通过阅读下文优选实施方式的详细描述,各种其他的优点和益处对于本领域普通技术人员将变得清楚明了。附图仅用于示出优选实施方式的目的,而并不认为是对本发明的限制。而且在整个附图中,用相同的参考符号表示相同的部件。在附图中:Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiment. The drawings are only for the purpose of illustrating a preferred embodiment and are not to be considered as limiting the invention. Also throughout the drawings, the same reference numerals are used to designate the same parts. In the attached picture:
图1为本发明实施例提供的激光器的倍频装置的光学元件及光路示意图。FIG. 1 is a schematic diagram of optical components and optical paths of a laser frequency doubling device provided by an embodiment of the present invention.
具体实施方式detailed description
本发明为解决现有技术存在的问题,提供一种激光器的倍频装置,其能够提高激光器倍频过程中的转化率,从而更加适于实用。In order to solve the problems existing in the prior art, the present invention provides a laser frequency doubling device, which can improve the conversion rate in the laser frequency doubling process, and thus is more suitable for practical use.
为更进一步阐述本发明为达成预定发明目的所采取的技术手段及功效,以下结合附图及较佳实施例,对依据本发明提出的激光器的倍频装置,其具体实施方式、结构、特征及其功效,详细说明如后。在下述说明中,不同的“一实施例”或“实施例”指的不一定是同一实施例。此外,一或多个实施例中的特征、结构、或特点可由任何合适形式组合。In order to further explain the technical means and effects of the present invention to achieve the intended purpose of the invention, the specific implementation, structure, characteristics and details of the laser frequency doubling device proposed according to the present invention will be described below in conjunction with the accompanying drawings and preferred embodiments. Its effect is described in detail below. In the following description, different "one embodiment" or "embodiment" do not necessarily refer to the same embodiment. Furthermore, the features, structures, or characteristics of one or more embodiments may be combined in any suitable manner.
本文中术语“和/或”,仅仅是一种描述关联对象的关联关系,表示可以存在三种关系,例如,A和/或B,具体的理解为:可以同时包含有A与B,可以单独存在A,也可以单独存在B,能够具备上述三种任一种情况。The term "and/or" in this article is just an association relationship describing associated objects, which means that there can be three relationships, for example, A and/or B. The specific understanding is: A and B can be included at the same time, and A and B can be included separately. A exists, B may exist alone, and any of the above three situations can be met.
参见附图1,本发明实施例提供的激光器的倍频装置包括第一倍频晶体1、第一分光镜2a、第二分光镜2b、第三分光镜2c、缩束镜组3、第二倍频晶体4、扩束镜组5、第一半波片6a、第二半波片6b和偏振分光棱镜7。入射光X1经过第一倍频晶体1入射至第一分光镜2a,被第一分光镜2a分束为第一透射光X2和第一反射光X3。第一透射光X2依次经过缩束镜组3、第二倍频晶体4、扩束镜组5和第一半波片6a后入射至第三分光镜2c,被第三分光镜2c分束为第二透射光X6和第二反射光X4,第二反射光X4入射至偏振光分光棱镜7并被偏振光分光棱镜7反射形成第三反射光。第一反射光X3入射至第二分光镜2b,被第二分光镜2b反射后得到第四反射光X5,第四反射光X5经过第二半波片6b后入射至偏振光分光棱镜7并被偏振光分光棱镜7透射形成第三透射光。第三反射光与第三透射光共同形成光束X7。Referring to accompanying drawing 1, the laser frequency doubling device provided by the embodiment of the present invention comprises a first frequency doubling crystal 1, a first beam splitter 2a, a second beam splitter 2b, a third beam splitter 2c, a beam reducer group 3, a second beam splitter Frequency doubling crystal 4 , beam expander group 5 , first half-wave plate 6 a , second half-wave plate 6 b and polarization beam splitter prism 7 . The incident light X1 enters the first beam splitter 2a through the first frequency doubling crystal 1, and is split by the first beam splitter 2a into the first transmitted light X2 and the first reflected light X3. The first transmitted light X2 sequentially passes through the beam reducer group 3, the second frequency doubling crystal 4, the beam expander group 5 and the first half-wave plate 6a, and then enters the third beam splitter 2c, and is split by the third beam splitter 2c into The second transmitted light X6 and the second reflected light X4, the second reflected light X4 is incident on the polarizing beam splitting prism 7 and is reflected by the polarizing beam splitting prism 7 to form the third reflected light. The first reflected light X3 is incident on the second beam splitter 2b, and the fourth reflected light X5 is obtained after being reflected by the second beam splitter 2b. The third transmitted light is transmitted by the polarizing beam splitting prism 7 . The third reflected light and the third transmitted light together form a light beam X7.
