CN104360274A - Fuel cell internal temperature-heat flux-current density synchronous measurement sensor - Google Patents
Fuel cell internal temperature-heat flux-current density synchronous measurement sensor Download PDFInfo
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- CN104360274A CN104360274A CN201410636315.5A CN201410636315A CN104360274A CN 104360274 A CN104360274 A CN 104360274A CN 201410636315 A CN201410636315 A CN 201410636315A CN 104360274 A CN104360274 A CN 104360274A
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Abstract
The invention discloses a fuel cell internal temperature-heat flux-current density synchronous measurement sensor and belongs to the field of fuel cell internal parameter measurement. Each temperature-heat flux-current density synchronous measurement sensor body is disposed on a ridge of a fuel cell flow field plate, comprises ten layers of films and is mainly made by a vacuum evaporation coating method, the first layer is a silicon dioxide insulation layer, the second layer is a top electrode aluminium coating, the third layer is coated with a high molecular polymer humidity-sensing medium, the fourth layer is a bottom electrode aluminium coating, the fifth and sixth layers are a film heat flux meter copper coating and a film heat flux meter nickel coating respectively, the seventh layer is a silicon dioxide protection layer, the eighth layer is a thick silicon dioxide heat resistance layer, and the ninth and tenth layers are a current density measurement copper coating and a current density measurement gold coating respectively. Synchronous measurement of internal temperature, heat flux and current density of a fuel cell can be realized, special modification on the structure of the fuel cell flow field plate and the like is not required, and the sensor can be arranged on the fuel cell flow field plate with flow channels of various shapes.
Description
Technical field
The invention belongs to fuel battery inside parameter measurement field, relate to the measurement of fuel battery inside humidity, heat flow density and current density, particularly fuel battery inside humidity-heat flow density-current density translocation sensor.
Background technology
The performance of fuel cell is that researchist paid close attention to, and the electrochemical reaction on itself and fuel cell membrane electrode has and the most directly contacts.Electrochemical reaction speed on fuel cell membrane electrode is by the impact of many factors, as temperature, the concentration, flow, humidity etc. of reacting gas, therefore by can contribute to operating condition and the structural parameters of optimizing fuel cell to the monitoring of fuel battery inside parameter, fuel cell is made to keep high-performance to run.
For moisture measurement, by perforate on fuel cell flow field board, implant the humidity of humidity sensor to fuel battery inside to measure, but the method needs to carry out special process and remould to the flow-field plate of fuel cell, difficulty of processing is large, and has certain destructiveness to the sealing of fuel cell; In addition, also have and adopt photoetching and lithographic technique to make humidity sensor and implant the method that fuel battery inside carries out measuring, although the method does not need to carry out special transformation to the structure of fuel cell, etching technics is comparatively complicated.For the measurement of heat flow density, be mostly implantation heat flow meter and measure, these methods can carry out special transformation with regard to the flow-field plate of fuel cell usually; often difficulty of processing is large; cost is high, uses inconvenience, also has a certain impact to the performance of fuel cell simultaneously.The measurement of current density has sub-battery method, membrane electrode split plot design, magnet ring group method etc., and also need to carry out special transformation to fuel cell, processed complex, cost is high.
Often kind of parameter measurement not there is versatility to the transformation of fuel cell, if to many kinds of parameters measure, then need to manufacture multiple special fuel cell specially, not only increase workload, also add job costs.
The present invention adopts vacuum evaporation coating film method to make, and production process is simple, and cost is low; Be integrated with hygrometric unit, calorimetric stream unit on a sensor and survey current unit, achieve the synchronous translocation of fuel battery inside humidity, heat flow density and current density, decrease the dismounting number of times of fuel cell, do not need to carry out special transformation to the structure of fuel cell, make handling ease, applied widely.
Summary of the invention
The object of the present invention is to provide the sensor of a kind of energy synchronous translocation fuel battery inside humidity, heat flow density and current density, to solve the problem of fuel battery inside humidity, heat flow density and current density translocation.It is simple that this invention has structure, and easy to make, the advantages such as volume is little, facilitate the measuring study of fuel battery inside humidity, heat flow density and current density.
For realizing above-mentioned technical purpose, technical scheme of the present invention is as follows: fuel battery inside humidity-heat flow density-current density translocation sensor, comprise fuel cell flow field board 1, humidity-heat flow density-current density translocation sensor 4, lead-in wire 5, fuel cell flow field board 1 is provided with runner 2 and ridge 3, humidity-heat flow density-current density translocation sensor 4 is arranged on the ridge 3 between fuel cell flow field board 1 liang of adjacent channels 2, one end of lead-in wire 5 connects with the wiring exit of humidity-heat flow density-current density translocation sensor 4, the other end extends to the edge of fuel cell flow field board 1, during fuel cell assembling, fuel cell flow field board 1 is furnished with humidity-heat flow density-current density translocation sensor 4 facing to fuel cell membrane electrode side and close contact with it.
