CN109946044B - Optical system for inspecting ultra-large caliber convex parabolic reflector by refractive and reflective lens group - Google Patents
Optical system for inspecting ultra-large caliber convex parabolic reflector by refractive and reflective lens group Download PDFInfo
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- 230000003287 optical effect Effects 0.000 title claims abstract description 26
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- 238000001514 detection method Methods 0.000 abstract description 31
- 238000000034 method Methods 0.000 abstract description 12
- 238000007689 inspection Methods 0.000 abstract description 11
- 238000012545 processing Methods 0.000 abstract description 7
- 238000012937 correction Methods 0.000 abstract description 3
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Abstract
The invention discloses an optical system for inspecting an ultra-large caliber convex parabolic reflector by a refractive and reflective lens group. The inspection optical system mainly comprises an interferometer, a refractive-reflective lens group, a Hundle spherical reflector and a convex parabolic reflector to be inspected. The refractive lens group consists of a single lens and a refractive lens. Firstly, spherical aberration generated by a spherical reflecting mirror is corrected by using a catadioptric lens, and then a self-alignment inspection light path is formed by using a single lens, and meanwhile, the spherical aberration correction effect is improved. The optical system can realize high-precision inspection of the ultra-large caliber convex parabolic reflector. The invention can reduce the caliber of the required spherical reflector and the refractive and reflective lens group while ensuring the high precision of system inspection, shorten the length of a detection light path, reduce the difficulty of assembly and adjustment in the processing and detection processes and save the cost.
Description
Technical Field
The invention relates to the technical field of optical detection, in particular to an optical system for inspecting an ultra-large caliber convex parabolic reflector by a refractive and reflective lens group. The inspection system is suitable for inspecting the ultra-large caliber convex parabolic reflector with the caliber of more than 500 mm.
Background
In the modern optical development process, the aspheric surface is widely applied to various optical fields due to good optical properties. Among them, the measurement of large-caliber convex aspheric surfaces has been one of difficulties in optical detection. The convex parabolic reflector in the convex aspheric surface can fully collect any light parallel to the parabolic optical axis on the focus, so that the imaging quality is improved. The convex parabolic reflector is widely applied to large-scale space, foundation, deep space detection telescope, collimator, optical lens and other systems, and is one of important components participating in high-quality imaging. The size of the caliber and the accuracy of the surface shape are key determinants of the imaging quality. In the traditional detection method, the Hindle sphere detection method needs a Hindle standard spherical mirror with the caliber far larger than that of a to-be-detected mirror (generally more than 2.2 times of that of the to-be-detected mirror), so that the detection difficulty and the cost are improved when the ultra-large caliber convex paraboloid aspherical mirror is detected, and the center shielding is easy to generate; the knife-edge shadow detection method can detect the convex paraboloid aspheric mirror, but is difficult to accurately quantify the surface shape error, and can only be used for low-precision aspheric surface processing; the zero compensation method is the most common method for detecting the convex aspheric surface, but when detecting the large-caliber aspheric surface, the compensation lens has high precision requirement and large caliber, the processing difficulty of the lens is improved, the detection light path is long, the installation and adjustment are difficult, and the method is difficult to realize in the actual large-caliber convex aspheric surface detection process; modern holographic detection methods require targeted customization, and have complex manufacturing processes and high cost. Therefore, the conventional aspheric surface detection method cannot meet the detection requirement of the large-caliber convex parabolic aspheric surface mirror.
[ Prior Art literature ] convex aspherical surface was examined by Hindle's double lens with no optical power, [ J ]. Yao Jingang, zheng Liehua, hao Peiming. Quantum electronics report, 2017,34 (3): 272-277.
[ Prior Art document ] phi 4m caliber concave parabolic mirror fold anti-zero compensation test, [ J ]. Hu Wenqi, she Lu ] Quantum electronics report, 2017,34 (4): 394-399.
The improved method provided in document 1 achieves the object of reducing the aperture of a Hindle ball lens by adding a dioptric power correction lens. However, in the process of detecting the large-caliber convex aspheric mirror by using the method, the used detection light path is long, the introduced error is large, and the adjustment is inconvenient. In addition, the Hindle ball lens needs to be semi-silvered, so that the problem of secondary processing is introduced, and when the caliber of the Hindle ball is increased, the difficulty and cost of the early processing technology are improved, and meanwhile, higher requirements are also put forward on the laser.
