CN104495391A - Air floatation conveyer - Google Patents
Air floatation conveyer Download PDFInfo
- Publication number
- CN104495391A CN104495391A CN201410626307.2A CN201410626307A CN104495391A CN 104495391 A CN104495391 A CN 104495391A CN 201410626307 A CN201410626307 A CN 201410626307A CN 104495391 A CN104495391 A CN 104495391A
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- China
- Prior art keywords
- air
- groove
- workpiece
- feeding device
- induction opening
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
Abstract
The invention discloses an air floatation conveyer comprising a flat plate which is provided with a plurality of symmetrically distributed recesses. Each recess is internally and pairwise provided with air inlets and air outlets both in the vertical direction; the air inlets and the air outlets are connected with compressed air incoming pipes and compressed air outgoing pipes, respectively; each compressed air incoming pipe and each compressed air outgoing pipe are communicated with positive and negative pressure sides of an air source through electromagnetic reversing valves, respectively. The air horizontally flows in the recesses, a workpiece can be driven to move by making greatest use of vicious force of the air flow, a high motion acceleration is acquired, the problem that the existing air flotation conveyer has low driving capacity and easily causes interference to the workpiece is solved, and electrostatic pollution and workpiece surface stress concentration can be lessened.
Description
Technical field
The present invention relates to a kind of air supporting feeding device, relate to the contactless transport technique field in semiconductor crystal wafer and glass substrate manufacture.
Background technology
Liquid crystal glass base and semiconductor crystal wafer must ensure that the carrying out of safety and nondestructive on its manufacturing line transports in process of production.The contactless mode transported generally is adopted to transmit this kind of workpiece at present, common way makes to form one deck air film between workpiece and feeding device surface, workpiece is suspended in above device, thus avoids workpiece contact with apparatus surface in transmitting procedure and cause damage.In existing this suspension transmission equipment, it is comparatively typical that just like Chinese patent application " a kind of air suspension device ", (application publication number is CN201961843U, Shen Qing Publication day is: on September 7th, 2011), " air suspension conveyer " (application publication number is CN102363476A, Shen Qing Publication day is: on February 29th, 2012), " float-up device and feedway " (application publication number is CN1966371B, and Shen Qing Publication day is: on August 15th, 2012).These technical schemes and similar techniques scheme thereof be all by spray from apparatus surface straight up airflow function bottom workpiece, the gap that air is consisted of apparatus surface and workpiece is discharged to air and below workpiece, form one deck air film, air film is only played a supporting role to workpiece, and workpiece motion in the horizontal direction must drive by applying external force.This kind of feedway can bring following problem:
1. need otherwise designed to drive the moveable platform of workpiece motion s, as mechanical arm, roller etc., device overall weight will increase greatly.
2. workpiece and feedway are not be in contactless state completely, and as shown in Figure 1, the air film between device 4 and workpiece only plays a supportive role, and workpiece is transported by motor driving rolls 1, owing to contacting with roller 1, and the easy scratch of workpiece, distortion or damage.
In the prior art, also have the contactless transfer ways that a class is known, as shown in Figure 2, offer oblique nozzle 2 on device 1 surface, below workpiece 3, spray windstream by oblique nozzle 2, the viscosity draw utilizing air to flow thus drive workpiece motion s.But there are the following problems for this technical scheme:
1. the air flow rate of nozzle injection is less, and power-handling capability is limited, and workpiece motion s acceleration/accel is little.
2. there is horizontal component and vertical component in oblique air-flow, and wherein vertical component easily causes the appearance of the unstable disturbing phenomenon of workpiece.
3. when the air-flow of nozzle injection contacts with semiconductor workpiece, easily produce electrostatic to pollute, near contact point, easily cause stress to be concentrated simultaneously.
4. nozzle air current direction is limited, is unfavorable for carrying out motion control to workpiece.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the invention provides a kind of air supporting feeding device, it can realize Entirely contactless formula and transport, solve little and easy problem workpiece being caused to disturbance of existing air supporting feeding device power-handling capability, but also electrostatic can be reduced to pollute and the stress of surface of the work is concentrated.