本发明提供的激光器的倍频装置在应用过程中,基频光通过第一次倍频转化过后程剩余的能量经过缩束后再次进行倍频转化,二次转化得到的倍频光经过扩束后与第一次转化过程得到的倍频光合束后输出以提高倍频效率。此外,采用传统腔外倍频方案受到光学器件损伤阈值的影响一般倍频效率只能到达50%;而采用本发明提供的激光器的倍频装置可以在不损坏光学器件的情况下,当缩束镜组的缩小倍数为1.4倍、扩束镜组的扩大倍数也为1.4倍时,其中,第一次倍频转化效率达到50%时,第二次倍频过程中基频光的峰值功率密度达到与第一次倍频过程相同的水平。这样第二次倍频转化过程中可以使剩余基频光的转化效率达到50%,因此,能够使得此时的使倍频效率达到75%。也就是说,在选择恰当的缩束镜组的缩小倍数、扩束镜组的扩大倍数的情况下,本发明提供的激光器的倍频装置能够显著地提高电光转化效率,同时,还能够降低系统复杂性。In the application process of the frequency doubling device of the laser provided by the present invention, the remaining energy after the first frequency doubling conversion of the fundamental frequency light undergoes frequency doubling conversion again after beam shrinkage, and the frequency doubling light obtained by the second conversion undergoes beam expansion After combining with the frequency-doubled light obtained in the first conversion process, it is output to improve the frequency-doubling efficiency. In addition, the frequency doubling efficiency of the traditional extracavity frequency doubling scheme can only reach 50% due to the influence of the damage threshold of the optical device; while the frequency doubling device of the laser provided by the present invention can shrink the beam without damaging the optical device When the reduction factor of the mirror group is 1.4 times and the expansion factor of the beam expander group is also 1.4 times, when the conversion efficiency of the first frequency doubling reaches 50%, the peak power density of the fundamental frequency light in the second frequency doubling process to the same level as the first octave process. In this way, the conversion efficiency of the remaining fundamental frequency light can reach 50% during the second frequency doubling conversion process, and therefore, the frequency doubling efficiency at this time can reach 75%. That is to say, in the case of selecting the appropriate reduction factor of the beam reducer group and the expansion factor of the beam expander group, the frequency doubling device of the laser provided by the present invention can significantly improve the electro-optic conversion efficiency, and at the same time, can also reduce the system Complexity.
其中,缩束镜组3包括第一凸透镜3a和第一凹透镜3b。第一透射光X2先经过第一凸透镜2a后再经过第一凹透镜3b。第一凸透镜3a的主光轴、第一凹透镜3b的主光轴分别处于第一透射光X2的光心延长线上。由于凸透镜和凹透镜均对光具有折射作用,其根据光入射到凸透镜或者凹透镜的位置,能够根据折射率改变光沿直线传播的特性,在这种情况下,只有当第一凸透镜3a的主光轴、第一凹透镜3b的主光轴分别处于第一透射光X2的光心延长线上时,才能够保证第一透射光X2在依次经过第一凸透镜3a、第一凹透镜3b之后,依然能够沿直线传播。Wherein, the beam reducer group 3 includes a first convex lens 3a and a first concave lens 3b. The first transmitted light X2 first passes through the first convex lens 2a and then passes through the first concave lens 3b. The main optical axis of the first convex lens 3a and the main optical axis of the first concave lens 3b are respectively located on the extension line of the optical center of the first transmitted light X2. Because both the convex lens and the concave lens have a refraction effect on light, it can change the characteristics of light propagating along a straight line according to the refractive index according to the position where the light is incident on the convex lens or the concave lens. In this case, only when the main optical axis of the first convex lens 3a 1. When the main optical axis of the first concave lens 3b is on the extension line of the optical center of the first transmitted light X2, it can be ensured that the first transmitted light X2 can still travel along a straight line after passing through the first convex lens 3a and the first concave lens 3b in sequence. spread.