Described humidity-heat flow density-current density translocation sensor 4 comprises humicap hygrometric unit, film thermal flowmeter calorimetric stream unit and current density are measured the coat of metal and are surveyed current unit, vacuum evaporation coating film method is adopted to make, comprise ten layer films: ground floor is the thick silicon dioxide insulating layer 16 for 0.08-0.12 μm on the ridge 3 of evaporation between fuel cell flow field board 1 liang of adjacent channels 2, as dielectric substrate, the second layer is the thick bottom electrode aluminium coat 17 for 1.0-1.2 μm of evaporation on silicon dioxide insulating layer 16, third layer is above bottom electrode aluminium coat 17, apply the high molecular polymer humidity-sensitive medium layer 18 that thick layer is 0.5-1 μm, 4th layer is the thick top electrode aluminium coat 19 for 1.0-1.2 μm of evaporation above high molecular polymer humidity-sensitive medium layer 18, described top electrode aluminium coat 19, high molecular polymer humidity-sensitive medium layer 18 and bottom electrode aluminium coat 17 form humicap, and head end is humicap wiring exit 39, and wherein the shape of top electrode aluminium coat 19 is snakelike, layer 5 is the thick film thermal flowmeter copper coating 20 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 16, and layer 6 is the thick film thermal flowmeter nickel coating 21 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 16, layer 7 is the thick silicon dioxide layer of protection 22 for 0.08-0.12 μm of evaporation above film thermal flowmeter copper coating 20, film thermal flowmeter nickel coating 21 and top electrode aluminium coat 19, the 8th layer on film thermal flowmeter node 36 be the thick thermoresistance layer 23 of silicon dioxide of 1.2-2.0 μm to evaporation thick layer above silicon dioxide coating, described film thermal flowmeter copper coating 20, film thermal flowmeter nickel coating 21, silicon dioxide layer of protection 22 and the thick thermoresistance layer 23 of silicon dioxide form film thermal flowmeter, head end is film thermal flowmeter wiring exit 38, the shape of film thermal flowmeter copper coating 20 and film thermal flowmeter nickel coating 21 is the quadrilateral be parallel to each other, head and the tail are overlap joint mutually, lap-joint forms film thermopile, comprising node 37 under node 36 on film thermal flowmeter and film thermal flowmeter, 9th layer by above film thermal flowmeter copper coating 20 and the right silicon dioxide layer of protection of film thermal flowmeter nickel coating 21 and thick thermoresistance layer evaporation thick layer be that to measure copper coating the 24, ten layer be measure in current density the current density measurement gold plate 25 that evaporation thick layer above copper coating 24 is 0.1-0.12 μm for the current density of 1.5-2.0 μm, described current density measures copper coating 24 and current density measurement gold plate 25 is overlapped, forms current density and measures the coat of metal 40, and head end is that current density measures coat of metal wiring exit 41.
Described film thermal flowmeter wiring exit 38, humicap wiring exit 39 and current density are measured coat of metal wiring exit 41 and are all made into circle, and are all arranged in the same side of silicon dioxide insulating layer 16.
The making step of humidity-heat flow density-current density translocation sensor comprises step one 26, step 2 27, step 3 28, step 4 29, step 5 30, step 6 31, step 7 32, step 8 33, step 9 34, step 10 35; Specifically, step one 26, according to silicon dioxide insulating layer mask 6 evaporation layer of silicon dioxide insulation course 16 on ridge 3; Step 2 27, according to bottom electrode aluminium coat mask 7 evaporation bottom electrode aluminium coat 17 on silicon dioxide insulating layer 16; Step 3 28, applies one deck high molecular polymer humidity-sensitive medium layer 18 according to high molecular polymer humidity-sensitive medium layer mask 8 above bottom electrode aluminium coat 17; Step 4 29, according to top electrode aluminium coat mask 9 evaporation top electrode aluminium coat 19 above high molecular polymer humidity-sensitive medium layer 18; Step 5 30, according to film thermal flowmeter copper coating mask 10 evaporation thin film heat flow meter copper coating 20 on silicon dioxide insulating layer 16; Step 6 31, according to film thermal flowmeter nickel coating mask 11 evaporation thin film heat flow meter nickel coating 21 on silicon dioxide insulating layer 16; Step 7 32, according to silicon dioxide layer of protection mask 12 steam coating silicon dioxide protective seam 22 above top electrode aluminium coat 19, film thermal flowmeter copper coating 20 and film thermal flowmeter nickel coating 21; Step 8 33, on film thermal flowmeter above node 36 according to the thick thermoresistance layer 23 of silicon dioxide thick thermoresistance layer mask 13 evaporation layer of silicon dioxide; Step 9 34, above film thermal flowmeter copper coating 20 and the right silicon dioxide coating of film thermal flowmeter nickel coating 21, measures copper coating mask 14 evaporation current density according to current density and measures copper coating 24; Step 10 35, measures above copper coating 24 in current density and measures gold plate mask 15 evaporation one Lyer current density measurement gold plate 25 according to current density; Form humidity-heat flow density-current density translocation sensor by above step, external metering circuit and data acquisition equipment can realize the synchro measure to fuel battery inside humidity, heat flow density and current density.
