CN205508797U - Contactless transport with locating platform device - Google Patents
Contactless transport with locating platform device Download PDFInfo
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- CN205508797U CN205508797U CN201620339042.2U CN201620339042U CN205508797U CN 205508797 U CN205508797 U CN 205508797U CN 201620339042 U CN201620339042 U CN 201620339042U CN 205508797 U CN205508797 U CN 205508797U
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- air
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- hose
- fixed platform
- venthole
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Abstract
The utility model discloses a contactless transport with locating platform device, the base of the device below transporting the platform, be located the fixed platform of transportation platform below and be located fixed platform, fixed platform passes through fixed platform to be supported and the pedestal connection, the transportation is equipped with a plurality of recess on the platform, and every recess is equipped with inlet port and venthole, the inlet port is connected with air inlet hose, and air inlet hose is connected with positive pressurized air source, the venthole and the hose connection of giving vent to anger, the hose of giving vent to anger is connected with the negative pressure air supply. The utility model discloses a contactless transport with locating platform device because the air is horizontal flow state in the recess, consequently, can utilize air current viscous force drive workpiece motion by furthest, obtains great motion acceleration, and this can realize the most genuine contactlessly completely, and the air current is difficult during with the semiconductor workpiece contact to produce the static pollution, and near contact point is difficult for leading to stress concentration.
Description
Technical field
The present invention relates to non-contacted conveyance and locating platform device, belong to non-contacted conveyance and the location technology of semi-conductor silicon chip
Field.
Background technology
A new generation's silicon chip manufacture requirements its must use without the non-contacting mode that rubs to guarantee table producing in transmitting procedure
Face cleaning not damaged.How realizing transporting safely with location of extremely brittle very thin silicon chip is that very important a manufacture is assembled
Technology, is to ensure that key one ring of production efficiency and yields.Traditional contact location mode (uses roller, sucker
Deng the way of contact) easily cause surface of semiconductor workpiece scratch, crackle occur, there is also electrostatic and metallic pollution etc. simultaneously
Problems, cannot adapt to the demand of current technological development.A new generation silicon chip manufacture alignment system is proposed high accuracy,
High-cleanness and the requirement of high reliability, have the most excellent without the non-contacting mode that rubs meeting these technology requesting party masks
Gesture.
Contactless the transporting with location mode of current popular is to use Bernoulli Jacob or flux vacuum cup above silicon chip
Implement absorption to capture.But, it is unstable that the mode of this kind of crawl easilys lead to absorption affinity in moving process, exists
The hidden danger such as wafer is easy to fall off, it is necessary to carry out spacing to it by alignment pin or rubber blanket, otherwise workpiece easily occurs to break away to take off
Fall.Separately have and a kind of utilize aerostatic bearing to realize the mode of contactless transmission and location, saved by aperture or Porous
Fluid element supplies below object, forms a layer of air pressure film thus reach minimizing table between object and device
The effect of face contact, has been successfully applied on glass substrate production line the most.The something in common of above two air supporting mode exists
Only play the effect of balancing gravity in workpiece upper and lower surface pressure differential, and the movement that workpiece is in the horizontal direction still has to rely on
Mechanical Contact can realize.Strictly speaking, this and unrealized truly entirely without contact.As it is shown in figure 1,
Air film between device 4 and workpiece 20 only plays a supportive role, and workpiece 20 is transported by motor driving rolls 1, by
In contacting with roller 1, the easy scratch of workpiece 20, deform or damage.As in figure 2 it is shown, utilize Bernoulli vacuum sucker 1
Capturing semiconductor workpiece 3, workpiece 3 and alignment pin 2 are in contact condition, and otherwise workpiece is susceptible to break away and takes off
Fall.Additionally, this kind of working method also needs to otherwise designed drives the moveable platform of workpiece motion s, such as mechanical arm, slide
Platforms etc., the existence of guide rail moving component is added significantly to the weight of integral platform, is also highly vulnerable to breakage the cleannes of working environment.
