CN104583918A - Sensor-integrated cover glass - Google Patents

Sensor-integrated cover glass Download PDF

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Publication number
CN104583918A
CN104583918A CN201380043790.5A CN201380043790A CN104583918A CN 104583918 A CN104583918 A CN 104583918A CN 201380043790 A CN201380043790 A CN 201380043790A CN 104583918 A CN104583918 A CN 104583918A
Authority
CN
China
Prior art keywords
nesa coating
sensor
glass
piece type
cover glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201380043790.5A
Other languages
Chinese (zh)
Inventor
玉井喜芳
中川文
齐木仁
上村直己
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of CN104583918A publication Critical patent/CN104583918A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0414Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using force sensing means to determine a position
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0416Control or interface arrangements specially adapted for digitisers
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0445Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04105Pressure sensors for measuring the pressure or force exerted on the touch surface without providing the touch position
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04111Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate

Abstract

The present invention relates to a sensor-integrated cover glass having: a glass panel; a first transparent conductive film extending in a first direction, and a second transparent conductive film extending in a different direction from the first direction, the films being formed on one surface of the glass panel; and a base insulating film comprising a transparent organic compound, formed between glass panel, and the first transparent conductive film and the second transparent conductive film.

Description

The one-piece type cover glass of sensor
Technical field
The present invention relates to the one-piece type cover glass of sensor for capacitive touch panel etc.
Background technology
Contact panel is used in smart mobile phone, plate computer etc.
In various contact panel, capacitive touch panel forms sensor function portion by forming the nesa coating (transparency electrode) for detecting input position that such as extends in x direction and y direction etc. on the glass substrate being called as sensor glass usually.
Common capacitive touch panel is by by gluing to the sensor glass being formed with nesa coating etc. and the glass being called as cover glass and form.
On the other hand, as Patent Document 1, in capacitive touch panel, also knownly the minimizing of achievement unit number of packages and slimming, lightweight is come by removing sensor glass.
Namely; this capacitive touch panel has following formation: tempered glass is used as cover glass; this cover glass being formed the nesa coating etc. for detecting input position, making cover glass and sensor part become one-piece type (the one-piece type cover glass of sensor) thus.
Tempered glass is the glass by forming strengthening layer (compressive stress layers) from the teeth outwards, compression stress being played a role to which thereby enhance intensity.
As the manufacture method of tempered glass, there will be a known the expansion of glass and contraction that utilize and caused by heating and cooling and form the physical strengthening method (air-cooled reinforcement) of strengthening layer and form the chemical enhanced method of strengthening layer by the basic ion in glass being replaced with other larger basic ion of ionic radius.
For the thin glass such as cover glass of contact panel, usually utilize the tempered glass, the i.e. so-called chemically reinforced glass that are obtained by chemical enhanced method.
Prior art document
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2011-197708 publication
Summary of the invention
Invent problem to be solved
Conveniently, for the one-piece type cover glass of sensor, in order to realize the contact panel of excellent durability, the cover glass importantly carrying out operating has sufficient intensity.
Therefore, for the one-piece type cover glass of sensor, require to guarantee or its above intensity equal with cover glass.
The object of the present invention is to provide the one-piece type cover glass of a kind of sensor; its in capacitive touch panel, the one-piece type cover glass of sensor that obtains by forming nesa coating for detecting position etc. on cover glass, it can realize the capacitive touch panel of excellent durability.
For the means of dealing with problems
The one-piece type cover glass of sensor of a mode of the present invention possesses: glass plate; Be formed on a face of above-mentioned glass plate, first direction extend the first nesa coating and the second nesa coating extended in the direction different from above-mentioned first direction; And be formed in above-mentioned glass plate and the transparent underlying insulation film including organic compounds between above-mentioned first nesa coating and above-mentioned second nesa coating.
