CN112361983B - Zoom compensator optical system for aspheric surface detection - Google Patents
Zoom compensator optical system for aspheric surface detection Download PDFInfo
- Publication number
- CN112361983B CN112361983B CN202011236949.3A CN202011236949A CN112361983B CN 112361983 B CN112361983 B CN 112361983B CN 202011236949 A CN202011236949 A CN 202011236949A CN 112361983 B CN112361983 B CN 112361983B
- Authority
- CN
- China
- Prior art keywords
- compensation lens
- aspheric surface
- aspheric
- compensator
- zoom
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
Abstract
The invention discloses a zoom compensator optical system for aspheric surface detection, which comprises an interferometer, a zoom compensator and a detected aspheric surface, wherein the zoom compensator is inserted between a point light source of the interferometer and the detected aspheric surface, the zoom compensator comprises a first compensation lens and a second compensation lens, a focusing mechanism is arranged between the two lenses, light rays emitted by the interferometer are transmitted through the first compensation lens and the second compensation lens, then are reflected by the detected aspheric surface in a self-collimating way, and then are transmitted back to the interferometer through the second compensation lens and the first compensation lens to form a detection light path. The invention can compensate the aberration of complex surface shape which changes in a large range, completes the high-precision detection of various aspheric surface shapes without re-processing and manufacturing the compensator, and has the characteristics of simple structure, strong surface shape adaptability and the like; the design freedom degree is increased, and aberration with large range change can be generated according to different incidence angles and positions of light beams; the measurement universality is improved.
Description
Technical Field
The invention belongs to the technical field of optical detection, and particularly relates to a zoom compensator optical system for aspheric surface optical mirror surface shape detection.
Background
Compared with the traditional spherical element, the aspheric optical mirror surface has better design freedom and flexible spatial layout, and can achieve the purposes of correcting system aberration, improving imaging quality and the like by optimizing the parameter index of the designed aspheric surface. The good use characteristics and imaging capability of the aspheric surface are ensured by the accurate geometric profile and the high-precision surface shape. In the current high-technology application, the surface shape precision requirement of the aspheric surface reaches the nanometer level, even the sub-nanometer level. The corresponding processing method comprises advanced optical processing methods such as fairing processing, magnetorheological processing, ion beam processing and the like. In any of the optical processing methods, a higher-precision detection technique is required as a guide, and there are two types of detection techniques commonly used.
The first is a general contour detection method, which is generally applicable to a stage with a relatively large error of a measured surface shape, and common equipment comprises a contour gauge, a three-coordinate measuring machine and the like. The method does not need a special compensation device when measuring the aspheric surface, and has strong applicability. Since the aspheric step-up generally has a large variation range (several millimeters to several tens of millimeters), the profilometry must have a large range, and accordingly it is difficult to obtain a high measurement accuracy. The second is an optical interferometry, which is suitable for the stage with higher accuracy of the measured surface shape, and the common equipment is an interferometer, and the measurement accuracy of the measurement method is higher and can reach sub-nanometer level. When the aspheric surface is measured, emergent light of the interferometer can not directly measure the aspheric surface, but plane wave front or spherical wave front emitted by the interferometer is converted into the aspheric surface wave front which is consistent with the surface shape of a measured piece through the compensator, so that the aim of zero detection can be fulfilled. This method of inspection by means of a compensation mirror is also called compensation inspection.
In a compensation verification system, the most important is the design of the compensator. The parameters of the compensator directly determine the wave front shape when the light wave reaches the surface of the measured piece, so that the most reasonable compensator must be designed according to different measured pieces. The compensator is usually composed of two or three spherical lenses, or a combination of spherical mirrors, or a computer hologram based on the diffraction principle. In any form, the compensator is designed aiming at the measured surface to carry out aberration balance, and can only be suitable for a single surface shape, so that huge waste of time and economic cost is caused, and the material, manufacture, inspection and adjustment of the compensator are important factors for limiting the measurement precision.
In order to solve the problem of universality of the compensator in use, a solution idea of the variable aberration compensator is provided at home and abroad. Chinese patent publication No. CN 106052583a discloses "an aspheric surface shape interference measurement method and apparatus based on a variable compensation lens", in which the variable compensation lens is a single high-order aspheric lens, the compensation capability range is only 0.04 λ -17.8 λ, and the high-precision processing and detection of the high-order aspheric surface are difficult, and the aspheric surface parameter error is large after the processing is completed; the Li-Huilan professor of Beijing university of science and engineering proposes a three-piece type partial compensator, the compensation characteristic of the compensator is changed by changing the relative axial distance of three elements, the compensation capability range of the concave aspheric surface is only 92.8 lambda-121.7 lambda, the residual spherical aberration after compensation is too large, and the final inspection of the surface shape of the high-precision aspheric surface cannot be guided. The compensation method of the compensator has too large residual spherical aberration and can not meet the requirement of high-precision aspheric surface shape detection.