In existing this suspension transmission equipment, more typically just like Chinese patent application " a kind of air suspension device " (Shen
Please publication No. be CN201961843U, Shen Qing Publication day be: on JIUYUE 7th, 2011), " air suspension conveyer "
(application publication number is CN102363476A, and Shen Qing Publication day is: on February 29th, 2012), " float-up device and defeated
Send device " (application publication number is CN1966371B, and Shen Qing Publication day is: on August 15th, 2012), " touchless
Grasping tool " (application publication number is CN102107782A, and Shen Qing Publication day is: on June 29th, 2011), " whirlpool
Manifold adult and contact-free transport device " (application publication number is CN102083720A, and Shen Qing Publication day is: 2011
On June 1, in).
In the prior art, an also contactless transfer ways of class air supporting, as it is shown on figure 3, offer on device 1 surface
Oblique nozzle 2, sprays windstream by oblique nozzle 2 below workpiece 3, and the viscosity traction utilizing air to flow is made
With thus drive workpiece 20 to move.It is driven although utilizing oblique jet flow can realize object, but, this skill
There are the following problems for art scheme:
1) air flow rate of nozzle injection is less, and driving force is limited, and workpiece motion s acceleration is little；2) oblique air-flow
There is horizontal component and vertical component, wherein vertical component easily causes the appearance of workpiece instability disturbing phenomenon；3) from
The high velocity air of nozzle injection easily produces electrostatic when contacting with semiconductor workpiece and pollutes, and easily leads near contact point simultaneously
Cause stress is concentrated.4. nozzle air current direction is limited, is unfavorable for workpiece is carried out motor control.
In the prior art, a kind of device " a kind of air supporting utilizing air-flow viscous force driving workpiece to do contactless motion
Feeding device " (application publication number is 201410626307.2), although which is capable of contactless transport, but
Lack the pose detection of object and control function, it is impossible to realizing object is accurately positioned, additionally, driver element uses
All the mode of supply also causes air consumption to be significantly increased.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the present invention provides a kind of non-contacted conveyance flat with location
Table apparatus, can farthest utilize air-flow viscous force to drive workpiece motion s, it is thus achieved that bigger acceleration of motion, it is achieved
Truly entirely without contact.
Technical scheme: for solving above-mentioned technical problem, a kind of non-contacted conveyance of the present invention and locating platform device, including
Shipping platform, being positioned at the fixed platform below shipping platform and be positioned at the pedestal below fixed platform, described fixed platform is led to
Crossing fixed platform support to be connected with pedestal, described shipping platform is provided with several grooves, and each groove is provided with some compositions
To air inlet and venthole, described air inlet is connected with air induction hose, and air induction hose is connected with malleation source of the gas, described in go out
Pore is connected with air-out hose, and air-out hose is connected with negative pressure source of the gas；Described malleation source of the gas subtracts with malleation by connecting flexible pipe
Pressure valve connects, and the outfan of malleation air relief valve is connected by the air induction hose of effusion meter, and the outfan of effusion meter passes through valve seat
The air induction hose of cylinder manifold is connected and passes through valve seat cylinder manifold and is connected with air-operated solenoid valve group, and air-operated solenoid valve group passes through air inlet
Flexible pipe is connected with air inlet；Described shipping platform side is provided with several infrared transmitting devices, relative at shipping platform
Side is provided with infrared receiving device, and infrared receiving device is connected with controller, and controller drives module to be connected with output, defeated
Go out to drive module to be connected with air-operated solenoid valve group.
As preferably, described negative pressure source of the gas is vacuum pump, is connected with negative pressure air relief valve by connecting flexible pipe, negative pressure air relief valve
Outlet be connected with the air-out hose of effusion meter, the entrance of effusion meter is connected with the air-out hose of cylinder manifold, air-out hose with
Air-operated solenoid valve group connects, and air-operated solenoid valve is connected with venthole by flexible pipe, and air-operated solenoid valve and output drive module even
Connect.
As preferably, described shipping platform is connected with fixed platform by leveling nut.
