CN206803957U - Optical system for the convex oblate spheroid detection of super large caliber - Google Patents
Optical system for the convex oblate spheroid detection of super large caliber Download PDFInfo
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- CN206803957U CN206803957U CN201720603792.0U CN201720603792U CN206803957U CN 206803957 U CN206803957 U CN 206803957U CN 201720603792 U CN201720603792 U CN 201720603792U CN 206803957 U CN206803957 U CN 206803957U
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- oblate spheroid
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Abstract
This patent discloses a kind of optical system for the convex oblate spheroid detection of super large caliber.The detection optical system includes flat interferometer, refraction-reflection sphere meniscus lens, and the wherein refracted portion of refraction-reflection sphere meniscus lens is used to compensate the third-order aberration of convex oblate spheroid mirror to be checked, the emergent ray formation autocollimatic light path of reflecting part reflection convex oblate spheroid mirror to be checked.Detection optical system described in this patent is surveyed for the convex oblate spheroid microscopy of super large caliber, and process and assemble difficulty, the cost for reducing the source of error component and reducing compensation system of compensator are reduced while accuracy of detection is ensured.This patent has the characteristics of measurement bore is big, light path is simple.
Description
Technical field
This patent is related to a kind of Aspherical-surface testing optical system, and in particular to one kind is used for the convex oblate spheroid detection of super large caliber
Optical system.
Background technology
Super large caliber convex aspheric surface (clear aperture is more than or equal to 300mm) is progressively applied to the spy of large space and deep space
Survey in telescopic system, as the primary optics for participating in high quality optical imaging, its caliber size and surface precision are into
As the key of quality.As the bigbore optical system demand of big visual field gradually increases, large-caliber convex oblate spheroid is in secondary mirror
Using turning into trend.
Convex aspheric surface interference detection method mainly includes the inspection of aberrationless point and compensated to examine at present.Aberration-free point is profit
Its face shape is detected with the aberrationless point property of secondary axisymmetric aspheric surface, its aberrationless point property refers to several with secondary aspherical
The picture of what focus conjugation does not have aberration.When examining convex hyperboloid mirror such as Hindle methods, interferometer spot light is positioned to be checked
In a convex bi-curved focus, the centre of sphere of auxiliary Hindle spheres then overlaps with another focus, the survey that face to be checked is reflected
Light beam is tried along backtracking to interferometer.But aberration-free point is only used for detecting K<0 convex hyperboloid and convex paraboloid, to convex
Oblate spheroid can not be applicable.Compensation detection is the common method for convex non-spherical mirror detection, is substantially as auxiliary by compensator
Help optical element, the aberration of convex aspheric surface to be measured compensated using aberration caused by compensator, be applicable to secondary aspherical and
High order aspheric surface.The test beams matched with convex aspheric surface to be checked are transformed to after the compensated lens group of light beam that interferometer is sent,
Impinge perpendicularly on convex aspheric surface to be checked, and along backtracking to interferometer after reflecting.It is saturating for the conventional compensation of convex oblate spheroid
Microscope group, it usually needs two to three pieces of lens, sometimes or even also containing aspherical, this just bring offset lens group in itself plus
A series of problems, such as work, detection and adjustment, so as to limit the raising of measurement accuracy.Offset lens group also can be by based on diffraction principle
Computed hologram (Computer Generated Hologram, CGH) replace, but this method light path is relative complex and holographic
The making of figure needs expensive professional equipment, and the making particularly with heavy caliber, high-precision CGH is also immature at present, limit
Its extensive use is made.
【Look-ahead technique document Prior Art】Research [J] of improved Hindle methods detection convex aspheric surface is infrared and laser engineering,
2011,40(2)：277-281
For the optical system shown in document 1, although being proposed in compensation system anti-using half in offset lens
Semi-transparent form is improved to Hindle methods, but because the compensation system is to utilize on axle to be conjugated based on Hindle principles
Point anaberration, therefore the system is that spot light is incident and meniscus lens two sides is approximate with one heart.And oblate spheroid disappears on axle without conjugation
Aberration point, therefore this method is only applicable to K<0 convex hyperboloid and paraboloidal mirror, and the convex oblate spheroid of super large caliber can not be applied to
Surface testing.