In described humidity-heat flow density-current density translocation sensor 4, silicon dioxide insulating layer 16 can be made into square, circular, polygon, trapezoidal, triangle, irregular figure.
The coat of metal material of top electrode and bottom electrode in described humicap, also can select gold, copper, platinum to replace.In film thermal flowmeter coat of metal material, the simple metal coating be made up of copper and mickel also can select tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt to substitute, and metal mixture material such as copper and constantan also can be adopted to substitute.
The shape of described top electrode aluminium coat 19 sets according to the shape of mask, and its shape also can be zigzag, pectination.
The shape of described film thermal flowmeter metallic copper coating 20 and film thermal flowmeter nickel coating 21 sets according to the shape of mask, its shape can also be strip, arc, rhombus, and the head and the tail mutually rear shape of overlap joint can be serrate, arc, waveform, zigzag.
Node 37 under node 36, film thermal flowmeter is at least comprised on a pair film thermal flowmeter in described film thermal flowmeter; The thick thermoresistance layer 23 of silicon dioxide also can be positioned at the top of node 37 under film thermal flowmeter.
The shape that described current density measures copper coating 24 and current density measurement gold plate 25 sets according to the shape of mask, can be rectangle, ellipse, circle, triangle, trapezoidal, irregular figure.
The shape that described film thermal flowmeter wiring exit 38, humicap wiring exit 39 and current density measure coat of metal wiring exit 41 also can be ellipse, rectangle, trapezoidal, triangle, the both sides being arranged in silicon dioxide insulating layer 16 that its position also can be relative.
The width of described lead-in wire 5 is 0.1-0.2mm; be made up of the four-level membrane of vacuum evaporation coating film method evaporation: ground floor is the lead-in wire silicon dioxide insulating layer 42 of thick 0.08-0.12 μm; the second layer is the lead-in wire copper coating 43 of thick 0.1-0.12 μm; third layer is the lead-in wire gold plate 44 of thick 0.1-0.12 μm, and most last layer is the lead-in wire silicon dioxide layer of protection 45 of thick 0.05-0.1 μm.
Lead-in wire silicon dioxide insulating layer 42 is all consistent in shape, position and size with the gold plate 44 that goes between with lead-in wire copper coating 43, and lead-in wire silicon dioxide layer of protection 45 is identical in shape with position with three first layers, but in close flow-field plate edge, outline is shorter than three first layers.
The shape of described fuel cell flow field board 1 upper runner 2 can be parallel fluid channels, snakelike single channel runner, serpentine multichannel runner, interdigitated gas distributor stream, irregular runner.
Compared with prior art, the present invention has following beneficial effect.
The present invention is integrated with humicap hygrometric unit, film thermal flowmeter calorimetric stream unit and current density and measures coat of metal survey current unit on humidity-heat flow density-current density translocation sensor, achieves the synchronous translocation to fuel battery inside humidity, heat flow density and current density; There is structure simple, easy to make, the advantages such as volume is little, be arranged in fuel cell battery inside not need to carry out special transformation to the flow-field plate of fuel cell or other components, reduce the destruction to fuel cell seal, decrease the frequent dismounting of fuel cell because measuring multiple parameters brings, ensure that the stable of fuel battery performance, this invention is simultaneously applicable to the fuel cell flow field board of various flow channel shape, arrangement convenience, can realize the synchro measure of the humidity of fuel battery inside single-point or multiple spot, heat flow density and current density.