其中,扩束镜组5包括第二凹透镜5a和第二凸透镜5b。第一透射光X2先经过第二凹透镜5a后再经过第二凸透镜5b;第二凹透镜5a的主光轴、第二凸透镜5b的主光轴分别处于第一透射光X2的光心延长线上。由于凸透镜和凹透镜均对光具有折射作用,其根据光入射到凸透镜或者凹透镜的位置,能够根据折射率改变光沿直线传播的特性,在这种情况下,只有当第二凹透镜5a的主光轴、第二凸透镜5b的主光轴分别处于第一透射光X2的光心延长线上时,才能够保证第一透射光X2在依次经过第二凹透镜5a、第二凸透镜5b之后,依然能够沿直线传播。Wherein, the beam expander lens group 5 includes a second concave lens 5a and a second convex lens 5b. The first transmitted light X2 first passes through the second concave lens 5a and then passes through the second convex lens 5b; the main optical axis of the second concave lens 5a and the main optical axis of the second convex lens 5b are respectively on the extension line of the optical center of the first transmitted light X2. Because both the convex lens and the concave lens have a refraction effect on light, it can change the characteristics of light propagating along a straight line according to the refractive index according to the position where the light is incident on the convex lens or the concave lens. In this case, only when the main optical axis of the second concave lens 5a , when the main optical axis of the second convex lens 5b is on the extension line of the optical center of the first transmitted light X2, it can be ensured that the first transmitted light X2 can still travel along a straight line after passing through the second concave lens 5a and the second convex lens 5b in sequence. spread.
其中,第一倍频晶体1和/或第二倍频晶体4上由磷酸钛氧钾或者三硼酸锂中的一种物质构成的晶体或者两种物质构成的混合物的晶体制成。其中,Wherein, the first frequency-doubling crystal 1 and/or the second frequency-doubling crystal 4 are made of a crystal composed of potassium titanyl phosphate or lithium triborate or a crystal of a mixture of the two substances. in,
磷酸钛氧钾(KTP)晶体是一种具有优良的非线性光学性质、已得到了广泛重视和应用的非线性光学晶体。 KTP晶体是正光性双晶,其透光波段为350nm~4.5um,可以实现1.064um钕离子激光及其他波段激光倍频、和频、光参量振荡的位相匹配(一般采用Ⅱ类位相匹配)。其非线性系数d31、d32、d33分别为1.4、2.65和10.7pm/V,d33是KDP晶体d36的20余倍。KTP晶体有较高的抗光损伤阈值,可以用于中功率激光倍频等。KTP晶体有良好的机械性质和理化性质,不溶于水及有机溶剂,不潮解,熔点约1150℃,在熔化时有部分分解,该晶体还有很大的温度和角度宽容度。KTP晶体作为频率转换材料已经广泛应用于科研、技术等各个领域,特别是作为中小功率倍频的最佳晶体。该晶体制成的倍频器及光参量放大器等已应用于全固态可调谐激光光源。Potassium titanyl phosphate (KTP) crystal is a nonlinear optical crystal with excellent nonlinear optical properties, which has been widely valued and applied. KTP crystal is a positive twin crystal, its light transmission band is 350nm ~ 4.5um, it can realize 1.064um neodymium ion laser and other band laser frequency doubling, sum frequency, phase matching of optical parametric oscillation (generally adopts type II phase matching). Its nonlinear coefficients d31, d32, and d33 are 1.4, 2.65, and 10.7 pm/V respectively, and d33 is more than 20 times that of KDP crystal d36. KTP crystals have a high resistance to light damage threshold and can be used for frequency doubling of medium-power lasers, etc. KTP crystal has good mechanical properties and physical and chemical properties, insoluble in water and organic solvents, non-deliquescence, melting point of about 1150 ℃, partially decomposed when melting, the crystal also has a large temperature and angle tolerance. As a frequency conversion material, KTP crystal has been widely used in various fields such as scientific research and technology, especially as the best crystal for small and medium power frequency doubling. Frequency doublers and optical parametric amplifiers made of the crystal have been applied to all-solid-state tunable laser sources.
