CN104495391B - Air flotation conveying device - Google Patents
Air flotation conveying device Download PDFInfo
- Publication number
- CN104495391B CN104495391B CN201410626307.2A CN201410626307A CN104495391B CN 104495391 B CN104495391 B CN 104495391B CN 201410626307 A CN201410626307 A CN 201410626307A CN 104495391 B CN104495391 B CN 104495391B
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- Prior art keywords
- air
- groove
- workpiece
- air inlet
- venthole
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- 238000005188 flotation Methods 0.000 title 1
- 230000033001 locomotion Effects 0.000 claims abstract description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- 238000005245 sintering Methods 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 4
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 241000222640 Polyporus Species 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 230000001133 acceleration Effects 0.000 abstract description 3
- 239000011148 porous material Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 241000239290 Araneae Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000000739 chaotic effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003319 supportive effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Abstract
The invention discloses an air-floating conveying device which comprises a flat plate, wherein a plurality of symmetrically distributed grooves are formed in the flat plate, longitudinal air inlet holes and longitudinal air outlet holes are formed in each groove in pairs, the air inlet holes and the air outlet holes are respectively connected with a compressed air inlet pipe and a compressed air exhaust pipe, and the compressed air inlet pipe and the compressed air exhaust pipe are communicated with positive pressure and negative pressure of an air source through an electromagnetic reversing valve. In the invention, because the air flows horizontally in the groove, the air flow viscous force can be utilized to drive the workpiece to move to the maximum extent, so that a larger movement acceleration is obtained, the problems that the driving capability of the existing air floatation conveying device is small and the workpiece is easily disturbed are solved, and the electrostatic pollution and the stress concentration on the surface of the workpiece can be reduced.
Description
Technical field
The present invention relates to a kind of air supporting feeding device, relate in semiconductor crystal wafer and glass substrate manufacturing industry is contactless defeated
Transportation technique field.
Background technology
Liquid crystal glass base and semiconductor crystal wafer must assure that in process of production safety and nondestructive on its production line carry out defeated
Fortune.This kind of workpiece is transmitted by the current commonly used contactless mode transported, it is common practice to make workpiece with defeated
Between shipping unit surface formed one layer of air film, workpiece is suspended in above device, thus avoid workpiece in transmitting procedure with
Apparatus surface contacts and causes damage.In existing this suspension transmission equipment, more typical just like Chinese patent application
" a kind of air suspension device " (application publication number is CN201961843U, and Shen Qing Publication day is: on JIUYUE 7th, 2011),
" air suspension conveyer " (application publication number is CN102363476A, and Shen Qing Publication day is: on February 29th, 2012),
" float-up device and conveyer device " (application publication number is CN1966371B, and Shen Qing Publication day is: August 15 in 2012
Day).These technical schemes and similar techniques scheme thereof be all by from apparatus surface spray straight up airflow function in work
Bottom part, the gap that air is consisted of apparatus surface and workpiece is arranged to air and at workpiece one layer of air film formed below, gas
Workpiece is only played a supporting role by film, and workpiece motion in the horizontal direction must be driven by applying external force.This kind of
Conveyer device can bring following problem:
1. need otherwise designed to drive the moveable platform of workpiece motion s, such as mechanical arm, roller etc., device overall weight
To be greatly increased.
2. workpiece and conveyer device are not in contactless state completely, as it is shown in figure 1, between device 4 and workpiece
Air film only plays a supportive role, and workpiece is transported by motor driving rolls 1, and owing to contacting with roller 1, workpiece is easy
Scratch, deform or damage.
In the prior art, the contactless transfer ways that also a class is known, as in figure 2 it is shown, open on device 1 surface
If oblique nozzle 2, below workpiece 3, spray windstream by oblique nozzle 2, utilize the viscosity traction that air flows
Act on thus drive workpiece motion s.But, there are the following problems for this technical scheme:
1. the air flow rate of nozzle injection is less, and driving force is limited, and workpiece motion s acceleration is little.
There is horizontal component and vertical component in the most oblique air-flow, wherein vertical component easily causes workpiece instability disturbing phenomenon
Appearance.
3. the air-flow from nozzle injection easily produces electrostatic pollution with semiconductor workpiece when contacting, and holds near contact point simultaneously
It is easily caused stress to concentrate.
