CN105712089B - A kind of control method of non-contacted conveyance and locating platform device - Google Patents
A kind of control method of non-contacted conveyance and locating platform device Download PDFInfo
- Publication number
- CN105712089B CN105712089B CN201610251430.XA CN201610251430A CN105712089B CN 105712089 B CN105712089 B CN 105712089B CN 201610251430 A CN201610251430 A CN 201610251430A CN 105712089 B CN105712089 B CN 105712089B
- Authority
- CN
- China
- Prior art keywords
- air
- platform
- hose
- controller
- contacted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/02—Control or detection
- B65G2203/0208—Control or detection relating to the transported articles
Landscapes
- Control Of Conveyors (AREA)
Abstract
The invention discloses a kind of non-contacted conveyance and locating platform device and control method, the device includes shipping platform, the fixed platform below shipping platform and the pedestal below fixed platform, the fixed platform is connected by fixed platform support with pedestal, the shipping platform is provided with several grooves, each groove is provided with air admission hole and venthole, the air admission hole is connected with air induction hose, air induction hose is connected with malleation source of the gas, the venthole is connected with air-out hose, and air-out hose is connected with negative pressure source of the gas.A kind of non-contacted conveyance of the present invention and locating platform device, because air is in bottom horizontal flow sheet state in groove, therefore, farthest workpiece motion s can be driven using air-flow viscous force, obtain larger acceleration of motion, this can realize truly complete contactless, be not likely to produce when air-flow is contacted with semiconductor workpiece near electrostatic pollution, contact point and be not easily caused stress concentration.
Description
Technical field
The present invention relates to non-contacted conveyance and locating platform device and control method, belong to the contactless defeated of semi-conductor silicon chip
Fortune and field of locating technology.
Background technology
Silicon chip manufacture of new generation requires that it must use without non-contacting mode is rubbed to ensure in production transmitting procedure
Surface cleaning not damaged.How to realize that transporting safely with positioning for extremely brittle very thin silicon chip is that a very important manufacture is assembled
Technology, is the crucial ring for ensureing production efficiency and yields.Traditional contact positioning method (is connect using roller, sucker etc.
The mode of touching) easily cause surface of semiconductor workpiece and scratch, crackle occur, while also existing, electrostatic and metallic pollution etc. are many to ask
Topic, can not adapt to the demand of current technological development.Silicon chip of new generation manufacture alignment system is proposed high accuracy, high-cleanness and
The requirement of high reliability, no non-contacting mode of friction has great advantage in terms of these technical requirements are met.
Contactless transport with positioning method of current popular is to use Bernoulli Jacob or flux vacuum cup from silicon chip
Implement absorption crawl in side.But, it is unstable that the mode of this kind of crawl easilys lead to absorption affinity in moving process, there is wafer
The hidden danger such as easy to fall off, it is necessary to carried out by alignment pin or rubber blanket to it spacing, otherwise workpiece easily occurs sideslip and come off.Separately have
A kind of mode that contactless transmission and positioning are realized using aerostatic bearing, by aperture or porous restriction element from thing
Supplied below body, a layer of air pressure film is formed between object and device so as to reach and reduces the effect that surface is contacted
Really, it has been successfully applied at present on glass substrate production line.Above two air supporting mode has in common that following table on workpiece
Surface pressure difference only plays a part of balancing gravity, and still have to can be real by Mechanical Contact for the movement of workpiece in the horizontal direction
It is existing.Strictly speaking, this and unrealized truly complete contactless.As shown in figure 1, the air film between device 4 and workpiece 2
Only play a supportive role, workpiece 2 drives roller 1 to be transported by motor, due to being in contact with roller 1, the easy scratch of workpiece 2, change
Shape or damage.As shown in Fig. 2 being captured using Bernoulli vacuum sucker 1 to semiconductor workpiece 3, at workpiece 3 and alignment pin 2
In contact condition, otherwise workpiece easily occurs sideslip and come off.In addition, this kind of working method also needs to otherwise designed driving workpiece fortune
Dynamic moveable platform, such as mechanical arm, slide unit etc., the presence of guide rail moving component is added significantly to the weight of integral platform,
Also the cleannes of working environment are highly vulnerable to breakage.