Accompanying drawing explanation
Fig. 1 is the subjective schematic diagram that humidity-heat flow density-current density translocation sensor is arranged in parallel fluid channels flow-field plate;
Fig. 2 is the subjective schematic diagram of single humidity-heat flow density-current density translocation sensor on fuel cell flow field board;
Fig. 3 is the Making programme figure of single humidity-heat flow density-current density translocation sensor on fuel cell flow field board;
Fig. 4 is the subjective schematic diagram in cross section of humidity-heat flow density-current density translocation sensor lead;
Fig. 5 is the subjective schematic diagram that humidity-heat flow density-current density translocation sensor is arranged in interdigitated gas distributor flow-field plate;
Fig. 6 is the subjective schematic diagram that humidity-heat flow density-current density translocation sensor is arranged on snakelike single channel fluid flow on channel plate;
Fig. 7 is the subjective schematic diagram that humidity-heat flow density-current density translocation sensor is arranged on serpentine multichannel fluid flow on channel plate;
In figure, 1, fuel cell flow field board, 2, runner, 3, ridge, 4, humidity-heat flow density-current density translocation sensor, 5, lead-in wire;
6-15 is each layer mask of humidity-heat flow density-current density translocation sensor: 6, silicon dioxide insulating layer mask, 7, bottom electrode aluminium coat mask, 8, high molecular polymer humidity-sensitive medium layer mask, 9, top electrode aluminium coat mask, 10, film thermal flowmeter copper coating mask, 11, film thermal flowmeter nickel coating mask, 12, silicon dioxide layer of protection mask, 13, the thick thermoresistance layer mask of silicon dioxide, 14, current density measures copper coating mask, 15, current density measures gold plate mask;
16-25 is the humidity-heat flow density-each rete of current density translocation sensor according to mask fabrication: 16, silicon dioxide insulating layer, 17, bottom electrode aluminium coat, 18, high molecular polymer humidity-sensitive medium layer, 19, top electrode aluminium coat, 20, film thermal flowmeter copper coating, 21, film thermal flowmeter nickel coating, 22, silicon dioxide layer of protection, 23, the thick thermoresistance layer of silicon dioxide, 24, current density measure copper coating, 25, current density measure gold plate;
26-35 is the making step of humidity-heat flow density-current density translocation sensor: 26, step one, 27, step 2,28, step 3,29, step 4,30, step 5,31, step 6,32, step 7,33, step 8,34, step 9,35, step 10;
36, node on film thermal flowmeter, 37, node under film thermal flowmeter, 38, film thermal flowmeter wiring exit, 39, humicap wiring exit, 40, current density measures the coat of metal, 41, current density measures coat of metal wiring exit;
42, go between silicon dioxide insulating layer, 43, lead-in wire copper coating, 44, lead-in wire gold plate, 45, lead-in wire silicon dioxide layer of protection.
Embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
With reference to shown in Fig. 1, fuel battery inside humidity-heat flow density-current density translocation sensor of the present invention comprises fuel cell flow field board 1, humidity-heat flow density-current density translocation sensor 4, lead-in wire 5; Fuel cell flow field board 1 is provided with runner 2 and ridge 3, humidity-heat flow density-current density translocation sensor 4 is arranged on the ridge 3 between fuel cell flow field board 1 liang of adjacent channels 2, one end of lead-in wire 5 connects with the wiring exit of humidity-heat flow density-current density translocation sensor 4, the other end extends to the edge of fuel cell flow field board 1, for transmitting the electric signal that transducer probe assembly produces; During fuel cell assembling, fuel cell flow field board 1 is furnished with humidity-heat flow density-current density translocation sensor 4 facing to fuel cell membrane electrode side and close contact with it.
With reference to shown in Fig. 2, humidity-heat flow density of the present invention-current density translocation sensor 4 comprises humicap hygrometric unit, film thermal flowmeter calorimetric stream unit and current density are measured the coat of metal and are surveyed current unit, vacuum evaporation coating film method is adopted to be made, comprise ten layer films: ground floor is the thick silicon dioxide insulating layer 16 for 0.08-0.12 μm of evaporation on ridge 3, as dielectric substrate, the second layer is the thick bottom electrode aluminium coat 17 for 1.0-1.2 μm of evaporation on silicon dioxide insulating layer 16, third layer is above bottom electrode aluminium coat 17, apply the high molecular polymer humidity-sensitive medium layer 18 that thick layer is 0.5-1 μm, 4th layer is the thick top electrode aluminium coat 19 for 1.0-1.2 μm of evaporation above high molecular polymer humidity-sensitive medium layer 18, layer 5 is the thick film thermal flowmeter copper coating 20 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 16, layer 6 is the thick film thermal flowmeter nickel coating 21 for 0.1-0.12 μm of evaporation on silicon dioxide insulating layer 16, layer 7 is at film thermal flowmeter copper coating 20, the top evaporation of film thermal flowmeter nickel coating 21 and top electrode aluminium coat 19 thick is the silicon dioxide layer of protection 22 of 0.08-0.12 μm, 8th layer on film thermal flowmeter node 36 be the thick thermoresistance layer 23 of silicon dioxide of 1.2-2.0 μm to evaporation thick layer above silicon dioxide coating, 9th layer by above film thermal flowmeter copper coating 20 and the right silicon dioxide layer of protection of film thermal flowmeter nickel coating 21 and thick thermoresistance layer evaporation thick layer be that the current density of 1.5-2.0 μm measures copper coating 24, tenth layer for measuring the current density measurement gold plate 25 that evaporation thick layer above copper coating 24 is 0.1-0.12 μm in current density, because copper and gold are the good conductor of heat, coefficient of heat conductivity is very high, in addition the current density of evaporation is measured copper coating and current density to measure gold plate all very thin, and therefore the current density of evaporation on film thermal flowmeter upper strata is measured metallic copper coating and current density and measured gold plate and can ignore the interference of film thermal flowmeter.
