CN104570203B - 光学装置 - Google Patents

光学装置 Download PDF

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Publication number
CN104570203B
CN104570203B CN201410579585.7A CN201410579585A CN104570203B CN 104570203 B CN104570203 B CN 104570203B CN 201410579585 A CN201410579585 A CN 201410579585A CN 104570203 B CN104570203 B CN 104570203B
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CN
China
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region
grating
light
interference
reflection
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Chinese (zh)
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CN104570203A (zh
Inventor
陈书履
那允中
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FORELUX Inc
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FORELUX Inc
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
    • G02B6/29325—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide of the slab or planar or plate like form, i.e. confinement in a single transverse dimension only
    • G02B6/29328—Diffractive elements operating in reflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
    • G02B6/29323—Coupling to or out of the diffractive element through the lateral surface of the light guide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29356—Interference cavity within a single light guide, e.g. between two fibre gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G02F1/2257—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure the optical waveguides being made of semiconducting material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Semiconductor Lasers (AREA)
CN201410579585.7A 2013-10-25 2014-10-24 光学装置 Active CN104570203B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910419195.6A CN110275247B (zh) 2013-10-25 2014-10-24 光学装置

Applications Claiming Priority (14)

Application Number Priority Date Filing Date Title
US201361895493P 2013-10-25 2013-10-25
US61/895,493 2013-10-25
US201461925629P 2014-01-09 2014-01-09
US61/925,629 2014-01-09
US201461946657P 2014-02-28 2014-02-28
US61/946,657 2014-02-28
US201461979489P 2014-04-14 2014-04-14
US61/979,489 2014-04-14
US201462012446P 2014-06-16 2014-06-16
US62/012,446 2014-06-16
US201462014182P 2014-06-19 2014-06-19
US62/014,182 2014-06-19
US14/510,799 2014-10-09
US14/510,799 US9239507B2 (en) 2013-10-25 2014-10-09 Grating based optical coupler

Related Child Applications (1)

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CN201910419195.6A Division CN110275247B (zh) 2013-10-25 2014-10-24 光学装置

Publications (2)

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CN104570203A CN104570203A (zh) 2015-04-29
CN104570203B true CN104570203B (zh) 2019-08-27

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US (2) US9239507B2 (cg-RX-API-DMAC10.html)
EP (1) EP2866067B1 (cg-RX-API-DMAC10.html)
JP (1) JP6640445B2 (cg-RX-API-DMAC10.html)
KR (1) KR20150048078A (cg-RX-API-DMAC10.html)
CN (2) CN104570203B (cg-RX-API-DMAC10.html)
CA (1) CA2867951A1 (cg-RX-API-DMAC10.html)
SG (1) SG10201406933YA (cg-RX-API-DMAC10.html)
TW (1) TWI648564B (cg-RX-API-DMAC10.html)