The one-piece type cover glass of sensor of the present invention is preferred: the cross part that above-mentioned first nesa coating and above-mentioned second nesa coating formation intersect in the mode that a nesa coating covers another nesa coating; at above-mentioned cross part, between above-mentioned first nesa coating and above-mentioned second nesa coating, there is cross part dielectric film.
The one-piece type cover glass of sensor of the present invention is preferred: only form above-mentioned underlying insulation film at above-mentioned glass plate and between above-mentioned first nesa coating and above-mentioned second nesa coating.
The one-piece type cover glass of sensor of the present invention is preferred: at least form above-mentioned underlying insulation film in the region being formed with above-mentioned first nesa coating and above-mentioned second nesa coating in the mode covering above-mentioned glass plate comprehensively.
In addition, preferably above-mentioned first nesa coating and above-mentioned second nesa coating intersect above-mentioned cross part and above-mentioned glass plate between do not form above-mentioned underlying insulation film.
In addition, preferred above-mentioned cross part dielectric film is by the above-mentioned glass plate that extends to beyond above-mentioned cross part and formed between above-mentioned first nesa coating and above-mentioned second nesa coating.
Invention effect
The one-piece type cover glass of sensor of the present invention with above-mentioned formation be in capacitive touch panel, by forming the one-piece type cover glass of sensor that the nesa coating etc. for detecting position obtains on cover glass, can provide the sensor of the capacitive touch panel that can realize excellent durability one-piece type cover glass.
Accompanying drawing explanation
Fig. 1 (A) ~ 1 (D) is the figure of the example schematically showing the one-piece type cover glass of sensor of the present invention; wherein; Fig. 1 (A) is vertical view; the b-b line cross section that Fig. 1 (B) is Fig. 1 (A); the c-c line cross section that Fig. 1 (C) is Fig. 1 (A), Fig. 1 (D) is the cross section near end.
Fig. 2 is the vertical view of the formation for illustration of the one-piece type cover glass of sensor shown in Fig. 1 (A) ~ 1 (D).
Fig. 3 is the process flow diagram of an example of the manufacture method representing the one-piece type cover glass of sensor shown in Fig. 1 (A) ~ 1 (D).
Fig. 4 (A) ~ 4 (C) is the figure of another embodiment schematically showing the one-piece type cover glass of sensor; wherein; Fig. 4 (A) is vertical view; the b-b line cross section that Fig. 4 (B) is Fig. 4 (A), the c-c line cross section that Fig. 4 (C) is Fig. 4 (A).
Fig. 5 (A) and 5 (B) is the figure of the test method of the face intensity schematically shown for measuring each sample in embodiments of the invention, and wherein, Fig. 5 (A) is vertical view, and Fig. 5 (B) is side view.
Embodiment
Below, based on preferred example shown in the drawings, the one-piece type cover glass of sensor of the present invention is described in detail.
An example of the one-piece type cover glass of sensor of the present invention is schematically shown in Fig. 1 (A) ~ 1 (D).
It should be noted that; in Fig. 1 (A) ~ 1 (D); Fig. 1 (A) is vertical view; namely observe part during the one-piece type cover glass 10 of sensor from the direction orthogonal with the direction, face of glass plate 12 (below by this direction referred to as direction, face), Fig. 1 (B) and Fig. 1 (C) is the figure representing the b-b line cross section of Fig. 1 (A) and the c-c line cross section of Fig. 1 (A) respectively.In addition, Fig. 1 (D) be schematically show the one-piece type cover glass 10 of sensor, the figure in the cross section in x direction near the end in x direction.
In illustrated example; the one-piece type cover glass 10 of sensor is constructed as follows substantially: form glass plate 12 as substrate; and there is the first nesa coating 14, second nesa coating 16 and photomask 18, be formed in the metal line 20 on photomask 18 and the protection dielectric film 24 that covers them and be formed on glass plate 12 (in Fig. 1 (A); eliminate protection dielectric film 24, and photomask 18 and metal line 20 are recorded in Fig. 2 described later).In addition, between the first nesa coating 14 and the second nesa coating 16, cross part dielectric film 28 is provided with.