The invention provides a zoom compensator optical system and a device thereof for aspheric surface detection, the device converts plane wave front or spherical wave front emitted by an interferometer into aspheric surface wave front which is consistent with the theoretical shape of an aspheric surface to be detected by adjusting the distance between two lenses of a compensator, thereby realizing high-precision detection of aspheric surface shapes with different parameters, improving the universality of measurement and greatly reducing the compensation detection cost.
Disclosure of Invention
The invention aims to provide a zoom compensator optical system for aspheric surface detection, which converts plane wavefront or spherical wavefront emitted by an interferometer into aspheric surface wavefront consistent with the aspheric surface shape to be detected by adjusting the distance between two lenses of a compensator, realizes high-precision detection of the aspheric surface shape with different parameters, and improves the measurement universality.
The invention is realized by the following technical scheme:
a zoom compensator optical system for aspheric surface detection comprises an interferometer, a zoom compensator and a detected aspheric surface, wherein the zoom compensator is inserted between a point light source of the interferometer and the detected aspheric surface, the zoom compensator comprises a first compensation lens and a second compensation lens, a focusing mechanism is arranged between the first compensation lens and the second compensation lens, light rays emitted by the interferometer are transmitted through the first compensation lens and the second compensation lens, then are reflected by the detected aspheric surface in a self-collimating way, and then are transmitted back to the interferometer through the second compensation lens and the first compensation lens to form a detection light path.
Furthermore, according to different measured aspheric surface parameters, the axial distance L1 between the point light source of the interferometer and the zoom compensator, the axial distance L2 between the zoom compensator and the measured aspheric surface, and the distance d between the first compensation lens and the second compensation lens are adjusted, so that the wave surface compensated by the zoom compensation lens is consistent with the surface shape of the measured aspheric surface.
Furthermore, the first compensation lens and the second compensation lens are spherical lenses.
Furthermore, the surface shape of the aspheric surface to be detected is a quadratic aspheric surface, the surface shape is determined by the following formula,
where c is the vertex curvature, K is the conic constant, and x is the aspheric run-out.
Further, the first compensation lens satisfies
Wherein D1 is the aperture of the first compensating lens, and L1 is the distance between the first compensating lens and the second compensating lens.
Furthermore, the focusing range delta d of the distance d between the first compensation lens and the second compensation lens is less than or equal to +/-60 mm.
Furthermore, the aspherical mirror 3 to be tested satisfies
Wherein D is the aperture of the aspheric mirror, R0 is the curvature radius of the vertex of the aspheric mirror, K is more than or equal to-2.5 and less than or equal to-0.9, and K is the second constant of the aspheric surface to be measured.
The invention has the following technical effects:
1. the invention utilizes two lenses with adjustable space as a zooming compensator, the two lenses are spherical lenses, the wave surface compensated by the zooming compensation lens is consistent with the measured aspheric surface shape by adjusting the axial distance L1 between a point light source of an interferometer and the zooming compensation lens group, the axial distance L2 between the zooming compensation lens group and the measured aspheric surface and the space d between the compensation lens group and the compensating lens group, the aberration of complex surface shapes changing in a large range can be compensated, the high-precision detection of various aspheric surface shapes can be completed without re-processing and manufacturing the compensator, and the invention has the characteristics of simple structure, strong surface shape adaptability and the like.
2. According to the invention, by adjusting the axial distance L1 between the point light source of the interferometer and the zoom compensation lens group, the axial distance L2 between the zoom compensation lens group and the measured aspheric surface, and the lens spacing d of the compensation lens group, the design freedom is increased, and aberration with large variation range can be generated according to different incident angles and positions of light beams.
3. Compared with a measurement method that one aspheric surface corresponds to one compensator, the method is suitable for detecting the surface shapes of a plurality of aspheric surfaces, the zoom compensator method reduces the difficulty of designing and processing the compensator, one compensator can be used for measuring the aspheric surfaces with various parameters, compensation as much as possible is realized by using as few compensators as possible, and the measurement universality is improved.