It is more typical just like a kind of Chinese patent application " air suspension device " (Shen in existing this suspension transmission equipment
Please publication No. be CN201961843U, data of publication of application is：On September 7th, 2011), " air suspension conveyer " (Shen Qing Publication
Number it is CN102363476A, data of publication of application is：On 2 29th, 2012), " float-up device and conveying device " (application publication number
For CN1966371B, data of publication of application is：On August 15th, 2012), " Non-touch grasping tool " (application publication number is
CN102107782A, data of publication of application is：On June 29th, 2011), " vortex type adult and contact-free transport device " (application
Publication No. is CN102083720A, and data of publication of application is：On June 1st, 2011).
In the prior art, the also contactless transfer ways of class air supporting, as shown in figure 3, being opened up tiltedly on the surface of device 1
To nozzle 2, windstream is sprayed below workpiece 3 by oblique nozzle 2, using the sticky draw of air flow so as to drive
Part 2 of starting building is moved.Object is driven although can be realized using oblique jet flow, however, this technical scheme is in the presence of as follows
Problem：
1) air flow rate that nozzle is projected is smaller, and driving force is limited, and workpiece motion s acceleration is small；2) oblique air-flow is present
Horizontal component and vertical component, wherein vertical component easily cause the appearance of the unstable disturbing phenomenon of workpiece；3) projected from nozzle
High velocity air electrostatic pollution is easily produced when being contacted with semiconductor workpiece, while being easily caused stress collection near contact point
In.4. nozzle air current direction is limited, it is unfavorable for carrying out motion control to workpiece.
In the prior art, also a kind of utilization air-flow viscous force driving workpiece does a kind of device " gas of contactless motion
Floating feeding device " (application publication number is 201410626307.2), although which can realize contactless transport, but be the absence of
The pose detection of object and control function, it is impossible to which realization is accurately positioned to object, in addition, driver element is using all supply
Mode also cause air consumption to be significantly increased.
The content of the invention
Goal of the invention：In order to overcome the deficiencies in the prior art, the present invention provides a kind of non-contacted conveyance and positioning
Stage apparatus, farthest can drive workpiece motion s using air-flow viscous force, obtain larger acceleration of motion, realize true
It is complete contactless in positive meaning.
Technical scheme：In order to solve the above technical problems, a kind of non-contacted conveyance of the present invention and locating platform device, including
Shipping platform, the fixed platform below shipping platform and the pedestal below fixed platform, the fixed platform pass through
Fixed platform support is connected with pedestal, and the shipping platform is provided with several grooves, and each groove is provided with air admission hole and outlet
Hole, the air admission hole is connected with air induction hose, and air induction hose is connected with malleation source of the gas, and the venthole is connected with air-out hose,
Air-out hose is connected with negative pressure source of the gas.
Preferably, the malleation source of the gas is connected by connecting flexible pipe with malleation pressure-reducing valve, the output end of malleation pressure-reducing valve
It is connected by the air induction hose of flowmeter, the output end of flowmeter is connected by the air induction hose of valve seat cylinder manifold and passes through valve seat
Cylinder manifold is connected with the first air-powered electromagnetic valve group, and the first air-powered electromagnetic valve group is connected by flexible pipe with air admission hole.
Preferably, being provided with high-speed camera above the shipping platform, high-speed camera is connected with input modular converter,
Input modular converter is connected with controller, and controller is connected with output driving module, output driving module and air-powered electromagnetic valve group
Connection.