Families Citing this family (68)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11726332B2 (en) 2009-04-27 2023-08-15 Digilens Inc. Diffractive projection apparatus
WO2016020630A2 (en) 2014-08-08 2016-02-11 Milan Momcilo Popovich Waveguide laser illuminator incorporating a despeckler
CN106125308B (zh) 2012-04-25 2019-10-25 罗克韦尔柯林斯公司 用于显示图像的装置和方法
US9933684B2 (en) 2012-11-16 2018-04-03 Rockwell Collins, Inc. Transparent waveguide display providing upper and lower fields of view having a specific light output aperture configuration
DE102013212752B4 (de) * 2013-03-01 2024-02-29 IHP GmbH - Innovations for High Performance Microelectronics/Institut für innovative Mikroelektronik Integriert-optische Koppler-Vorrichtung zwischen integriert-optischen Wellenleitern und einer optischen Mehrmodenfaser, sowie optoelektronische Vorrichtung und Anordnung mit einer solchen Koppler-Vorrichtung
US9239507B2 (en) 2013-10-25 2016-01-19 Forelux Inc. Grating based optical coupler
US10386581B2 (en) 2013-10-25 2019-08-20 Forelux Inc. Grating based optical transmitter
US9766410B1 (en) * 2014-07-11 2017-09-19 Acacia Communications, Inc. Wafer-level testing of photonic integrated circuits with optical IOs
EP3221897A1 (en) * 2014-09-08 2017-09-27 The Research Foundation Of State University Of New York Metallic gratings and measurement methods thereof
US10241330B2 (en) 2014-09-19 2019-03-26 Digilens, Inc. Method and apparatus for generating input images for holographic waveguide displays
EP3245444B1 (en) 2015-01-12 2021-09-08 DigiLens Inc. Environmentally isolated waveguide display
US9632226B2 (en) 2015-02-12 2017-04-25 Digilens Inc. Waveguide grating device
WO2016146963A1 (en) * 2015-03-16 2016-09-22 Popovich, Milan, Momcilo Waveguide device incorporating a light pipe
AU2016276980B2 (en) 2015-06-12 2021-09-23 Pacific Biosciences Of California, Inc. Integrated target waveguide devices and systems for optical coupling
TWI566918B (zh) 2015-07-29 2017-01-21 財團法人工業技術研究院 立體列印系統
JP6089077B1 (ja) * 2015-08-25 2017-03-01 沖電気工業株式会社 導波路型光回折格子及び光波長フィルタ
US9939587B2 (en) * 2015-08-28 2018-04-10 Samsung Electronics Co., Ltd. On-chip optical filter comprising Fabri-Perot resonator structure and spectrometer
KR102640201B1 (ko) * 2015-08-28 2024-02-23 삼성전자주식회사 페브리-페로 공진기 구조를 포함하는 온칩 광학필터 및 분광기
US10690916B2 (en) 2015-10-05 2020-06-23 Digilens Inc. Apparatus for providing waveguide displays with two-dimensional pupil expansion
US9798084B2 (en) * 2015-11-20 2017-10-24 Google Inc. Photonic chip grating couplers
EP3391482B1 (en) 2015-12-17 2022-11-23 Finisar Corporation Surface coupled systems
US10992104B2 (en) 2015-12-17 2021-04-27 Ii-Vi Delaware, Inc. Dual layer grating coupler
US10067303B1 (en) * 2016-01-14 2018-09-04 Finisar Corporation Optical grating
EP3548939A4 (en) 2016-12-02 2020-11-25 DigiLens Inc. UNIFORM OUTPUT LIGHTING WAVEGUIDE DEVICE
WO2018129398A1 (en) 2017-01-05 2018-07-12 Digilens, Inc. Wearable heads up displays
US10412378B2 (en) 2017-05-08 2019-09-10 Microsoft Technology Licensing, Llc Resonating optical waveguide using multiple diffractive optical elements
US10222615B2 (en) 2017-05-26 2019-03-05 Microsoft Technology Licensing, Llc Optical waveguide with coherent light source
US11262605B2 (en) * 2017-08-31 2022-03-01 Lightwave Logic Inc. Active region-less polymer modulator integrated on a common PIC platform and method
FR3071626B1 (fr) * 2017-09-26 2019-11-01 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif de couplage optique pour un circuit photonique.
CN107765375B (zh) * 2017-11-21 2019-06-25 南京大学 基于双层光栅的芯片-光纤垂直耦合结构
JP7145436B2 (ja) * 2017-12-27 2022-10-03 パナソニックIpマネジメント株式会社 光学装置