In addition, the one-piece type cover glass 10 of sensor of the present invention is at glass plate 12 and have underlying insulation film 26 between the first nesa coating 14 and the second nesa coating 16.
The one-piece type cover glass of sensor of the present invention is not limited to the formation of illustrated example, can utilize various by the glass plate in face operated capacitive touch panel being formed the nesa coatings that form sensor etc. and the formation of the one-piece type cover glass of known sensor that obtains forming.
The one-piece type cover glass 10 of sensor of the present invention forms capacitive touch panel.As shown in Fig. 1 (B), in the one-piece type cover glass 10 of this sensor, surface (interarea) 12a not being formed with the sides such as the first nesa coating 14, second nesa coating 16 of glass plate 12 is as the face of carrying out operating.Below, in glass plate 12, the face 12a carrying out operating is set to operating surface 12a, the face being formed with the first nesa coating 14 and the second nesa coating 16 etc. is set to sensor cover 12b.
Namely; in the one-piece type cover glass 10 of sensor, glass plate 12 has concurrently as the function of the cover glass of the operating surface 12a forming capacitive touch panel and the function as the sensor glass be formed as sensor performance the first nesa coating 14 of function and the second nesa coating 16 etc.
In the one-piece type cover glass 10 of sensor, glass plate 12 can utilize the various glass plate that can be used as the cover glass forming operating surface in known touch sensor.That is, for glass plate 12, the manufacture methods such as composition, float glass process or fusion method etc. are restriction not.
As glass plate 12, illustrative have the tempered glass such as above-mentioned chemically reinforced glass, physical strengthening glass; Soda-lime glass, alkali-free glass etc. are as an example.Wherein, preferably utilize silico-aluminate chemically reinforced glass, sodium calcium chemically reinforced glass etc.
The thickness of glass plate 12 can be same with the cover glass for known touch sensor.It should be noted that, the thickness of glass plate 12 is generally 0.3 ~ 1.5mm, is preferably 0.5 ~ 1.1mm.
The one-piece type cover glass of sensor 10 is using such glass plate 12 as substrate and on sensor cover 12b, be formed with the first nesa coating 14, second nesa coating 16 and photomask 18.
In addition, at the first nesa coating 14 be formed with underlying insulation film 26 between the second nesa coating 16 and glass plate 12.About this underlying insulation film 26, after describe in detail.It should be noted that, at underlying insulation film 26 and between the first nesa coating 14 and the second nesa coating 16, other film can be set.Such as, can SiO be set 2deng inoranic membrane.
In the one-piece type cover glass 10 of sensor, the first nesa coating 14 and the second nesa coating 16 are for detecting input position (for detecting the transparency electrode of input position).That is, the first nesa coating 14 and the second nesa coating 16 form the sensor detecting input position.
In the following description, when without the need to distinguishing first nesa coating 14 and second nesa coating 16, also both can be referred to as nesa coating 14 and 16.
In the one-piece type cover glass 10 of sensor of illustrated example, the first nesa coating 14 in the drawings x direction extends and arranges multiple on the y direction orthogonal with this x direction.On the other hand, the second nesa coating 16 extends and arranges in x direction multiple in y direction in the drawings.
As shown in Fig. 1 (A), the first nesa coating 14 can have following formation: large area portion (pad portion) 14a arranging rectangle at bearing of trend and x direction at predetermined intervals, and connects with connecting portion 14b.In addition, the second nesa coating 16 also can similarly have following formation: the large area portion 16a arranging rectangle at bearing of trend and y direction at predetermined intervals, and connects with connecting portion 16b.
Large area portion 14a and large area portion 16a is separated from each other, and arranges in the mode mutually replaced in x direction and y direction, arranges to improve input position to detect.Therefore, the mode that the first nesa coating 14 and the second nesa coating 16 intersect with connecting portion 14b and connecting portion 16b is formed.
