CN104362103B - 封装装置和封装方法 - Google Patents
封装装置和封装方法 Download PDFInfo
- Publication number
- CN104362103B CN104362103B CN201410641094.0A CN201410641094A CN104362103B CN 104362103 B CN104362103 B CN 104362103B CN 201410641094 A CN201410641094 A CN 201410641094A CN 104362103 B CN104362103 B CN 104362103B
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- substrate
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- sealing
- electromagnet
- packaging system
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- 238000004806 packaging method and process Methods 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000012856 packing Methods 0.000 title claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 154
- 238000001179 sorption measurement Methods 0.000 claims abstract description 121
- 239000000463 material Substances 0.000 claims abstract description 76
- 230000005291 magnetic effect Effects 0.000 claims abstract description 23
- 239000000155 melt Substances 0.000 claims description 8
- 230000005611 electricity Effects 0.000 claims description 6
- 238000007711 solidification Methods 0.000 claims description 6
- 230000008023 solidification Effects 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 5
- 230000004927 fusion Effects 0.000 claims description 3
- 230000009467 reduction Effects 0.000 claims description 3
- 238000010276 construction Methods 0.000 claims 1
- 238000009738 saturating Methods 0.000 claims 1
- 238000005538 encapsulation Methods 0.000 abstract description 14
- 238000007499 fusion processing Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000004020 luminiscence type Methods 0.000 description 8
- 239000010410 layer Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229920001621 AMOLED Polymers 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- HJCMDXDYPOUFDY-WHFBIAKZSA-N Ala-Gln Chemical compound C[C@H](N)C(=O)N[C@H](C(O)=O)CCC(N)=O HJCMDXDYPOUFDY-WHFBIAKZSA-N 0.000 description 1
- 208000033999 Device damage Diseases 0.000 description 1
- 108010044940 alanylglutamine Proteins 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
- H10K59/871—Self-supporting sealing arrangements
- H10K59/8722—Peripheral sealing arrangements, e.g. adhesives, sealants
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/483—Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/842—Containers
- H10K50/8426—Peripheral sealing arrangements, e.g. adhesives, sealants
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
- H10K71/421—Thermal treatment, e.g. annealing in the presence of a solvent vapour using coherent electromagnetic radiation, e.g. laser annealing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Electroluminescent Light Sources (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410641094.0A CN104362103B (zh) | 2014-11-13 | 2014-11-13 | 封装装置和封装方法 |
US14/892,414 US9673356B2 (en) | 2014-11-13 | 2015-04-16 | Packaging device and packaging method |
PCT/CN2015/076708 WO2016074437A1 (zh) | 2014-11-13 | 2015-04-16 | 封装装置和封装方法 |
EP15839058.3A EP3220412B1 (de) | 2014-11-13 | 2015-04-16 | Verkapselungsvorrichtung und -verfahren |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410641094.0A CN104362103B (zh) | 2014-11-13 | 2014-11-13 | 封装装置和封装方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104362103A CN104362103A (zh) | 2015-02-18 |
CN104362103B true CN104362103B (zh) | 2017-03-15 |
Family
ID=52529354
