CN101251436A - On-line verification method for processing cassegrain two-mirror optics system - Google Patents
On-line verification method for processing cassegrain two-mirror optics system Download PDFInfo
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- CN101251436A CN101251436A CNA2008100353258A CN200810035325A CN101251436A CN 101251436 A CN101251436 A CN 101251436A CN A2008100353258 A CNA2008100353258 A CN A2008100353258A CN 200810035325 A CN200810035325 A CN 200810035325A CN 101251436 A CN101251436 A CN 101251436A
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Abstract
The invention discloses an online test method for the processing of a Cassegrain two-reflector optical system, which is used for the online test of the processing of the non-perfect imaging Cassegrain two-reflector optical system. The optical test system consists of a standard self-collimating plane mirror, the tested Cassegrain optical system, a compensating lens and an aspheric processing surface form detection instrument. The compensating lens is arranged on the back light path of the non-perfect imaging Cassegrain two-reflector optical system to compensate the spherical aberration of the original optical system, thereby enabling the tested Cassegrain two-reflector optical system to form a perfect image on points on the axis, and meeting the processing requirements of the pair of primary and secondary reflectors.
Description
Technical field
The present invention relates to optics inspection during manufacture technology, specifically be meant a kind of on-line verification method for processing cassegrain two-mirror optics system, it be used for the non-Cassegrain's two-mirror optics system that improves imaging add man-hour at X-ray inspection X.
Background technology
The Cassegrain had invented the optical system that adopts two mirror structures in 1672, the optical system of this structure is extensively adopted by astronomical telescope and various long-focus telephotolens, the big principal reflection mirror that is called in the catoptron of Cassegrain's optical system, little be called secondary catoptron, usually in the principal reflection mirror central openings, image in the principal reflection mirror back.In the classical Cassegrain telescope, principal reflection mirror is the paraboloid of revolution, and according to the optical property of conic section, secondary catoptron is so long as with F
1, F
2Be the hyperboloid of revolution of bifocal, do not converge to F with then having spherical aberration originally
1The light of point through after this secondary mirror reflects, does not converge to F with will having spherical aberration
2Point, but this telescope has coma, and the certain astigmatism and the curvature of field are also arranged.A principal reflection mirror relative aperture 1/3, Cassegrain telescope relative aperture 1/8 is as becoming in principal reflection mirror back system nearby, on resonable imagination plane (the picture plane of paraxial light), if require the disperse of picture to be no more than 1 rad, the available fields diameter is about 9 jiaos of branches.Owing to put on the classical Cassegrain system axle and become to improve picture, therefore in the optical system processing, after the processing of finishing main parabolic mirror, when the bi-curved secondary catoptron of processing, always principal reflection mirror and secondary catoptron are paired into actual optical system and come the processing of secondary catoptron is tested, guarantee that system has favorable imaging quality.In order to enlarge the imaging viewing field of Cassegrain system, people take to add the method for one group of refractor usually on the back light path of Cassegrain system, at this moment this point on axle of Cassegrain system has not become perfect picture, the method that generally adopts principal reflection mirror and secondary catoptron to process respectively, check for the processing of this type systematic.This processing technology is because the inevitable machining deviation of aspherical mirror machining when system in combination, often can not get the favorable imaging quality of expecting.
Summary of the invention
The online method of inspection of processing that the purpose of this invention is to provide a kind of Cassegrain system, solution axle go up to put into the major and minor catoptron pairing of the Cassegrain system of non-perfect picture and add online check problem in man-hour.