The improved method provided in the document 2 realizes the detection of the large-caliber aspheric surface by a refraction and reflection zero compensation method, effectively shortens the light path and improves the compensation capability. However, the method is mainly applied to the detection of the aspheric surface of the concave paraboloid, and the detection requirement of the aspheric surface of the convex paraboloid cannot be met.
Disclosure of Invention
In order to solve the technical problems, the invention provides a checking system capable of realizing an ultra-large caliber convex parabolic reflector by combining a single lens and a catadioptric lens. The system effectively shortens the detection light path, improves the compensation capability, reduces the caliber of the auxiliary detection lens, and reduces the cost and the processing difficulty.
In order to solve the technical problems, the invention adopts the following technical scheme:
the inspection system mainly comprises an interferometer 1, a catadioptric lens group 2, an ultra-large caliber convex parabolic reflector to be inspected and a Hundle spherical reflector 3. The refractive lens group 2 consists of a single lens and a refractive lens, and spherical aberration generated by the Hundell spherical reflector is effectively corrected by introducing the refractive lens. Meanwhile, in order to facilitate detection, the optical path is designed into a self-alignment inspection optical path, and a single lens is added on the left side of the catadioptric lens to further improve the correction effect of spherical aberration generated by the Hundle spherical reflector.
The interferometer 1 emits a beam of parallel light to the catadioptric lens group 2 through the central hole of the hendel spherical reflector 3, the beam of parallel light reaches the hendel spherical reflector 3 after being catadioptric through the catadioptric lens group 2, the hendel spherical reflector 3 reflects the light to the convex parabolic reflector to be detected, the light is reflected to the hendel spherical reflector 3 along the normal direction through the convex parabolic reflector to be detected because of a self-alignment system, and the light path returns from the hendel spherical reflector 3 according to the original light path after being reflected.
In the detection system, the ratio of the caliber of the Hundle spherical reflector 3 to the caliber of the convex parabolic reflector to be detected is smaller than 2, and the ratio of the maximum caliber of the catadioptric lens group 2 to the caliber of the convex parabolic reflector to be detected is smaller than 0.16.
In the invention, the spherical center of the Hundler spherical reflector 3 is positioned at the back focus of the convex parabolic reflector by eliminating aberration through the combination of the single lens and the catadioptric lens, so that the self-alignment inspection of the convex parabolic reflector with ultra-large caliber to be inspected is realized. The inspection accuracy of the convex parabolic reflector is improved, the detection light path length is shortened, the compensation capability of the lens is improved, the caliber of the auxiliary detection lens is reduced, and the cost and the processing difficulty are reduced.
Drawings
Fig. 1 is a block diagram of an optical system for inspecting an ultra-large caliber convex parabolic mirror in accordance with the present invention.
FIG. 2 is a graph of the axial spherical aberration of an optical system for inspecting an ultra-large caliber convex parabolic mirror in accordance with the present invention.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples.
Fig. 1 to 2 show an example of an optical system for inspecting an ultra-large aperture convex parabolic mirror by a catadioptric lens group of the present invention, the interference detection method comprising the steps of:
the interferometer 1 emits a beam of parallel light to the catadioptric lens group 2 through the central hole of the hendel spherical reflector 3, the beam is refracted and reflected by the catadioptric lens group 2 to reach the hendel spherical reflector 3, the hendel spherical reflector 3 reflects the light to the convex parabolic reflector to be detected, the interferometer is a self-alignment system, the light is reflected to the hendel spherical reflector 3 along the normal direction after being reflected by the convex parabolic reflector to be detected, the light path returns to the interferometer 1 according to the original light path after being reflected by the hendel spherical reflector 3, and the interference detection result is the actual surface shape of the convex parabolic reflector.
In the example, the caliber of the convex parabolic reflector to be detected is 700mm, the curvature radius is 2500mm, the secondary constant is-1, and the actual optical system for detecting the convex parabolic reflector consists of an interferometer 1, a catadioptric lens group 2, the convex parabolic reflector to be detected and a Hundle spherical reflector 3.
