CN106587647B - TFT glass surface pretreatment fluids - Google Patents
TFT glass surface pretreatment fluids Download PDFInfo
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- CN106587647B CN106587647B CN201611268680.0A CN201611268680A CN106587647B CN 106587647 B CN106587647 B CN 106587647B CN 201611268680 A CN201611268680 A CN 201611268680A CN 106587647 B CN106587647 B CN 106587647B
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
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- Chemical Kinetics & Catalysis (AREA)
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- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
TFT glass surface pretreatment fluids, it is composed of the following components：The hydrochloric acid (HCl) of mass percentage content 10 15%, the hydrofluoric acid (HF) of mass percentage content 2%~5%, the lanolin isohexadecyl ether of mass percentage content 2~4%, lauric monoglyceride, the Macrogol 6000 of mass percent 8 10% and the water of surplus of mass percentage content 1~2%.
Description
Technical field
The present invention relates to etch pretreated composition for glass substrate of liquid crystal display.
Background technology
In the production of ultra-thin TFT (Thin Film Transistor, thin film transistor (TFT)) liquid crystal display, need to complete
Carry out thinning processing at the glass substrate (abbreviation TFT glass) of encapsulation, the hydrofluoric acid etch generally used in the prior art into
Row thinning, because glass baseplate surface in production inevitable local defect, when thinning handle often generating part crosses erosion
Pit needs to carry out prolonged polishing treatment again, and the serious entire glass substrate for completing to encapsulate that even results in is scrapped.In order to
The pit that thinning processing occurs is reduced, the yields after thinning treatment process is improved, is needed before thinning processing to liquid crystal display
Glass substrate is pre-processed, a small amount of hydrofluoric acid is added in existing pretreating process based on the concentrated sulfuric acid, hydrochloric acid be configured to it is pre-
Treatment fluid, due to adding a large amount of concentrated sulfuric acid, the waste liquid generated after pretreatment process is difficult to be handled.Therefore it provides a kind of
New glass substrate of liquid crystal display thinning pretreatment product, disposal of pollutants is reduced on the basis of improving treatment effect, at
For urgent problem to be solved in the prior art.
Invention content
To solve aforementioned technical problem, the present invention provides TFT glass surfaces pretreatment fluid and its treatment process, by excellent
Change prescription and treatment process, successfully realizes and avoid concentrated sulfuric acid etc. and cause seriously to pollute and be difficult to making for the raw material handled
With.
The present invention provides TFT glass surface pretreatment fluids, it is characterised in that the pretreatment fluid is composed of the following components：
The hydrochloric acid (HCl) of mass percentage content 10-15%, the hydrofluoric acid (HF) of mass percentage content 2%~5%,
The lanolin isohexadecyl ether of mass percentage content 2~4%, the lauric monoglyceride of mass percentage content 1~2%,
The Macrogol 6000 of mass percent 8-10% and the water of surplus.
The TFT glass surface pretreatment fluids, it is characterised in that it prepares in the following manner,
1) recipe quantity hydrochloric acid, hydrofluoric acid are mixed, and suitable quantity of water dilution are added,
2) recipe quantity polyethylene glycol is dissolved in the lauric monoglyceride and lanolin polyoxy that recipe quantity is added after suitable quantity of water
Vinethene；
3) mixed liquor that step 1) obtains is slowly added in the mixed liquor of step 2), is stirred to mixed after supplying the water of surplus
It closes uniform.
Under study for action it has been surprisingly found that pretreatment fluid provided by the invention, poly- second two is being added into mix acid liquor
After alcohol, lauric monoglyceride and lanolin isohexadecyl ether, the surface that can be used for carrying out TFT glass before thinning technique is pre-
Processing, and the pit on subsequent hydrofluoric acid etch thinning technique metacoxal plate surface can be significantly reduced, to ensure that pre- place
While managing effect, avoids and use the insecurity of concentrated sulfuric acid pretreating agent as main component when in use in the prior art
The problem of being difficult to handle with waste liquid.Pretreatment fluid provided by the invention has the faces CF of glass substrate and the faces TFT good pre-
Treatment effect.And further study show that, the pretreating process that the present invention uses, preferably temperature range and temperature change journey
Sequence.Surface preparation liquid cooperation with the present invention can generate good pretreating effect.
Specific implementation mode
Provided by the present invention for TFT glass surface pretreatment fluids, prepare in the following manner,
1) recipe quantity hydrochloric acid, hydrofluoric acid are mixed, and suitable quantity of water dilution are added,
2) recipe quantity polyethylene glycol is dissolved in the lauric monoglyceride and lanolin polyoxy that recipe quantity is added after suitable quantity of water
Vinethene；
3) mixed liquor that step 1) obtains is slowly added in the mixed liquor of step 2), is stirred to mixed after supplying the water of surplus
It closes uniform.