As shown in Fig. 1 (A) and 1 (C), in the cross part of the first nesa coating 14 and the cross part of the second nesa coating 16, i.e. connecting portion 14b and connecting portion 16b, form cross part dielectric film 28 in the mode striding across the second nesa coating 16 in x direction.
In addition, at this cross part, this cross part dielectric film 28 forms the first nesa coating 14 in the mode striding across cross part dielectric film 28 and the second nesa coating 16 in x direction.
Thus, form the bridge (cross part) that the first nesa coating 14 and the second nesa coating 16 are intersected with state of insulation, keep the state of insulation of the first nesa coating 14 and the second nesa coating 16 mutually intersected to form.
In the one-piece type cover glass 10 of sensor of the present invention, the formation material of nesa coating 14 and 16 can utilize the various conductive material for the formation of the sensor part in electrostatic capacity type touch sensor, known transparent (having light transmission).
Specifically, illustrative have ITO (tin indium oxide), IZO (indium zinc oxide) etc.Wherein, preferably ITO is utilized.
The thickness of nesa coating 14 and 16 suitably can be determined according to formation material etc.It should be noted that, the thickness of nesa coating 14 and 16 is generally about 20 ~ about 100nm.
The formation material of cross part dielectric film 28 can utilize various known transparent insulating material.Specifically, illustrative have the various photoresists such as acrylic compounds, polyimide etc.
In addition, the thickness of cross part dielectric film 28 suitably can be determined according to formation material etc.It should be noted that, the thickness of cross part dielectric film 28 is generally about 0.8 ~ about 2.0 μm.
Fig. 2 is the vertical view of the formation for illustration of the one-piece type cover glass 10 of sensor.In Fig. 2, photomask 18 is insulating films that be formed at the sensor cover peripheral part of glass plate 12, that have light-proofness.
Photomask 18 be in order to block from the display combined with the one-piece type cover glass of sensor 10 light leak, hide for driving the wiring of this display or IC, hide metal line 20 described later etc. and arrange.
The thickness of photomask 18 can suitably change.It should be noted that, the thickness of photomask 18 is generally about 0.8 ~ about 2.0 μm.
It should be noted that, in the one-piece type cover glass 10 of sensor of the present invention, photomask 18 is arranged as optimal way.
As shown in Fig. 2 and Fig. 1 (D), be formed with metal line 20 at photomask 18 (underlying insulation film 26 on photomask 18) upper (sensor cover 12b).
Number according to the first nesa coating 14 and the second nesa coating 16 forms multiple metal line 20, and one end of each metal line 20 is connected with the first nesa coating 14 or the second nesa coating 16.In addition, the other end of each metal line 20 is connected with such as flexible printed circuit board 30, and this flexible printed circuit board 30 is connected with the display be combined on the one-piece type cover glass 10 of sensor.
By having this metal line 20, the low electric conductivity of the nesa coating comprising ITO etc. can be compensated, thus easily extract the signal of sensor.
In the one-piece type cover glass 10 of sensor of the present invention, metal line 20 can utilize various metal material in contact panel.
Specifically, illustrative three-layer metal material (MAM), the three-layer metal material of Mo-Nb alloy/Al/Mo-Nb alloy, the three-layer metal material etc. of Mo-Nb alloy/Al-Nb alloy/Mo-Nb alloy having Mo/Al/Mo.
The thickness of metal line 20 suitably can be determined according to the width etc. of the electric conductivity of used material, possible wiring.It should be noted that, the thickness of metal line 20 is generally about 0.3 ~ about 0.5 μm.
In the one-piece type cover glass of sensor of the present invention, this metal line 20 is also arrange as optimal way.
Above-mentioned metal line 20 is provided with protection dielectric film 24, but is not that whole protected dielectric film 24 covers, necessary part is exposed in outside.Such as, in metal line 20, only have the connecting portion of the flexible printed circuit board 30 be connected with display etc. to expose, and not protected dielectric film 24 cover.