Drawings
FIG. 1 is a schematic diagram of the detection path of the present invention;
FIG. 2 is a side cross-sectional view of the zoom compensator of the present invention;
FIG. 3 is a right side view of the zoom compensator of FIG. 2;
fig. 4 is a residual wavefront difference map of an embodiment of the present invention.
The labels in the figure are: 1. an interferometer; 2. a zoom compensator; 201. a first compensation lens; 202. a second compensation lens; 203. a lens barrel; 204. a linear bearing; 205. an inner focusing barrel; 206. a motor; 207. a rolling bearing; 208. a turbine; 209. a worm; 3. and (5) measuring the aspheric surface.
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
The present embodiment provides a zoom compensator optical system for aspheric surface detection as shown in fig. 1. The optical system comprises an interferometer 1, a zoom compensator 2 and a measured aspheric surface 3. A zoom compensator 2 is inserted between a point light source of an interferometer 1 and a detected aspheric surface 3, the zoom compensator 2 comprises a first compensation lens 201 and a second compensation lens 202, a focusing mechanism is arranged between the first compensation lens 201 and the second compensation lens 202, light rays emitted by the interferometer 1 are transmitted through the first compensation lens 201 and the second compensation lens 202, then are transmitted to the detected aspheric surface 3 for self-collimation and reflection, and then are transmitted back to the interferometer 1 through the second compensation lens 202 and the first compensation lens 201 to form a detection light path. According to different measured aspheric surface parameters, the axial distance L1 between the point light source of the interferometer 1 and the zoom compensator 2, the axial distance L2 between the zoom compensator 2 and the measured aspheric surface 3, and the distance d between the first compensation lens 201 and the second compensation lens 202 are adjusted, so that the wave surface compensated by the zoom compensation lens is consistent with the measured aspheric surface shape, and the consistency error is in the dynamic measurement range of the interferometer.
The invention utilizes two lenses with adjustable space as a zooming compensator, the two lenses are spherical lenses, the wave surface compensated by the zooming compensation lens is consistent with the measured aspheric surface shape by adjusting the axial distance L1 between a point light source of an interferometer and the zooming compensation lens group, the axial distance L2 between the zooming compensation lens group and the measured aspheric surface and the space d between the compensation lens group and the compensating lens group, the aberration of complex surface shapes changing in a large range can be compensated, the high-precision detection of various aspheric surface shapes can be completed without re-processing and manufacturing the compensator, and the invention has the characteristics of simple structure, strong surface shape adaptability and the like. According to the invention, by adjusting the axial distance L1 between the point light source of the interferometer and the zoom compensation lens group, the axial distance L2 between the zoom compensation lens group and the measured aspheric surface, and the lens spacing d of the compensation lens group, the design freedom is increased, and aberration with large variation range can be generated according to different incident angles and positions of light beams.
The first compensation lens 201 and the second compensation lens 202 are spherical lenses, and in this embodiment, the material of the first compensation lens 201 and the second compensation lens 202 is preferably H-K9L, fused silica, or other glass material. The aspheric mirror to be tested is preferably made of metal or glass material, the surface shape is a secondary aspheric surface, the surface shape is determined by the following formula,
where c is the vertex curvature, K is the conic constant, and x is the aspheric run-out.
In this embodiment, the first compensation lens 201 satisfies
Wherein D1 is the aperture of the first compensation lens, and L1 is the distance between the first compensation lens 201 and the second compensation lens 202; the focusing range delta d of the distance between the first compensation lens (201) and the second compensation lens (202) is less than or equal to +/-60 mm; the aspheric mirror 3 to be tested satisfies
Wherein D is the aperture of the aspheric mirror, R0 is the curvature radius of the vertex of the aspheric mirror, K is more than or equal to-2.5 and less than or equal to-0.9, and K is the second constant of the aspheric surface to be measured.
The zoom compensator 2 adopted in the present embodiment has a structure as shown in fig. 2 to 3, and includes a lens barrel 203, a linear bearing 204, an inner focusing barrel 205, a motor 206, a rolling bearing 207, a worm gear 208, and a worm 209.
In this embodiment, a concave paraboloid with a caliber of 800mm of an aspheric surface to be measured, a vertex curvature radius R0 of-2500 mm and K of-1 is used as a focusing zero position to design a zoom compensator, and optical design software is used for simulation to obtain parameters of the zoom compensator, as shown in table 1.
Table 1: zoom compensator parameters
The residual wavefront difference map is shown in fig. 4.
