CN104354093B - 一种研磨机气压伺服系统 - Google Patents
一种研磨机气压伺服系统 Download PDFInfo
- Publication number
- CN104354093B CN104354093B CN201410557148.5A CN201410557148A CN104354093B CN 104354093 B CN104354093 B CN 104354093B CN 201410557148 A CN201410557148 A CN 201410557148A CN 104354093 B CN104354093 B CN 104354093B
- Authority
- CN
- China
- Prior art keywords
- pressure
- pulling force
- cylinder
- top lap
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410557148.5A CN104354093B (zh) | 2014-10-21 | 2014-10-21 | 一种研磨机气压伺服系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410557148.5A CN104354093B (zh) | 2014-10-21 | 2014-10-21 | 一种研磨机气压伺服系统 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104354093A CN104354093A (zh) | 2015-02-18 |
CN104354093B true CN104354093B (zh) | 2016-09-07 |
Family
ID=52521451
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410557148.5A Active CN104354093B (zh) | 2014-10-21 | 2014-10-21 | 一种研磨机气压伺服系统 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN104354093B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105014521A (zh) * | 2015-05-27 | 2015-11-04 | 苏州德锐朗智能科技有限公司 | 一种平面研磨机三段式上盘升降速度控制方法 |
CN108436666A (zh) * | 2018-03-19 | 2018-08-24 | 尹强 | 一种安全阀校验维修智能一体机 |
CN114603482B (zh) * | 2020-12-03 | 2023-03-21 | 长鑫存储技术有限公司 | 压力检测系统及压力检测方法 |
CN113910098B (zh) * | 2021-10-19 | 2023-08-29 | 上海汉虹精密机械有限公司 | 一种用于研磨抛光机精确加压气路控制系统 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3691697A (en) * | 1970-09-21 | 1972-09-19 | Hamco Mach & Elect Co | Pressure control for lapping device |
JP2000127024A (ja) * | 1998-10-27 | 2000-05-09 | Toshiba Corp | ポリッシング装置及び研磨加工方法 |
CN101905444A (zh) * | 2009-06-04 | 2010-12-08 | 株式会社荏原制作所 | 修整装置、修整方法和抛光装置 |
CN102133733A (zh) * | 2011-01-06 | 2011-07-27 | 清华大学 | 一种用于cmp多腔室的气压控制系统 |
CN102133730A (zh) * | 2011-01-06 | 2011-07-27 | 清华大学 | 一种用于cmp抛光头多区的气压控制系统 |
CN103567852A (zh) * | 2012-07-23 | 2014-02-12 | 株式会社荏原制作所 | 压力控制装置、具有该压力控制装置的研磨装置及研磨方法 |
CN203738563U (zh) * | 2014-02-28 | 2014-07-30 | 江苏海事职业技术学院 | 一种基于plc的平面高速研磨机 |
-
2014
- 2014-10-21 CN CN201410557148.5A patent/CN104354093B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3691697A (en) * | 1970-09-21 | 1972-09-19 | Hamco Mach & Elect Co | Pressure control for lapping device |
JP2000127024A (ja) * | 1998-10-27 | 2000-05-09 | Toshiba Corp | ポリッシング装置及び研磨加工方法 |
CN101905444A (zh) * | 2009-06-04 | 2010-12-08 | 株式会社荏原制作所 | 修整装置、修整方法和抛光装置 |
CN102133733A (zh) * | 2011-01-06 | 2011-07-27 | 清华大学 | 一种用于cmp多腔室的气压控制系统 |
CN102133730A (zh) * | 2011-01-06 | 2011-07-27 | 清华大学 | 一种用于cmp抛光头多区的气压控制系统 |
CN103567852A (zh) * | 2012-07-23 | 2014-02-12 | 株式会社荏原制作所 | 压力控制装置、具有该压力控制装置的研磨装置及研磨方法 |
CN203738563U (zh) * | 2014-02-28 | 2014-07-30 | 江苏海事职业技术学院 | 一种基于plc的平面高速研磨机 |
Also Published As
Publication number | Publication date |
---|---|
CN104354093A (zh) | 2015-02-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104354093B (zh) | 一种研磨机气压伺服系统 | |
CN204019295U (zh) | 数控宝石磨抛一体机 | |
CN100574992C (zh) | 新型精密研磨抛光机 | |
CN102019579A (zh) | 玻璃基板的制造方法、研磨方法及研磨装置以及玻璃基板 | |
CN103909456A (zh) | 数控宝石磨抛一体机 | |
CN103331691A (zh) | 一种浮动盘悬浮抛光装置 | |
CN106363475A (zh) | 一种高效双端面磨床及其控制方法 | |
CN211661806U (zh) | 一种汽车模具孔内抛光设备 | |
CN202922386U (zh) | 一种喷丝板加工专用研磨机 | |
CN203579390U (zh) | 一种研磨设备的自动加压机构 | |
CN104369087B (zh) | 一种研磨机气压伺服系统的压力控制方法 | |
CN211805341U (zh) | 一种磨床工件自动测量装置 | |
CN203390734U (zh) | 一种磨盘表面磨损度的检测装置 | |
CN206140218U (zh) | 一种高效双端面磨床 | |
CN203792152U (zh) | 一种单面研磨机 | |
CN105014521A (zh) | 一种平面研磨机三段式上盘升降速度控制方法 | |
CN204819007U (zh) | 具有透光检测装置的双面磨光机 | |
CN104440510B (zh) | 一种研磨机气压伺服系统的拉力控制方法 | |
CN201179622Y (zh) | 新型精密研磨抛光机 | |
CN104493651B (zh) | 一种新型外圆磨装置 | |
CN105014538A (zh) | 一种平面研磨机三段式压力控制方法 | |
CN201192801Y (zh) | 一种用于磨石机主机移动的液压缸控制装置 | |
CN203266382U (zh) | 一种浮动盘悬浮抛光装置 | |
CN104440510A (zh) | 一种研磨机气压伺服系统的拉力控制方法 | |
CN207600430U (zh) | 一种用于双面研磨机工件厚度测量机构 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20160810 Address after: 266045 Shandong province Qingdao City, Zhengzhou Road No. 43 building 130 room A Applicant after: Qingdao Rubber Valley Intellectual Property Co.,Ltd. Address before: Taishan road Suzhou City, Jiangsu province 215299 Suzhou high tech Industrial Development Zone No. 2 Canton Technology Park 10 building 324 Applicant before: Suzhou Hexinmei Electronic Technology Co., Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CB03 | Change of inventor or designer information |
Inventor after: Liang Tiedong Inventor before: Gao Jun Inventor before: Hu Guoliang Inventor before: Zhu Xia |
|
CB03 | Change of inventor or designer information | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170509 Address after: Dalang Zhen Xin Lian Cun 523770 Guangdong province Dongguan Lianying Road No. 1 Patentee after: Profit time watch (Dongguan) Co., Ltd. Address before: 266045 Shandong province Qingdao City, Zhengzhou Road No. 43 building 130 room A Patentee before: Qingdao Rubber Valley Intellectual Property Co.,Ltd. |
|
TR01 | Transfer of patent right |