The content of the invention
In this patent, in order to eliminate above-mentioned problem of the prior art point, its object is to provide one kind to be used for super large caliber
The optical system of convex oblate spheroid detection.The optical system includes flat interferometer and refraction-reflection sphere meniscus lens, wherein rolling over
The refracted portion of reflective sphere meniscus lens be used for compensate convex oblate spheroid mirror to be checked third-order aberration, reflecting part reflection it is to be checked
The first reflection light of convex oblate spheroid mirror forms autocollimatic light path.
A kind of optical system for the convex oblate spheroid detection of super large caliber is by flat interferometer 3 and refraction-reflection sphere bent moon
Lens 1 form, wherein：
The described glass material of refraction-reflection sphere meniscus lens 1 is K9, focal power be on the occasion of and its concave surface S1-2One layer of plating
Semi-transparent semi-reflecting film；
Described refraction-reflection sphere meniscus lens 1 is positioned between flat interferometer 3 and oblate spheroid mirror 2 to be checked, catadioptric
Penetrate the convex surface S of formula sphere meniscus lens 11-1Face flat interferometer 3, concave surface face oblate spheroid mirror 2 to be checked；Refraction-reflection sphere
The concave surface S of meniscus lens 11-2The centre of sphere weight of divergent spherical wave that is formed after the convex first reflection of oblate spheroid mirror 2 of the centre of sphere and light
Close；
A branch of collimated light beam that flat interferometer 3 is sent is directly incident on to be checked convex after the refraction of sphere meniscus lens 1
On oblate spheroid mirror 2, the concave surface S of sphere meniscus lens 1 is reflexed to by convex oblate spheroid mirror 2 to be checked1-2Afterwards again former road be reflected back it is to be checked
Convex oblate spheroid mirror 2, plane interference is entered after sphere meniscus lens 1 reflects by light beam after the convex secondary reflection of oblate spheroid mirror 2 to be checked
Instrument 3.
The advantages of this patent, is：Described detection optical system detects for the oblate spheroid of super large caliber, is ensureing to examine
The process and assemble difficulty of compensation optical system is reduced, reduce the source of error component and reduces compensation while surveying precision
The cost of system.This patent has the characteristics of measurement bore is big, light path is simple.
Brief description of the drawings
Fig. 1 is the optical system structure figure for being used for the convex oblate spheroid detection of super large caliber described in this patent.
Fig. 2 is the design residual aberration figure of the detection optical system described in this patent.
Fig. 3 is the spherical aberration curve map of the detection optical system described in this patent.
In figure：1 is refraction-reflection sphere meniscus lens；2 be convex oblate spheroid mirror to be checked；3 be flat interferometer；S1-2For folding
The convex surface of reflective meniscus lens；S1-2For the concave surface of refraction-reflection meniscus lens；S2-1For the reflecting surface of convex oblate spheroid mirror to be checked.
Embodiment
Hereinafter, this patent is described in further detail in conjunction with the drawings and the specific embodiments.
Known convex oblate spheroid aperture of mirror to be checked is D0=360mm, vertex curvature radius R0=1568.19mm, quadratic surface system
Number K=1.44, aspherical degree 10um.For the surface face type error-detecting of the convex oblate spheroid, optics as shown in Figure 1 is designed
System, the system include flat interferometer 3 and refraction-reflection sphere meniscus lens 1.
The ray tracing process of detection optical system is in present embodiment, a branch of directional light sent by flat interferometer
Beam is directly incident on convex oblate spheroid mirror 2 to be checked after the refraction of refraction-reflection sphere meniscus lens 1, and by convex oblate spheroid to be checked
Face mirror 2 reflexes to the concave surface S of refraction-reflection sphere meniscus lens 11-2Former road is reflected back convex oblate spheroid mirror 2 to be checked again afterwards, works as light
After line is reflected by convex oblate spheroid mirror 2 to be checked for the second time, along backtracking into flat interferometer.Wherein refraction-reflection sphere bent moon
The refracted portion of lens 1 is used for the third-order aberration for compensating convex oblate spheroid mirror 2 to be checked, and convex oblate spheroid mirror 2 to be checked is reflected in reflecting part
Emergent ray formed autocollimatic light path.