4. nozzle air current direction is limited, is unfavorable for workpiece is carried out motor control.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the present invention provides a kind of air supporting feeding device, its energy
Enough realize Entirely contactless formula to transport, solve existing air supporting feeding device driving force little and easy workpiece is caused disturbance
Problem, but also can reduce electrostatic pollute and surface of the work stress concentrate.
Technical scheme: for achieving the above object, a kind of air supporting feeding device of the present invention, including flat board, on described flat board
Be provided with several symmetrical grooves, paired longitudinal air inlet and the venthole of being provided with in each groove, air inlet with
Venthole is connected with compressed air inlet pipe and compressed air exhaustor respectively, compressed air inlet pipe and compressed air aerofluxus
Pipe is connected with source of the gas malleation and negative pressure by solenoid directional control valve.
As preferably, the degree of depth of described groove is more than 200 microns and less than 500 microns.
As preferably, being provided with two air inlets and two ventholes in described groove, the spacing of two air inlets goes out with two
The spacing of pore is equal.
As preferably, described air inlet and venthole upper end are provided with restricting element, table on the restricting element after installing
Face is not higher than groove floor, and restricting element is metal polyporous material or the porous graphite of sintering.
As preferably, described groove is cross, is provided with four rectangular recess in cross groove, air inlet or give vent to anger
Hole is positioned at rectangular recess, is provided with restricting element in rectangular recess.
Beneficial effect: the air supporting feeding device of the present invention, has the advantage that
1. due to air in groove in bottom horizontal flow sheet state, therefore, it can farthest utilize air-flow viscous force to drive
Workpiece motion s, it is thus achieved that bigger acceleration of motion, solves existing air supporting feeding device driving force little and easy to workpiece
The problem causing disturbance, but also electrostatic can be reduced and pollute and the stress concentration of surface of the work.
2. air inlet and steam vent use the mode of independent gas supply, and control mode is flexible, driver element and support unit cloth
Put and be easily achieved, it is possible to achieve high-precision contactless transport workpiece, meet the requirement of semiconductor element transmission.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of one of existing air supporting feeding device operative scenario；
Fig. 2 is the schematic diagram of the two of existing air supporting feeding device operative scenario
Fig. 3 is the principle schematic of the present invention；
Fig. 4 is the front view that the present invention comprises the structure of 4 grooves；
Fig. 5 is the sectional view at Fig. 4 A-A；
Fig. 6 is the front view of the another kind of structure that the present invention comprises 4 grooves；
Fig. 7 is the front view that the present invention comprises the third structure of 4 grooves；
Fig. 8 is the sectional view at Fig. 7 B-B；
Fig. 9 is that the third structure that the present invention comprises 64 grooves uses view；
Figure 10 is the front view of the 4th kind of structure that the present invention comprises 4 grooves；
Figure 11 is the sectional view at Figure 10 C-C.
Detailed description of the invention
Below in conjunction with the accompanying drawings the present invention is further described.
As shown in Fig. 3 to Figure 11, a kind of air supporting feeding device, including a ganoid flat board 11, flat board 11
Surface sets the multiple groove 1-2 being symmetric, and is mutually separated by flat board 11 surface between each groove 1-2, and groove
1-2 quantity is more than 4.The groove 1-2 on flat board 11 surface can be circular, square or cross, groove 1-2
The degree of depth is more than 200 microns and less than 500 microns.Air inlet 1-3 and venthole 1-4 is offered in pairs inside groove 1-2,
Flat board 11 bottom surface residing for air inlet 1-3 and venthole 1-4 offers screw thread, is used for connecting gas joint and supplies
Gas.Air inlet 1-3 supplies normal pressure, venthole 1-4 supplying negative voltage power.As it is shown on figure 3, workpiece 12 to be transported
It is positioned at flat board 11 surface, when compressed air inputs from air inlet 1-3, owing to groove 1-2 bottom surface is less than flat board
11 surfaces, in groove 1-2, flow resistance is little, and overwhelming majority air is discharged from venthole 1-4, the most on a small quantity in groove 1-2
Air is flowed in the gap that workpiece 12 and flat board 11 surface are constituted, and forms a layer of air pressure film, makes workpiece 12
Any contact is there is not with flat board 11 surface.The quasi-viscous effect that in groove 1-2, air flowing produces simultaneously can make workpiece 12
Forces are applied, thus realizes the motion of workpiece 12.In order to improve the accuracy that viscous force controls, each groove 1-2
Air inlet 1-3 and venthole 1-4 all separately through a two-bit triplet solenoid directional control valve 15 and source of the gas malleation and negative pressure
It is connected, by solenoid directional control valve 15 is controlled changing airflow direction in groove.