Preferably, the negative pressure source of the gas is vavuum pump, it is connected by connecting flexible pipe with negative pressure pressure-reducing valve, negative pressure pressure-reducing valve
Outlet be connected with the air-out hose of flowmeter, the entrance of flowmeter is connected with the air-out hose of cylinder manifold, air-out hose and gas
Moving electromagnetic valve group is connected, and air-operated solenoid valve is connected by flexible pipe with venthole, and air-operated solenoid valve is connected with output driving module.
Preferably, the shipping platform is connected by leveling nut with fixed platform.
The control method of a kind of above-mentioned non-contacted conveyance and locating platform device, comprises the following steps：
1) controller shoots the current actual positions that shipping platform obtains object by high-speed camera；
2) current actual positions of the object obtained according to step 1 substitute into the coordinate system of control system and detect whether needs
Change desired motion track, it is such as negative, into step 4 into step 3 just to be such as；
3) desired motion track is reset according to mission requirements, trajectory planning is carried out to desired motion track and track is whole
Shape, into step 4；
4) the reference state amount of current point in time is obtained, it is inclined to calculate ohject displacement according to reference state amount and virtual condition amount
Poor e (t)；
5) offset deviation amount e (t) calculates controlled quentity controlled variable as inputting in incoming controller by PID controllerThe Proportional coefficient K of PID controller in equationP, the time of integration
Constant TI, derivative time constant TDPreset to meet system requirements by trial and error procedure；
6) worked according to controlled quentity controlled variable u (t) by output module drive magnetic valve group, object is in the presence of air stream drives power
It is mobile；
7) detect whether to reach target location, be such as no, then continue repeat step 1-6；If it has, then into step 8；
8) detect whether to need to preserve data, if it is, being such as no, into step 10 into step 9；
9) data such as the virtual condition amount for stating real-time sampling, reference state amount and controlled quentity controlled variable are write to file, file is preserved
After end, into step 10；
10) transport task to terminate, stop.
In the present invention, the platform that transports includes the smooth flat board in a surface, and it is many that planar surface is symmetric
Mutually separated by planar surface between individual chase unit, each groove.The groove of planar surface can be circular, square, return
Font is cross, and depth of groove is generally less than 200 microns.Air admission hole and venthole are opened up in pairs in inside grooves, in air inlet
Screw thread is offered in planar bottom surface residing for hole and venthole, is supplied for connecting gas joint.Air admission hole supplies normal pressure,
Venthole supplying negative voltage power.The air admission hole and venthole of each groove are separately through a two-bit triplet solenoid directional control valve and gas
Source malleation is connected with negative pressure, and groove interior air-flow direction can be changed by being controlled to valve.
In the present invention, the magnetic valve in air-powered electromagnetic valve group is two-bit triplet magnetic valve, one end of two-position three-way valve and gas
Source malleation connection, one end is connected with source of the gas negative pressure, and the switching of malleation and negative pressure is realized by controlling magnetic valve.Tracheae will ventilate
Hole is connected with magnetic valve, compressed air air induction hose and compressed air exhaust hose by solenoid directional control valve and source of the gas malleation and
Negative pressure is connected.
In the present invention, input modular converter is high-speed camera phase control device or image pick-up card, can change image information
Controller is transferred to for positional information., it is necessary to program to obtain the position of object by OpenCV during according to image pick-up card
Information.
The output driving module is circuit amplification board, can isolate numeral output card or multichannel non-isolated for multichannel
TTL output cards, for controller signals to be amplified into output driving electromagnetism valve events.
The controller is industrial computer, single-chip microcomputer or programmable controller, and its function has：Good man-machine interface interaction,
Motion state control and the display of object, data preservation etc..
When providing the displacement of targets and expected path that transport object, sampled using high-speed camera, by object
Physical location is substituted into the coordinate system of control system；Trajectory planning is carried out to the expected pose track of object, obtains referring to pose
Track, reference state amount is provided for the design of controller.It can be obtained in the position of system coordinate system and target position by object
The deviation put, is subtracted with attained pose and obtains error state amount e (t) with reference to pose；Pass through PID control systemComputing obtain the controlled quentity controlled variable u (t) of air-powered electromagnetic valve group, by defeated
Go out the action of amplification module drive magnetic valve；For different objects, pid control parameter is preset by trial and error procedure is to meet
System rapidity, the requirement of Stability and veracity.