KR102745805B1 (ko) 2018-01-08 2024-12-20 디지렌즈 인코포레이티드. 광 도파관의 제조 방법
US10732569B2 (en) 2018-01-08 2020-08-04 Digilens Inc. Systems and methods for high-throughput recording of holographic gratings in waveguide cells
EP3710876A4 (en) 2018-01-08 2022-02-09 DigiLens Inc. SYSTEMS AND PROCESSES FOR THE MANUFACTURE OF WAVEGUIDE CELLS
DE112018007107B4 (de) * 2018-02-19 2023-09-28 Mitsubishi Electric Corporation Optische integrierte Halbleitervorrichtung
CN108333681B (zh) * 2018-04-08 2023-10-13 浙江大学 基于部分透射式角反射镜组的片上集成部分反射器
TWI673618B (zh) * 2018-06-27 2019-10-01 英業達股份有限公司 導光體輔助設計方法
US11435522B2 (en) * 2018-09-12 2022-09-06 Ii-Vi Delaware, Inc. Grating coupled laser for Si photonics
US10914892B2 (en) * 2018-10-18 2021-02-09 Cisco Technology, Inc. Germanium photodetector coupled to a waveguide
US10802213B2 (en) 2018-12-27 2020-10-13 Juniper Networks, Inc. Photodetector with sequential asymmetric-width waveguides
JP7252598B2 (ja) * 2019-01-08 2023-04-05 国立大学法人東京工業大学 光機能デバイスの制御方法および制御装置
US20200225471A1 (en) 2019-01-14 2020-07-16 Digilens Inc. Holographic Waveguide Display with Light Control Layer
US20200247017A1 (en) 2019-02-05 2020-08-06 Digilens Inc. Methods for Compensating for Optical Surface Nonuniformity
US20220283377A1 (en) 2019-02-15 2022-09-08 Digilens Inc. Wide Angle Waveguide Display
CN120405821A (zh) 2019-02-15 2025-08-01 迪吉伦斯公司 使用集成光栅提供全息波导显示的方法和装置
US11404850B2 (en) 2019-04-22 2022-08-02 Ii-Vi Delaware, Inc. Dual grating-coupled lasers
US20200386947A1 (en) 2019-06-07 2020-12-10 Digilens Inc. Waveguides Incorporating Transmissive and Reflective Gratings and Related Methods of Manufacturing
CN110161600B (zh) * 2019-07-09 2022-08-30 京东方科技集团股份有限公司 一种阵列基板及其制备方法和液晶显示装置
KR102775783B1 (ko) 2019-08-29 2025-02-28 디지렌즈 인코포레이티드. 진공 격자 및 이의 제조 방법
US11067765B2 (en) 2019-11-27 2021-07-20 Cisco Technology, Inc. Evanescent coupling of photodiode with optical waveguide
US11378750B2 (en) 2020-01-17 2022-07-05 Taiwan Semiconductor Manufacturing Company, Ltd. Germanium photodetector embedded in a multi-mode interferometer
US12535420B2 (en) 2020-02-18 2026-01-27 Pacific Biosciences Of California, Inc. Highly multiplexed nucleic acid sequencing systems
EP4160944A4 (en) * 2020-05-28 2024-02-28 LG Electronics, Inc. METHOD AND APPARATUS FOR FAST BEAM STEERING TRANSMISSION BASED ON FREQUENCY GRADIENT METASURFACE FOR OWC
US11204463B1 (en) * 2020-07-17 2021-12-21 Globalfoundries U.S. Inc. Integrated circuit structure with optical absorber layer over optical grating coupler
US11869991B2 (en) * 2020-09-18 2024-01-09 Taiwan Semiconductor Manufacturing Company Limited Semiconductor device and method of making
EP4020027A1 (en) 2020-12-23 2022-06-29 EFFECT Photonics B.V. An environmentally protected photonic integrated circuit
CN114675369B (zh) * 2020-12-24 2026-02-10 天津大学 波导光栅器件、光波导相控阵、光学扫描及光通信装置
US12399326B2 (en) 2021-01-07 2025-08-26 Digilens Inc. Grating structures for color waveguides
US11474294B2 (en) * 2021-01-29 2022-10-18 Globalfoundries U.S. Inc. Grating couplers with segments having sections of inverted curvature
US12158612B2 (en) 2021-03-05 2024-12-03 Digilens Inc. Evacuated periodic structures and methods of manufacturing
CN118661138A (zh) 2021-12-29 2024-09-17 迪吉伦斯公司 利用倒置母版进行全息记录的方法和系统
WO2024125102A1 (zh) * 2022-12-16 2024-06-20 上海鲲游科技有限公司 二维光栅结构、扩瞳结构、耦出结构以及衍射光波导
EP4459370A1 (en) * 2023-05-02 2024-11-06 Alpine Quantum Technologies GmbH Suppression of spontaneous emissions
US12693556B2 (en) * 2023-05-09 2026-07-28 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated photodetector with embedded semiconductor region
CN116908991B (zh) * 2023-07-18 2025-07-29 河南皓泽电子股份有限公司 棱镜镜头一体式驱动装置