In the one-piece type cover glass 10 of sensor of the present invention, protection dielectric film 24 can utilize the known transparent insulating material of the various diaphragm for the formation of the one-piece type cover glass of sensor, can use the material same with cross part dielectric film 28.
In addition, protect the thickness of dielectric film 24 can according to formed material, the thickness at various position that formed on the sensor cover of glass plate 12 etc. suitably setting cover them and the thickness played one's part to the full as protective seam.It should be noted that, the thickness of protection dielectric film 24 is generally 0.8 ~ 2.0 μm.
As mentioned above, in the one-piece type cover glass 10 of sensor of the present invention, at glass plate 12 and be formed with underlying insulation film 26 between the first nesa coating 14 and the second nesa coating 16.It should be noted that, in illustrated example, as shown in Fig. 1 (D), underlying insulation film 26 is not only formed between glass plate 12 and nesa coating 14 and 16, but also is formed on photomask 18.
Underlying insulation film 26 is characteristic positions of the present invention, is transparent and has the film including organic compounds of insulativity.
The one-piece type cover glass 10 of sensor of the present invention has this underlying insulation film 26, significantly improves the intensity of glass plate 12 thus, achieves the touch sensor of the smart mobile phone of excellent durability, plate computer etc.
That is, the result of study of the present inventor finds, for the one-piece type cover glass of sensor in the past, the face intensity of the sensor cover of glass plate is weak.
As mentioned above, be assembled with operating in of the equipment of the one-piece type cover glass of sensor to carry out with the operating surface of sensor cover opposition side as the face being formed with nesa coating.That is, glass plate is subject to pressing force from operating surface side usually, and applies drawing stress to sensor cover.
Therefore, in glass plate, the face intensity applying the sensor cover of drawing stress is low may become serious problem for the one-piece type cover glass of sensor.
The present invention makes to solve the problem, and on the sensor cover 12b of the one-piece type cover glass 10 of sensor, has and include organic compounds and transparent, to have insulativity underlying insulation film 26 between glass plate 12 and nesa coating 14 and 16.
In the one-piece type cover glass 10 of sensor of the present invention, as long as the formation material of underlying insulation film 26 includes organic compounds and has the material of the transparency and insulativity fully, then can utilize various material.Specifically, illustrative have transparent epoxy resin, acrylic resin, other light-cured resin or heat-curing resin, various photoresists etc.At this, the sufficient transparency refers to that in the transmissivity of visible region (wavelength is 400nm ~ 700nm) be more than 85%.In addition, sufficient insulativity refers to that resistivity is more than 1E12 (Ω/), is more preferably more than 1E14 (Ω/).
The thickness of underlying insulation film 26 can suitably set.According to the research of the present inventor, the thickness of underlying insulation film 26 is preferably 0.8 ~ 2.0 μm, is particularly preferably 1.0 ~ 1.5 μm.
As shown in Fig. 1 (D), underlying insulation film 26 is not only formed between glass plate 12 and nesa coating 14 and 16, but also is formed on photomask 18.But the present invention is not limited to this, underlying insulation film 26 can not be formed at inner side photomask 18 being only arranged on photomask 18.
In addition, as shown in Fig. 1 (C) and 1 (D), underlying insulation film 26 is formed on whole of sensor cover 12b.But the present invention is not limited thereto, underlying insulation film 26 can not be formed in the part without nesa coating 14 and 16 on sensor cover 12b and only be formed between nesa coating 14 and 16 and glass plate 12.That is, in the present invention, as long as underlying insulation film 26 is at least formed between nesa coating 14 and 16 and glass plate 12.
It should be noted that, so, when needing the patterning carrying out underlying insulation film 26, underlying insulation film 26 is preferably formed by photoresist.
Below, the example of process flow diagram to the manufacture method of the one-piece type cover glass 10 of sensor with reference to Fig. 3 is described.