Technical scheme: for achieving the above object, a kind of air supporting feeding device of the present invention, comprise flat board, described flat board is provided with several symmetrical grooves, be provided with longitudinal induction opening and air gate in pairs in each groove, induction opening and air gate are connected with compressed air inlet pipe and pressurized air freeing pipe respectively, and compressed air inlet pipe is communicated with negative pressure with source of the gas malleation by solenoid directional control valve with pressurized air freeing pipe.
As preferably, the degree of depth of described groove is for being greater than 200 microns and being less than 500 microns.
As preferably, be provided with two induction openings and two air gates in described groove, the spacing of two induction openings is equal with the spacing of two air gates.
As preferably, described induction opening and air gate upper end are provided with throttle unit, and the throttle unit upper surface after installing is not higher than groove floor, and throttle unit is metal polyporous material or the porous graphite of sintering.
As preferably, described groove is criss-cross, and in cross groove, be provided with four rectangular recess, induction opening or air gate are positioned at rectangular recess, are provided with throttle unit in rectangular recess.
Beneficial effect: air supporting feeding device of the present invention, has the following advantages:
1. because air is horizontal flow state in groove, therefore, air-flow force of cohesion can be farthest utilized to drive workpiece motion s, obtain larger acceleration of motion, solve little and easy problem workpiece being caused to disturbance of existing air supporting feeding device power-handling capability, but also electrostatic can be reduced to pollute and the stress of surface of the work is concentrated.
2. induction opening and deflation hole adopt the mode of independent gas supply, and mode is flexible, and driver element and support unit are arranged and be easy to realize, and can realize high-precisionly contactlessly transporting workpiece, meet the requirement of semiconductor element transmission.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of one of existing air supporting feeding device operative scenario;
Fig. 2 is the schematic diagram of existing air supporting feeding device operative scenario two
Fig. 3 is principle schematic of the present invention;
Fig. 4 is the front view that the present invention comprises the structure of 4 grooves;
Fig. 5 is the cutaway view at Fig. 4 A-A place;
Fig. 6 is the front view that the present invention comprises the another kind of structure of 4 grooves;
Fig. 7 is the front view that the present invention comprises the third structure of 4 grooves;
Fig. 8 is the cutaway view at Fig. 7 B-B place;
Fig. 9 is the third structure using state schematic diagram that the present invention comprises 64 grooves;
Figure 10 is the front view that the present invention comprises the 4th kind of structure of 4 grooves;
Figure 11 is the cutaway view at Figure 10 C-C place.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is further described.
As shown in Fig. 3 to Figure 11, a kind of air supporting feeding device, comprises one ganoid dull and stereotyped 11, and the multiple groove 1-2 be symmetric are established on dull and stereotyped 11 surfaces, mutually separated, and groove 1-2 quantity is greater than 4 between each groove 1-2 by dull and stereotyped 11 surfaces.The groove 1-2 on dull and stereotyped 11 surfaces can be circular, square or cross, and the groove 1-2 degree of depth is greater than 200 microns and is less than 500 microns.Offering induction opening 1-3 and air gate 1-4 in pairs in groove 1-2 inside, flat board 11 bottom surface residing for induction opening 1-3 and air gate 1-4 offers screw thread, carrying out air feed for connecting gas joint.Induction opening 1-3 supplies positive pressure, air gate 1-4 supplying negative voltage power.As shown in Figure 3, the workpiece 12 transported is positioned at dull and stereotyped 11 surfaces, when pressurized air inputs from induction opening 1-3, because groove 1-2 bottom surface is lower than dull and stereotyped 11 surfaces, in groove 1-2, flow resistance is little, and most air is discharged from air gate 1-4 in groove 1-2, in only have a small amount of air to flow into gap that workpiece 12 and dull and stereotyped 11 surfaces form, form one deck air pressure film, make workpiece 12, with dull and stereotyped 11 surfaces, any contact not occur.The quasi-viscous effect that in groove 1-2, air flowing produces simultaneously can make workpiece 12, and forces are applied, thus realize the motion of workpiece 12.In order to the accuracy that power of tackifying controls, the induction opening 1-3 of each groove 1-2 is all connected with negative pressure with source of the gas malleation separately through a two-bit triplet solenoid directional control valve 15 with air gate 1-4, can change air flow line in groove by carrying out control to solenoid directional control valve 15.
