CN107131846A - A kind of optical system for the convex oblate spheroid detection of super large caliber - Google Patents
A kind of optical system for the convex oblate spheroid detection of super large caliber Download PDFInfo
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- CN107131846A CN107131846A CN201710388101.4A CN201710388101A CN107131846A CN 107131846 A CN107131846 A CN 107131846A CN 201710388101 A CN201710388101 A CN 201710388101A CN 107131846 A CN107131846 A CN 107131846A
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- Prior art keywords
- oblate spheroid
- convex
- sphere
- checked
- meniscus lens
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02058—Passive reduction of errors by particular optical compensation or alignment elements, e.g. dispersion compensation
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- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Lenses (AREA)
Abstract
The invention discloses a kind of optical system for the convex oblate spheroid detection of super large caliber.The detection optical system includes flat interferometer, refraction-reflection sphere meniscus lens, and the wherein refracted portion of refraction-reflection sphere meniscus lens is used to compensate the emergent ray formation autocollimatic light path that the third-order aberration of convex oblate spheroid mirror to be checked, reflecting part reflect convex oblate spheroid mirror to be checked.Detection optical system of the present invention is for the convex oblate spheroid microscopy survey of super large caliber, the process and assemble difficulty for reducing compensator while accuracy of detection is ensured, the cost for reducing the source of error component and reducing compensation system.Bore is big, detect the simple feature of light path with measuring by the present invention.
Description
Technical field
The present invention relates to a kind of Aspherical-surface testing optical system, and in particular to one kind is used for the convex oblate spheroid detection of super large caliber
Optical system.
Background technology
Super large caliber convex aspheric surface (clear aperture is more than or equal to 300mm) is progressively applied to the spy of large space and deep space
Survey in telescopic system, as the primary optics for participating in high quality optical imaging, its caliber size and surface precision are into
As the key of quality.As the bigbore optical system demand in big visual field gradually increases, large-caliber convex oblate spheroid is in secondary mirror
Using as trend.
Current convex aspheric surface interference detection method mainly includes aberrationless point and examines and compensate inspection.Aberration-free point is profit
Its face shape is detected with the aberrationless point property of secondary axisymmetric aspheric surface, its aberrationless point property refers to several with secondary aspherical
The picture of what focus conjugation does not have aberration.When examining convex hyperboloid mirror such as Hindle methods, interferometer spot light is located to be checked
In a convex bi-curved focus, the centre of sphere of auxiliary Hindle spheres is then overlapped with another focus, the survey that face to be checked is reflected
Light beam is tried along backtracking to interferometer.But aberration-free point is only used for detecting K<0 convex hyperboloid and convex paraboloid, to convex
Oblate spheroid can not be applicable.Compensation detection is the common method detected for convex non-spherical mirror, is substantially as auxiliary by compensator
Help optical element, the aberration produced using compensator compensates the aberration of convex aspheric surface to be measured, be applicable to secondary aspherical and
High order aspheric surface.The test beams matched with convex aspheric surface to be checked are transformed to after the compensated lens group of light beam that interferometer is sent,
Impinge perpendicularly on convex aspheric surface to be checked, and along backtracking to interferometer after reflecting.It is saturating for the conventional compensation of convex oblate spheroid
Microscope group, it usually needs two to three pieces of lens, sometimes or even also containing aspherical, this just bring offset lens group in itself plus
Work, a series of problems, such as detect and debug, so as to limit the raising of measurement accuracy.Offset lens group also can be by based on diffraction principle
Computed hologram (Computer Generated Hologram, CGH) replace, but this method light path is relative complex and holography
The making of figure needs expensive professional equipment, and the making particularly with heavy caliber, high-precision CGH is also immature at present, limit
Its extensive use is made.
【Look-ahead technique document Prior Art】Research [J] of improved Hindle methods detection convex aspheric surface is infrared and laser engineering,
2011,40(2)：277-281
For the optical system shown in document 1, although proposed in compensation system anti-using half in offset lens
Semi-transparent form is improved to Hindle methods, but because the compensation system is to be conjugated based on Hindle principles using on axle
Point anaberration, therefore the system is that spot light is incident and meniscus lens two sides is approximately concentric.And oblate spheroid disappears on axle without conjugation
Aberration point, therefore this method is only applicable to K<0 convex hyperboloid and paraboloidal mirror, and the convex oblate spheroid of super large caliber can not be applied to
Surface testing.
The content of the invention
It is a kind of for super large caliber its object is to provide in order to eliminate above-mentioned problem of the prior art point in the present invention
The optical system of convex oblate spheroid detection.The optical system includes flat interferometer and refraction-reflection sphere meniscus lens, wherein rolling over
The refracted portion of reflective sphere meniscus lens reflects to be checked for compensating the third-order aberration of convex oblate spheroid mirror to be checked, reflecting part
The first reflection light formation autocollimatic light path of convex oblate spheroid mirror.
