CN104406775A - Spectroscopless measuring optical system - Google Patents

Abstract

The invention provides a measuring optical system without a beam splitter, which comprises a light source, a condenser mirror, a reticle with a reflective surface, a focusing lens group and a reflector. The system does not have the beam splitter of the common measurement optical system, and can reflect all the light reflected from the measurement optical path to the receiving system. The loss of light energy only depends on the transmittance of the lens group and the reflectivity of the measured object, and the energy loss is significantly reduced; Another great benefit is that when the optical system is used in the infrared light path, since there is no beam splitter in the system, visible light can be used to adjust the system, which brings great convenience to the assembly.

Description

A measuring optical system without beam splitter

technical field

The invention relates to the technical field of an optical system centering device and its adjustment, in particular to a measuring optical system without a beam splitter.

Background technique

For a high-precision optical system, the center error will cause the actual optical axis of the optical device to deviate from the designed optical axis, destroying the aberration correction state of the optical design, thereby seriously affecting the imaging performance of the optical system such as resolution, distortion, and contrast.

The non-beam splitter measurement optical system is the core optical path in the centering device of the optical system, and is used to measure and correct the center error of the optical device.

If a spectroscopic optical system is used, the optical path is as shown in Figure 1. The light emitted by the light source 1 is converged by the condenser lens 2 on the reticle 3 coated with a semi-transparent and semi-reflective film, and then reaches the measured mirror group 6 through the focusing lens group 4. It is reflected back to the reticle 3 and finally reaches the observation system 5 . There are two serious defects in this method: First, due to the existence of the semi-transparent and semi-reflective beam splitter, the light energy is greatly lost, especially the light energy after the lens under test, making it very difficult to observe the reticle image; Second, this method is difficult to apply to non-visible light paths.

Contents of the invention

The technical problem to be solved by the present invention is to provide a practical optical system for measuring light path.

The object of the present invention is achieved like this: a kind of measuring optical system without beam splitter, comprises light source, condenser mirror, reticle with reflective surface, focusing lens group and reflector; The reticle image reaches the lens under test through the focusing lens group and is reflected, then passes through the focusing lens group, and is reflected to the mirror through the reticle, and finally reaches the observation system after being reflected by the mirror.

Further, the reticle with the reflective surface is a non-visible light reticle with a reflective film. At this time, the system is suitable for non-visible light paths, or the reticle with a reflective surface is a non-visible light reticle with a reflective film. The visible light reticle is suitable for the visible light path at this time.

Further, the lower surface of the reticle is coated with a reflective film, which is a bright crosshair in the visible light path and a light-through small hole in the non-visible light path.

Further, the reflector is a cylinder.

Compared with the prior art, the present invention has the following advantages:

(1), the present invention greatly reduces the energy loss in the process of advancing the optical path, thus bringing great convenience to the observation;

(2), the present invention fundamentally solves the feasibility of implementing light splitting in the non-visible light path;

(3) The present invention is not only applicable to visible light optical systems, but also applicable to non-visible optical systems.

Description of drawings

Fig. 1 is the schematic diagram of measuring optical system containing beam splitter of prior art;

Fig. 2 is the schematic diagram of the measuring optical system without beam splitter of the present invention;

In the figure, 1 is a light source, 2 is a condenser, 3 is a reticle with a reflective surface, 31 is a beam splitter, 32 is a transflective film, 301 is a non-visible light reticle, 302 is a visible light reticle, 303 is a reflective film, 4 is a focusing lens group, 5 is a mirror, 6 is an observation system, and 7 is a measured lens.

Detailed ways

The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings.

As shown in FIG. 2 , a spectroscope-less measurement optical system of the present invention includes a light source 1 , a condenser lens 2 , a reticle 3 with a reflective surface, a focusing lens group 4 and a reflector 5 . The reticle 3 with a reflective surface is a non-visible light reticle 301 with a reflective film 303 , or a visible light reticle 302 with a reflective film 303 . The light 1 emitted by the light source is converged onto the reticle 3 through the condenser lens 2, and the illuminated reticle target passes through the focusing lens group 4 to change the convergence of the optical path and then reaches the surface of the measured lens 7 vertically. After reflection, the original path returns to the lower surface of the reticle 3, and the reticle 3 finally reflects the optical path to the observation system 6. In the observation system, the measured lens group is adjusted by measuring the circle amount of the returned image of the reticle.

Parts not described in detail in the present invention belong to the known techniques of those skilled in the art.

Those of ordinary skill in the art should recognize that the above embodiments are only used to illustrate the present invention, rather than as a limitation to the present invention, as long as within the scope of the spirit of the present invention, changes to the above embodiments , Modifications will fall within the scope of the claims of the present invention.

Claims (4)

1. A kind of measuring optical system without beam splitter, it is characterized in that: comprise light source (1), condenser lens (2), have the reticle (3) of reflecting surface, focusing lens group (4) and reflecting mirror (5) ); the light source (1) illuminates the reticle (3) through the condenser lens (2), and the reticle image reaches the measured lens (7) through the focusing lens group (4) and is reflected, and then passes through the focusing lens group (4), reflected by the reticle (3) to the reflector (5), and finally arrives in the observation system (6) after being reflected by the reflector (5). 2. The non-spectroscopic measuring optical system according to claim 1, characterized in that: wherein the reticle (3) with reflective surface is a non-visible light reticle (301) with reflective film (303), At this time, the system is suitable for the non-visible light path, or the reticle (3) with the reflective surface is a visible light reticle (302) with the reflective film (303), and at this time it is suitable for the visible light path. 3. The non-beam splitter measuring optical system according to claim 1, characterized in that: the lower surface of the reticle (3) is coated with a reflective film (303), which is a bright crosshair in the visible light path; In the middle of the road is a small hole for light. 4. The spectroscope-less measuring optical system according to claim 1, characterized in that: the reflector (5) is a cylinder.