In the present invention, by positioned at the magnetic valve Unified coding of same column, to arrange or driver element number is basic transformation unit
Switch positive and negative pressurized air source.Any combination of row or different driving unit can be so realized, and different positive and negative pressurized air sources is combined
Different viscous drive power can be produced, the influence to object moving state is also different, so as to make object reach acceleration,
Even static motion state of slowing down meets the requirement that system is transported and positioned.All magnetic valves are all turned on leading to during original state
Enter compressed air formation air cushion, object is kept constant and suspend；High speed camera sensor can be obtained behind input object target position
Object current location and carry out feedback error amount is obtained compared with moving target, the controlled quentity controlled variable u calculated by PID controller
And it is rounded.When being controlled with arranging for basic transformation unit, controlled quentity controlled variable u is corresponding with the correspondence of solenoid valve block regular.U is
When 0, all magnetic valves are turned on malleation, and now object is not driven power effect；When u is+1 to+4 change, object is by under it
Sticky air stream drives in 1 row of side to the unit of 4 row will be moved right, i.e. u is bigger, and driver element columns is more, driving force
Also it is bigger.On the contrary, when u is -1 to -4 change, object is by the sticky air stream drives in the unit of 1 row below to 4 row
Will be to left movement.The columns or driver element number of the controlled quentity controlled variable integer and valve are corresponding relations.
Beneficial effect：The non-contacted conveyance of the present invention and locating platform device and control method, with advantages below：
1. because air is in bottom horizontal flow sheet state in groove, it therefore, it can farthest drive using air-flow viscous force
Dynamic workpiece motion s, obtain larger acceleration of motion, this can realize complete contactless, air-flow and semiconductor truly
Workpiece is not likely to produce near electrostatic pollution, contact point when contacting and is not easily caused stress concentration.
2. air-flotation type have the advantages that cleanliness without any pollution, do not generate heat, not magnetisation, and pneumatic system is easier to maintain, and builds letter
It is single.In the absence of guide rail moving component, the weight of integral platform is significantly reduced, the cleannes of working environment are also greatly improved.
3. air admission hole and steam vent are by the way of independent gas supply, control mode is flexible.Driver element and support unit cloth
Put and be easily achieved, it is possible to achieve the high-precision contactless requirement for transporting workpiece, meeting semiconductor element transmission.Which
Strong with driving force, control performance is excellent, and the advantages such as disturbance are not easily introduced.
4. designing PID controller based on many valve co-ordination principles, solution systematic parameter is uncertain, model is excessively complicated and interference
Influence problem to control performance, suppresses semi-conductor silicon chip and is transporting the generation with unstable vibration phenomenon in position fixing process, from
And realize the high-precision control of motion state.
Brief description of the drawings
Fig. 1 is the schematic diagram of one of existing air supporting feeding device operative scenario；
Fig. 2 is two schematic diagram of existing air supporting feeding device operative scenario；
Fig. 3 is three schematic diagram of existing air supporting feeding device operative scenario；
Fig. 4 is structural representation of the invention；
Fig. 5 is the axonometric drawing of mechanical part of the present invention；
Fig. 6 is the front view of mechanical part of the present invention；
Fig. 7 is the top view of mechanical part of the present invention；
Fig. 8 is the left view of mechanical part of the present invention；
Fig. 9 is object transportation state schematic diagram of the invention；
Figure 10 is the partial sectional view of mechanical part of the present invention；
Controlled quentity controlled variable input mode figures of the Figure 11 to arrange as basic transformation unit；
Controlled quentity controlled variable input mode figures of the Figure 12 using driver element number as basic transformation unit；
The contactless air supportings of Figure 13 transport the program flow diagram for transporting PID control method of control platform.