In this example, spherical aberration cannot be generated due to reflection of the convex parabolic reflector, in order to correct spherical aberration generated by the hendel spherical reflector 3, a detection light path is shortened, actual detection is convenient to realize, and the catadioptric lens group 2 is introduced to form a self-alignment detection light path. The material for manufacturing the catadioptric lens group 2 in the system adopts K9 glass, the maximum caliber of the lens in the catadioptric lens group 2 is 112mm, the ratio of the caliber of the convex parabolic reflector to be detected is 0.16, and the ratio of the caliber of the Hundle spherical reflector 3 to the caliber of the convex parabolic reflector to be detected is 1.96.
In this embodiment, parameters of the catadioptric lens group 2 are optimized by the optical design software, so as to balance the aberration of the measured convex parabolic mirror as an optimization target, specific parameters of the optimized catadioptric lens group and the detection optical path are shown in the following table 1, and residual aberration of the optimized inspection optical system is pv=0.005 λ, rms=0.0017λ (λ=632.8 nm).
Although the present invention has been described in terms of preferred embodiments, it is not limited thereto, and the present invention is equally applicable to the detection of all convex parabolic reflectors with ultra-large aperture, and the present embodiment is mainly described with respect to parallel light, and is equally applicable to divergent light sources.
Table 1 major optical parameters of inspection system
| Sequence number | Radius of curvature (mm) | Thickness (mm) | Material | Caliber (mm) | Secondary coefficient |
| 1 | Infinity | Infinity | 0.00 | 0.00 | |
| 2 | Infinity | 1500 | 44.79 | 0.00 | |
| 3 | -226.43 | 25.00 | K9 | 44.79 | 0.00 |
| 4 | -228.15 | 5.00 | 46.49 | 0.00 | |
| 5 | -465.73 | 25.00 | MIRROR | 47.38 | 0.00 |
| 6 | 891.76 | -25.00 | MIRROR | 600.07 | 0.00 |
| 7 | -465.73 | -5.00 | 51.43 | 0.00 | |
| 8 | -228.15 | -25.00 | K9 | 53.84 | 0.00 |
| 9 | -226.43 | -1050.02 | 56.14 | 0.00 | |
| 10 | 2500.00 | 1250.00 | MIRROR | 349.93 | 0.00 |
| 11 | 2500.00 | -1250.00 | MIRROR | 349.93 | -1.00 |
| 12 | 2500.00 | 1250.00 | MIRROR | 686.42 | 0.00 |
| 13 | 2500.00 | -1250.00 | MIRROR | 349.93 | -1.00 |
| 14 | 2500.00 | 1050.02 | MIRROR | 349.93 | 0.00 |
| 15 | -226.43 | 25.00 | K9 | 56.14 | 0.00 |
| 16 | -228.15 | 5.00 | 53.83 | 0.00 | |
| 17 | -465.73 | 25.00 | K9 | 51.43 | 0.00 |
| 18 | 891.76 | -25.00 | MIRROR | 47.38 | 0.00 |
| 19 | -465.73 | -5.00 | 46.46 | 0.00 | |
| 20 | -228.15 | -25.00 | K9 | 46.48 | 0.00 |
| 21 | -226.43 | -1200 | 44.79 | 0.00 | |
| 22 | -100.00 | 44.79 | 0.00 | ||
| 23 | Infinity | 0.00 | 0.00 |
Claims (1)
1. The optical system for inspecting the ultra-large caliber convex parabolic reflector by the catadioptric lens group consists of an interferometer (1), the catadioptric lens group (2), a Hundle spherical reflector (3) and a to-be-inspected convex parabolic reflector, and is characterized in that:
the Hundell spherical reflector (3) is positioned between the interferometer (1) and the catadioptric lens group (2), and the spherical center of the Hundell spherical reflector is positioned on the back focus of the convex parabolic reflector to be detected, so that a self-alignment optical system is formed; the catadioptric lens group (2) is positioned between the convex parabolic reflector to be detected and the spherical reflector (3), so that aberration generated by the spherical reflector is corrected;
the parallel light beams emitted by the interferometer (1) are incident from the central hole of the Hundle spherical reflector (3), are reflected by the catadioptric lens group (2), are incident on the Hundle spherical reflector (3), are reflected by the convex parabolic reflector to be detected, are incident on the Hundle spherical reflector (3) again along the normal direction, and are reflected by the self-alignment, and return to the interferometer according to the original path;
the ratio of the caliber of the Hundle spherical reflector (3) to the caliber of the convex parabolic reflector to be detected is not more than 2;
the ratio of the caliber of the catadioptric lens group (2) to the caliber of the convex parabolic reflector to be detected is not more than 0.16.
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