Film thermal flowmeter copper coating 20, film thermal flowmeter nickel coating 21, silicon dioxide layer of protection 22 and the thick thermoresistance layer of silicon dioxide 23 constitute complete film thermal flowmeter, to realize the measurement of heat flow density, its measuring principle is: mutually overlapped by film thermal flowmeter copper coating and film thermal flowmeter nickel coating head and the tail and form thermoelectric pile, thermoelectric pile to comprise on film thermal flowmeter node under node and film thermal flowmeter, because node on film thermal flowmeter is different with the silicon dioxide thermoresistance layer thickness above node under film thermal flowmeter, thus make thermoelectric pile produce thermoelectric force, it is relevant to the thickness difference of silicon dioxide thermoresistance layer on upper node and lower node, and heat flow density and the temperature difference, silicon dioxide thermoresistance layer thickness difference and coefficient of heat conductivity are correlated with, because silicon dioxide coefficient of heat conductivity is known, therefore the size of heat flow density can be calculated.
Fig. 3 is Making programme figure: 6-15 of single humidity-heat flow density-current density translocation sensor is each layer mask of humidity-heat flow density-current density translocation sensor, 16-25 is the humidity-heat flow density-each rete of current density translocation sensor according to mask fabrication, and 26-35 is the making step of humidity-heat flow density-current density translocation sensor.First on ridge 3 according to silicon dioxide insulating layer mask 6 evaporation layer of silicon dioxide insulation course 16, as the substrate of sensor, and fully to insulate with fuel cell flow field board, thus completing steps 1, step 2 27 is according to bottom electrode aluminium coat mask 7 evaporation bottom electrode aluminium coat 17 on silicon dioxide insulating layer 16, step 3 28 for apply one deck high molecular polymer humidity-sensitive medium layer 18 according to high molecular polymer humidity-sensitive medium layer mask 8 above bottom electrode aluminium coat 17, and step 4 29 is according to top electrode aluminium coat mask 9 evaporation one deck top electrode aluminium coat 19 above high molecular polymer humidity-sensitive medium layer 18, wherein, bottom electrode aluminium coat 17, high score polymkeric substance humidity-sensitive medium layer 18 and top electrode aluminium coat 19 constitute humicap, achieve the measurement of humidity, step 5 30 is according to film thermal flowmeter copper coating mask 10 evaporation thin film heat flow meter copper coating 20 on silicon dioxide insulating layer 16, step 6 31 is according to film thermal flowmeter nickel coating mask 11 evaporation thin film heat flow meter nickel coating 21 on silicon dioxide insulating layer 16, film thermal flowmeter copper coating 20 and film thermal flowmeter nickel coating 21 constitute film thermal flowmeter thermoelectric pile, step 7 32 is at top electrode aluminium coat 19, the top of film thermal flowmeter copper coating 20 and film thermal flowmeter nickel coating 21 is according to silicon dioxide layer of protection mask 12 evaporation layer of silicon dioxide protective seam 22, it is namely as the protective seam of humicap top electrode, again as the thin thermoresistance layer of film thermal flowmeter, step 8 33 on film thermal flowmeter node 36 to above silicon dioxide coating according to the thick thermoresistance layer 23 of silicon dioxide thick thermoresistance layer mask 13 evaporation layer of silicon dioxide, wherein film thermal flowmeter copper coating 20, film thermal flowmeter nickel coating 21, silicon dioxide layer of protection 22 and the thick thermoresistance layer of silicon dioxide 23 constitute complete film thermal flowmeter, achieve the measurement of heat flow density, step 9 34 is by above film thermal flowmeter copper coating 20 and the right silicon dioxide coating of film thermal flowmeter nickel coating 21, copper coating mask 14 is measured according to current density, evaporation one Lyer current density measures copper coating 24, and step 10 35 is measure above copper coating 24 in current density to measure gold plate mask 15 evaporation one Lyer current density measurement gold plate 25 according to current density, wherein current density is measured copper coating 24 and current density to measure gold plate 25 overlapped, constitutes survey current unit, achieves the measurement of current density, form humidity-heat flow density-current density translocation sensor by above step, external metering circuit and data acquisition equipment can realize the synchro measure to fuel battery inside humidity, heat flow density and current density.