In the present invention, described in transport platform and comprise a ganoid flat board, it is multiple that planar surface is symmetric
Chase unit, is mutually separated by planar surface between each groove.The groove of planar surface can be circular, square,
Back Word type or cross, depth of groove is generally less than 200 microns.Air inlet and venthole is offered in pairs in inside grooves,
Planar bottom surface residing for air inlet and venthole offers screw thread, is used for connecting gas joint and supplies.Air inlet supplies
Answer normal pressure, venthole supplying negative voltage power.The air inlet of each groove and venthole are all separately through a two-bit triplet electricity
Magnetic reversal valve is connected with source of the gas malleation and negative pressure, by valve is controlled changing airflow direction in groove.
In the present invention, the electromagnetic valve in air-operated solenoid valve group is two-bit triplet electromagnetic valve, one end of two-position three-way valve and source of the gas
Malleation connects, and one end is connected with source of the gas negative pressure, realizes the switching of malleation and negative pressure by controlling electromagnetic valve.Trachea will be logical
Pore is connected with electromagnetic valve, and compressed air air induction hose and compressed air exhaust hose are by solenoid directional control valve with source of the gas just
Pressure connects with negative pressure.
Described output drives module to be circuit amplification board, can be multichannel isolation numeral output card or multichannel non-isolated
TTL output card, drives electromagnetic valve action for controller signals is amplified output.
Described controller is industrial computer, single-chip microcomputer or Programmable Logic Controller, and its function has: good man machine interface is mutual,
The kinestate of object controls and display, data preservation etc..
When providing the displacement of targets and expected path that transport object, utilize multiple infrared emission and receive device, by object
Physical location substitute into control system coordinate system in；The expected pose track of object is carried out trajectory planning, obtains reference
Pose track, the design for controller provides reference state amount.By object can obtain in the position of system coordinate system with
The deviation value of target location, deducts with attained pose and obtains error state amount e (t) with reference to pose；Pass through PID control systemComputing obtain controlled quentity controlled variable u (t) of air-operated solenoid valve group, pass through
Output amplification module drives electromagnetic valve action；For different objects, pid control parameter by trial and error procedure preset with
Meet the requirement of system rapidity, Stability and veracity.
In the present invention, will be located in the electromagnetic valve Unified coding of same column, cut for basic transformation unit with row or driver element number
Change positive/negative-pressure source of the gas.So can realize row or the combination in any of different driving unit, and different positive/negative-pressure sources of the gas combines
Can produce different viscous drive power, the impact on object moving state is the most different such that it is able to make object reach to add
Speed, the most static kinestate that slows down meet the requirement that system transports and positions.During original state, all electromagnetic valves are whole
Unlatching is passed through compressed air and forms air cushion, makes object keep constant suspension；High speed camera sensing behind input object target position
Device can obtain object current location and carry out feedback obtain error amount compared with moving target, PID controller calculate
It is also rounded by controlled quentity controlled variable u that draws.With row for basic transformation unit be controlled time, controlled quentity controlled variable u and electromagnetic valve group
Corresponding corresponding rule.When u is 0, all electromagnetic valves are turned on malleation, and now object is not driven power effect；U is
During+1 to+4 change, object will be moved right by the viscosity air stream drives in the unit of 1 row below to 4 row,
That is, u is the biggest, and driver element columns is the most, and driving force is the biggest.On the contrary, when u is-1 to-4 change, object is subject to
Arriving the viscosity air stream drives in 1 row to 4 unit arranged below will be to left movement.Described controlled quentity controlled variable integer and the row of valve
Number or driver element number are corresponding relations.(Figure 13 being labeled with step number originally, think personally and be so best understood from)
Beneficial effect: the non-contacted conveyance of the present invention and locating platform device, has the advantage that
1. due to air in groove in bottom horizontal flow sheet state, therefore, it can farthest utilize air-flow viscous force to drive
Workpiece motion s, it is thus achieved that bigger acceleration of motion, this can realize truly entirely without contact, air-flow with partly lead
It is not likely to produce electrostatic during body absorption surface to pollute, is not easily caused stress near contact point and concentrates.
2. air-flotation type have cleanliness without any pollution, do not generate heat, the not advantage such as magnetisation, and pneumatic system is easier to maintain, and builds letter
Single.There is not guide rail moving component, significantly reduce the weight of integral platform, greatly improve the cleaning of working environment yet
Degree.