Embodiment
As shown in Fig. 4 to Figure 10, non-contacted conveyance of the invention is with locating platform device, transporting platform 2 by leveling
Nut 3 is supported in the top of fixed platform 4, and leveling nut 3 is adjustable to transport the levelness of platform 2；Fixed platform 4 passes through with pedestal 8
Threaded fixed platform support 15 is rigidly connected, and forms a space for installing air-powered electromagnetic valve group 7 and pipeline, air-powered electromagnetic
Valve group 7, flowmeter 6a, 6b, valve seat cylinder manifold 9a, 9b, pressure-reducing valve 5a, 5b are arranged on pedestal 8.
The malleation source of the gas is connected by connecting flexible pipe 15a with malleation pressure-reducing valve 5a, and malleation pressure-reducing valve 5a output end is led to
The air induction hose 14a of excessively stream gauge is connected, and flowmeter 6a output end is connected by valve seat cylinder manifold 9a air induction hose 13a
And be connected by valve seat cylinder manifold 9b with air-powered electromagnetic valve group 7；Negative pressure source of the gas is vavuum pump, by connecting flexible pipe 15b and negative pressure
Pressure-reducing valve 5b is connected, and pressure-reducing valve 5b outlet is connected with flowmeter 6b air-out hose 14b, and flowmeter 6b entrance is with confluxing
The air-out hose 13b of plate is connected.
The control port of the air-powered electromagnetic valve group 7 is electrically connected with exporting the output port of modular converter 10, output conversion
The input port of module 10 is connected with the output port of controller 11, transmission port and the input modular converter of high-speed camera 1
12 input port is connected, and the output port of input modular converter 12 is connected with the input port of controller 11.
The electric control part that the contactless air supporting transports control platform includes output conversion module 10, controller 11, defeated
Enter conversion module 12.Output conversion module 10 is made up of multi-channel digital output card and interlock circuit, for transmitting air-powered electromagnetic
The controlled quentity controlled variable of valve group.Conversion module 12 is inputted by high-speed camera and its supporting processor group into the collection for ohject displacement.
Controller 11 is industrial computer, single-chip microcomputer or programmable controller.The Bit andits control with locating platform control system is transported according to reality
When the ohject displacement that gathers, substitute into coordinate system and obtain error amount, according to certain control requirement and control algolithm, export pneumatic
The control variable of solenoid valve block, so that change the direction of gas viscosity power and size in driver element, it is final to realize to object position
The control of shifting.
Shown in Fig. 9 and Figure 10 it is one to transport and position comprising 36 air supportings with mutually isostructural groove driver element
Apparatus structure schematic diagram and its partial sectional view.Reference picture 10, planar surface offers the square indentations 1- being symmetric
1, groove the 1-1 length of side are 13 millimeters, 200 microns of depth.Air admission hole 1-2 and venthole 1-3 are opened up in pairs inside groove 1-1,
Diameter is 2 millimeters, and screw thread is offered in air admission hole 1-2 and planar bottom surface residing for venthole 1-3, for air induction hose and
Exhaust hose is connected.Air admission hole 1-2 supplies normal pressure, venthole 1-3 supplying negative voltage power.Pass through guide rail meter between each groove 1-1
Face 1-4 mutually separates.If apparatus surface is placed with workpiece 20, when compressed air is inputted from air admission hole 1-2 and 1-5, due to recessed
Groove 1-1 bottom surfaces and the runner that the lower surface of workpiece 20 is formed are wider, and flow resistance is small, and most air are just from venthole 1-3 and 1-6
Discharge, a small amount of air is flowed into the gap that workpiece 20 is constituted with planar surface, is formed a layer of air pressure film, is made workpiece
20 do not occur any contact with platform surface.When air flows in groove 1-1 from air admission hole 1-2 to gas outlet 1-3, its viscosity
Effect can make workpiece 20, and forces are applied, so that workpiece 20 is moved.Each air admission hole and venthole pass through two-bit triplet electricity
Magnet valve is connected with source of the gas malleation and negative pressure.Glued by controlling the break-make of magnetic valve to change the air-flow in each chase unit
Property force direction, workpiece 20 is moved towards certain direction.