WO2025238847A1 (ja) * 2024-05-17 2025-11-20 Ntt株式会社 半導体レーザ
CN121238326A (zh) * 2025-08-04 2025-12-30 聚光科芯(杭州)光电子科技有限公司 双金属布拉格光栅相位差调控实现窄线宽的外腔激光器
CN121484639B (zh) * 2026-01-06 2026-05-29 湖北江城实验室 封装结构及其制造方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1468385A (zh) * 2000-07-21 2004-01-14 �Ƹ��� 表面等离子体偏振子带隙结构
US6775427B2 (en) * 2001-03-09 2004-08-10 Photodigm, Inc. Laterally coupled wave guides
CN101793998A (zh) * 2010-03-10 2010-08-04 中国科学院半导体研究所 带有分布布拉格反射镜的波导光栅耦合器及其制作方法
CN101915965A (zh) * 2010-08-23 2010-12-15 清华大学 光栅耦合器及其封装结构
CN102047160A (zh) * 2008-05-19 2011-05-04 Imec公司 集成光子器件
CN102565955A (zh) * 2012-01-16 2012-07-11 中国科学院半导体研究所 电可调谐光栅耦合器
CN103197386A (zh) * 2013-04-01 2013-07-10 北京工业大学 一种金属键合的垂直耦合光栅耦合器及其制作方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2692913B2 (ja) 1987-12-19 1997-12-17 株式会社東芝 グレーティング結合型表面発光レーザ素子およびその変調方法
US5038185A (en) 1989-11-30 1991-08-06 Xerox Corporation Structurally consistent surface skimming hetero-transverse junction lasers and lateral heterojunction bipolar transistors
WO1997026571A2 (en) * 1996-01-18 1997-07-24 British Telecommunications Public Limited Company Optical waveguide with photosensitive refractive index cladding
US6031243A (en) 1996-10-16 2000-02-29 Geoff W. Taylor Grating coupled vertical cavity optoelectronic devices
JPH10178165A (ja) * 1996-12-19 1998-06-30 Furukawa Electric Co Ltd:The 感度可変型光集積素子
JPH11281829A (ja) * 1998-03-31 1999-10-15 Minolta Co Ltd 光導波路デバイス及びその製造方法
JP3647656B2 (ja) * 1998-11-05 2005-05-18 株式会社東芝 光機能素子及び光通信装置
US6714575B2 (en) * 2001-03-05 2004-03-30 Photodigm, Inc. Optical modulator system
US20040114642A1 (en) 2002-03-22 2004-06-17 Bullington Jeff A. Laser diode with output fiber feedback
US6970488B2 (en) 2002-10-16 2005-11-29 Eastman Kodak Company Tunable organic VCSEL system
JP2005159002A (ja) * 2003-11-26 2005-06-16 Seiko Epson Corp 受光素子、光モジュール、及び光伝送装置
JP4793820B2 (ja) * 2006-03-20 2011-10-12 国立大学法人京都大学 2次元フォトニック結晶面発光レーザ光源
JP4772585B2 (ja) * 2006-05-10 2011-09-14 浜松ホトニクス株式会社 光検出器
US7643709B2 (en) 2006-05-12 2010-01-05 Interuniversitair Microelektronica Centrum (Imec) Slanted segmented coupler
KR100910979B1 (ko) * 2007-07-27 2009-08-05 (주)켐옵틱스 폴리머 광 도파로형 파장가변 레이저 모듈
JP2009288718A (ja) * 2008-05-30 2009-12-10 Kyoto Institute Of Technology 共振グレーティングカップラ
US8270791B2 (en) 2010-10-05 2012-09-18 Tdk Corporation Optical waveguide and thermally-assisted magnetic recording head therewith
US10078190B2 (en) * 2010-12-20 2018-09-18 Alcatel Lucent Multi-core optical cable to photonic circuit coupler
US9028157B2 (en) 2011-12-15 2015-05-12 Intel Corporation Efficient backside-emitting/collecting grating coupler
JP5884532B2 (ja) * 2012-02-06 2016-03-15 三菱電機株式会社 フォトダイオード、波長センサ、波長測定装置
EP2634605B1 (en) 2012-02-29 2015-10-28 Huawei Technologies Co., Ltd. A diffractive coupling grating for perpendicular coupling
US20150117817A1 (en) 2013-10-25 2015-04-30 Forelux Inc. Optical device for redirecting incident electromagnetic wave
US9239507B2 (en) * 2013-10-25 2016-01-19 Forelux Inc. Grating based optical coupler

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1468385A (zh) * 2000-07-21 2004-01-14 �Ƹ��� 表面等离子体偏振子带隙结构
US6775427B2 (en) * 2001-03-09 2004-08-10 Photodigm, Inc. Laterally coupled wave guides
CN102047160A (zh) * 2008-05-19 2011-05-04 Imec公司 集成光子器件
CN101793998A (zh) * 2010-03-10 2010-08-04 中国科学院半导体研究所 带有分布布拉格反射镜的波导光栅耦合器及其制作方法
CN101915965A (zh) * 2010-08-23 2010-12-15 清华大学 光栅耦合器及其封装结构
CN102565955A (zh) * 2012-01-16 2012-07-11 中国科学院半导体研究所 电可调谐光栅耦合器
CN103197386A (zh) * 2013-04-01 2013-07-10 北京工业大学 一种金属键合的垂直耦合光栅耦合器及其制作方法

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