The present invention drives workpiece 12 by the viscous effect of horizontal gas flow, with the prior art phase utilizing oblique jet flow
Ratio, the present invention is capable of in the case of identical supply flow rate obtaining bigger driving force, simultaneously because do not exist vertically
Direction air-flow, it is possible to reduce the air-flow disturbance to workpiece 12.
In the technical scheme of above-mentioned air supporting feeding device: the groove 1-2 quantity increased in unit are makes the flat gas of trough inner water
Stream increases with workpiece 12 contact area, can improve viscous force.For ensureing the symmetry of device, the internal phase of groove 1-2
Between adjacent pore, pitch-row is equal；The positive/negative pressure of air inlet 1-3 and venthole 1-4 suitably to mate, empty in increasing groove
Throughput, can increase driving force in the case of ensureing certain hoverheight.Fluted 1-2 need not be provided which to drive
Power, can be supplied separately to malleation or negative pressure according to practical situations.Can also suitably change the groove 1-2 degree of depth to carry
High viscosity driving force.
Air inlet 1-3 and venthole 1-4 can be rectangle, circle, triangle, or arbitrary shape.Can also
Supplied by sintering diamond bit, or can be porous graphite.When using sintering diamond bit or many
When hole graphite is as restricting element, at air inlet 1-3 and venthole 1-4, groove 1-2 is the deepest, more than 3 millimeters, uses
In being embedded by porous material, after embedding, its surface flushes or lower slightly with groove 1-2 bottom surface.
As shown in Figure 4 and Figure 5, flat board 11 surface offers 4 square indentations 1-2 being symmetric, groove
The 1-2 length of side is 25 millimeters, and the degree of depth is more than 200 microns and less than 500 microns.Air inlet is offered in pairs inside groove 1-2
Hole 1-3 and venthole 1-4, diameter is 3 millimeters, on flat board 11 bottom surface residing for air inlet 1-3 and venthole 1-4
Offer screw thread, for connecting with air inlet pipe and exhaustor.Air inlet 1-3 supplies normal pressure, and venthole 1-4 supply is negative
Pressure.Mutually separated by guide rail surface between each groove 1-2.If apparatus surface is placed with workpiece 12, work as compressed air
When air inlet 1-3 inputs, owing to groove 1-2 bottom surface is wider with the runner that workpiece 12 lower surface is formed, flow resistance is little,
Overwhelming majority air is just discharged from venthole 1-4, and a small amount of air is flowed into the gap that workpiece 12 is constituted with apparatus surface
In, form a layer of air pressure film, make workpiece 12 that any contact not occur with apparatus surface.Air is at groove 1-2
In from air inlet 1-3 to venthole 1-4 flow time, its quasi-viscous effect can make workpiece 12, and forces are applied, so that workpiece
12 motions.
As shown in Figure 6, comprise 4 and there is mutually isostructural groove 1-2, it from Fig. 4, embodiment illustrated in fig. 5 different
, that flat board 11 surface is offered is 4 circular groove 1-2 being symmetric, a diameter of 30 millimeters of groove 1-2.
As shown in Figure 7 and Figure 8, flat board 11 surface offers 4 cruciform groove 1-2 being symmetric, groove
1-2 is wide 20 millimeters, long 30 millimeters, and the degree of depth is more than 200 microns and less than 500 microns.At groove 1-2 spider end
Portion offers narrow and long rectangular air inlet 1-3 and venthole 1-4 in pairs, and pore length 15 millimeters is wide 3.5 millimeters, deep 3 millimeters.
In the bottom centre of air inlet 1-3 and venthole 1-4, the through hole with a diameter of 3 millimeters connects, flat residing for through hole
Plate 11 offers screw thread on bottom surface, for connecting with compressed air inlet pipe and compressed air exhaustor.Arranged in pairs
Air inlet 1-3 and venthole 1-4 is when supplying for a pair, and another is to not supplying, chaotic with air-flow in preventing groove 1-2.
Compared with Fig. 4, embodiment illustrated in fig. 5, cruciform groove 1-2 adds the active area of air-flow viscous force, identical
Supplying gas condition under can obtain bigger driving force.Meanwhile, narrow and long rectangular air inlet 1-3 and venthole 1-4 can make
The support force that workpiece 12 is subject to is evenly.