Figure 11 is shown when being controlled using arranging as basic transformation unit, the rule of correspondence of controlled quentity controlled variable u and solenoid valve block.
When u is 0, all magnetic valves are turned on malleation, and now object is not driven power effect；When u is+1 to+4 change, object is by it
Sticky air stream drives in 1 row of lower section to the unit of 4 row will be moved right, i.e. u is bigger, and driver element columns is more, driving
Power is also bigger.Solid black round dot represents to be passed through negative pressure in figure, and hollow is malleation.On the contrary, when u is -1 to -4 change, object
Will be to left movement by the sticky air stream drives in the unit of 1 row below to 4 row.
It is also the rule of correspondence of controlled quentity controlled variable u and solenoid valve block shown in Figure 12.It is individual with driver element from unlike Figure 11
Number is controlled as basic transformation unit.When u is 0, all magnetic valves are turned on malleation, and now object is not driven masterpiece
With；When u is+1 to+8 change, driver element number is more, and driving force is also bigger.On the contrary, when u is -1 to -8 change, reversely
The number of unit of driving is more.
As shown in figure 13, the control method of a kind of non-contacted conveyance and locating platform device, comprises the following steps：
1 controller shoots the current actual positions that shipping platform obtains object by high-speed camera；
The current actual positions of 2 objects obtained according to step 1, which are substituted into the coordinate system of control system, detects whether needs
Change desired motion track, it is such as negative, into step 4 into step 3 just to be such as；
3 reset desired motion track according to mission requirements, carry out trajectory planning to desired motion track and track is whole
Shape, into step 4；
4 obtain the reference state amount of current point in time, and it is inclined to calculate ohject displacement according to reference state amount and virtual condition amount
Poor e (t)；
5 offset deviation amount e (t) calculate controlled quentity controlled variable as inputting in incoming controller by PID controller
The Proportional coefficient K of PID controller in equationP, integration time constant TI, derivative time constant TDBy trial and error procedure preset with
Meet system requirements；
6 are worked according to controlled quentity controlled variable u (t) by output module drive magnetic valve group, and object is in the presence of air stream drives power
It is mobile；
7 detect whether to reach target location, are such as no, then continue repeat step 1-6；If it has, then into step 8；
8 detect whether to need to preserve data, if it is, being such as no, into step 10 into step 9；
9 write the data such as the virtual condition amount for stating real-time sampling, reference state amount and controlled quentity controlled variable to file, and file preserves knot
Shu Hou, into step 10；
10, which transport task, terminates, and stops.
Described above is only the preferred embodiment of the present invention, it should be pointed out that：For the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (4)
1. the control method of a kind of non-contacted conveyance and locating platform device, it is characterised in that：This method is based on a kind of contactless
Transport includes shipping platform, the fixed platform below shipping platform and positioned at fixed flat with locating platform device, the device
Pedestal below platform, the fixed platform is connected by fixed platform support with pedestal, and the shipping platform is provided with several
Groove, each groove provided with some compositions to air admission hole and venthole, the air admission hole is connected with air induction hose, air induction hose
It is connected with malleation source of the gas, the venthole is connected with air-out hose, air-out hose is connected with negative pressure source of the gas；
High-speed camera is provided with above the shipping platform, high-speed camera is connected with input modular converter, inputs modular converter
It is connected with controller, controller is connected with output driving module, output driving module is connected with air-powered electromagnetic valve group；
This method comprises the following steps：
1) controller shoots the current actual positions that shipping platform obtains object by high-speed camera；
2) current actual positions of the object obtained according to step 1 are substituted into detects whether to need to change in the coordinate system of control system
Desired motion track, it is such as negative, into step 4 into step 3 just to be such as；
3) desired motion track is reset according to mission requirements, trajectory planning and track shaping is carried out to desired motion track,
Into step 4；
4) the reference state amount of current point in time is obtained, ohject displacement deviation e is calculated according to reference state amount and virtual condition amount
(t)；
5) offset deviation amount e (t) calculates controlled quentity controlled variable as inputting in incoming controller by PID controller
The Proportional coefficient K of PID controller in equationP, integration time constant TI, derivative time constant TDBy trial and error procedure preset with
Meet system requirements；
6) worked according to controlled quentity controlled variable u (t) by output module drive magnetic valve group, object is moved in the presence of air stream drives power
It is dynamic；
7) detect whether to reach target location, be such as no, then continue repeat step 1-6；If it has, then into step 8；
8) detect whether to need to preserve data, if it is, being such as no, into step 10 into step 9；
9) data such as the virtual condition amount for stating real-time sampling, reference state amount and controlled quentity controlled variable are write to file, file, which is preserved, to be terminated
Afterwards, into step 10；
10) transport task to terminate, stop.
