CN104388091A - 缓冲氧化腐蚀液制备方法 - Google Patents
缓冲氧化腐蚀液制备方法 Download PDFInfo
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CN201410574838.1A CN104388091B (zh) | 2014-10-25 | 2014-10-25 | 缓冲氧化腐蚀液制备方法 |
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CN104388091A true CN104388091A (zh) | 2015-03-04 |
CN104388091B CN104388091B (zh) | 2016-06-01 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108585023A (zh) * | 2018-05-03 | 2018-09-28 | 东莞运城制版有限公司 | 一种氯化铜腐蚀液生产中的无人化控制方法 |
CN111235578A (zh) * | 2020-02-24 | 2020-06-05 | 江苏传艺科技股份有限公司 | GaN毫米波功率放大器芯片生产用腐蚀液及其制备方法 |
CN116144365A (zh) * | 2023-01-30 | 2023-05-23 | 江苏美阳电子材料有限公司 | 一种缓冲氧化腐蚀液及其制备方法和应用 |
Citations (5)
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US20040089840A1 (en) * | 2002-11-08 | 2004-05-13 | 3M Innovative Properties Company | Fluorinated surfactants for buffered acid etch solutions |
US6797194B1 (en) * | 1998-02-27 | 2004-09-28 | Stella Chemifa Kabushiki Kaisha | Surface treating for micromachining and method for surface treatment |
CN101130871A (zh) * | 2007-08-06 | 2008-02-27 | 江阴市润玛电子材料有限公司 | 半导体用氟表面蚀刻液及其制备方法 |
KR100934498B1 (ko) * | 2008-12-26 | 2009-12-30 | (주)비피케미칼 | 균일 패턴의 에칭 특성을 갖는 액상 미끄럼방지제 |
CN103666478A (zh) * | 2013-12-13 | 2014-03-26 | 江阴润玛电子材料股份有限公司 | 一种非离子型低表面张力的酸性氟化铵蚀刻液 |
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- 2014-10-25 CN CN201410574838.1A patent/CN104388091B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6797194B1 (en) * | 1998-02-27 | 2004-09-28 | Stella Chemifa Kabushiki Kaisha | Surface treating for micromachining and method for surface treatment |
US20040089840A1 (en) * | 2002-11-08 | 2004-05-13 | 3M Innovative Properties Company | Fluorinated surfactants for buffered acid etch solutions |
CN101130871A (zh) * | 2007-08-06 | 2008-02-27 | 江阴市润玛电子材料有限公司 | 半导体用氟表面蚀刻液及其制备方法 |
KR100934498B1 (ko) * | 2008-12-26 | 2009-12-30 | (주)비피케미칼 | 균일 패턴의 에칭 특성을 갖는 액상 미끄럼방지제 |
CN103666478A (zh) * | 2013-12-13 | 2014-03-26 | 江阴润玛电子材料股份有限公司 | 一种非离子型低表面张力的酸性氟化铵蚀刻液 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108585023A (zh) * | 2018-05-03 | 2018-09-28 | 东莞运城制版有限公司 | 一种氯化铜腐蚀液生产中的无人化控制方法 |
CN111235578A (zh) * | 2020-02-24 | 2020-06-05 | 江苏传艺科技股份有限公司 | GaN毫米波功率放大器芯片生产用腐蚀液及其制备方法 |
CN111235578B (zh) * | 2020-02-24 | 2021-12-10 | 江苏传艺科技股份有限公司 | GaN毫米波功率放大器芯片生产用腐蚀液及其制备方法 |
CN116144365A (zh) * | 2023-01-30 | 2023-05-23 | 江苏美阳电子材料有限公司 | 一种缓冲氧化腐蚀液及其制备方法和应用 |
CN116144365B (zh) * | 2023-01-30 | 2023-10-03 | 江苏美阳电子材料有限公司 | 一种缓冲氧化腐蚀液及其制备方法和应用 |
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