CN104510500B - 超声波器件、探测器、电子设备以及超声波图像装置 - Google Patents
超声波器件、探测器、电子设备以及超声波图像装置 Download PDFInfo
- Publication number
- CN104510500B CN104510500B CN201410514380.0A CN201410514380A CN104510500B CN 104510500 B CN104510500 B CN 104510500B CN 201410514380 A CN201410514380 A CN 201410514380A CN 104510500 B CN104510500 B CN 104510500B
- Authority
- CN
- China
- Prior art keywords
- wiring
- electrode
- ultrasonic
- wiring layer
- ultrasonic device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000003384 imaging method Methods 0.000 title claims 2
- 239000004020 conductor Substances 0.000 claims abstract description 69
- 239000012528 membrane Substances 0.000 claims abstract description 30
- 238000000034 method Methods 0.000 claims description 2
- 239000011159 matrix material Substances 0.000 abstract description 21
- 238000012285 ultrasound imaging Methods 0.000 abstract description 7
- 238000010276 construction Methods 0.000 abstract description 6
- 239000010410 layer Substances 0.000 description 65
- 239000002344 surface layer Substances 0.000 description 13
- 238000002604 ultrasonography Methods 0.000 description 12
- 238000003491 array Methods 0.000 description 11
- 239000000758 substrate Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000004913 activation Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
- G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
- A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/0629—Square array
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/88—Sonar systems specially adapted for specific applications
- G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
- G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
- G01S15/8909—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration
- G01S15/8915—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array
- G01S15/8925—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array the array being a two-dimensional transducer configuration, i.e. matrix or orthogonal linear arrays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/101—Piezoelectric or electrostrictive devices with electrical and mechanical input and output, e.g. having combined actuator and sensor parts
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Life Sciences & Earth Sciences (AREA)
- Acoustics & Sound (AREA)
- Computer Networks & Wireless Communication (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Molecular Biology (AREA)
- Biophysics (AREA)
- Mechanical Engineering (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Medical Informatics (AREA)
- Gynecology & Obstetrics (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Signal Processing (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-203478 | 2013-09-30 | ||
| JP2013203478A JP6221582B2 (ja) | 2013-09-30 | 2013-09-30 | 超音波デバイスおよびプローブ並びに電子機器および超音波画像装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104510500A CN104510500A (zh) | 2015-04-15 |
| CN104510500B true CN104510500B (zh) | 2019-03-15 |
Family
ID=52740039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410514380.0A Active CN104510500B (zh) | 2013-09-30 | 2014-09-29 | 超声波器件、探测器、电子设备以及超声波图像装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US10042044B2 (enExample) |
| JP (1) | JP6221582B2 (enExample) |
| CN (1) | CN104510500B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9858640B1 (en) * | 2015-07-15 | 2018-01-02 | Hrl Laboratories, Llc | Device and method for merging 3D point clouds from sparsely distributed viewpoints |
| JP6623596B2 (ja) * | 2015-07-24 | 2019-12-25 | セイコーエプソン株式会社 | 超音波デバイス、超音波モジュール、電子機器、及び超音波測定装置 |
| JP6610058B2 (ja) * | 2015-07-29 | 2019-11-27 | セイコーエプソン株式会社 | 超音波デバイス、及び電子機器 |
| JP6601190B2 (ja) * | 2015-11-30 | 2019-11-06 | セイコーエプソン株式会社 | 圧電モジュール、超音波モジュール及び電子機器 |
| JP6828389B2 (ja) | 2016-11-16 | 2021-02-10 | セイコーエプソン株式会社 | 超音波トランスデューサーデバイス、超音波プローブおよび超音波装置 |
| JP7096248B2 (ja) * | 2016-12-12 | 2022-07-05 | コーニンクレッカ フィリップス エヌ ヴェ | 治療デバイスの超音波ガイド下の位置決め |
| JP7167657B2 (ja) * | 2018-11-22 | 2022-11-09 | セイコーエプソン株式会社 | 圧電デバイス製造方法 |
| JP7127510B2 (ja) * | 2018-11-22 | 2022-08-30 | セイコーエプソン株式会社 | 超音波素子、及び超音波装置 |
| FR3110834B1 (fr) * | 2020-05-28 | 2022-04-22 | Moduleus | Dispositif d'imagerie ultrasonore à adressage ligne-colonne |
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-
2013
- 2013-09-30 JP JP2013203478A patent/JP6221582B2/ja active Active
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2014
- 2014-09-24 US US14/495,145 patent/US10042044B2/en active Active
- 2014-09-29 CN CN201410514380.0A patent/CN104510500B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP6221582B2 (ja) | 2017-11-01 |
| US10042044B2 (en) | 2018-08-07 |
| JP2015066203A (ja) | 2015-04-13 |
| US20150092514A1 (en) | 2015-04-02 |
| CN104510500A (zh) | 2015-04-15 |
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