The present invention drives workpiece 12 by the viscous effect of horizontal gas flow, compared with the prior art utilizing oblique jet flow, the present invention can realize obtaining larger propulsive effort when identical supply flow rate, simultaneously owing to there is not vertical direction air-flow, the disturbance of air-flow to workpiece 12 can be reduced.
In the technical scheme of above-mentioned air supporting feeding device: the groove 1-2 quantity increased in unit area makes the flat air-flow of trough inner water and workpiece 12 area of contact increase, power of can tackifying.For the symmetry of assurance device, between the inner adjacent air holes of groove 1-2, pitch-row is equal; The positive/negative pressure of induction opening 1-3 and air gate 1-4 will suitably mate, and increases charge air in groove, can increase propulsive effort when ensureing certain hoverheight.Fluted 1-2 does not need all to provide propulsive effort, can supply separately malleation or negative pressure according to practical situations.Can also the appropriate change groove 1-2 degree of depth with propulsive effort of tackifying.
Induction opening 1-3 and air gate 1-4 can be rectangle, circle, leg-of-mutton, or arbitrary shape.Also can carry out air feed by sintering diamond bit, or can be porous graphite.When adopting sintering diamond bit or porous graphite as throttle unit, induction opening 1-3 and air gate 1-4 place groove 1-2 is then comparatively dark, is greater than 3 millimeters, and for being embedded by porous material, after embedding, it surperficially to flush with groove 1-2 bottom surface or lower slightly.
As shown in Figure 4 and Figure 5, dull and stereotyped 11 surfaces offer 4 square indentations 1-2 be symmetric, and the groove 1-2 length of side is 25 millimeters, and the degree of depth is greater than 200 microns and is less than 500 microns.Offer induction opening 1-3 and air gate 1-4 in pairs in groove 1-2 inside, diameter is 3 millimeters, and induction opening 1-3 and the flat board residing for air gate 1-4 11 bottom surface offer screw thread, for being communicated with freeing pipe with air inlet pipe.Induction opening 1-3 supplies positive pressure, air gate 1-4 supplying negative voltage power.Mutually separated by guide rail surface between each groove 1-2.If apparatus surface is placed with workpiece 12, when pressurized air inputs from induction opening 1-3, the runner formed due to groove 1-2 bottom surface and workpiece 12 lower surface is wider, flow resistance is little, overwhelming majority air is just discharged from air gate 1-4, a small amount of air flow in the gap that workpiece 12 and apparatus surface form, and forms one deck air pressure film, makes workpiece 12 and apparatus surface that any contact not occur.When air flows from induction opening 1-3 to air gate 1-4 in groove 1-2, its quasi-viscous effect can make workpiece 12, and forces are applied, thus workpiece 12 is moved.
As shown in Figure 6, comprise the groove 1-2 that 4 have same structure, it and Fig. 4, embodiment illustrated in fig. 5 unlike, that dull and stereotyped 11 surfaces are offered is 4 circular groove 1-2 be symmetric, and groove 1-2 diameter is 30 millimeters.