2. the control method of non-contacted conveyance according to claim 1 and locating platform device, it is characterised in that：It is described just
Pressurized air source is connected by connecting flexible pipe with malleation pressure-reducing valve, the air induction hose phase that the output end of malleation pressure-reducing valve passes through flowmeter
Even, the output end of flowmeter is connected by the air induction hose of valve seat cylinder manifold and connected by valve seat cylinder manifold and air-powered electromagnetic valve group
Connect, air-powered electromagnetic valve group is connected by air induction hose with air admission hole.
3. the control method of non-contacted conveyance according to claim 2 and locating platform device, it is characterised in that：It is described negative
Pressurized air source is vavuum pump, is connected by connecting flexible pipe with negative pressure pressure-reducing valve, and the outlet of negative pressure pressure-reducing valve and the outlet of flowmeter are soft
Pipe is connected, and the entrance of flowmeter is connected with the air-out hose of cylinder manifold, and air-out hose is connected with air-powered electromagnetic valve group, air-powered electromagnetic
Valve is connected by air-out hose with venthole, and air-operated solenoid valve is connected with output driving module.
4. the control method of non-contacted conveyance according to claim 1 and locating platform device, it is characterised in that：The fortune
Defeated platform is connected by leveling nut with fixed platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610251430.XA CN105712089B (en) | 2016-04-21 | 2016-04-21 | A kind of control method of non-contacted conveyance and locating platform device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610251430.XA CN105712089B (en) | 2016-04-21 | 2016-04-21 | A kind of control method of non-contacted conveyance and locating platform device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105712089A CN105712089A (en) | 2016-06-29 |
| CN105712089B true CN105712089B (en) | 2017-10-17 |
Family
ID=56160400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610251430.XA Active CN105712089B (en) | 2016-04-21 | 2016-04-21 | A kind of control method of non-contacted conveyance and locating platform device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105712089B (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106938785B (en) * | 2017-02-28 | 2022-07-19 | 江苏科技大学 | Glass substrate air floatation device with deformation detection function and detection method |
| CN109283135B (en) * | 2017-07-21 | 2021-06-08 | 合肥欣奕华智能机器有限公司 | Display panel detection device |
| CN108177199A (en) * | 2018-02-11 | 2018-06-19 | 重庆双驰门窗有限公司 | Computer panel saw operation console |
| CN108469442B (en) * | 2018-05-16 | 2020-12-01 | 浙江西溪玻璃有限公司 | Glass detection device |
| CN108840102A (en) * | 2018-06-13 | 2018-11-20 | 合肥工业大学 | A kind of air-flotation system for being used to convey glass panel with tilting jet mechanism |
| CN108910534B (en) * | 2018-07-05 | 2020-06-16 | 江苏科技大学 | Glass substrate non-contact air flotation conveying device |
| CN109605244A (en) * | 2018-12-11 | 2019-04-12 | 银河水滴科技（北京）有限公司 | A kind of localization method and device |
| CN111977375B (en) * | 2019-05-21 | 2022-01-18 | 晶彩科技股份有限公司 | Thin plate conveying device and method |
| CN110498233B (en) * | 2019-07-26 | 2021-04-27 | 江苏科技大学 | Two-dimensional non-contact conveying platform device |