As it is shown in figure 9, altogether containing 64 groove 1-2, may be used to workpiece 12 and transport within the specific limits.Each enter
Pore 1-3 is all connected with source of the gas malleation and negative pressure by two-bit triplet solenoid directional control valve 15 with venthole 1-4.By control
The break-make of solenoid directional control valve 15 processed can change the viscous force action direction in each groove 1-2, makes workpiece 12 towards one
Fixed direction motion.
As shown in Figure 10 and Figure 11, it is unlike Fig. 7, embodiment illustrated in fig. 8, at rectangular inlet hole 1-3 and
Sintering diamond bit or porous graphite is embedded as restricting element at venthole 1-4.Porous material upper surface and groove
1-2 surface flushes or lower slightly, and between lower surface and rectangular opening bottom surface, 0.5 millimeter of spacing of reservation is to guarantee supply uniformly, side
Face uses the mode of glue sealing in case stopping leak leaks.Offer a diameter of at the bottom centre of air inlet 1-3 and venthole 1-4
The through hole of 3 millimeters, offers screw thread on flat board 11 bottom surface residing for through hole, is used for and compressed air inlet pipe and compression
Air exhaust duct connects.When compressed air inputs from air inlet 1-3, flows decrease after porous material, flowing is steady,
Workpiece 12 disturbance to transporting is little so that it is the support force being subject to is more uniform.
The above is only the preferred embodiment of the present invention, it should be pointed out that: for those skilled in the art
For, under the premise without departing from the principles of the invention, it is also possible to make some improvements and modifications, these improvements and modifications are also
Should be regarded as protection scope of the present invention.
Claims (5)
1. an air supporting feeding device, it is characterised in that: including flat board, it is symmetrical that described flat board is provided with several
Groove, paired longitudinal air inlet and the venthole of being provided with in each groove, air inlet and venthole respectively with compression sky
Gas air inlet pipe and compressed air exhaustor connect, compressed air inlet pipe and compressed air exhaustor by solenoid directional control valve with
Source of the gas malleation connects with negative pressure；Workpiece to be transported is positioned at above planar surface, when compressed air inputs from air inlet,
Owing to groove floor is less than planar surface, in groove, flow resistance is little, and overwhelming majority air is discharged from venthole in groove, only
Have a small amount of air to be flowed in the gap that workpiece and planar surface are constituted, form a layer of air pressure film, make workpiece with
There is not any contact in planar surface, the quasi-viscous effect that in groove, air flowing produces simultaneously can make workpiece, and forces are applied,
Thus realize the motion of workpiece.
Air supporting feeding device the most according to claim 1, it is characterised in that: the degree of depth of described groove is more than 200
Micron and less than 500 microns.
Air supporting feeding device the most according to claim 1, it is characterised in that: it is provided with two air inlets in described groove
Hole and two ventholes, the spacing of two air inlets is equal with the spacing of two ventholes.
Air supporting feeding device the most according to claim 1, it is characterised in that: described air inlet and venthole upper end
Being provided with restricting element, the restricting element upper surface after installing is not higher than groove floor, and restricting element is the gold of sintering
Genus polyporus material or porous graphite.
5. according to the air supporting feeding device described in any one of Claims 1-4, it is characterised in that: described groove is ten
Font, is provided with four rectangular recess in cross groove, and air inlet or venthole are positioned at rectangular recess, rectangular recess
Restricting element is inside installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410626307.2A CN104495391B (en) | 2014-11-07 | Air flotation conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410626307.2A CN104495391B (en) | 2014-11-07 | Air flotation conveying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104495391A CN104495391A (en) | 2015-04-08 |
| CN104495391B true CN104495391B (en) | 2017-01-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200728 Address after: 313100 -2 factory building, Changxin Road, Changxing County Taihu street, Huzhou, Zhejiang, China, 809 Patentee after: AIRBEST (CHANGXING) TECHNOLOGY Co.,Ltd. Address before: 212003, No. 2, Mengxi Road, Zhenjiang, Jiangsu Patentee before: JIANGSU University OF SCIENCE AND TECHNOLOGY |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: An air floating transport device Effective date of registration: 20210413 Granted publication date: 20170104 Pledgee: Changxin Zhejiang rural commercial bank Limited by Share Ltd. Pledgor: AIRBEST (CHANGXING) TECHNOLOGY Co.,Ltd. Registration number: Y2021330000300 |