It should be noted that, the one-piece type cover glass 10 of sensor of the present invention is not limited to manufacture according to this step.As long as underlying insulation film 26 can be formed between nesa coating 14 and 16 and glass plate 12, then can utilize such as formed to be formed after nesa coating metal line etc. according to the one-piece type cover glass of known sensor in the manufacture method of various steps that uses.
In addition, the formation method of each film is also not limited to example shown below, according to the formation material etc. of film, can utilize the various methods used in the one-piece type cover glass of known sensor.
First, prepare as raw-material glass plate, and implement chemical enhanced to this glass plate, thus produce glass plate 12.Chemical enhancedly can be undertaken by known method.
Then, glass plate 12 prints photomask 18 to surround the region (see Fig. 2) as active region A.The printing of photomask 18 can by manufacturing the known method utilized in contact panel.It should be noted that, as mentioned before, the formation of photomask 18 can be carried out as required.
Then, form the film as underlying insulation film 26, and carry out patterning etc. as required thus form underlying insulation film 26.
Film build method for underlying insulation film 26 is not particularly limited, and can utilize the various known film build method including the film of organic compounds.
In addition, when carrying out patterning, also can be undertaken by known method according to the formation material of underlying insulation film 26.
Then, whole of underlying insulation film 26 becomes the film forming such as the ITO of the cross part nesa coating 16c of a part for the second nesa coating 16 by after formation, and carries out patterning.The film forming of ITO etc. can be undertaken by known methods such as sputterings.Patterning also can be undertaken by utilizing the known methods such as the method for photoetching.
Then, cross part nesa coating 16c forms dielectric film, and carry out patterning and expose to make a part of the region beyond cross part nesa coating 16c and cross part nesa coating 16c, thus form cross part dielectric film 28.Film build method and patterning can be undertaken by known method according to the formation material of cross part dielectric film 28.
Then, by film forming such as the ITO of formation first nesa coating 14 and the second nesa coating 16 except cross part nesa coating 16c, and carry out patterning, complete clear sensor wiring portion thus.With same before, the film forming of ITO etc. can be undertaken by known methods such as sputterings, and patterning also can be undertaken by known method.
Further, photomask 18 forms metal line 20, and carry out patterning.It should be noted that, as mentioned before, this operation also can be carried out as required.In addition, in present embodiment, implement between formation cross part nesa coating 16c and the operation of cross part dielectric film 28, but be not limited thereto.
Then, form protection dielectric film 24 in the mode of whole of the sensor cover 12b of stacked coated glass sheets 12, and carry out patterning to make to expose with the necessary part of the metal line 20 such as the connecting portion of flexible printed circuit board 30.Film build method and patterning can be undertaken by known method according to the formation material of protection dielectric film 24.
Then, Fig. 4 (A) ~ 4 (C) is the figure of another embodiment schematically showing the one-piece type cover glass of sensor of the present invention.
It should be noted that, Fig. 4 (A) is the vertical view of the part same with Fig. 1 (A), and Fig. 4 (B) and Fig. 4 (C) is the figure representing the b-b line cross section of Fig. 4 (A) and the c-c line cross section of Fig. 4 (A) respectively.
It should be noted that; sensor one-piece type cover glass 10a shown in Fig. 4 (A) ~ 4 (C) has a large amount of component identical with the one-piece type cover glass of the sensor 10; therefore give same-sign to identical components, mainly different parts is described.
The one-piece type cover glass 10a of sensor shown in Fig. 4 (A) ~ 4 (C) does not have underlying insulation film 26; and use organic compound as the transparent insulating film for the formation of bridge; this dielectric film is not only formed at bridge; and be formed on whole of sensor cover 12b of glass plate 12, thus make cross part/underlying insulation film 32.