A kind of optical system for the convex oblate spheroid detection of super large caliber is by flat interferometer 3 and refraction-reflection sphere bent moon
Lens 1 are constituted, wherein：
The described glass material of refraction-reflection sphere meniscus lens 1 be K9, focal power be on the occasion of and its concave surface S1-2One layer of plating
Semi-transparent semi-reflecting film；
Described refraction-reflection sphere meniscus lens 1 is positioned between flat interferometer 3 and oblate spheroid mirror 2 to be checked, catadioptric
Penetrate the convex surface S of formula sphere meniscus lens 11-1Just to flat interferometer 3, concave surface just to oblate spheroid mirror 2 to be checked；Refraction-reflection sphere
The concave surface S of meniscus lens 11-2The centre of sphere weight of divergent spherical wave that is formed after the convex first reflection of oblate spheroid mirror 2 of the centre of sphere and light
Close；
A branch of collimated light beam that flat interferometer 3 is sent is directly incident on to be checked convex after the refraction of sphere meniscus lens 1
On oblate spheroid mirror 2, the concave surface S of sphere meniscus lens 1 is reflexed to by convex oblate spheroid mirror 2 to be checked1-2Afterwards again former road be reflected back it is to be checked
Convex oblate spheroid mirror 2, enters plane interference after being reflected by light beam after the convex secondary reflection of oblate spheroid mirror 2 to be checked through sphere meniscus lens 1
Instrument 3.
The advantage of the invention is that：Described detection optical system is detected for the oblate spheroid of super large caliber, is ensureing inspection
The process and assemble difficulty of compensation optical system is reduced, the source of error component is reduced and reduces compensation while surveying precision
The cost of system.Bore is big, detect the simple feature of light path with measuring by the present invention.
Brief description of the drawings
Fig. 1 is the optical system structure figure of the present invention for the convex oblate spheroid detection of super large caliber.
Fig. 2 is the design residual aberration figure of detection optical system of the present invention.
Fig. 3 is the spherical aberration curve map of detection optical system of the present invention.
In figure：1 is refraction-reflection sphere meniscus lens；2 be convex oblate spheroid mirror to be checked；3 be flat interferometer；S1-2For folding
The convex surface of reflective meniscus lens；S1-2For the concave surface of refraction-reflection meniscus lens；S2-1For the reflecting surface of convex oblate spheroid mirror to be checked.
Embodiment
Hereinafter, the present invention is described in further detail in conjunction with the drawings and the specific embodiments.
Known convex oblate spheroid aperture of mirror to be checked is D0=360mm, vertex curvature radius R0=1568.19mm, quadratic surface system
Number K=1.44, aspherical degree is 10um.For the surface face type error-detecting of the convex oblate spheroid, optics as shown in Figure 1 is designed
System, the system includes flat interferometer 3 and refraction-reflection sphere meniscus lens 1.
The ray tracing process of detection optical system is in present embodiment, a branch of directional light sent by flat interferometer
Beam is directly incident on convex oblate spheroid mirror 2 to be checked after the refraction of refraction-reflection sphere meniscus lens 1, and by convex oblate spheroid to be checked
Face mirror 2 reflexes to the concave surface S of refraction-reflection sphere meniscus lens 11-2Former road is reflected back convex oblate spheroid mirror 2 to be checked again afterwards, works as light
After line is reflected by convex oblate spheroid mirror 2 to be checked for the second time, along backtracking into flat interferometer.Wherein refraction-reflection sphere bent moon
The refracted portion of lens 1 is used for the third-order aberration for compensating convex oblate spheroid mirror 2 to be checked, and convex oblate spheroid mirror 2 to be checked is reflected in reflecting part
Emergent ray formation autocollimatic light path.
The design parameter of refraction-reflection sphere meniscus lens 1 is optimized by optical design software in present embodiment,
Aberration to balance convex oblate spheroid mirror to be checked is optimization aim, and it is 380mm, refraction-reflection sphere to draw compensation system entrance pupil size
The glass material of meniscus lens 1 is K9, and largest beam bore is 403mm, the major optical parameter such as institute of table 1 of detection optical system
Show.