The major and minor catoptron pairing of Cassegrain's two-mirror optics system of the present invention is processed the online method of inspection as shown in Figure 1, and optical detection system is made up of standard autocollimatic level crossing 1, tested Cassegrain's optical system 2, offset lens 3 and aspherical mirror machining face shape detecting instrument 4.Standard autocollimatic level crossing 1 places the place ahead of detected Cassegrain's optical system 2, and offset lens 3 is positioned on the back light path of detected Cassegrain's optical system 2, and detecting instrument 4 is placed on the focus of detected Cassegrain's optical system 2.The check light beam that is sent by detecting instrument 4 at first is incident on the detected secondary catoptron 201 by compensating glass 3, light beam reflexes on the principal reflection mirror 202 through secondary catoptron 201, light beam after principal reflection mirror 202 reflections becomes parallel beam directive standard autocollimation level crossing 1, light beam after standard autocollimation mirror reflects is back to detecting instrument 4 by original optical path, detecting instrument 4 can come out the mismachining tolerance information analysis that has in the Returning beam of secondary catoptron mismachining tolerance information, instructs the following process of secondary catoptron 201.The surface figure accuracy of standard autocollimation level crossing 1 requires to be better than 1/10th check optical wavelength, and clear aperture is greater than more than the principal reflection mirror 202 bore 50mm; Offset lens 3 is positioned on the back light path of Cassegrain's two-mirror optics system 2, and it is used for compensating the spherical aberration of Cassegrain's two-mirror optics system, and offset lens 3 generally has the optical glass of high-quality easy processing to make, as K9, and BK7 glass; Testing instruments 4 adopt knife, laser interferometer usually.
The invention has the advantages that, in Cassegrain's two-mirror optics system 2, add offset lens 3, Cassegrain's two-mirror optics system 2 is put on axle become to improve picture, when the secondary catoptron 201 of processing, can adopt the method for technical maturation, reliable major and minor mirror pairing processing, check like this, thereby guarantee the crudy of Cassegrain's two-mirror optics system.
Description of drawings
Fig. 1 is that the major and minor catoptron pairing of Cassegrain's two-mirror optics system processing is at the X-ray inspection X index path;
Among the figure: 1---standard autocollimation level crossing;
2---be verified Cassegrain's two-mirror optics system;
201---secondary catoptron (being verified);
202---principal reflection mirror;
3---compensating glass;
4---testing instruments.
Embodiment
1 secondary catoptron 201 inspection during manufacture index paths with reference to the accompanying drawings, we are that the non-Cassegrain's two-mirror optics system 2 that improves imaging of point has designed a cover pairing inspection during manufacture light path on the axle.The optical parametric of this Cassegrain's two-mirror optics system 2 is as shown in table 1:
Table 1
The check light path design is as follows:
Standard autocollimation level crossing 1 adopts diameter 250mm, the plane mirror of surface precision 1/10th wavelength; Offset lens 3 adopts BK7 optical glass, and concrete optical design parameter is as shown in table 2:
Table 2
2 of Cassegrain's two-mirror optics systems behind the adding offset lens 3 are gone up and are put into perfect picture, and its wave aberration of going up point is near 1/50th wavelength; Detecting instrument 4 is selected knife and laser interferometer for use, secondary catoptron 201 being carried out adopt the knife check when aspheric surface is repaiied band, when mismachining tolerance enters 1/2nd wavelength, adopts the laser interferometer check that secondary catoptron 201 aspheric surfaces are carried out refine.
Claims (4)
1. on-line verification method for processing cassegrain two-mirror optics system, it is by standard autocollimation level crossing (1), offset lens (3) and detecting instrument (4) are formed, it is characterized in that: the standard autocollimatic level crossing (1) that the former road of check light beam is returned is arranged in the place ahead of detected Cassegrain's optical system (2), in Cassegrain's two-mirror optics system (2) back light path that is verified, an offset lens (3) that is used for compensating spherical aberration on the optical system axis that is verified is arranged, the detecting instrument (4) that is used for measuring secondary catoptron (201) aspherical mirror machining error is arranged on the focus of detected Cassegrain's optical system (2).
2. a kind of on-line verification method for processing cassegrain two-mirror optics system according to claim 1, it is characterized in that: said standard autocollimation level crossing (1) adopts surface figure accuracy to be better than 1/10th check optical wavelength, and clear aperture is greater than the above standard flat catoptron of principal reflection mirror (202) clear aperture 50mm.
3. a kind of on-line verification method for processing cassegrain two-mirror optics system according to claim 1, it is characterized in that: said offset lens (3) adopts high-quality optical glass to make, and said optical glass material can be selected the glass of the K9 or the BK7 trade mark for use.
4. a kind of on-line verification method for processing cassegrain two-mirror optics system according to claim 1, it is characterized in that: said detecting instrument (4) is knife and laser interferometer, when the secondary catoptron of aspheric surface (201) is repaiied band, adopt knife to detect, when mismachining tolerance enters 1/2nd wavelength coverages when secondary catoptron (201) aspheric surface is carried out refine, adopt the laser interferometer check.
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