Namely; in the one-piece type cover glass 10a of sensor; when forming the cross part dielectric film 28 of Fig. 1 (A) and the one-piece type cover glass of sensor shown in 1 (C); the transparent insulating film including organic compounds is formed on whole of sensor cover 12b, there is cross part/underlying insulation film 32 thus that the cross part dielectric film 28 of above-mentioned example and underlying insulation film 26 integration are obtained.
Specifically; for the one-piece type cover glass 10a of the sensor shown in Fig. 4 (A) ~ 4 (C); in the process flow diagram shown in Fig. 3; after carrying out the printing of chemical enhanced and photomask 18; do not carry out the film forming of underlying insulation film 26, and carry out until form the operation of cross part nesa coating 16c and formation metal line 20 (metal line etching).That is, in this example, cross part nesa coating 16c is formed directly on glass plate 12 (sensor cover 12b).
Then, whole forms transparent insulating film, by etching etc., the two ends in the y direction of cross part nesa coating 16c are exposed, thus form cross part/underlying insulation film 32.
Then, similarly, the formation of the nesa coating 14 and 16 beyond cross part nesa coating 16c and the formation of protection dielectric film 24 is carried out.
That is, the sensor one-piece type cover glass 10a shown in Fig. 4 (A) ~ 4 (C) have x direction extend the first nesa coating and y direction extend the second nesa coating and be arranged on the first nesa coating and the second nesa coating cross part two conducting films between and at above-mentioned first nesa coating and the transparent cross part/underlying insulation film including organic compounds between the second nesa coating and glass plate.
In other words; in the one-piece type cover glass of sensor shown in Fig. 1 (A) ~ 1 (D); not there is underlying insulation film in the below of the nesa coating of bridge; and cross part dielectric film extends to the first nesa coating beyond bridge and between the second nesa coating and glass plate, plays a role as underlying insulation film.
When the one-piece type cover glass 10 of the sensor shown in shop drawings 1 (A) ~ 1 (D), need to add the such operation of formation underlying insulation film.On the other hand, the sensor one-piece type cover glass 10a shown in Fig. 4 (A) ~ 4 (C) of present embodiment can manufacture with the process number identical with the one-piece type cover glass of sensor in the past when not increasing process number.In addition, underlying insulation film can be set between nesa coating and glass plate in most of region, the effect that the face intensity that therefore can also obtain the sensor cover 12b preventing glass plate 12 fully reduces.
On the other hand, the one-piece type cover glass 10 of the sensor shown in Fig. 1 (A) ~ 1 (D) also has underlying insulation film in the below of bridge, is therefore favourable in the intensity of glass plate 12.
Above, be illustrated in detail, but the present invention is not limited to above-mentioned example to the one-piece type cover glass of sensor of the present invention, without departing from the spirit and scope of the invention, can carry out various improvement, change, this is natural.
Embodiment
Then, illustrate in greater detail the present invention by embodiment, but the present invention is not by any restriction of these embodiments.
First, the aluminum silicate glass (alumina silicate glass) that thickness of slab is 0.7mm is prepared.This glass is carried out chemical enhanced after, cut into 50mm square.
In order to investigate the dependence of chemical intensified condition, the different chemical intensified condition of chemical enhanced use two kinds carries out.The glass plate obtained under each chemical intensified condition CS separately (compression stress) for 647MPa, DOL (layer depth) be 21 μm; CS is 630MPa, DOL is 49 μm.
Below, for simplicity, to be 647MPa, DOL by CS be, and the glass plate of 21 μm is set to glass plate A, and to be 630MPa, DOL by CS be, and the glass plate of 49 μm is set to glass plate B.
Then, be produced on and obtained glass plate form ito film by sputtering method on whole and the sample that obtains, and by be spin-coated on whole upper form underlying insulation film after, similarly on whole, form ito film thereon and the sample that obtains.At this, ito film carries out film forming with the thickness of 100nm, underlying insulation film respectively with the thickness of 1.2 μm.In addition, underlying insulation film uses acrylic resin.