3. air inlet and steam vent use the mode of independent gas supply, and control mode is flexible.Driver element and support unit cloth
Put and be easily achieved, it is possible to achieve high-precision contactless transport workpiece, meet the requirement of semiconductor element transmission.Should
It is strong that mode has driving force, and control performance is excellent, is not easily introduced the advantages such as disturbance.
4. designing PID controller based on many valves co-ordination principle, solution systematic parameter is uncertain, model is excessively complicated and dry
Disturbing the problem that affects on control performance, suppression semi-conductor silicon chip is transporting and the sending out of unstable vibration phenomenon in position fixing process
Raw, thus the high accuracy realizing kinestate controls.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of one of existing air supporting feeding device operative scenario；
Fig. 2 is the schematic diagram of the two of existing air supporting feeding device operative scenario；
Fig. 3 is the schematic diagram of the three of existing air supporting feeding device operative scenario；
Fig. 4 is the structural representation of the present invention；
Fig. 5 is the side view of mechanical part of the present invention；
Fig. 6 is the front view of mechanical part of the present invention；
Fig. 7 is the top view of mechanical part of the present invention；
Fig. 8 is the left view of mechanical part of the present invention；
Fig. 9 is the object transportation state schematic diagram of the present invention；
Figure 10 is the partial sectional view of mechanical part of the present invention；
Figure 11 is using row as the controlled quentity controlled variable input mode figure of basic transformation unit；
Figure 12 is using driver element number as the controlled quentity controlled variable input mode figure of basic transformation unit；
The contactless air supporting of Figure 13 transports the program flow diagram transporting PID control method controlling platform.
Detailed description of the invention
As shown in Fig. 4 to Figure 10, the non-contacted conveyance of the present invention, with locating platform device, transports platform 2 by adjusting
Flush nut 3 is supported in above fixed platform 4, and leveling nut 3 scalable transports platform 2 levelness；Fixed platform 4 with
Pedestal 8 supports 15 by threaded fixed platform and is rigidly connected, and forms one and installs air-operated solenoid valve group 7 and pipeline
Space, air-operated solenoid valve group 7, effusion meter 6a, 6b, valve seat cylinder manifold 9, air relief valve 5a, 5b are arranged on pedestal 8
On.
Described malleation source of the gas is connected with malleation air relief valve 5a by connecting flexible pipe 15a, and the outfan of malleation air relief valve 5a leads to
The air induction hose 14a of inflow-rate of water turbine meter is connected, the outfan of the effusion meter 6a air induction hose 13a by valve seat cylinder manifold 9a
It is connected and passes through valve seat cylinder manifold 9b and be connected with air-operated solenoid valve group 7；Negative pressure source of the gas is vacuum pump, by connecting flexible pipe
15b is connected with negative pressure air relief valve 5b, and the outlet of air relief valve 5b is connected with the air-out hose 14b of effusion meter 6b, effusion meter
The entrance of 6b is connected with the air-out hose 13b of cylinder manifold.
The port that controls of described air-operated solenoid valve group 7 electrically connects with the output port of output modular converter 10, output conversion
The input port of module 10 is connected with the output port of controller 11, the transmission port of high-speed camera 1 and input conversion
The input port of module 12 is connected, and the output port of input modular converter 12 is connected with the input port of controller 11.
Described contactless air supporting transports and controls the electric control part of platform and divide and include exporting conversion module 10, controller 11, defeated
Enter conversion module.Output conversion module 10 is made up of multi-channel digital output card and interlock circuit, for conveying gas galvanic electricity
The controlled quentity controlled variable of magnet valve group.Input conversion module is formed adopting for ohject displacement by infrared launcher and infrared receiving device
Collection, stops infrared according to object, utilizes the positional information of infrared receiving device can accurately know the position of object.Control
Device 11 is industrial computer, single-chip microcomputer or Programmable Logic Controller.Transport the Bit andits control with locating platform control system according to reality
Time the ohject displacement that gathers, substitute into and coordinate system obtain error amount, according to certain control requirement and control algolithm, output
The control variable of air-operated solenoid valve group, thus the direction of gas viscosity power and size in changing driver element, it is right finally to realize
The control of ohject displacement.