Examples 1 to 4 formula see the table below (mass percent wt%)
It is as follows that the pretreated method of thinning is carried out to the pretreatment fluid that Examples 1 to 4 obtains
The glass panel for TFT display screens for the same batch that raw material are Corning Incorporated's production is taken, thickness is
1.000mm, size are 730mm × 920mm.It is used etching and polissoir be respectively Dongguan letter village etching machine and Hunan forever
Create polishing machine.UV glue is first permeated in CF surface glasses substrate and TFT surface glass substrate surroundings gap, then complete with UV illumination curings
At the encapsulation of glass substrate, the glass substrate that encapsulation is completed is for subsequent pretreatment and thinning process
Preprocess method is
1) TFT glass surface pretreatment fluid 1000L (hereinafter referred to as pretreating agent) are prepared
2) pretreating agent is squeezed into etching machine acid tank and controls pretreating agent temperature at 30 DEG C ± 2 DEG C, using as experiment
5 glass substrates (number is I~V) for completing encapsulation of group sample are immersed in pretreating agent, removal glass surface bilayer 20
Micron；Then pretreating agent temperature is risen to 50 DEG C ± 2 DEG C, continues to be dipped to 60 microns of removal glass surface bilayer, is locating in advance
Bubbling stirring is carried out to pretreating agent when reason.
3)：Glass surface is cleaned with clear water, is entered back under conditions of surface wettability in hydrofluoric acid etch liquid, it is a concentration of
9mol/L, temperature are controlled in 30 DEG C of conditions, are thinned to 0.5mm thickness.
It is directly entered after another glass substrate (number i~v) clear water for taking 5 to complete encapsulation cleaning dense in hydrofluoric acid etch liquid
Degree is 9mol/L, and temperature is controlled in 30 DEG C of conditions, is thinned to 0.5mm thickness, and as a control group
On same forever wound polishing machine 1300-3#, pressure 60g/cm2, lower disk rotating speed 50, upper disk rotating speed 40, grinding pad
For global LP-66 models, polishing powder is happy 101 model of scholar of moral, and absorption layer is FUJIBO BPE211 models, and experimental group is often ground
One-time surface effect is examined within 2 minutes, control group, which often grinds to examine for 5 minutes, once shows effect, is examined after record grinding not recessed
The accumulative milling time in hole is as shown in table 1
The experimental results showed that carrying out pretreated glass substrate using pretreating agent provided by the invention is carrying out thinning
The pit on panel can be substantially reduced after process.
Claims (2)
1.TFT glass surface pretreatment fluids, it is characterised in that the pretreatment fluid is composed of the following components：
The hydrochloric acid (HCl) of mass percentage content 10-15%, the hydrofluoric acid (HF) of mass percentage content 2%~5%, quality
The lanolin isohexadecyl ether of degree 2~4%, the lauric monoglyceride of mass percentage content 1~2%, quality
The Macrogol 6000 of percentage 8-10% and the water of surplus, it is as follows that the pretreatment fluid carries out pretreated method：
Pretreatment fluid is squeezed into etching machine acid tank and controls pretreatment fluid temperature at 30 DEG C ± 2 DEG C, the glass for completing encapsulation
Substrate is immersed in pretreatment fluid, and removal glass surface is 20 microns double-deck；Then pretreatment fluid temperature is risen to 50 DEG C ± 2 DEG C,
Continue to be dipped to 60 microns of removal glass surface bilayer, bubbling stirring is carried out to pretreatment fluid in pretreatment.
2. TFT glass surfaces pretreatment fluid as described in claim 1, it is characterised in that it prepares in the following manner,
1) recipe quantity hydrochloric acid, hydrofluoric acid are mixed, and suitable quantity of water dilution are added,
2) recipe quantity polyethylene glycol is dissolved in the lauric monoglyceride and lanolin polyoxyethylene that recipe quantity is added after suitable quantity of water
Ether；
3) mixed liquor that step 1) obtains is slowly added in the mixed liquor of step 2), stirring is equal to mixing after supplying the water of surplus
It is even.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201611268680.0A CN106587647B (en) | 2016-12-31 | 2016-12-31 | TFT glass surface pretreatment fluids |
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|---|---|---|---|
| CN201611268680.0A CN106587647B (en) | 2016-12-31 | 2016-12-31 | TFT glass surface pretreatment fluids |
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| Publication Number | Publication Date |
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| CN106587647A CN106587647A (en) | 2017-04-26 |
| CN106587647B true CN106587647B (en) | 2018-08-31 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107608111A (en) * | 2017-09-18 | 2018-01-19 | 合肥惠科金扬科技有限公司 | A kind of processing technology of the substrate support of liquid crystal display panel |
| CN109694203A (en) * | 2017-10-24 | 2019-04-30 | 天津美泰真空技术有限公司 | A kind of glass thin chemical industry skill pretreatment fluid |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52144020A (en) * | 1976-05-26 | 1977-12-01 | Seiko Instr & Electronics | Method of etching glass surface |
| SG121817A1 (en) * | 2002-11-22 | 2006-05-26 | Nishiyama Stainless Chemical Co Ltd | Glass substrate for flat planel display, and process for producing the same |
| KR100860367B1 (en) * | 2006-08-21 | 2008-09-25 | 제일모직주식회사 | Wet etching solution having high selectivity for silicon oxide |
| JP5802407B2 (en) * | 2011-03-04 | 2015-10-28 | 三菱瓦斯化学株式会社 | Substrate processing apparatus and substrate processing method |
| CN103951270B (en) * | 2014-04-17 | 2016-10-19 | 苏州凯利昂光电科技有限公司 | A kind of TFT glass thinning preprocess method |
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Effective date of registration: 20180724 Address after: 221423 west side of Mo Xin Road, Chesse Town, Xinyi City, Xuzhou, Jiangsu Applicant after: Xinyi chessboard Industrial Concentration Zone Construction Development Co., Ltd. Address before: 528051 No. 4, Lane 4, Nan Bian street, Chancheng, Zhangcha, Foshan, Guangdong. Applicant before: Pang Qiqi |
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