Table 2: residual error after compensation of multiple aspheric parameters
In this embodiment, adopt ZEMAX software to substitute in the aspheric surface parameter of being surveyed, the aspheric surface of being surveyed can be one in ellipsoid, paraboloid and the hyperboloid, optimizes axial distance L1, L2 and d, ensures that residual wave front difference satisfies the high accuracy measurement requirement, adjusts the compensating mirror interval through focusing mechanism, and after the focusing was finished, the two mirror intervals of three-dimensional actual measurement to locking processing.
It can be understood that the optical system of the present invention can also be used for surface shape detection of various convex aspheric surfaces. It can be understood that the zoom compensator lens of the present invention may be a plano-convex lens, or may be a biconvex lens or a meniscus lens, and considering that the plano-convex lens has high assembling detection precision, in this embodiment, both the two zoom compensator lenses adopt plano-convex lenses, which reduces the assembling detection difficulty.
In conclusion, the measuring device of the invention can finish high-precision detection of various aspheric surface shapes under the condition of not replacing the compensator, and has the characteristics of simple structure, high detection precision, wide applicable range and the like. Compared with a measurement method that one aspheric surface corresponds to one compensator, the method is suitable for detecting the surface shapes of a plurality of aspheric surfaces, the zoom compensator method reduces the difficulty of designing and processing the compensator, one compensator can be used for measuring the aspheric surfaces with various parameters, compensation as much as possible is realized by using as few compensators as possible, and the measurement universality is improved.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. A zoom compensator optical system for aspheric surface detection is characterized by comprising an interferometer (1), a zoom compensator (2) and a detected aspheric surface (3), wherein the zoom compensator (2) is inserted between a point light source of the interferometer (1) and the detected aspheric surface (3), the zoom compensator (2) comprises a first compensation lens (201) and a second compensation lens (202), a focusing mechanism is arranged between the first compensation lens (201) and the second compensation lens (202), and the focusing mechanism is composed of a lens bodyAfter being transmitted by a first compensation lens (201) and a second compensation lens (202), light rays emitted by the interferometer (1) are transmitted to a tested aspheric surface (3) for auto-collimation and reflection, and then are transmitted back to the interferometer (1) by the second compensation lens (202) and the first compensation lens (201) to form a detection light path; the first compensation lens (201) satisfies
Wherein D1 is the aperture of the first compensating mirror lens, and L1 is the axial distance between the point light source of the interferometer (1) and the zoom compensator (2).
2. The optical system of claim 1, wherein the axial distance L1 between the point light source of the interferometer (1) and the zoom compensator (2), the axial distance L2 between the zoom compensator (2) and the aspheric surface (3) to be measured, and the distance d between the first compensation lens (201) and the second compensation lens (202) are adjusted according to different aspheric parameters to be measured, so that the wave surface compensated by the zoom compensation lens is consistent with the aspheric surface shape to be measured.
3. A zoom compensator optical system for aspheric detection as claimed in claim 1, characterized in that the first (201) and second (202) compensation lenses are spherical lenses.
4. Zoom compensator optical system for aspheric detection as claimed in claim 1, characterized in that the measured aspheric surface (3) has a quadratic aspheric surface profile, which is determined by the following formula,
where c is the vertex curvature, K is the conic constant, and x is the aspheric run-out.
5. A zoom compensator optical system for aspheric detection as claimed in claim 1, characterized by a focusing range ad ≦ 60mm between the first (201) and second (202) compensation lenses.