Shown in Fig. 9 with Figure 10 it is one to comprise 36 air supportings with mutually isostructural groove driver element and transport with fixed
Position apparatus structure schematic diagram and partial sectional view thereof.With reference to Figure 10, it is recessed that planar surface offers the square being symmetric
Groove 1-1, the groove 1-1 length of side is 13 millimeters, the degree of depth 200 microns.Air inlet 1-2 is offered in pairs inside groove 1-1
With venthole 1-3, diameter is 2 millimeters, and the planar bottom surface residing for air inlet 1-2 and venthole 1-3 offers spiral shell
Stricture of vagina, for connecting with air induction hose and exhaust hose.Air inlet 1-2 supplies normal pressure, venthole 1-3 supplying negative voltage power.
Mutually separated by guide rail surface 1-4 between each groove 1-1.If apparatus surface is placed with workpiece 20, when compressed air from
During air inlet 1-2 and 1-5 input, owing to groove 1-1 bottom surface is wider with the runner that workpiece 20 lower surface is formed, stream
Hindering little, overwhelming majority air is just discharged from venthole 1-3 and 1-6, and a small amount of air is flowed into workpiece 20 and planar surface
In the gap constituted, form a layer of air pressure film, make workpiece 20 that any contact not occur with platform surface.Empty
Gas in groove 1-1 from air inlet 1-2 to gas outlet 1-3 flow time, its quasi-viscous effect can make workpiece 20 by masterpiece
With, so that workpiece 20 moves.Each air inlet and venthole are all by two-bit triplet electromagnetic valve and source of the gas malleation with bear
Pressure is connected.The air-flow viscous force direction in each chase unit can be changed by the break-make controlling electromagnetic valve, make workpiece
20 towards certain direction motion.
Figure 11 show using row as basic transformation unit be controlled time, the rule of correspondence of controlled quentity controlled variable u and electromagnetic valve group.
When u is 0, all electromagnetic valves are turned on malleation, and now object is not driven power effect；When u is+1 to+4 change, thing
Body will be moved right by the viscosity air stream drives in the unit of 1 row below to 4 row, i.e. u is the biggest, drive single
Unit's columns is the most, and driving force is the biggest.In figure, solid black round dot represents and is passed through negative pressure, hollow for malleation.On the contrary,
When u is-1 to-4 change, object will be to left movement by the viscosity air stream drives in the unit of 1 row below to 4 row.
It also it is the rule of correspondence of controlled quentity controlled variable u and electromagnetic valve group shown in Figure 12.It is individual with driver element unlike Figure 11
Number is controlled as basic transformation unit.When u is 0, all electromagnetic valves are turned on malleation, and now object is not driven
Power effect；When u is+1 to+8 change, driver element number is the most, and driving force is the biggest.On the contrary, u is-1 to-8
During change, the number of unit of reverse drive is the most.
As shown in figure 13, a kind of non-contacted conveyance and the control method of locating platform device, comprise the following steps:
1 controller obtains the current actual positions of object by high-speed camera shooting shipping platform；
The coordinate system of the current actual positions substitution control system of 2 objects obtained according to step 1 detects whether that needs change
Become desired motion track, as just, entered step 3, as negative, entered step 4；
3 reset desired motion track according to mission requirements, and desired motion track carries out trajectory planning and track shaping,
Enter step 4；
The 4 reference state amounts obtaining current point in time, calculate ohject displacement deviation according to reference state amount and virtual condition amount
e(t)；
5 offset deviations amount e (t), as inputting in incoming controller, are calculated controlled quentity controlled variable by PID controllerThe Proportional coefficient K of PID controller in equationP, long-pending
Divide time constant TI, derivative time constant TDPreset to meet system requirements by trial and error procedure；
6 drive electromagnetic valve group to work according to controlled quentity controlled variable u (t) by output module, and object moves down in the effect of air stream drives power
Dynamic；
7 detect whether to arrive target location, as being no, then continue to repeat step 1-6；If it has, then enter step 8；
8 detect whether to need to preserve data, if it is, enter step 9, as being no, enter step 10；
9 write, to file, data such as stating the virtual condition amount of real-time sampling, reference state amount and controlled quentity controlled variable, and file preserves knot
Shu Hou, enters step 10；
10 transport task terminates, and stops.