As shown in Figure 7 and Figure 8, dull and stereotyped 11 surfaces offer 4 cruciform groove 1-2 be symmetric, and groove 1-2 is wide 20 millimeters, and long 30 millimeters, the degree of depth is greater than 200 microns and is less than 500 microns.Narrow and long rectangular induction opening 1-3 and air gate 1-4 is offered in pairs, pore length 15 millimeters in groove 1-2 spider end, wide 3.5 millimeters, dark 3 millimeters.The through hole being 3 millimeters in the bottom centre of induction opening 1-3 and air gate 1-4 and diameter connects, and flat board 11 bottom surface residing for through hole offers screw thread, for being communicated with pressurized air freeing pipe with compressed air inlet pipe.Induction opening 1-3 arranged in pairs and air gate 1-4 is when a pair air feed, and another is to not air feed, to prevent air-flow in groove 1-2 chaotic.With Fig. 4, embodiment illustrated in fig. 5 compared with, cruciform groove 1-2 adds the active area of air-flow force of cohesion, can obtain larger propulsive effort under identical Supplying gas condition.Meanwhile, narrow and long rectangular induction opening 1-3 and the air gate 1-4 bearing force that workpiece 12 can be made to be subject to evenly.
As shown in Figure 9, altogether containing 64 groove 1-2, may be used for workpiece 12 is transported within the specific limits.Each induction opening 1-3 is all connected with negative pressure with source of the gas malleation by two-bit triplet solenoid directional control valve 15 with air gate 1-4.The force of cohesion action direction in each groove 1-2 can be changed by the break-make controlling solenoid directional control valve 15, workpiece 12 is moved towards certain direction.
As shown in Figure 10 and Figure 11, it and Fig. 7, embodiment illustrated in fig. 8 unlike, embed sintering diamond bit or porous graphite as throttle unit at rectangular inlet hole 1-3 and air gate 1-4 place.Aerated materials upper surface flushes with groove 1-2 surface or lower slightly, and retain 0.5 millimeter of spacing between lower surface and rectangular opening bottom surface to guarantee that air feed is even, side adopts the mode of glue sealing with Leakage prevention.Offering at the place of bottom centre of induction opening 1-3 and air gate 1-4 the through hole that diameter is 3 millimeters, flat board 11 bottom surface residing for through hole offering screw thread, for being communicated with pressurized air freeing pipe with compressed air inlet pipe.When pressurized air inputs from induction opening 1-3, flows decrease after aerated materials, steadily, little to workpiece 12 disturbance transported, the bearing force making it be subject to is more even in flowing.
The above is only the preferred embodiment of the present invention; be noted that for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (5)
1. an air supporting feeding device, it is characterized in that: comprise flat board, described flat board is provided with several symmetrical grooves, be provided with longitudinal induction opening and air gate in pairs in each groove, induction opening and air gate are connected with compressed air inlet pipe and pressurized air freeing pipe respectively, and compressed air inlet pipe is communicated with negative pressure with source of the gas malleation by solenoid directional control valve with pressurized air freeing pipe.
2. air supporting feeding device according to claim 1, is characterized in that: the degree of depth of described groove is for being greater than 200 microns and being less than 500 microns.
3. air supporting feeding device according to claim 1, is characterized in that: be provided with two induction openings and two air gates in described groove, the spacing of two induction openings is equal with the spacing of two air gates.
4. air supporting feeding device according to claim 1, it is characterized in that: described induction opening and air gate upper end are provided with throttle unit, throttle unit upper surface after installing is not higher than groove floor, and throttle unit is metal polyporous material or the porous graphite of sintering.