Wherein, the global shape of humidity-heat flow density-current density translocation sensor is decided by the shape of silicon dioxide insulating layer, it is square that it not only can be made into shown in Fig. 3, can be made into circle, polygon, trapezoidal, other shape such as triangle, irregular figure.The coat of metal material of the humicap top electrode that step 2 27 and step 4 29 complete and bottom electrode also can select other metal substitutes such as gold, copper, platinum; Wherein, it is snakelike that the shape of humicap top electrode aluminium coat 19 not only can be shown in Fig. 3, also can be other shapes such as zigzag, pectination.The film thermal flowmeter copper coating 20 that step 5 30 and step 6 31 complete and the shape of film thermal flowmeter nickel coating 21 are the quadrilateral be parallel to each other, head and the tail are overlap joint mutually, lap-joint forms film thermopile, wherein at least to comprise on a pair film thermal flowmeter node 37 under node 36, film thermal flowmeter; The shape of film thermal flowmeter copper coating 20 and film thermal flowmeter nickel coating 21 sets according to the shape of mask, its shape can also be strip, arc, rhombus etc., and after head and the tail overlap joint, shape can be other shapes such as serrate, arc, waveform, zigzag; The material of the film thermal flowmeter coat of metal also can be tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt etc. substitute, and metal mixture material such as copper and constantan also can be adopted to substitute; The position of the thick thermoresistance layer 23 of silicon dioxide also can be positioned at the top of node 37 under film thermal flowmeter.The shape that the current density that step 9 34 and step 10 35 complete measures copper coating 24 and current density measurement gold plate 25 also sets according to the shape of mask, its shape not only can be rectangle as shown in Figure 3, also can be other shapes such as ellipse, circle, triangle, trapezoidal, irregular figure.
The head end of film thermal flowmeter is film thermal flowmeter wiring exit 38, the head end of humicap electricity is humicap wiring exit 39, the head end that current density measures the coat of metal is that current density measures coat of metal wiring exit 41, it act as and is conveniently connected with lead-in wire 5, carries out the conduction of electric signal.The shape that film thermal flowmeter wiring exit 38, humicap wiring exit 39 and current density measure coat of metal wiring exit 41 not only can be the shape shown in Fig. 3, also can be other shapes such as ellipse, rectangle, trapezoidal, triangle, its position can be arranged in the same side of silicon dioxide insulating layer 16, the both sides being arranged in silicon dioxide insulating layer 16 that also can be relative.
Fig. 4 is the schematic cross-section of humidity-heat flow density-current density translocation sensor lead, the width of this lead-in wire 5 is 0.1-0.2mm, be made up of the four-level membrane of vacuum evaporation coating film method evaporation: ground floor is the lead-in wire silicon dioxide insulating layer 42 of thick 0.08-0.12 μm, the second layer is the lead-in wire copper coating 43 of thick 0.1-0.12 μm, third layer is the lead-in wire gold plate 44 of thick 0.1-0.12 μm, and most last layer is the lead-in wire silicon dioxide layer of protection 45 of thick 0.05-0.1 μm; Lead-in wire silicon dioxide insulating layer 42 is all consistent in shape, position and size with the gold plate 44 that goes between with lead-in wire copper coating 43; lead-in wire silicon dioxide layer of protection 45 is identical in shape with position with three first layers; but in close flow-field plate edge; outline is shorter than three first layers, is connected with the lead-in wire of external data collecting device to facilitate.
Fig. 5 is the humidity-heat flow density-layout schematic diagram of current density translocation sensor in interdigitated gas distributor flow-field plate, the ridge of interdigitated gas distributor flow-field plate is furnished with humidity-heat flow density-current density translocation sensor 4,5 one end that go between connect with humidity-heat flow density-current density translocation sensor wiring exit, and the other end extends to flow-field plate edge.
Fig. 6 is the layout schematic diagram of humidity-heat flow density-current density translocation sensor on snakelike single channel fluid flow on channel plate, the ridge of flow-field plate is furnished with humidity-heat flow density-current density translocation sensor 4,5 one end that go between connect with humidity-heat flow density-current density translocation sensor wiring exit, and the other end extends to flow-field plate edge.
Fig. 7 is the humidity-heat flow density-layout schematic diagram of current density translocation sensor on serpentine multichannel fluid flow on channel plate, the ridge of flow-field plate is furnished with humidity-heat flow density-current density translocation sensor 4,5 one end that go between connect with humidity-heat flow density-current density translocation sensor wiring exit, and the other end extends to flow-field plate edge.
Humidity-heat flow density of the present invention-current density translocation sensor adopts vacuum evaporation coating film method to make, and achieves the synchronous translocation of fuel battery inside humidity, heat flow density and current density, without the need to carrying out special transformation to the structure of fuel cell.