In present embodiment the design residual error (remaining wave aberration) of optical system be 0.0617 λ PV, 0.0193 λ RMS (λ=
632.8nm)。
The detecting system major optical parameter of table 1
| Surface | Radius of curvature (mm) | Thickness (mm) | Material | Half bore (mm) | Quadratic coefficients K |
| S1-1 | 694.379 | 31.833 | K9 | 190.163 | 0 |
| S1-2 | 1201.646 | 133.349 | 188.233 | 0 | |
| S2-1 | 1568.196 | -133.349 | MIRROR | 180.001 | 1.44 |
| S1-2 | 1201.646 | 133.349 | MIRROR | 201.564 | 0 |
| S2-1 | 1568.196 | -133.349 | MIRROR | 180.001 | 1.44 |
| S1-2 | 1201.646 | -31.833 | K9 | 188.228 | |
| S1-1 | 694.379 | 190.157 |
Claims (1)
1. a kind of optical system for the convex oblate spheroid detection of super large caliber, curved by flat interferometer (3) and refraction-reflection sphere
Moon lens (1) composition, it is characterised in that：
Described refraction-reflection sphere meniscus lens (1) glass material be K9, focal power be on the occasion of and its concave surface (S1-2) one layer of plating
Semi-transparent semi-reflecting film；
Described refraction-reflection sphere meniscus lens (1) is positioned between flat interferometer (3) and oblate spheroid mirror to be checked (2), folding
Convex surface (the S of reflective sphere meniscus lens (1)1-1) just to flat interferometer (3), concave surface just to oblate spheroid mirror (2) to be checked；Folding
Reflective sphere meniscus lens (1) concave surface (S1-2) the hair that is formed after convex oblate spheroid mirror (2) first reflection of the centre of sphere and light
The centre of sphere for dissipating spherical wave is overlapped；
A branch of collimated light beam that flat interferometer (3) is sent is directly incident on to be checked convex after sphere meniscus lens (1) refraction
On oblate spheroid mirror (2), the concave surface (S of sphere meniscus lens (1) is reflexed to by convex oblate spheroid mirror (2) to be checked1-2) after again former road it is anti-
Convex oblate spheroid mirror (2) to be checked is emitted back towards, is reflected by light beam after convex oblate spheroid mirror (2) secondary reflection to be checked through sphere meniscus lens (1)
Enter flat interferometer (3) afterwards.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710388101.4A CN107131846A (en) | 2017-05-27 | 2017-05-27 | A kind of optical system for the convex oblate spheroid detection of super large caliber |
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| CN201710388101.4A CN107131846A (en) | 2017-05-27 | 2017-05-27 | A kind of optical system for the convex oblate spheroid detection of super large caliber |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108181092A (en) * | 2018-01-31 | 2018-06-19 | 中国科学院西安光学精密机械研究所 | Heavy caliber reflective optics intermediate image plane detection device and method |
| CN109253864A (en) * | 2018-10-10 | 2019-01-22 | 中国科学院上海技术物理研究所 | It is a kind of for examining the optical system of super large caliber convex hyperboloid mirror |
| CN110579877A (en) * | 2019-09-23 | 2019-12-17 | 中国科学院上海技术物理研究所 | optical system and theory of conjugate correction inspection aspherical mirror |
| CN112284319A (en) * | 2020-10-29 | 2021-01-29 | 中国航空工业集团公司洛阳电光设备研究所 | Tool and method for measuring central thickness of meniscus lens with non-coincident vertex and gravity center |
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| CN206803957U (en) * | 2017-05-27 | 2017-12-26 | 中国科学院上海技术物理研究所 | Optical system for the convex oblate spheroid detection of super large caliber |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108181092A (en) * | 2018-01-31 | 2018-06-19 | 中国科学院西安光学精密机械研究所 | Heavy caliber reflective optics intermediate image plane detection device and method |
| CN108181092B (en) * | 2018-01-31 | 2023-05-02 | 中国科学院西安光学精密机械研究所 | Intermediate image plane detection device and method for large-caliber reflection optical system |
| CN109253864A (en) * | 2018-10-10 | 2019-01-22 | 中国科学院上海技术物理研究所 | It is a kind of for examining the optical system of super large caliber convex hyperboloid mirror |
| CN109253864B (en) * | 2018-10-10 | 2024-03-22 | 中国科学院上海技术物理研究所 | Optical system for detecting ultra-large caliber convex hyperboloid reflector |
| CN110579877A (en) * | 2019-09-23 | 2019-12-17 | 中国科学院上海技术物理研究所 | optical system and theory of conjugate correction inspection aspherical mirror |
| CN110579877B (en) * | 2019-09-23 | 2024-03-26 | 中国科学院上海技术物理研究所 | Optical system and theory for conjugate correction inspection of aspherical mirror |
| CN112284319A (en) * | 2020-10-29 | 2021-01-29 | 中国航空工业集团公司洛阳电光设备研究所 | Tool and method for measuring central thickness of meniscus lens with non-coincident vertex and gravity center |
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Application publication date: 20170905 |