三硼酸锂(LiB3O5,简写为LBO)为优秀的大功率紫外倍频晶体,具有宽的透光波段,高的损伤阈值,大的接受角。其主要性能包括:透过波段:0.165~3.2μm,非线性系数:d31=1.05Pm/V,激光损伤阈值:25GW/cm2,倍频转化效率:40~60%(1064nm→532nm),应用范围:固体激光系统,特别是用于高功率Nd:YAG的二倍频,三倍频以及光参量振荡和放大等。Lithium triborate (LiB3O5, abbreviated as LBO) is an excellent high-power ultraviolet frequency doubling crystal with a wide light transmission band, high damage threshold, and large acceptance angle. Its main properties include: Transmission band: 0.165~3.2μm, nonlinear coefficient: d31=1.05Pm/V, laser damage threshold: 25GW/cm2, frequency doubling conversion efficiency: 40~60% (1064nm→532nm), application Scope: solid-state laser systems, especially for high-power Nd:YAG frequency doubling, frequency tripling, and optical parametric oscillation and amplification, etc.
其中,第一倍频晶体1和第二倍频晶体4均镀有基频光和倍频光的增透膜。在这种情况下,光在经过第一倍频晶体1和第二倍频晶体4的过程中,光强损失由于增透膜的引入,会被降低,因此,能够使得经过第一倍频晶体1和第二倍频晶体4的光能够尽可能地实现保真传播。Wherein, both the first frequency doubling crystal 1 and the second frequency doubling crystal 4 are coated with anti-reflection coatings for the fundamental frequency light and the frequency doubling light. In this case, when the light passes through the first frequency doubling crystal 1 and the second frequency doubling crystal 4, the light intensity loss will be reduced due to the introduction of the anti-reflection coating, so it can make the light pass through the first frequency doubling crystal 1 and the light of the second frequency-doubling crystal 4 can be transmitted as faithfully as possible.
其中,第一倍频晶体1和第二倍频晶体4的材质相同。Wherein, the materials of the first frequency doubling crystal 1 and the second frequency doubling crystal 4 are the same.
其中,第二倍频晶体4的截面积大于或者等于第一倍频晶体1的截面积的一半。在这种情况下,晶体的截面积可以使光束全部通过即可,倍频晶体的截面积越大价格越高。由于第二倍频晶体4处的光斑面积只有第一倍频晶体1处的一半,所以只需第二倍频晶体4的截面积大于或者等于第一倍频晶体1的截面积的一半就可以使光束全部通过。这样做的目的是降低成本。Wherein, the cross-sectional area of the second frequency doubling crystal 4 is greater than or equal to half of the cross-sectional area of the first frequency doubling crystal 1 . In this case, the cross-sectional area of the crystal is sufficient to allow all light beams to pass through, and the larger the cross-sectional area of the frequency doubling crystal, the higher the price. Since the spot area at the second frequency doubling crystal 4 is only half that of the first frequency doubling crystal 1, it is only necessary that the cross-sectional area of the second frequency doubling crystal 4 is greater than or equal to half of the cross-sectional area of the first frequency doubling crystal 1. Pass the beam all the way through. The purpose of this is to reduce costs.
其中,设缩束镜组3的缩小倍数为m,扩束镜组5的扩大倍数为n,则m=n。其能够保证光束X7的光斑分布均匀。其中,如果m≠n,则光束X4和光束X5的光斑直径不同,合束后会改变原有的光斑能量分布状态,使光束X7的光斑分布不均匀。Wherein, it is assumed that the reduction factor of the beam reducer group 3 is m, and the expansion factor of the beam expander group 5 is n, then m=n. It can ensure uniform spot distribution of the light beam X7. Wherein, if m≠n, the spot diameters of the beam X4 and the beam X5 are different, and the original spot energy distribution state will be changed after combining the beams, making the spot distribution of the beam X7 uneven.