5. the air supporting feeding device according to any one of Claims 1-4, is characterized in that: described groove is criss-cross, and in cross groove, be provided with four rectangular recess, induction opening or air gate are positioned at rectangular recess, are provided with throttle unit in rectangular recess.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410626307.2A CN104495391B (en) | 2014-11-07 | Air flotation conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410626307.2A CN104495391B (en) | 2014-11-07 | Air flotation conveying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104495391A true CN104495391A (en) | 2015-04-08 |
| CN104495391B CN104495391B (en) | 2017-01-04 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105712089A (en) * | 2016-04-21 | 2016-06-29 | 江苏科技大学 | Non-contact transporting and positioning platform device and control method |
| CN105742220A (en) * | 2016-04-21 | 2016-07-06 | 钟伟 | Non-contact transmission and positioning platform device and control method thereof |
| CN107655788A (en) * | 2017-11-16 | 2018-02-02 | 合肥工业大学 | A kind of device for being used to measure glass substrate air-flotation system choke block Restriction Parameters |
| CN108910534A (en) * | 2018-07-05 | 2018-11-30 | 江苏科技大学 | The contactless air bearing feeding device of glass substrate |
| CN110498233A (en) * | 2019-07-26 | 2019-11-26 | 江苏科技大学 | The contactless delivery platform device of two dimension |
| CN112173725A (en) * | 2019-07-03 | 2021-01-05 | 上海睿范自动化设备有限公司 | Non-contact transmission device |
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| CN103112719A (en) * | 2011-10-25 | 2013-05-22 | 东丽工程株式会社 | Device with levitation and transportation |
| JP2013245732A (en) * | 2012-05-24 | 2013-12-09 | Hiroaki Tsuno | Workpiece levitation device |
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| JP2000021949A (en) * | 1998-07-03 | 2000-01-21 | Tabai Espec Corp | Structure for noncontact floating transfer of work |
| KR20040023888A (en) * | 2002-09-12 | 2004-03-20 | 삼성전자주식회사 | Wafer backgrinding apparatus |
| JP2006264804A (en) * | 2005-03-22 | 2006-10-05 | Daiichi Shisetsu Kogyo Kk | Flotation unit for large flat panel, and non-contact carrying device using the same |
| JP2007073876A (en) * | 2005-09-09 | 2007-03-22 | V Technology Co Ltd | Work stage and exposure device |
| CN102267630A (en) * | 2006-11-22 | 2011-12-07 | 翔风技术有限公司 | Air floatation conveyance device and method of conveyance using air |
| CN101284602A (en) * | 2007-04-10 | 2008-10-15 | 株式会社日本设计工业 | Conveying device and method for sheet material |
| CN101778787A (en) * | 2007-08-24 | 2010-07-14 | 新东工业株式会社 | Air blowout structure and air blowout unit for air-floating conveyor apparatus, and air-floating conveyor apparatus having the same |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105712089A (en) * | 2016-04-21 | 2016-06-29 | 江苏科技大学 | Non-contact transporting and positioning platform device and control method |
| CN105742220A (en) * | 2016-04-21 | 2016-07-06 | 钟伟 | Non-contact transmission and positioning platform device and control method thereof |
| CN105742220B (en) * | 2016-04-21 | 2018-10-26 | 钟伟 | A kind of non-contacted conveyance and locating platform device and control method |
| CN107655788A (en) * | 2017-11-16 | 2018-02-02 | 合肥工业大学 | A kind of device for being used to measure glass substrate air-flotation system choke block Restriction Parameters |
| CN107655788B (en) * | 2017-11-16 | 2019-10-01 | 合肥工业大学 | It is a kind of for measuring the device of glass substrate air-flotation system choke block Restriction Parameters |
| CN108910534A (en) * | 2018-07-05 | 2018-11-30 | 江苏科技大学 | The contactless air bearing feeding device of glass substrate |
| CN112173725A (en) * | 2019-07-03 | 2021-01-05 | 上海睿范自动化设备有限公司 | Non-contact transmission device |
| CN110498233A (en) * | 2019-07-26 | 2019-11-26 | 江苏科技大学 | The contactless delivery platform device of two dimension |
| CN110498233B (en) * | 2019-07-26 | 2021-04-27 | 江苏科技大学 | Two-dimensional non-contact conveying platform device |
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Effective date of registration: 20200728 Address after: 313100 -2 factory building, Changxin Road, Changxing County Taihu street, Huzhou, Zhejiang, China, 809 Patentee after: AIRBEST (CHANGXING) TECHNOLOGY Co.,Ltd. Address before: 212003, No. 2, Mengxi Road, Zhenjiang, Jiangsu Patentee before: JIANGSU University OF SCIENCE AND TECHNOLOGY |
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Denomination of invention: An air floating transport device Effective date of registration: 20210413 Granted publication date: 20170104 Pledgee: Changxin Zhejiang rural commercial bank Limited by Share Ltd. Pledgor: AIRBEST (CHANGXING) TECHNOLOGY Co.,Ltd. Registration number: Y2021330000300 |