The design parameter of refraction-reflection sphere meniscus lens 1 is optimized by optical design software in present embodiment,
Using the aberration for balancing convex oblate spheroid mirror to be checked as optimization aim, show that compensation system entrance pupil size is 380mm, refraction-reflection sphere
The glass material of meniscus lens 1 is K9, and largest beam bore is 403mm, the major optical parameter such as institute of table 1 of detection optical system
Show.
In present embodiment the design residual error (remaining wave aberration) of optical system be 0.0617 λ PV, 0.0193 λ RMS (λ=
632.8nm)。
The detecting system major optical parameter of table 1
| Surface | Radius of curvature (mm) | Thickness (mm) | Material | Half bore (mm) | Quadratic coefficients K |
| S1-1 | 694.379 | 31.833 | K9 | 190.163 | 0 |
| S1-2 | 1201.646 | 133.349 | 188.233 | 0 | |
| S2-1 | 1568.196 | -133.349 | MIRROR | 180.001 | 1.44 |
| S1-2 | 1201.646 | 133.349 | MIRROR | 201.564 | 0 |
| S2-1 | 1568.196 | -133.349 | MIRROR | 180.001 | 1.44 |
| S1-2 | 1201.646 | -31.833 | K9 | 188.228 | |
| S1-1 | 694.379 | 190.157 |
Claims (1)
1. a kind of optical system for the convex oblate spheroid detection of super large caliber, curved by flat interferometer (3) and refraction-reflection sphere
Moon lens (1) composition, it is characterised in that：
Described refraction-reflection sphere meniscus lens (1) glass material is K9, focal power be on the occasion of and its concave surface (S1-2) one layer of plating
Semi-transparent semi-reflecting film；
Described refraction-reflection sphere meniscus lens (1) is positioned between flat interferometer (3) and oblate spheroid mirror to be checked (2), folding
Convex surface (the S of reflective sphere meniscus lens (1)1-1) face flat interferometer (3), concave surface face oblate spheroid mirror (2) to be checked；Folding
Reflective sphere meniscus lens (1) concave surface (S1-2) the hair that is formed after convex oblate spheroid mirror (2) first reflection of the centre of sphere and light
The centre of sphere for dissipating spherical wave overlaps；
A branch of collimated light beam that flat interferometer (3) is sent is directly incident on to be checked convex after sphere meniscus lens (1) refraction
On oblate spheroid mirror (2), the concave surface (S of sphere meniscus lens (1) is reflexed to by convex oblate spheroid mirror (2) to be checked1-2) after again former road it is anti-
Convex oblate spheroid mirror (2) to be checked is emitted back towards, is reflected by light beam after convex oblate spheroid mirror (2) secondary reflection to be checked through sphere meniscus lens (1)
Enter flat interferometer (3) afterwards.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107131846A (en) * | 2017-05-27 | 2017-09-05 | 中国科学院上海技术物理研究所 | A kind of optical system for the convex oblate spheroid detection of super large caliber |
| CN109946043A (en) * | 2019-03-11 | 2019-06-28 | 中国科学院上海技术物理研究所 | A kind of convex hyperboloid detection optical system of super large of catadioptric lens combination correction |
| CN110579877A (en) * | 2019-09-23 | 2019-12-17 | 中国科学院上海技术物理研究所 | optical system and theory of conjugate correction inspection aspherical mirror |
-
2017
- 2017-05-27 CN CN201720603792.0U patent/CN206803957U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107131846A (en) * | 2017-05-27 | 2017-09-05 | 中国科学院上海技术物理研究所 | A kind of optical system for the convex oblate spheroid detection of super large caliber |
| CN109946043A (en) * | 2019-03-11 | 2019-06-28 | 中国科学院上海技术物理研究所 | A kind of convex hyperboloid detection optical system of super large of catadioptric lens combination correction |
| CN109946043B (en) * | 2019-03-11 | 2024-03-22 | 中国科学院上海技术物理研究所 | Ultra-large convex hyperboloid inspection optical system for refractive and reflective lens combination correction |
| CN110579877A (en) * | 2019-09-23 | 2019-12-17 | 中国科学院上海技术物理研究所 | optical system and theory of conjugate correction inspection aspherical mirror |
| CN110579877B (en) * | 2019-09-23 | 2024-03-26 | 中国科学院上海技术物理研究所 | Optical system and theory for conjugate correction inspection of aspherical mirror |
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