| CN113219827B (en) * | 2021-04-13 | 2024-01-26 | 曲阜师范大学 | Non-contact suspension grabbing system and model reference self-adaptive control method thereof |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4197129B2 (en) * | 2003-03-19 | 2008-12-17 | シャープ株式会社 | Work transfer device |
| KR101195628B1 (en) * | 2004-04-14 | 2012-10-30 | 코레플로우 사이언티픽 솔루션스 리미티드 | A method for focusing an optical device on a facing surface of a flat object |
| CN101133488A (en) * | 2005-03-03 | 2008-02-27 | 住友重机械工业株式会社 | Transport object levitation unit, transport object levitation apparatus and stage apparatus |
-
2016
- 2016-04-21 CN CN201610251430.XA patent/CN105712089B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN105712089A (en) | 2016-06-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105712089B (en) | A kind of control method of non-contacted conveyance and locating platform device | |
| CN105742220B (en) | A kind of non-contacted conveyance and locating platform device and control method | |
| CN100466159C (en) | High-performance non-contact support platforms | |
| CN205508797U (en) | Contactless transport with locating platform device | |
| CN108910534B (en) | Glass substrate non-contact air flotation conveying device | |
| CN101107186B (en) | Stage apparatus and application processing apparatus | |
| CN112236851A (en) | Transport device for transporting at least one wafer | |
| JP2011225355A (en) | Air floating unit, stage device, inspection system, exposure system, and application system | |
| JP5399963B2 (en) | Substrate transfer apparatus and substrate processing apparatus | |
| JP2011212544A (en) | Coating apparatus | |
| CN113314449B (en) | Suction-floating type contactless transport device and control method | |
| Delettre et al. | A new contactless conveyor system for handling clean and delicate products using induced air flows | |
| CN106494889A (en) | A kind of base board delivery device and its control method | |
| CN104179781A (en) | Adsorption device and vacuum adsorption equipment capable of adsorbing soft object | |
| CN110498233B (en) | Two-dimensional non-contact conveying platform device | |
| CN106586548A (en) | Combined mixed chuck | |
| CN202815412U (en) | Pre-alignment mechanism of photoetching machine | |
| CN206336779U (en) | A kind of base board delivery device | |
| CN104175320A (en) | Vacuum chuck and bracket type vacuum adsorption equipment provided with vacuum chuck | |
| CN204869987U (en) | Sticking film machine move membrane device | |
| CN203306729U (en) | Vacuum sucker and support type vacuum absorption equipment with vacuum sucker | |
| CN113602813B (en) | Glass substrate air floatation device with deformation control function and control method | |
| CN206050940U (en) | Combination type mixing sucker | |
| KR101591037B1 (en) | Non-contacting type board transferring device | |
| CN114030894A (en) | Method and device for adjusting angle and position of glass |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200724 Address after: 313100 -2 factory building, Changxin Road, Changxing County Taihu street, Huzhou, Zhejiang, China, 809 Patentee after: AIRBEST (CHANGXING) TECHNOLOGY Co.,Ltd. Address before: 212003, No. 2, Mengxi Road, Zhenjiang, Jiangsu Patentee before: JIANGSU University OF SCIENCE AND TECHNOLOGY |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A control method of contactless transport and positioning platform device Effective date of registration: 20210413 Granted publication date: 20171017 Pledgee: Changxin Zhejiang rural commercial bank Limited by Share Ltd. Pledgor: AIRBEST (CHANGXING) TECHNOLOGY Co.,Ltd. Registration number: Y2021330000300 |