6. Zoom compensator optical system for aspheric detection as claimed in claim 1, characterized by the fact that the aspheric surface under test (3) satisfies
Wherein D is the aperture of the aspheric mirror, R0 is the curvature radius of the vertex of the aspheric mirror, K is more than or equal to-2.5 and less than or equal to-0.9, and K is the second constant of the aspheric surface to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011236949.3A CN112361983B (en) | 2020-11-09 | 2020-11-09 | Zoom compensator optical system for aspheric surface detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011236949.3A CN112361983B (en) | 2020-11-09 | 2020-11-09 | Zoom compensator optical system for aspheric surface detection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112361983A CN112361983A (en) | 2021-02-12 |
| CN112361983B true CN112361983B (en) | 2022-04-08 |
Family
ID=74508867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011236949.3A Active CN112361983B (en) | 2020-11-09 | 2020-11-09 | Zoom compensator optical system for aspheric surface detection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112361983B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113295386B (en) * | 2021-05-21 | 2022-11-01 | 中国科学院长春光学精密机械与物理研究所 | Optical lens piece detection system and detection method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101196611A (en) * | 2006-12-06 | 2008-06-11 | 索尼株式会社 | Zoom lens and image pick-up apparatus |
| CN106052583A (en) * | 2016-05-24 | 2016-10-26 | 中国人民解放军国防科学技术大学 | Aspheric surface shape interference measuring method and device based on variable compensation lens |
| CN208421374U (en) * | 2018-05-17 | 2019-01-22 | 苏州天准科技股份有限公司 | A kind of electronic continuous zoom lens |
| CN110779462A (en) * | 2019-11-11 | 2020-02-11 | 中国科学院上海技术物理研究所 | Improved optical system for ultra-large-caliber concave aspheric mirror for Olympic inspection |
| WO2020093727A1 (en) * | 2018-11-06 | 2020-05-14 | 浙江大学 | Structured light generation device and method based on beam shaping |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5849859B2 (en) * | 2012-06-05 | 2016-02-03 | ソニー株式会社 | Zoom lens and imaging device |
-
2020
- 2020-11-09 CN CN202011236949.3A patent/CN112361983B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101196611A (en) * | 2006-12-06 | 2008-06-11 | 索尼株式会社 | Zoom lens and image pick-up apparatus |
| CN106052583A (en) * | 2016-05-24 | 2016-10-26 | 中国人民解放军国防科学技术大学 | Aspheric surface shape interference measuring method and device based on variable compensation lens |
| CN208421374U (en) * | 2018-05-17 | 2019-01-22 | 苏州天准科技股份有限公司 | A kind of electronic continuous zoom lens |
| WO2020093727A1 (en) * | 2018-11-06 | 2020-05-14 | 浙江大学 | Structured light generation device and method based on beam shaping |
| CN110779462A (en) * | 2019-11-11 | 2020-02-11 | 中国科学院上海技术物理研究所 | Improved optical system for ultra-large-caliber concave aspheric mirror for Olympic inspection |
Non-Patent Citations (1)
| Title |
|---|
| Offner补偿器的结构设计与装调;陈旭等;《光学精密工程》;20100131;第18卷(第1期);第88-93页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112361983A (en) | 2021-02-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5416586A (en) | Method of testing aspherical optical surfaces with an interferometer | |
| CN107782254B (en) | A kind of mixed compensating mode sub-aperture stitching surface testing method | |
| CN101858735B (en) | Large-caliber off-axis non-spherical measuring and calibration system | |
| CN103335610A (en) | System for detecting large-aperture and high-order convex aspheric surface | |
| CN110487205B (en) | Aspheric parameter error interference measurement method combining dispersion confocal positioning | |
| CN109855560B (en) | Convex aspheric reflector surface shape detection device and detection method | |
| CN102590988B (en) | Compensator camera lens for aspheric surface detection | |
| Ceyhan et al. | Measurements of aberrations of aspherical lenses using experimental ray tracing | |
| CN102519397A (en) | Method for measuring curvature radius of optical spherical surface | |
| CN113739719B (en) | Surface shape detection system and method of high-precision Schmidt correction plate | |
| CN112361983B (en) | Zoom compensator optical system for aspheric surface detection | |
| CN116380419A (en) | Device and method for detecting optical axis consistency of two-sided co-body aspheric mirror | |
| CN106767471B (en) | Optical interval measuring system and method in aspheric surface detection light path | |
| CN108267094B (en) | Non-cylindrical surface interference splicing measurement system and method based on rotary CGH | |
| CN115164775A (en) | Large-caliber convex aspheric reflector surface shape detection device and detection method thereof | |
| CN112923871B (en) | Free-form surface reflector curvature radius detection device and method | |
| CN110823127A (en) | Non-cylindrical surface shape interference measurement system and method based on cylindrical surface partial compensator | |
| CN110966958B (en) | Aspheric error interferometry method and system combining liquid lens confocal positioning | |
| CN114185144A (en) | Method for adjusting large-caliber optical system based on small-caliber plane mirror | |
| US8294904B2 (en) | Fizeau lens having aspheric compensation | |
| Erdei et al. | Tolerancing surface accuracy of aspheric lenses used for imaging purposes | |
| CN113008159B (en) | Variable one-dimensional spherical aberration interferometry system of non-cylindrical surface shape and application method | |
| Yang et al. | Research of precision interference locating method for a partial null compensator at aspheric testing | |
| CN114137736B (en) | Large-aperture optical element adjusting device and adjusting method thereof | |
| CN117054053B (en) | Device and method for calibrating focal plane of reflecting telescope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |