CN104488147B - 脉冲型co2激光输出脉冲形状和功率控制 - Google Patents

脉冲型co2激光输出脉冲形状和功率控制 Download PDF

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Publication number
CN104488147B
CN104488147B CN201380019811.XA CN201380019811A CN104488147B CN 104488147 B CN104488147 B CN 104488147B CN 201380019811 A CN201380019811 A CN 201380019811A CN 104488147 B CN104488147 B CN 104488147B
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China
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pulse
sub
train
laser
pulses
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Chinese (zh)
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CN104488147A (zh
Inventor
P·罗森塔尔
J·肯尼迪
V·塞古因
D·阿利
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Coherent Inc
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Coherent Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • H01S3/104—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/09705—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser with particular means for stabilising the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/10038—Amplitude control
    • H01S3/10046—Pulse repetition rate control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/10069—Memorized or pre-programmed characteristics, e.g. look-up table [LUT]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Laser Beam Processing (AREA)
CN201380019811.XA 2012-04-13 2013-04-05 脉冲型co2激光输出脉冲形状和功率控制 Active CN104488147B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261624096P 2012-04-13 2012-04-13
US61/624,096 2012-04-13
US13/467,890 2012-05-09
US13/467,890 US8687661B2 (en) 2012-04-13 2012-05-09 Pulsed CO2 laser output-pulse shape and power control
PCT/US2013/035530 WO2013154949A2 (en) 2012-04-13 2013-04-05 Pulsed co2 laser output-pulse shape and power control

Publications (2)

Publication Number Publication Date
CN104488147A CN104488147A (zh) 2015-04-01
CN104488147B true CN104488147B (zh) 2017-07-07

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CN201380019811.XA Active CN104488147B (zh) 2012-04-13 2013-04-05 脉冲型co2激光输出脉冲形状和功率控制

Country Status (7)

Country Link
US (1) US8687661B2 (enExample)
JP (1) JP6041977B2 (enExample)
KR (1) KR101519516B1 (enExample)
CN (1) CN104488147B (enExample)
DE (1) DE112013002021B4 (enExample)
GB (1) GB2515981B (enExample)
WO (1) WO2013154949A2 (enExample)

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US8995052B1 (en) * 2013-09-09 2015-03-31 Coherent Kaiserslautern GmbH Multi-stage MOPA with first-pulse suppression
KR102251810B1 (ko) 2014-09-30 2021-05-13 삼성전자주식회사 메모리 장치, 메모리 시스템 및 메모리 장치에 대한 제어 방법
US9450369B2 (en) * 2014-11-26 2016-09-20 Convergent Dental, Inc. Systems and methods for supplying power to and cooling dental laser systems
US20160204566A1 (en) * 2015-01-09 2016-07-14 Coherent, Inc. Gas-discharge laser power and energy control
CN108141949B (zh) 2015-10-12 2019-11-12 通快激光与系统工程有限公司 高频激励脉冲产生等离子或激光脉冲方法设备和控制单元
DE102016212927B3 (de) 2016-07-14 2017-09-07 Trumpf Laser Gmbh Laser-Taktsignalgenerator
CN109157747A (zh) * 2017-10-30 2019-01-08 武汉奇致激光技术股份有限公司 一种强脉冲光治疗机的脉冲串输出控制方法
WO2019145930A2 (en) 2018-01-29 2019-08-01 IDEA machine development design AND production ltd. Compact coaxial laser
US11081855B2 (en) * 2018-06-18 2021-08-03 Coherent, Inc. Laser-MOPA with burst-mode control
US11067809B1 (en) * 2019-07-29 2021-07-20 Facebook Technologies, Llc Systems and methods for minimizing external light leakage from artificial-reality displays
US20220288720A1 (en) * 2021-03-12 2022-09-15 Ofuna Enterprise Japan Co., Ltd. Laser processing method and laser processing machine
CN113231750B (zh) * 2021-03-18 2022-07-19 武汉大学 一种脉冲激光打孔系统及打孔方法

Citations (7)

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US4539685A (en) * 1982-09-02 1985-09-03 United Technologies Corporation Passively Q-switched laser having a variable pulse rate
WO2002090037A1 (en) * 2001-05-09 2002-11-14 Electro Scientific Industries, Inc. Micromachining with high-energy, intra-cavity q-switched co2 laser pulses
JP2003188446A (ja) * 2001-12-19 2003-07-04 Sumitomo Heavy Ind Ltd レーザ加工のパルス安定化方法
US20060176917A1 (en) * 2005-02-09 2006-08-10 Ultratech, Inc. CO2 laser stabilization systems and methods
WO2008091446A1 (en) * 2007-01-26 2008-07-31 Electro Scientific Industries, Inc. Methods and systems for generating pulse trains for material processing
US20110085575A1 (en) * 2009-10-13 2011-04-14 Coherent, Inc. Digital pulse-width-modulation control of a radio frequency power supply for pulsed laser
US20110182319A1 (en) * 2010-01-22 2011-07-28 Coherent, Inc. Co2 laser output power control during warm-up

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JPS57186378A (en) * 1981-05-11 1982-11-16 Mitsubishi Electric Corp Laser device
JPH06114582A (ja) * 1992-10-06 1994-04-26 Mitsui Petrochem Ind Ltd メッキ鋼板のパルスレーザ照射方法
US5345168A (en) 1993-02-01 1994-09-06 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Burst-by-burst laser frequency monitor
US6463086B1 (en) * 1999-02-10 2002-10-08 Lambda Physik Ag Molecular fluorine laser with spectral linewidth of less than 1 pm
JP2004153442A (ja) 2002-10-29 2004-05-27 Sony Corp 光送信装置、光受信装置および光通信システム、並びにその送・受信方法
EP1581128B1 (en) * 2003-01-09 2007-05-30 Gyrus Medical Limited An electrosurgical generator
JP4493967B2 (ja) * 2003-10-01 2010-06-30 日立ビアメカニクス株式会社 Ｃｏ２レーザ加工方法およびレーザ加工装置
US7508850B2 (en) * 2004-09-02 2009-03-24 Coherent, Inc. Apparatus for modifying CO2 slab laser pulses
US20070086495A1 (en) * 2005-08-12 2007-04-19 Sprague Randall B Method and apparatus for stable laser drive
US7817686B2 (en) 2008-03-27 2010-10-19 Electro Scientific Industries, Inc. Laser micromachining using programmable pulse shapes
US8391329B2 (en) * 2009-01-26 2013-03-05 Coherent, Inc. Gas laser discharge pre-ionization using a simmer-discharge
JP5765730B2 (ja) * 2010-03-11 2015-08-19 ギガフォトン株式会社 極端紫外光生成装置

Patent Citations (7)

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Publication number Priority date Publication date Assignee Title
US4539685A (en) * 1982-09-02 1985-09-03 United Technologies Corporation Passively Q-switched laser having a variable pulse rate
WO2002090037A1 (en) * 2001-05-09 2002-11-14 Electro Scientific Industries, Inc. Micromachining with high-energy, intra-cavity q-switched co2 laser pulses
JP2003188446A (ja) * 2001-12-19 2003-07-04 Sumitomo Heavy Ind Ltd レーザ加工のパルス安定化方法
US20060176917A1 (en) * 2005-02-09 2006-08-10 Ultratech, Inc. CO2 laser stabilization systems and methods
WO2008091446A1 (en) * 2007-01-26 2008-07-31 Electro Scientific Industries, Inc. Methods and systems for generating pulse trains for material processing
US20110085575A1 (en) * 2009-10-13 2011-04-14 Coherent, Inc. Digital pulse-width-modulation control of a radio frequency power supply for pulsed laser
US20110182319A1 (en) * 2010-01-22 2011-07-28 Coherent, Inc. Co2 laser output power control during warm-up

Also Published As

Publication number Publication date
JP6041977B2 (ja) 2016-12-14
JP2015518657A (ja) 2015-07-02
KR101519516B1 (ko) 2015-05-12
KR20140132018A (ko) 2014-11-14
DE112013002021T5 (de) 2015-03-05
WO2013154949A2 (en) 2013-10-17
GB2515981A (en) 2015-01-07
CN104488147A (zh) 2015-04-01
GB2515981B (en) 2015-02-18
US20130272325A1 (en) 2013-10-17
DE112013002021B4 (de) 2016-03-10
US8687661B2 (en) 2014-04-01
WO2013154949A3 (en) 2013-12-05
GB201420217D0 (en) 2014-12-31

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