The sample that glass plate A is only formed ito film is set to comparative example 1, the sample that glass plate B is only formed ito film is set to comparative example 2, the sample that glass plate A is formed underlying insulation film and ito film is set to embodiment 1, and the sample being formed with underlying insulation film and ito film on glass plate B is set to embodiment 2.
Obtained each sample is measured to the face intensity of each sample by the method as shown in Fig. 5 (A) and 5 (B).In addition, glass plate A and glass plate B is also carried out to the mensuration of same face intensity.
Fig. 5 (A) and 5 (B) schematically shows to be called as BOR (ball and ring method, Ball on Ring) the figure of face Strength Testing Methods of glass plate, wherein, Fig. 5 (A) is vertical view, Fig. 5 (B) is side view.As shown in Fig. 5 (A) and 5 (B), on the support portion S of ring-type, alignd in center, so that the forming surface of ITO is loaded sample G towards the mode of S side, support portion, from the S of support portion, pressing is the spherical load portion L of radius 5mm with the contact site of sample G thus applies load in the heart, measures the face intensity of each sample G thus.The diameter of support portion S is 30mm (with the center of support portion S for benchmark).
The measurement result of the face intensity of each sample and glass plate is shown in following table 1.
[table 1]
From the measurement result of the comparative example 1 and 2 of table 1 and the face intensity of glass plate A and B, have nothing to do with chemical intensified condition, when forming ito film on a glass, the face intensity of the film forming face upper glass plates of ITO reduces.According to this result, the face intensity of the sensor cover of the one-piece type cover glass of sensor is in the past weak.
On the other hand, confirmed by the measurement result of the face intensity of embodiment 1 and 2 and glass plate A and B, even if be formed with ito film on a glass, by forming underlying insulation film, the ITO film forming face of glass plate can guarantee with ITO film forming before the equal face intensity of intensity.That is, the one-piece type cover glass of sensor according to the present invention, can realize the touch sensor of the face intensity, the smart mobile phone of excellent durability, plate computer etc. that fully ensure that sensor cover.
The Japanese patent application 2012-183832 that the application applied for based on August 23rd, 2012, is incorporated herein by reference by its content.
Reference numeral
10, the one-piece type cover glass of 10a sensor
12 glass plates
14 first nesa coatings
16 second nesa coatings
18 photomasks
20 metal lines
24 protection dielectric films
26 underlying insulation films
28 cross part dielectric films
30 flexible printed circuit boards
32 cross parts/underlying insulation film

Claims (6)

1. the one-piece type cover glass of sensor, it possesses:
Glass plate;
Be formed on a face of described glass plate, first direction extend the first nesa coating and the second nesa coating extended in the direction different from described first direction; With
Be formed in described glass plate and the transparent underlying insulation film including organic compounds between described first nesa coating and described second nesa coating.
2. the one-piece type cover glass of sensor as claimed in claim 1; wherein; the cross part that described first nesa coating and described second nesa coating formation intersect in the mode that a nesa coating covers another nesa coating; at described cross part, between described first nesa coating and described second nesa coating, there is cross part dielectric film.
3. the one-piece type cover glass of sensor as claimed in claim 1 or 2, wherein, only forms described underlying insulation film at described glass plate and between described first nesa coating and described second nesa coating.
4. the one-piece type cover glass of sensor as claimed in claim 1 or 2, wherein, at least forms described underlying insulation film in the region being formed with described first nesa coating and described second nesa coating in the mode covering described glass plate comprehensively.
5. the one-piece type cover glass of sensor as claimed in claim 2, wherein, does not form described underlying insulation film between the described cross part intersected at described first nesa coating and described second nesa coating and described glass plate.
6. the one-piece type cover glass of sensor as claimed in claim 5, wherein, described cross part dielectric film is by the described glass plate that extends to beyond described cross part and formed between described first nesa coating and described second nesa coating.
CN201380043790.5A 2012-08-23 2013-08-16 Sensor-integrated cover glass Pending CN104583918A (en)

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