其中,构成缩束镜组3的光学元件、构成扩束镜组5的光学元件上均镀有基频光和倍频光的增透膜。Wherein, the optical elements constituting the beam reducer group 3 and the optical elements constituting the beam expander group 5 are coated with anti-reflection coatings for the fundamental frequency light and the frequency doubled light.
其中,第一半波片6a、第二半波片6b的波长为倍频光波长。在这种情况下,此处两个半波片的作用是使经过半波片的两束倍频光偏振方向发生变化,从而实现两束倍频光在偏振光分光棱镜7处的合束输出。其中光束X5经过半波片6b后变为水平偏振光,经过半波片6a后的光束X4变为垂直偏振光。半波片有使用波长范围,例如波长1064nm的激光不适用于532nm的半波片。Wherein, the wavelengths of the first half-wave plate 6 a and the second half-wave plate 6 b are frequency-doubled light wavelengths. In this case, the role of the two half-wave plates here is to change the polarization directions of the two frequency-doubled lights passing through the half-wave plates, so as to realize the combined output of the two frequency-doubled lights at the polarizing beam splitter prism 7 . The light beam X5 becomes horizontally polarized light after passing through the half-wave plate 6b, and the light beam X4 becomes vertically polarized light after passing through the half-wave plate 6a. The half-wave plate has a wavelength range, for example, a laser with a wavelength of 1064nm is not suitable for a 532nm half-wave plate.
其中,第一半波片6a、第二半波片6b上均镀有基频光和倍频光的增透膜。从而降低光在经过第一半波片6a、第二半波片6b之后的光强损失。Wherein, the first half-wave plate 6a and the second half-wave plate 6b are coated with anti-reflection coatings for the fundamental frequency light and the frequency doubled light. Therefore, the light intensity loss after passing through the first half-wave plate 6 a and the second half-wave plate 6 b is reduced.
其中,偏振分光棱镜上镀有倍频光增透膜。从而降低光在经过偏振分光棱镜之后的光强损失。Wherein, the polarization beam splitter prism is coated with frequency doubled light anti-reflection film. Therefore, the light intensity loss after the light passes through the polarization beam splitter is reduced.
其中,第一分光镜2a、第二分光镜2b、第三分光镜2c的反射面均镀有反射率>99.5%的倍频光高反膜,第一分光镜2a、第二分光镜2b、第三分光镜2c的两面均镀有透过率>99.5%基频光增透膜。尽管已描述了本发明的优选实施例,但本领域内的技术人员一旦得知了基本创造性概念,则可对这些实施例作出另外的变更和修改。所以,所附权利要求意欲解释为包括优选实施例以及落入本发明范围的所有变更和修改。Wherein, the reflective surfaces of the first beamsplitter 2a, the second beamsplitter 2b, and the third beamsplitter 2c are all coated with a high-reflection film of frequency-doubled light with a reflectivity>99.5%, and the first beamsplitter 2a, the second beamsplitter 2b, Both sides of the third beam splitter 2c are coated with an anti-reflection coating for the fundamental frequency light with a transmittance>99.5%. While preferred embodiments of the invention have been described, additional changes and modifications to these embodiments can be made by those skilled in the art once the basic inventive concept is appreciated. Therefore, it is intended that the appended claims be construed to cover the preferred embodiment as well as all changes and modifications which fall within the scope of the invention.
显然,本领域的技术人员可以对本发明进行各种改动和变型而不脱离本发明的精神和范围。这样,倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内,则本发明也意图包含这些改动和变型在内。Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and equivalent technologies thereof, the present invention also intends to include these modifications and variations.
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CN207474912U (en) * | 2017-08-24 | 2018-06-08 | 南京先进激光技术研究院 | The frequency doubling device of laser |
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