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410641094.0A Active CN104362103B (zh) | 2014-11-13 | 2014-11-13 | 封装装置和封装方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9673356B2 (de) |
EP (1) | EP3220412B1 (de) |
CN (1) | CN104362103B (de) |
WO (1) | WO2016074437A1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104362103B (zh) | 2014-11-13 | 2017-03-15 | 京东方科技集团股份有限公司 | 封装装置和封装方法 |
CN104362259B (zh) | 2014-11-17 | 2017-02-22 | 京东方科技集团股份有限公司 | 发光二极管显示面板及其封装方法 |
CN105154830B (zh) | 2015-09-06 | 2017-04-19 | 京东方科技集团股份有限公司 | 一种固定方法和蒸镀方法 |
CN108123066B (zh) * | 2016-11-29 | 2019-11-26 | 上海微电子装备(集团)股份有限公司 | 封装预压紧结构和方法以及基于磁性材料的激光封装装置 |
US10340481B2 (en) * | 2017-08-17 | 2019-07-02 | Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Manufacturing method of OLED display panel |
CN107342371B (zh) * | 2017-08-25 | 2019-03-22 | 上海天马有机发光显示技术有限公司 | 有机发光显示面板及其制作方法、有机发光显示装置 |
CN108389981A (zh) * | 2018-04-11 | 2018-08-10 | 武汉华星光电半导体显示技术有限公司 | Oled显示面板及其制作方法 |
CN108538763B (zh) * | 2018-04-24 | 2020-05-15 | 京东方科技集团股份有限公司 | 一种加热组件、封装装置和封装方法 |
CN209390507U (zh) * | 2018-11-05 | 2019-09-13 | 京东方科技集团股份有限公司 | 外壳及电子设备 |
CN109712920B (zh) * | 2019-02-21 | 2024-03-19 | 安徽晶格尔电子有限公司 | 一种二极管装模装置 |
CN112133734B (zh) * | 2020-09-29 | 2022-08-30 | 湖北长江新型显示产业创新中心有限公司 | 显示面板及显示装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2384314Y (zh) * | 1999-07-15 | 2000-06-21 | 张志林 | 有多层密封的有机薄膜电致发光元件 |
CN103681763A (zh) * | 2012-09-24 | 2014-03-26 | 乐金显示有限公司 | 有机发光显示装置 |
CN204167262U (zh) * | 2014-11-13 | 2015-02-18 | 京东方科技集团股份有限公司 | 封装装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007013001A2 (en) * | 2005-07-27 | 2007-02-01 | Philips Intellectual Property & Standards Gmbh | Light-emitting device with a sealing integrated driver circuit |
US7632715B2 (en) * | 2007-01-05 | 2009-12-15 | Freescale Semiconductor, Inc. | Method of packaging semiconductor devices |
US20090203283A1 (en) * | 2008-02-07 | 2009-08-13 | Margaret Helen Gentile | Method for sealing an electronic device |
KR101097317B1 (ko) * | 2009-11-18 | 2011-12-21 | 삼성모바일디스플레이주식회사 | 유기 발광 디스플레이 장치 |
KR101030000B1 (ko) | 2009-12-10 | 2011-04-20 | 삼성모바일디스플레이주식회사 | 프릿 실링 시스템 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 |
CN101807667B (zh) * | 2010-03-18 | 2011-11-16 | 电子科技大学 | 一种有机光电子器件的封装装置及其封装方法 |
CN102244020A (zh) * | 2011-06-20 | 2011-11-16 | 江苏长电科技股份有限公司 | 复合材料引线框封装方法及其封装模具结构 |
CN103187541B (zh) | 2011-12-28 | 2017-05-17 | 上海大学 | Oled器件封装夹持装置 |
CN103258971B (zh) * | 2013-04-27 | 2016-02-03 | 上海和辉光电有限公司 | 显示元件的封装方法及其装置 |
CN104362103B (zh) * | 2014-11-13 | 2017-03-15 | 京东方科技集团股份有限公司 | 封装装置和封装方法 |
-
2014
- 2014-11-13 CN CN201410641094.0A patent/CN104362103B/zh active Active
-
2015
- 2015-04-16 US US14/892,414 patent/US9673356B2/en active Active
- 2015-04-16 WO PCT/CN2015/076708 patent/WO2016074437A1/zh active Application Filing
- 2015-04-16 EP EP15839058.3A patent/EP3220412B1/de active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2384314Y (zh) * | 1999-07-15 | 2000-06-21 | 张志林 | 有多层密封的有机薄膜电致发光元件 |
CN103681763A (zh) * | 2012-09-24 | 2014-03-26 | 乐金显示有限公司 | 有机发光显示装置 |
CN204167262U (zh) * | 2014-11-13 | 2015-02-18 | 京东方科技集团股份有限公司 | 封装装置 |
Also Published As
Publication number | Publication date |
---|---|
CN104362103A (zh) | 2015-02-18 |
US20160284942A1 (en) | 2016-09-29 |
EP3220412A1 (de) | 2017-09-20 |
EP3220412A4 (de) | 2018-08-15 |
EP3220412B1 (de) | 2021-08-04 |
US9673356B2 (en) | 2017-06-06 |
WO2016074437A1 (zh) | 2016-05-19 |
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