Claims (10)
1. fuel battery inside humidity-heat flow density-current density translocation sensor, comprise fuel cell flow field board (1), humidity-heat flow density-current density translocation sensor (4), lead-in wire (5), fuel cell flow field board (1) is provided with runner (2) and ridge (3), humidity-heat flow density-current density translocation sensor (4) is arranged on the ridge (3) between fuel cell flow field board (1) two adjacent channels (2), one end of lead-in wire (5) connects with the wiring exit of humidity-heat flow density-current density translocation sensor (4), the other end extends to the edge of fuel cell flow field board (1), during fuel cell assembling, fuel cell flow field board (1) is furnished with humidity-heat flow density-current density translocation sensor (4) facing to fuel cell membrane electrode side and close contact with it, it is characterized in that:
Described humidity-heat flow density-current density translocation sensor (4) comprises humicap hygrometric unit, film thermal flowmeter calorimetric stream unit and current density are measured the coat of metal and are surveyed current unit, vacuum evaporation coating film method is adopted to make, comprise ten layer films: ground floor is the thick silicon dioxide insulating layer (16) for 0.08-0.12 μm on the ridge (3) of evaporation between fuel cell flow field board (1) two adjacent channels (2), as dielectric substrate, the second layer is the thick bottom electrode aluminium coat (17) for 1.0-1.2 μm at the upper evaporation of silicon dioxide insulating layer (16), the high molecular polymer humidity-sensitive medium layer (18) of third layer at bottom electrode aluminium coat (17) top coating thick layer being 0.5-1 μm, 4th layer is the thick top electrode aluminium coat (19) for 1.0-1.2 μm at high molecular polymer humidity-sensitive medium layer (18) top evaporation, described top electrode aluminium coat (19), high molecular polymer humidity-sensitive medium layer (18) and bottom electrode aluminium coat (17) form humicap, head end is humicap wiring exit (39), and wherein the shape of top electrode aluminium coat (19) is snakelike, layer 5 is the thick film thermal flowmeter copper coating (20) for 0.1-0.12 μm at the upper evaporation of silicon dioxide insulating layer (16), and layer 6 be the film thermal flowmeter nickel coating (21) of 0.1-0.12 μm at the upper evaporation of silicon dioxide insulating layer (16) thick, layer 7 is the thick silicon dioxide layer of protection (22) for 0.08-0.12 μm of the top evaporation at film thermal flowmeter copper coating (20), film thermal flowmeter nickel coating (21) and top electrode aluminium coat (19), the 8th layer on film thermal flowmeter node (36) be the thick thermoresistance layer of silicon dioxide (23) of 1.2-2.0 μm to the top evaporation thick layer of silicon dioxide coating, described film thermal flowmeter copper coating (20), film thermal flowmeter nickel coating (21), silicon dioxide layer of protection (22) and the thick thermoresistance layer of silicon dioxide (23) form film thermal flowmeter, head end is film thermal flowmeter wiring exit (38), the shape of film thermal flowmeter copper coating (20) and film thermal flowmeter nickel coating (21) is the quadrilateral be parallel to each other, head and the tail are overlap joint mutually, lap-joint forms film thermopile, comprising node (37) under node (36) on film thermal flowmeter and film thermal flowmeter, measure copper coating (24) by the current density being 1.5-2.0 μm at the top evaporation thick layer of film thermal flowmeter copper coating (20) and the right silicon dioxide layer of protection of film thermal flowmeter nickel coating (21) and thick thermoresistance layer for 9th layer, the tenth layer of be the top evaporation thick layer measuring copper coating (24) in current density be current density measurement gold plate (25) of 0.1-0.12 μm, described current density measures copper coating (24) and current density measurement gold plate (25) is overlapped, form current density and measure the coat of metal (40), head end is that current density measures coat of metal wiring exit (41),
Described film thermal flowmeter wiring exit (38), humicap wiring exit (39) and current density are measured coat of metal wiring exit (41) and are all made into circle, and are all arranged in the same side of silicon dioxide insulating layer (16).
