CN104372289A - 一种用于oled金属掩模板绷网用的位置调整机构 - Google Patents
一种用于oled金属掩模板绷网用的位置调整机构 Download PDFInfo
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- CN104372289A CN104372289A CN201310354451.0A CN201310354451A CN104372289A CN 104372289 A CN104372289 A CN 104372289A CN 201310354451 A CN201310354451 A CN 201310354451A CN 104372289 A CN104372289 A CN 104372289A
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- 230000007246 mechanism Effects 0.000 title claims abstract description 58
- 239000002184 metal Substances 0.000 title claims abstract description 22
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 45
- 239000010959 steel Substances 0.000 claims abstract description 45
- 238000012546 transfer Methods 0.000 claims description 43
- 230000008878 coupling Effects 0.000 claims description 8
- 238000010168 coupling process Methods 0.000 claims description 8
- 238000005859 coupling reaction Methods 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010023 transfer printing Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
Abstract
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Claims (8)
Priority Applications (1)
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CN201310354451.0A CN104372289B (zh) | 2013-08-15 | 2013-08-15 | 一种用于oled金属掩模板绷网用的位置调整机构 |
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CN201310354451.0A CN104372289B (zh) | 2013-08-15 | 2013-08-15 | 一种用于oled金属掩模板绷网用的位置调整机构 |
Publications (2)
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CN104372289A true CN104372289A (zh) | 2015-02-25 |
CN104372289B CN104372289B (zh) | 2018-08-07 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105549638A (zh) * | 2015-12-23 | 2016-05-04 | 中国科学院长春光学精密机械与物理研究所 | 基于步进电机实现的高精度快速位移平台 |
CN107012627A (zh) * | 2017-04-05 | 2017-08-04 | 浙江宏泰新材料有限公司 | 一种布匹预应力拉伸装置 |
CN108796436A (zh) * | 2018-06-26 | 2018-11-13 | 京东方科技集团股份有限公司 | 夹具组件、张网机及其使用方法 |
CN110901214A (zh) * | 2019-12-04 | 2020-03-24 | 深圳市腾深显示技术有限公司 | 张拉对位方法及装置 |
CN112427875A (zh) * | 2021-01-28 | 2021-03-02 | 上海精骊电子技术有限公司 | 一种张网机夹持装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000037847A (ja) * | 1998-07-21 | 2000-02-08 | Yamaha Motor Co Ltd | スクリーン印刷装置 |
JP2005158319A (ja) * | 2003-11-21 | 2005-06-16 | Toppan Printing Co Ltd | 蒸着マスクの製造方法 |
JP2006249544A (ja) * | 2005-03-14 | 2006-09-21 | Dainippon Printing Co Ltd | 基準位置指示装置及びメタルマスク位置アラインメント装置 |
JP2007206575A (ja) * | 2006-02-03 | 2007-08-16 | Orc Mfg Co Ltd | マスク保持機構 |
CN102029771A (zh) * | 2010-10-28 | 2011-04-27 | 苏州凯蒂亚半导体制造设备有限公司 | 一种对位平台 |
CN203451604U (zh) * | 2013-08-15 | 2014-02-26 | 昆山思拓机器有限公司 | 一种用于oled 金属掩模板绷网用的位置调整机构 |
-
2013
- 2013-08-15 CN CN201310354451.0A patent/CN104372289B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000037847A (ja) * | 1998-07-21 | 2000-02-08 | Yamaha Motor Co Ltd | スクリーン印刷装置 |
JP2005158319A (ja) * | 2003-11-21 | 2005-06-16 | Toppan Printing Co Ltd | 蒸着マスクの製造方法 |
JP2006249544A (ja) * | 2005-03-14 | 2006-09-21 | Dainippon Printing Co Ltd | 基準位置指示装置及びメタルマスク位置アラインメント装置 |
JP2007206575A (ja) * | 2006-02-03 | 2007-08-16 | Orc Mfg Co Ltd | マスク保持機構 |
CN102029771A (zh) * | 2010-10-28 | 2011-04-27 | 苏州凯蒂亚半导体制造设备有限公司 | 一种对位平台 |
CN203451604U (zh) * | 2013-08-15 | 2014-02-26 | 昆山思拓机器有限公司 | 一种用于oled 金属掩模板绷网用的位置调整机构 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105549638A (zh) * | 2015-12-23 | 2016-05-04 | 中国科学院长春光学精密机械与物理研究所 | 基于步进电机实现的高精度快速位移平台 |
CN107012627A (zh) * | 2017-04-05 | 2017-08-04 | 浙江宏泰新材料有限公司 | 一种布匹预应力拉伸装置 |
CN108796436A (zh) * | 2018-06-26 | 2018-11-13 | 京东方科技集团股份有限公司 | 夹具组件、张网机及其使用方法 |
CN108796436B (zh) * | 2018-06-26 | 2020-03-24 | 京东方科技集团股份有限公司 | 夹具组件、张网机及其使用方法 |
CN110901214A (zh) * | 2019-12-04 | 2020-03-24 | 深圳市腾深显示技术有限公司 | 张拉对位方法及装置 |
CN112427875A (zh) * | 2021-01-28 | 2021-03-02 | 上海精骊电子技术有限公司 | 一种张网机夹持装置 |
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CN104372289B (zh) | 2018-08-07 |
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Effective date of registration: 20240305 Address after: Room 101, Building 7, No. 1111 Yuyang Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province, 215000 Patentee after: KUNSHAN THETA MICRO Co.,Ltd. Country or region after: China Address before: 215347, First Floor, Innovation Building, Tsinghua Science and Technology Park, No. 1666 Weicheng South Road, Kunshan City, Suzhou City, Jiangsu Province Patentee before: KUNSHAN THETA MICRO Co.,Ltd. Country or region before: China |
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