The above is only the preferred embodiment of the present invention, it should be pointed out that: for those skilled in the art
For, under the premise without departing from the principles of the invention, it is also possible to make some improvements and modifications, these improvements and modifications are also
Should be regarded as protection scope of the present invention.
Claims (3)
1. a non-contacted conveyance and locating platform device, it is characterised in that: include shipping platform, be positioned at shipping platform
The fixed platform of lower section and be positioned at the pedestal below fixed platform, described fixed platform is supported with pedestal even by fixed platform
Connecing, described shipping platform is provided with several grooves, each groove be provided with some compositions to air inlet and venthole, institute
Stating air inlet to be connected with air induction hose, air induction hose is connected with malleation source of the gas, and described venthole is connected with air-out hose, goes out
Gas flexible pipe is connected with negative pressure source of the gas；Described malleation source of the gas is connected with malleation air relief valve by connecting flexible pipe, malleation air relief valve
Outfan is connected by the air induction hose of effusion meter, and the outfan of effusion meter is connected also by the air induction hose of valve seat cylinder manifold
Being connected with air-operated solenoid valve group by valve seat cylinder manifold, air-operated solenoid valve group is connected with air inlet by air induction hose；Described
Shipping platform side is provided with several infrared transmitting devices, and the side relative at shipping platform is provided with infrared receiving device,
Infrared receiving device is connected with controller, and controller drives module to be connected with output, and output drives module and air-operated solenoid valve
Group connects.
Non-contacted conveyance the most according to claim 1 and locating platform device, it is characterised in that: described negative pressure gas
Source is vacuum pump, is connected with negative pressure air relief valve by connecting flexible pipe, the outlet of negative pressure air relief valve and the air-out hose of effusion meter
Being connected, the entrance of effusion meter is connected with the air-out hose of cylinder manifold, and air-out hose is connected with air-operated solenoid valve group, pneumatic electricity
Magnet valve is connected with venthole by air-out hose, and air-operated solenoid valve drives module to be connected with output.
Non-contacted conveyance the most according to claim 1 and locating platform device, it is characterised in that: described transport is put down
Platform is connected with fixed platform by leveling nut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620339042.2U CN205508797U (en) | 2016-04-21 | 2016-04-21 | Contactless transport with locating platform device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620339042.2U CN205508797U (en) | 2016-04-21 | 2016-04-21 | Contactless transport with locating platform device |
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| Publication Number | Publication Date |
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| CN205508797U true CN205508797U (en) | 2016-08-24 |
Family
ID=56706003
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620339042.2U Expired - Fee Related CN205508797U (en) | 2016-04-21 | 2016-04-21 | Contactless transport with locating platform device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105742220A (en) * | 2016-04-21 | 2016-07-06 | 钟伟 | Non-contact transmission and positioning platform device and control method thereof |
| CN111063653A (en) * | 2018-10-16 | 2020-04-24 | 先进装配系统有限责任两合公司 | Ejector device and method for facilitating the detachment of a component arranged on a holding membrane |
| CN111556848A (en) * | 2017-11-08 | 2020-08-18 | 科福罗有限公司 | Layered non-contact supporting platform |
-
2016
- 2016-04-21 CN CN201620339042.2U patent/CN205508797U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105742220A (en) * | 2016-04-21 | 2016-07-06 | 钟伟 | Non-contact transmission and positioning platform device and control method thereof |
| CN105742220B (en) * | 2016-04-21 | 2018-10-26 | 钟伟 | A kind of non-contacted conveyance and locating platform device and control method |
| CN111556848A (en) * | 2017-11-08 | 2020-08-18 | 科福罗有限公司 | Layered non-contact supporting platform |
| CN111063653A (en) * | 2018-10-16 | 2020-04-24 | 先进装配系统有限责任两合公司 | Ejector device and method for facilitating the detachment of a component arranged on a holding membrane |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160824 Termination date: 20200421 |