The making step of humidity-heat flow density-current density translocation sensor comprises step one (26), step 2 (27), step 3 (28), step 4 (29), step 5 (30), step 6 (31), step 7 (32), step 8 (33), step 9 (34), step 10 (35); Specifically, step one (26), according to silicon dioxide insulating layer mask (6) evaporation layer of silicon dioxide insulation course (16) on ridge (3); Step 2 (27), according to bottom electrode aluminium coat mask (7) evaporation bottom electrode aluminium coat (17) on silicon dioxide insulating layer (16); Step 3 (28), according to high molecular polymer humidity-sensitive medium layer mask (8) at bottom electrode aluminium coat (17) top coating one deck high molecular polymer humidity-sensitive medium layer (18); Step 4 (29), in the top of high molecular polymer humidity-sensitive medium layer (18) according to top electrode aluminium coat mask (9) evaporation top electrode aluminium coat (19); Step 5 (30), according to film thermal flowmeter copper coating mask (10) at upper evaporation thin film heat flow meter copper coating (20) of silicon dioxide insulating layer (16); Step 6 (31), according to film thermal flowmeter nickel coating mask (11) at upper evaporation thin film heat flow meter nickel coating (21) of silicon dioxide insulating layer (16); Step 7 (32), in the top of top electrode aluminium coat (19), film thermal flowmeter copper coating (20) and film thermal flowmeter nickel coating (21) according to silicon dioxide layer of protection mask (12) steam coating silicon dioxide protective seam (22); Step 8 (33), on film thermal flowmeter, the top of node (36) is according to the silicon dioxide thick thermoresistance layer thick thermoresistance layer of mask (13) evaporation layer of silicon dioxide (23); Step 9 (34), above film thermal flowmeter copper coating (20) and the right silicon dioxide coating of film thermal flowmeter nickel coating (21), measure copper coating mask (14) evaporation current density according to current density and measure copper coating (24); Step 10 (35), gold plate mask (15) evaporation one Lyer current density measurement gold plate (25) is measured according to current density in the top measuring copper coating (24) in current density; Form humidity-heat flow density-current density translocation sensor by above step, external metering circuit and data acquisition equipment can realize the synchro measure to fuel battery inside humidity, heat flow density and current density.
2. fuel battery inside humidity-heat flow density-current density translocation sensor according to claim 1, is characterized in that: silicon dioxide insulating layer (16) can be made into square, circular, polygon, trapezoidal, triangle, irregular figure in described humidity-heat flow density-current density translocation sensor (4).
3. fuel battery inside humidity-heat flow density-current density translocation sensor according to claim 1, is characterized in that: the coat of metal material of top electrode and bottom electrode in described humicap, gold, copper, platinum also can be selected to replace.In film thermal flowmeter coat of metal material, the simple metal coating be made up of copper and mickel also can select tungsten and nickel, copper and cobalt, molybdenum and nickel, antimony and cobalt to substitute, and metal mixture material such as copper and constantan also can be adopted to substitute.
4. fuel battery inside humidity-heat flow density-current density translocation sensor according to claim 1, it is characterized in that: the shape of described top electrode aluminium coat (19) sets according to the shape of mask, and its shape also can be zigzag, pectination.
5. fuel battery inside humidity-heat flow density-current density translocation sensor according to claim 1, it is characterized in that: the shape of described film thermal flowmeter metallic copper coating (20) and film thermal flowmeter nickel coating (21) sets according to the shape of mask, its shape can also be strip, arc, rhombus, and the head and the tail mutually rear shape of overlap joint can be serrate, arc, waveform, zigzag.
6. fuel battery inside humidity-heat flow density-current density translocation sensor according to claim 1, is characterized in that: at least to comprise on a pair film thermal flowmeter node (37) under node (36), film thermal flowmeter in described film thermal flowmeter; The thick thermoresistance layer of silicon dioxide (23) also can be positioned at the top of node (37) under film thermal flowmeter.
7. fuel battery inside humidity-heat flow density-current density translocation sensor according to claim 1, it is characterized in that: the shape that described current density measures copper coating (24) and current density measurement gold plate (25) sets according to the shape of mask, can be rectangle, ellipse, circle, triangle, trapezoidal, irregular figure.
8. fuel battery inside humidity-heat flow density-current density translocation sensor according to claim 1, it is characterized in that: the shape that described film thermal flowmeter wiring exit (38), humicap wiring exit (39) and current density measure coat of metal wiring exit (41) also can be ellipse, rectangle, trapezoidal, triangle, the both sides being arranged in silicon dioxide insulating layer (16) that its position also can be relative.
9. fuel battery inside humidity-heat flow density-current density translocation sensor according to claim 1, it is characterized in that: the width of described lead-in wire (5) is 0.1-0.2mm, be made up of the four-level membrane of vacuum evaporation coating film method evaporation: ground floor is the lead-in wire silicon dioxide insulating layer (42) of thick 0.08-0.12 μm, the second layer is the lead-in wire copper coating (43) of thick 0.1-0.12 μm, third layer is the lead-in wire gold plate (44) of thick 0.1-0.12 μm, and most last layer is the lead-in wire silicon dioxide layer of protection (45) of thick 0.05-0.1 μm;
Lead-in wire silicon dioxide insulating layer (42) with go between copper coating (43) and the gold plate (44) that goes between all consistent in shape, position and size; lead-in wire silicon dioxide layer of protection (45) is identical in shape with position with three first layers; but in close flow-field plate edge, outline is shorter than three first layers.
10. fuel battery inside humidity-heat flow density-current density translocation sensor according to claim 1, is characterized in that: the shape of described fuel cell flow field board (1) upper runner (2) can be parallel fluid channels, snakelike single channel runner, serpentine multichannel runner, interdigitated gas distributor stream, irregular runner.
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